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ACTIVE VIBRATION ISOLATION ELEMENTS
INTRODUCTION
ACTIVE VIBRATION ISOLATION ELEMENTS:
Vario Basic 40 with nanofi lm_ep4
Vario 60 with KSV NIMA PM-IRRAS
Polytec TMC-500 TopMap on VarioBasic 40-600 (4 isolation elements)
SELECTED APPLICATIONS
ACCESSORIES AND OPTIONS Steel support frame Acoustic enclosure
Automatic load adjustment Rack mountable external control unit
Various breadboards with or without mounting holes (M6/25 or 1/4-20")
Vario 60 with
ACCESSORIES AND OPTIONS Steel support frame
Automatic load adjustment Automatic load adjustment
Various breadboards with or without mounting holes Various breadboards with or without mounting holes (M6/25 or 1/4-20")
Polytec TMC-500 TopMap on Vario
The Vario systems are element based modular vibration isolation systems, consisting of at least two isolation elements and an external control unit. The primary model, the Vario Basic has been designed for the isolation of high static loads. While the two-element-confi guration can carry loads of up to 300 kg, the maximum load capacity can be increased by adding more isolation elements. Thus a set-up of six isolation elements can cope with a load of 900 kg.
For applications with frequent load changes or withoutaccess to the isolation elements, we off er the option of an automatic load adjustment.
The compact dimensions and its fl exibility render this product series ideal for installations in customer-specifi capplications. A typical example is the combination with anoptical breadboard. It serves as a mechanical link betweenthe isolation elements and can be used for a variety of labo-ratory set-ups e.g. interferometer or other laser set-ups.
There are virtually no limits in applications off ered by Vario systems.
Floating monolayer of ethyl stearate without and with active vibration isolation taken with a Brewster angle microscope
VARIO BASIC 40 396 × 120 × 110 mm / 15.6" × 4.7" × 4.3"
VARIO BASIC 60 636 × 130 × 110 mm / 25" × 5.1" × 4.3"
VARIO BASIC 90 932 × 130 × 110 mm / 36.7" × 5.1" × 4.3"
2-PORT CONTROL UNIT 4-PORT CONTROL UNIT
1 A2
Vario
Bas
ic 40
Stat
usÄn
deru
ngen
DATUM
Name
Geze
ichne
t
Kont
rollie
rt
Norm
DATU
MNa
me 2
3.02.2
015
ae
D:\Va
ultW
S\Pr
oduk
tion\
halcy
onics
Prä
sent
ation
en\V
ario
Basic
40.i
am
Maßs
tab:
1 : 1
Mate
rial:
DIN IS
O13
02DIN
ISO
2768
fAC
CURI
ON
solu
tions
for
scie
nce
Artik
elnum
mer:
Baug
rupp
e: Index
:
326
64106
376
364
396
120 84
110
326
376
64106
1 A2
Vario
Bas
ic 60
Stat
usÄn
deru
ngen
DA
TU
MNa
me
Geze
ichne
t
Kont
rolli
ert
Norm
DATU
MNa
me 2
3.02
.201
5
ae
D:\V
ault
WS\
Prod
uktio
n\ha
lcyo
nics
Prä
sent
atio
nen\
Vario
Bas
ic 60
.iam
Maßs
tab:
1 : 1
Mate
rial:
DIN
ISO
1302
DIN
ISO
2768
fAC
CURI
ON
solu
tions
for
scie
nce
Artik
elnu
mmer
:Ba
ugru
ppe: In
dex:
480
620
6411084130
604
636
110
64110
480
620
1 A2
Vario Basic 40
Status Änderungen DATUM Name
Gezeichnet
Kontrolliert
Norm
DATUM Name 23.02.2015 ae
D:\VaultWS\Produktion\halcyonics Präsentationen\Vario Basic 40.iam
Maßstab: 1 : 1Material:
DIN ISO1302DIN ISO 2768 fACCURION
solutions for science
Artikelnummer:Baugruppe:
Index:
326
64
106
376
364
396
120
84
110
364
396
1 A2
Vario Basic 60
Status Änderungen DATUM Name
Gezeichnet
Kontrolliert
Norm
DATUM Name 23.02.2015 ae
D:\VaultWS\Produktion\halcyonics Präsentationen\Vario Basic 60.iam
Maßstab: 1 : 1Material:
DIN ISO1302DIN ISO 2768 fACCURION
solutions for science
Artikelnummer:Baugruppe:
Index:
480 620
64110
84
130 604
636
110
604
636
1 A2
Vario Basic 60
Status Änderungen DATUM Name
Gezeichnet
Kontrolliert
Norm
DATUM Name 23.02.2015 ae
D:\VaultWS\Produktion\halcyonics Präsentationen\Vario Basic 60.iam
Maßstab: 1 : 1Material:
DIN ISO1302DIN ISO 2768 fACCURION
solutions for science
Artikelnummer:Baugruppe:
Index:
480 620
64110
84
130 604
636
110
130
84
110
1 A2
Vario Basic 40
Status Änderungen DATUM Name
Gezeichnet
Kontrolliert
Norm
DATUM Name 23.02.2015 ae
D:\VaultWS\Produktion\halcyonics Präsentationen\Vario Basic 40.iam
Maßstab: 1 : 1Material:
DIN ISO1302DIN ISO 2768 fACCURION
solutions for science
Artikelnummer:Baugruppe:
Index:
326
64
106
376
364
396
120
84
110
120
84
110
1 A2
Vario
Bas
ic 90
Stat
usÄn
deru
ngen
DA
TU
MNa
me
Geze
ichne
t
Kont
rolli
ert
Norm
DATU
MNa
me 0
2.03
.201
5
ae
D:\V
ault
WS\
Prod
uktio
n\ha
lcyo
nics
Prä
sent
atio
nen\
Vario
Bas
ic 90
.iam
Maßs
tab:
1 : 1
Mate
rial:
DIN
ISO
1302
DIN
ISO
2768
fAC
CURI
ON
solu
tions
for
scie
nce
Artik
elnu
mmer
:Ba
ugru
ppe: In
dex:
130
84
110
64110
780
916
932
900
780
916
64110
1 A2
Vario Basic 90
Status Änderungen DATUM Name
Gezeichnet
Kontrolliert
Norm
DATUM Name 02.03.2015 ae
D:\VaultWS\Produktion\halcyonics Präsentationen\Vario Basic 90.iam
Maßstab: 1 : 1Material:
DIN ISO1302DIN ISO 2768 fACCURION
solutions for science
Artikelnummer:Baugruppe:
Index:
130
84
110
64110
780 916
932
900900
932
1 A2
Vario Basic 90
Status Änderungen DATUM Name
Gezeichnet
Kontrolliert
Norm
DATUM Name 02.03.2015 ae
D:\VaultWS\Produktion\halcyonics Präsentationen\Vario Basic 90.iam
Maßstab: 1 : 1Material:
DIN ISO1302DIN ISO 2768 fACCURION
solutions for science
Artikelnummer:Baugruppe:
Index:
130
84
110
64110
780 916
932
900130
84
110
1
1
2
2
3
3
4
4
5
5
6
6
A A
B B
C C
D D
NameDatum
Datum NameÄnderungenStatus
Gezeichnet
Kontrolliert
Norm
Werkstoff: Maßstab:
Zeichnungs-Nr.:Artikel-Nr.:
L. Walla
A3O:\Produktion\halcyonics_VarioSeries\halcyonics_variobasic40\Zeichnungen\Steuereinheit\Steuereinheit_Basic klein.idw
12.08.2011
Allgemein-toleranzenISO 2768-f
Werkstück-kanten DINISO 13715
Vario Basic control unit
---
--.---.--- ---
134
236
340
47
134
1
1
2
2
3
3
4
4
5
5
6
6
A A
B B
C C
D D
NameDatum
Datum NameÄnderungenStatus
Gezeichnet
Kontrolliert
Norm
Werkstoff: Maßstab:
Zeichnungs-Nr.:Artikel-Nr.:
L. Walla
A3O:\Produktion\halcyonics_VarioSeries\halcyonics_variobasic40\Zeichnungen\Steuereinheit\Steuereinheit_Basic klein.idw
12.08.2011
Allgemein-toleranzenISO 2768-f
Werkstück-kanten DINISO 13715
Vario Basic control unit
---
--.---.--- ---
134
236
340
47
340
47
236
1 A3
Steuereinheit Vario Basic84TE 3HE
Status Änderungen DATUM Name
Gezeichnet
Kontrolliert
Norm
DATUM Name 03.03.2015 ae
D:\VaultWS\Produktion\halcyonics_VarioSeries\Steuereinheiten\Magic 84TE\Steuereinheit Vario Basic 84TE 3HE.iam
Maßstab: 1 : 3Material:
DIN ISO1302DIN ISO 2768 fACCURION
solutions for science
Artikelnummer:
220498
Baugruppe:
Index:
133
449
341
47
449
341
47
133
KEY FEATURES Isolation in all six degrees of freedom.
Active vibration isolation starts at 1.0 Hz (passive isolation above 200 Hz).
Settling time only 0.3 s.
No compressed air supply is needed, AC power from an electrical outlet is suffi cient.
No natural low frequency resonance and, as a result, excellent vibration characteristics also in frequency ranges below 5 Hz.
Convenient manual load adjustment – automatic loadadjustment as an option.
Excellent position stability and stiff ness.
Wide range of standard sizes and customizations available.
PLEASE CONTACT US FOR FURTHER INFORMATION!
Vario Basic 40–600 with breadboard on steel support frame
FREQUENCY (Hz)
10.000
1.000
0.100
0.010
0.001
0 %
90.0 %
99.0 %
99.9 %0.1 1.0 10.0 100.0
TRAN
SMIS
SIBI
LITY
vertical horizontal
ISO
LATI
ON
TIME [sec]
AMPL
ITU
DE
-80 0,2 0,4 0,6 0,8 1 1,2 1,4 1,6 1,8 2
-6
-4
-2
0
2
4
6
8
Transmission graph of the Vario Basic 60 measured at a velocity of 100 μm/s with a payload of 50 kg (110 lbs).
Settling time Vario (green) compared to a conventional air vibration isolation system (white).
1 A2
Vario Basic 60
Status Änderungen DATUM Name
Gezeichnet
Kontrolliert
Norm
DATUM Name 23.02.2015 ae
D:\VaultWS\Produktion\halcyonics Präsentationen\Vario Basic 60.iam
Maßstab: 1 : 1Material:
DIN ISO1302DIN ISO 2768 fACCURION
solutions for science
Artikelnummer:Baugruppe:
Index:
480 620
64110
84
130 604
636
110
SPECIFICATIONS Vario Basic 40 Vario Basic 60 Vario Basic 90
Dimensions of isolation element (L × W × H)
396 × 120 × 110 mm15.6 × 4.7 × 4.3 inch
636 × 130 × 110 mm25 × 5.1 × 4.3 inch
932 × 130 × 110 mm36.7 × 5.1 × 4.3 inch
Load capacity – 2 element configuration
0 – 300 kg / 0 – 660 lbs 0 – 300 kg / 0 – 660 lbs 0 – 300 kg / 0 – 660 lbs
Load capacity – 4 element configuration
0 – 600 kg / 0 – 1320 lbs 0 – 600 kg / 0 – 1320 lbs 0 – 600 kg / 0 – 1320 lbs
Weight per isolation elementWeight of control unit
6.8 kg / 15 lbs 4.5 kg / 10 lbs
8.6 kg / 19 lbs 4.5 kg / 10 lbs
10.4 kg / 23 lbs 4.5 kg / 10 lbs
Isolation technology Halcyonics control technology based on piezoelectric type acceleration pickup, fast signal processing and electro-dynamic force transducers.
Control electronics External control unit with sensor and actuator LEDs.
Force directions Active compensation in all six degrees of freedom.
Isolation performance > 5 Hz = -25 dB (94.4 %) > 10 Hz = -35 dB (98.2 %)
Active bandwidth 1 – 200 Hz* (passive isolation beyond 200 Hz)
Settling time 300 ms**
Response time 0.5 ms***
Stroke of the actuator 1 mm
Max. correction forces –2 element configuration
Vertical ± 8 N Horizontal ± 4 N
Max. correction forces –4 element configuration
Vertical ± 16 N Horizontal ± 8 N
Max. compensation level 550 μm / sec. at 8 Hz and 150 kg / 330 lbs**
Interface BNC analog diagnostic output – 50 Ω
Environmental and operational requirements
Electrical voltage: 100 – 250 V / 47 – 63 Hz Power consumption: Typically 10 – 20 W; max. 50 W Operating temperature: 15 – 40 °C / 59 – 104 °F Relative humidity: 0 – 60 % Operating altitude: < 2,500 m / 8,100 ft
Electrical safety CE certified according to directive 2006/95/EC
EMC CE certified according to directive 2004/108/EC
* The low-pass characteristics of the spring-mass combination dominate the dynamic behavior of the isolation system above 200 Hz. The part of the active isolation decreases with increasing frequency.
** The settling time and maximum compensation level depend on several conditions such as payload, vibration frequency and load distribution. The mentioned settling time value is exemplary for a centric load of 80 kg. The settling time defines the time until an incoming vibration is compensated.
*** The response time determines when the system starts to actively isolate an incoming vibration after detection by the sensors.
Erro
rs a
nd o
mis
sion
s ex
cept
ed.
HEADQUARTERS GOETTINGEN, GERMANYAccurion GmbHStresemannstrasse 3037079 Goettingen, Germany
Phone: +49(0)551.999 60.0Fax: +49(0)551.999 60.10E-Mail: info@accurion.comWeb: www.accurion.com
NORTH AMERICAAccurion, Inc.20045 Stevens Creek Blvd., Suite 2ECupertino, CA 95014, USA
Phone/Fax: (+1)408.642.1446E-Mail: info@accurion.com Web: www. accurion.com
INDIAAccurion Scientific Instruments Pvt. LtdFlat 402, WING 2, Balaji Lakeside Marvel#1413/2A, 7th Cross, 1st Main roadBHCS layout, UttarahalliBangalore 560061, India
Phone: +91-[0]98.450.04273E-Mail: sharma@accurion.com Web: www.accurion.com
CHINAAccurion Scientific Instruments (Shanghai) Co. Ltd.Rm. 502, Xuhui Commercial Building,No. 168, Yude RoadXuhui DistrictShanghai 200030, China
Phone: +86-(0)21.5017.9099E-Mail: fz@accurion.cnWeb: www.accurion.com.cn
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