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ACTUATOR 20007th International

Conference on New Actuators&

International Exhibition on Smart Actuators and Drive Systems

19 - 21 June 2000Bremen, Germany

Conference Proceedings

EditorHubert Borgmann

Published byMESSE BREMEN GMBH, Bremen, Germany

© 2000 MESSE BREMEN GMBH, Bremen, Germany

No responsibility is assumed by the publisher for any injury and/or damage to persons or propertywith regard to products liability, negligence or otherwise, resulting from any use or operation ofthe methods, products, instructions or ideas contained in the material herein.

All rights reserved. No part of this publication may be reproduced, stored in a retrieval system ortransmitted in any form or by any means (electronic, mechanical, photocopying) or otherwise,without the prior written permission of the publisher.

Printed in Germany by ASCO-Druck GmbH & Co. KG, BremenISBN-3-933339-02-2

7th International Conference on New Actuators International Exhibition on Smart Actuators and Drive Systems

ACTUATOR 200019 – 21 June, 2000Bremen Fair and Congress Center,Germany

Organised by

MESSE BREMEN GMBH, Bremen, Germany

Endorsements

American Ceramic Society, USA

German Electrical and Electronic Manufacturers’ Association (ZVEI)Division Electronic Components

German Machinery and Plant Manufacturers Association (VDMA)Fluid Power Transmission and Control Association

Japan Technology Transfer Association

The Society of Non-Traditional Technology, Japan

University of Bremen, Germany

VDI/VDE-Technologiezentrum Informationstechnik GmbH (VDI/VDE-IT), Germany

CommitteeU. BeckordDr. Fritz Faulhaber GmbH & Co. KG, Schönaich, Germany

W. BeneckeUniversität Bremen, Germany

J. D. CarlsonLord Corporation, Cary, USA

F. ClaeyssenCedrat Recherche, Meylan, France

T. GessnerTechnische Universität Chemnitz, Germany

E. QuandtStiftung caesar, Bonn, Germany

L. M. SchetkyMemry Corporation, Brookfield, USA

B. SchröerAXON Technologie Consult GmbH, Bremen, Germany

K. SpannerPhysik Instrumente (PI) GmbH & Co., Waldbronn, Germany

J. L. SprostonThe University of Liverpool, United Kingdom

H. D. StöltingUniversität Hannover, Germany

K. UchinoThe Pennsylvania State University, USA

M. WuttigUniversity of Maryland, USA

OrganiserH. BorgmannMESSE BREMEN GMBH, Germany

Welcoming Remarks

Welcome to ACTUATOR 2000 in Bremen. This event continues a series of biennial functions inBremen and consists of the 7th International Conference on New Actuators and the InternationalExhibition on Smart Actuators and Drive Systems. Like its predecessors, ACTUATOR 2000 is a majormeeting place for leading experts, scientists and managers from all over the world in the field ofnew actuators. Its main focus is on the transfer of new results from science and research into widefields of application.

In response to many requests, we are now offering a wide range of application-oriented topicssuch as nanopositioning, microfluidics, vibration control and medical applications in additionalconference sessions. This has been achieved by introducing a parallel track of oral presentations.The schedule has been compiled carefully to avoid time conflicts between related topics. Thus, wewill have in total 78 oral presentations and 74 poster contributions this time, all portraying thestate of the art and indicating future trends.

Oral sessions will be held in the following fields:

Piezoelectric actuators MicrofluidicsMicroactuators Piezoelectric actuators: applicationsMagnetostrictive actuators Actuators for artificial limbsActuators based on ER/MR fluids NanopositioningShape memory actuators Vibration controlElectromagnetic actuators Shape memory actuators: applicationsOther actuators Electromagnetic actuators: linear drives

Some of the sessions will be kicked off by a 30-minute review presented by a member of theProgramme Committee, followed by application-oriented presentations of 20 minutes each. Thefull manuscripts of nearly all the oral papers and poster contributions have been included in theseproceedings and, as for 1998, in a separate CD-ROM.

Furthermore, we invite you to also visit the enlarged accompanying trade show with the exhibi-tion forum right in its centre. Here, exhibitors accepted our invitation to give more product-ori-ented presentations. Thus, conference participants and visitors to the exhibition can inform them-selves individually about the current state of actuator technology.

Our special thanks go to all those participants who are actively contributing to this event by sha-ring the results of their research work here – as authors of papers and posters, or as exhibitors –and thus possibly igniting new projects, initiating new co-operations, or paving the way for newbusiness connections. We also thank the members of the Programme Committee for their excel-lent work and valuable assistance, and we are particularly grateful to the endorsing institutionsand to all others who have supported our public relations work.

We are now looking forward to interesting presentations, lively discussions and helpful newcontact, and we would be pleased to welcome you again in two years, for ACTUATOR 2002.

Enjoy your conference!

Rolf Henkhaus Hubert BorgmannMESSE BREMEN GMBH MESSE BREMEN GMBHGeneral Manager Organiser ACTUATOR 2000

ACTUATOR 2002

8th International Conference on New Actuators

&2nd International Exhibition

on Smart Actuators and Drive Systems

June 2002Bremen, Germany

Technology-oriented Sessions

Piezoelectric Actuators I A 1.0 - A 1.6 8Microactuators A 2.0 - A 2.7 9Magnetostrictive Actuators A 3.0 - A 3.5 10Actuators based on ER/MR Fluids A 4.0 - A 4.5 11Shape Memory Actuators I A 5.0 - A 5.5 12Low-Power Electromagnetic Actuators I A 6.0 - A 6.5 13Other Actuators A 7.1 - A 7.3 14

Application-oriented Sessions

Microfluidics B 1.1 - B 1.6 15Piezoelectric Actuators II: Applications B 2.0 - B 2.6 16Actuators for Artificial Limbs B 3.1 - B 3.6 17Nanopositioning B 4.1 - B 4.5 18Vibration Control B 5.1 - B 5.5 19Shape Memory Actuators II: Applications B 6.1 - B 6.4 20Low-Power Electromagnetic Actuators II: Linear Drives B 7.1 - B 7.4 21

Poster Contributions

Piezoelectric Actuators P 1 - P 34 22Microactuators P 35 - P 40 26Magnetostrictive Actuators P 41 - P 45 27Actuators Based on ER/MR Fluids P 46 - P 52 28Haptic Systems P 53 - P 55 29Shape Memory Actuators P 56 - P 60, P 79 30Micromanipulation P 61 - P 64 31Electromagnetic Actuators P 65 - P 71 32Other Actuators P 72 33Actuators for Artificial Limbs P 73 - P 78 33

List of Exhibitors 665

List of Authors 678

Table of Contents

Oral Contributions No. Page

7

A 1 Piezoelectric Actuators I

Technical Papers and Authors No. Page

Recent Trend of Piezoelectric Actuator Developments A 1.0 34- Material, Design and Drive Technique Related Issues -K. UchinoThe Pennsylvania State University, USA

Domain Contribution to Dielectric and Piezoelectric A 1.1 40Properties of Piezoelectric Ceramics Based on x Pb(Zr, Ti)O3 - (1-x) Sr (K0,25 Nb0,75)O3 (PZT/SKN) Solid SolutionsA. Schönecker, P. Obenaus, L. Seffner, U. Keitel,Fraunhofer-IKTS Dresden, GermanyT. Scholehwar, Technische Universität Dresden, GermanyG. Helke, CeramTec AG, Lauf, Germany

Low-Temperature Properties of Piezoelectric Actuators A 1.2 41P. Pertsch, H. Marth, Physik Instrumente (PI) GmbH & Co.,Waldbronn, GermanyP. Anger, A. Feltz, Omicron Vakuumphysik GmbH,Taunusstein, Germany

The Development of a Low Cost, High Performance A 1.3 45Piezo Actuator for High Volume ManufactureS. C. PowellPBT Limited, Harlow, United Kingdom

Monolithic Piezo-Actuators: Modelling, Validation in A 1.4 49the Laboratory and Optimisation of Working ConditionsR. Pérez, J.-M. Breguet, H. Bleuler, R. ClavelSwiss Federal Institute of Technology, Lausanne, Switzerland

Application of Piezoceramic Multilayer Actuators, A 1.5 53Experiences and SolutionsR. Bindig, G. HelkeCeramTec AG, Lauf, Germany

Properties and Reliability of Large PZT Multilayer A 1.6 58Stack ActuatorsK. Lubitz, C. Schuh, T. Steinkopff, A. WolffSiemens AG, München, Germany

8

A 2 Microactuators


9

Recent Progress of Microactuators A 2.0 62T. GessnerTechnische Universität Chemnitz, Germany

A Spatial Light Modulator Using Moving Liquid A 2.1 71Mirrors (MLM) on a CMOS Active-MatrixA. Wolter, K.-U. Kirstein, W. Doleschal, H. Kück, H. Lakner, G. ZimmerFraunhofer-Institut für Mikroelektronische Schaltungenund Systeme, Dresden, Germany

Optical Switch Matrix with Micromechanical A 2.2 75Actuator-ArraysR. Loke, J. Sehm, S. BocklischTechnische Universität Chemnitz, Germany

Analysis of Micromachined Electro-Thermal A 2.3 79Bent-Beam Actuators and their Applications on Micro-Grippers/Micro-OpticsG. B. Lee, H. I. Tsai, C. S. Shey, Y. H. Lin, R. S. Chan,National Cheng Kung University, Tainan, TaiwanC. J. Kung, Far East College, Tainan, Taiwan

Micromechanical Scanning Device for Large A 2.4 83Vertical Range with High ResolutionR. Knöfler, K. Wolf, E. Ahl, U. Kotarsky, W. Manthey, A. Bertz, T. Gessner,Technische Universität Chemnitz, GermanyM. Küchler, Fraunhofer-IZM Berlin/Chemnitz, Germany

High Force and Large Displacement Electrostatic Actuators A 2.5 87with Curved Electrodes Using Silicon Bulk MicromachiningF. Bennini, J. Frühauf, W. DötzelTechnische Universität Chemnitz, Germany

Electrostatic Repulsive-Force Microactuators Using A 2.6 91Lateral Electrostatic Field AsymmetryK. B. Lee, Samsung Advanced Institute of Technology,Suwon, Rep. of KoreaY.-H. Cho, Korea Advanced Institute of Science and Technology, Taejon, Rep. of Korea

Excimer Laser Patterning of Polyimide Microstructure A 2.7 96for Permalloy Magnetic MicroactuatorY.-S. Lin, C.-T. Pan, S.-C. Chen, J.-J. JangIndustrial Technology Research Institute, Hsinchu, Taiwan

A 3 Magnetostrictive Actuators


Magnetostrictive Materials and Actuators A 3.0 100E. Quandt, Stiftung caesar, Bonn, GermanyF. Claeyssen, Cedrat Recherche, Meylan, France

Large-Stroke Actuators Based on Magnetic-Field-Induced A 3.1 106Bending of a Ni-Mn-Ga ElementK. UllakkoHelsinki University of Technology, Espoo, Finland

Preparation of Films of Fe-45at % PD Magnetic Shape A 3.2 107Memory Alloy by Magnetron Sputtering Process and their CharacterizationH. Yabe, R. Fujii, K. Oguri, H.-H. Uchida, Y. Matsumura, H. Uchida, Y. NishiTokai University, Hiratsuka, Kanagawa, Japan

Magnetostrictive Galfenol/Alfenol Single Crystal Alloys A 3.3 111Under Large Compressive StressesA. E. Clark, Clark Associates, Adelphi, USAM. Wun-Fogle, J. B. Restorff, Naval Surface Warfare Center,West Bethesda, USAT. A. Lograsso, A. R. Ross, D. L. Schlagel, Ames Laboratory,Ames, USA

Magnetostrictive Linear Motor Based on Self-Moving A 3.4 116Cell ConceptJ. Kim, J.-K. Doo, S.-B. ChoiInha University, Incheon, Rep. of Korea

Compact Magnetostrictive Actuators and Linear Motors A 3.5 120C. H. JoshiEnergen, Inc., Billerica, USA

10

A 4 Actuators based on ER/MR Fluids


11

Controllable Fluids in 2000 - Status of ER and A 4.0 126MR Fluid TechnologyJ. D. Carlson, Lord Corporation, Cary, USA J. L. Sproston, University of Liverpool, United Kingdom

Applications of ER Fluids to Fluid Power Systems A 4.1 131(Proposition of Micro ER Valves and Novel Hydraulic Actuators: METERA)Y. Kondoh, S. YokotaTokyo Institute of Technology, Yokohama, Japan

6 kV Power Amplifier Designed for Actuators with A 4.2 135Electrorheological (ER) FluidsC. Stiebel, H. JanochaUniversität des Saarlandes, Saarbrücken, Germany

Semi-Active Control of a Vehicle Suspension System A 4.3 139Using MR DamperG. Z. Yao, F. F. Yap, W. H. Li, G. Chen, S. H. Yeo, Y. C. Guo Nanyang Technological University, Singapore

Modeling of a Magnetorheological Damper by A 4.4 143Parameter-EstimationP. Lederer, Quillion Ltd., Cambridge, United KingdomM. G. Salloker, Technikum Joanneum GmbH, Kapfenberg, AustriaS. Doczy, University of Technology, Graz, Austria

Development of Damper for New Electronically Controlled A 4.5 147Power Steering System by Magneto-Rheological FluidY. Park, B. JungKorea Advanced Institute of Science and Technology, Taejon, Rep. of Korea

A 5 Shape Memory Actuators


Shape Memory Actuators in MEMS and Medicine A 5.0 151M. Wuttig, University of Maryland, USAL. McD. Schetky, Memry Corporation, Brookfield, USA

Time Response of Ni-Ti Actuator Wire A 5.1 156P. L. Potapov, Antwerp University, BelgiumE. P. da Silva, Technische Universität Berlin, Germany

Laser Material Processing of Shape Memory Alloys A 5.3 163H. Haferkamp, S. Paschko, F. von Alvensleben, M. GoedeLaser Zentrum Hannover e.V., Germany

A New Production Method of SMA Micro Actuator by A 5.4 167Sputtering TiNi and Using Ni MoldK. Kuribayashi, T. YasumuneYamaguchi University, Ube, Japan

Thin Ti(Ni, Cu) Film Composites A 5.5 172B. Winzek, E. Quandt, Stiftung caesar, Bonn, GermanyH. Holleck, Forschungszentrum Karlsruhe GmbH, Germany

12

A 6 Low-Power Electromagnetic Actuators I


13

Small Electromagnetic Disk Drives A 6.0 177H.-D. StöltingUniversität Hannover, Germany

3-Phase Coil for Planar Brushless Micromotor A 6.1 181P.-A. Gilles, O. Cugat, J. Delamare, V. Fernandez, Laboratoire dÉlectrotechnique de Grenoble, FranceC. Divoux, Laboratoire dÉlectronique, de Technologie et dÍnstrumentation, Grenoble, France

Pancake Shaped Micro Gear System with A 6.2 185High Transmission RatioR. Degen, W. Ehrfeld, F. MichelInstitut für Mikrotechnik Mainz GmbH, Germany

An Induction Micromotor on a Permanent Magnet Bearing A 6.3 189V. Fernandez, O. Cugat, G. Reyne, P.-A. Gilles,Laboratoire d'Electrotechnique de Grenoble, FranceS. Basrour, Laboratoire de Physique et de Métrologie des Oscillateurs, Besançon, France

Penny-Motor: A Family of Novel Ultraflat A 6.4 193Electromagnetic MicromotorsS. Kleen, W. Ehrfeld, F. Michel, M. Nienhaus, Institut für Mikrotechnik Mainz GmbH, GermanyH.-D. Stölting, Universität Hannover, Germany

New Concept of a Spherical Actuator with A 6.5 197Three Degrees of FreedomK. Kahlen, R. W. De DonckerRWTH Aachen, Germany

A 7 Other Actuators


14

Electroactive Polymers as Artificial Muscles Changing A 7.1 201Robotics ParadigmsY. Bar-Cohen, S. LearyJet Propulsion Laboratory/Caltech, Pasadena, USA

Actuators from Carbon Nanotubes A 7.2 205S. Roth, A. Minett, Max-Planck-Institut fürFestkörperforschung, Stuttgart, GermanyR. Baughman, Allied Signal Inc., Morristown, USAO. Jaschinski, Université de Montpellier, France

ZrNi Thin Films for Fast Reversible Hydrogen A 7.3 208Pressure Actuation J. G. E. Gardeniers, J. F. Burger, H. van Egmond, H. J. Holland,H. J. M. ter Brake, M. ElwenspoekUniversity of Twente, Enschede, The Netherlands

B 1 Microfluidics


15

Time Response of Shape Memory Microvalves B 1.1 212M. Kohl, I. Hürst, B. KrevetForschungszentrum Karlsruhe GmbH, Germany

An Intrinsically Safe Optically Powered Hydraulic Valve B 1.2 216J. Lim, Q. P. Yang, K. F. Hale, B. E. Jones,Brunel University, Uxbridge, Middlesex, United KingdomP. R. Jackson, Flight Refuelling Ltd., Dorset, United Kingdom

Micromachined 3/2 Port Pressure Controlling Valve B 1.3 220H. J. Quenzer, B. Wagner, Fraunhofer-Institut für Siliziumtechnologie, Itzehoe, GermanyG. Günther, RWTH Aachen, Germany

Pneumatic Silicon Microvalves with B 1.4 224Piezoelectric ActuationM. Weinmann, P. Post, H. Vollmer, FESTO AG & Co., Esslingen, GermanyR. Wanner, Beurer GmbH & Co., Ulm, GermanyS. Kluge, P. Woias, Fraunhofer-Institut für Mikro-elektronische Schaltungen und Systeme, München, Germany

An Actuation Coupling System for a Fast and Low-Volume B 1.5 228Micropipetting Device with Integrated SensorsN. Szita, J. Dual,Eidgenössische Technische Hochschule Zürich, SwitzerlandR. Buser, Institute of Microsystems, Buchs SG, Switzerland

A Micro-Droplet Dispenser Based on a Shock Principle B 1.6 232M. Moreau, Y. Fouillet, B. DiemLaboratoire d'Electronique, de Technologie et d'Instrumentation, Grenoble, France

B 2 Piezoelectric Actuators II: Applications


16

Breakthrough in Piezo Actuator Applications B 2.0 236K. SpannerPhysik Instrumente (PI) GmbH & Co., Waldbronn, Germany

A Miniature Piezoelectric Rotary Motor Using Two B 2.1 242Orthogonal Bending Modes of a Hollow CylinderB. Koc, K. Uchino, The Pennsylvania State University, USAJ. F. Tressler, Naval Research Laboratory, Washington, USA

Gyro-Moment Motor B 2.2 246K. Kanauchi, Y. Tomikawa Yamagata University, Yonezawa, Japan

Piezoelectric Linear Motors B 2.3 250T. Hemsel, J. WallaschekUniversität Paderborn, Germany

Actuators with Piezoelectric Impact Drives B 2.4 254K. Bartzke, S. Mack, Carl Zeiss Jena GmbH, GermanyM. Burkhardt, P. Dittrich, Fachhochschule Jena, GermanyE. Hennig, PI Ceramic GmbH, Lederhose, Germany

Distributed Actuator Systems Based on Piezoceramics B 2.5 258B. Z. Janos, N. W. HagoodMassachusetts Institute of Technology, Cambridge, USA

Versatile Ultrasonic Piezo Drive for B 2.6 262Direct-Drive MotorizationF. Claeyssen, R. Le Letty, M. F. Six, M. Debarnot, N. Lhermet, Cedrat Recherche, Meylan, FranceM. Privat, CNES, Toulouse, France

B 3 Actuators for Artifical Limbs


17

Application of a Hydraulic Bilateral Servo Actuator for B 3.1 266a Patient Supporting RobotY. Saito, K. Ohnishi, Y. Sunagawa, Tokyo Denki University, Hiki, Saitama, JapanS. Ishigami, National Defense Medical College, Tokorozawa,Saitama, JapanS. Taguchi, Nihon Shinkan Co., Ltd., Shirakawa, Fukushima, Japan

A Micro Rubber Artificial Muscle Driven by a B 3.2 272Micro Compressor for Artificial LimbsY. K. Lee, I. ShimoyamaThe University of Tokyo, Japan

An Actuator System for a Novel Biomechatronic B 3.3 276Prosthetic HandM. C. Carrozza, P. Dario, R. Lazzarini, B. Massa, M. Zecca, S. Roccella, Centro INAIL/RTR, Viareggio and Scuola Superiore Sant'Anna, Pisa, ItalyR. Sacchetti, Centro Protesi INAIL, Vigorso di Budrio, Italy

Development of a Shape Memory Alloy Actuated Hand B 3.4 281K. J. DeLaurentis, C. Mavroidis, The State University of New Jersey, USAC. Pfeiffer, CyBotic Technologies, Inc., New Jersey, USA

High Torque Ultrasonic Motors for Hand Prosthetics: B 3.5 285Current Status and TrendsJ. L. Pons, H. Rodríguez, A. Duarte, A. R. Jiménez, R. Ceres, Consejo Superior de Investigaciones Cientificas, Madrid, SpainI. Luyckx, D. Reynaerts, H. Van Brussel, Katholieke Universiteit Leuven, Belgium

Muscle-Like Pneumatic Actuators for B 3.6 289Below-Knee ProsthesesG. K. Klute, J. M. Czerniecki, Dept. of Veterans Affairs, and University of Washington, Seattle, USAB. Hannaford, University of Washington, Seattle, USA

B 4 Nanopositioning


18

Hexapod Parallel Kinematics with B 4.1 293Sub-Micrometer Accuracy R. GlößPhysik Instrumente (PI) GmbH & Co., Waldbronn, Germany

Piezoelectric X-Y-Micropositioner Made B 4.2 296of Photosensitive Glass to Form one Micro-Handling Unit R. Keoschkerjan, F. Qiao, C. Schilling, H. Wurmus, Technische Universität Ilmenau, GermanyM. Harutyunyan, State Engineering University of Armenia,Erevan, Armenia

A Rigid and Accurate XYC Positioning System B 4.3 300Based on a Piezo-Electric Stepper DriveM. Versteyhe, D. Reynaerts, F. Al-Bender, H. Van BrusselKatholieke Universiteit Leuven, Belgium

Detection and Compensation of Misalignments in B 4.4 304Ground- and Space Based Interferometers Realised by Optical Sensors and Piezoelectric ActuatorsU. Schnars, K. Sommer, OHB-System, Bremen, GermanyV. Kebbel, H.-J. Hartmann, W. Jüptner, BIAS, Bremen, Germany

Different Methods of Signal Preshaping for Highly B 4.5 308Dynamic Piezo Positioning SystemsR. GlößPhysik Instrumente (PI) GmbH & Co., Waldbronn, Germany

B 5 Vibration Control


19

Designing a Magnetostrictive Actuator by Using B 5.1 312Simple Predictive Tools and Experimental DataE. Monaco, F. Franco, L. Lecce Università di Napoli, Italy

Design, Manufacturing and Experimental Evaluation of a B 5.2 318Magnetostrictive Actuator for Active Vibration Control and Damage AnalysisF. Stillesjö, G. Engdahl,Royal Institute of Technology, Stockholm, SwedenC. May, H. Janocha, Universität des Saarlandes, Saarbrücken, Germany

Vibration Damping with a Piezoelectric Torque Drive B 5.3 322F. Palis, U. Ladra, A. SchwarzkopfOtto-von-Guericke-Universität Magdeburg, Germany

Electromagnetic Actuators for Active Engine B 5.4 326Vibration CancellationC. Hartwig, H. Haase, Universität Hannover, GermanyM. Hofmann, H.-J. Karkosch,ContiTech Vibration Control GmbH, Hannover, Germany

Development of a Novel Piezoelectric Inertial Absorber B 5.5 330H. Du, Y. J. Tang, S. F. LingNanyang Technological University, Singapore

A New SMA Actuated Miniature Silicon B 6.1 334Gripper for Micro AssemblyS. Bütefisch, G. Pokar, S. Büttgenbach, J. HesselbachTechnische Universität Braunschweig, Germany

Shape Memory Alloy Based Micro Actuators B 6.2 338V. Galhotra, V. Gupta, V. Martynov, A. D. JohnsonTiNi Alloy Company, San Leandro, USA

Cu-Zn-AI SMA Actuators for Active Disassembly Using B 6.3 342Smart Materials (ADSM)J. D. Chiodo, M. Perkins, E. H. Billett, D. J. Harrison, Brunel University, Egham, Surrey, United KingdomA. W. Anson, Anson Medical LTD., Oxfordshire, United Kingdom

Development of a New Micro Gas Valve Composed of a B 6.4 346SMA Thin Film and Micro Distance SensorX. Ding, K. Kuribayashi, T. HashidaYamaguchi University, Ube, Japan

B 6 Shape Memory Actuators II: Applications


20

Contribution to Short Stroke Linear DC Motors B 7.1 351with Permanent MagnetsR. Hanitsch, R. OkonkwoTechnische Universität Berlin, Germany

Electromagnetic Microactuators for Optical Applications B 7.2 355Th. Kunz, P. Krippner, A. Fath, M. Scherr, J. MohrForschungszentrum Karlsruhe GmbH, Germany

Application of Electrodynamic Planar Drives B 7.3 359E. Saffert, E. Kallenbach, Technische Universität Ilmenau, GermanyS. Pause, LLT Laser- und Lichtstrahl-Technologie GmbH, Ilmenau, Germany

A Novel Variable Reluctance Micromotor for B 7.4 363Linear ActuationH. H. Gatzen, H.-D. Stölting, Universität Hannover, GermanyS. Büttgenbach, Technische Universität Braunschweig, GermanyH. Dimigen, Fraunhofer-Institut für Schicht- und Oberflächentechnik, Braunschweig, Germany

B 7 Low-Power Electromagnetic Actuators II: Linear Drives


21

Control for Ultrasonic Motors with P 1 367LLCC-Resonant Converter T. Schulte, H. Grotstollen, N. FröhlekeUniversität-Gesamthochschule Paderborn, Germany

Piezoelectric Rotary-Linear-Actuators for Miniaturised P 2 371or Micro Parallel RobotsY. Zhang, J. HesselbachTechnische Universität Braunschweig, Germany

Robotic Wrist Actuator with High Torque P 3 375Piezoelectric Travelling-Wave-MotorM. Schreiner, W. Huber, H.-P. Schöner, DaimlerChrysler AG, Frankfurt, GermanyM. Dörmer, DaimlerChrysler Aerospace, Bremen, Germany

Motor Characteristics of Piezoelectric Micropush Motors P 4 379for Rotating SystemsG. Diefenbach, C. ReichingerPhilips GmbH Forschungslaboratorien, Aachen, Germany

Global Performance Evaluation of TWUM’s Drivers P 5 383A. Duarte, H. Rodríguez, A. R. Jiménez, J. L. Pons, R. CeresConsejo Superior de Investigaciones Cientificas, Madrid, Spain

Piezoelectric Actuator with Integrated Sensor for P 6 387Microgripper Made of GlassF. Qiao, H. WurmusTechnische Universität Ilmenau, Germany

Linear Quasi-Traveling Wave Ultrasonic Motor P 7 391J. Scortesse, S. Biwersi, J. F. Manceau, F. BastienLaboratoire de Physique et de Métrologie des Oscillateurs, Besançon, France

A Smart Actuator to Transonic Wave Drag Reduction P 8 395C. Esposito, A. Concilio,The Italian Aerospace Research Centre, Capua, ItalyS. Ameduri, L. Lecce, University of Naples, Italy

22

Poster Contributions:Piezoelectric ActuatorsTechnical Papers and Authors No. Page

Multi-Degrees-of-Freedom Ultrasonic Actuator P 9 399Employing Multi-Vibration Modes of a DiskM. Aoyagi, T. Ogasawara, Y. Tomikawa, Yamagata University, Yonezawa, JapanT. Takano, Tohoku Institute of Technology, Sendai, Japan

High-Speed Real Time Measurement System of P 10 403High-Power Piezoelectric CharacteristicsS. Hirose, M. Matsumoto, Y. Tomikawa, Yamagata University, Yonezawa, JapanT. Takano, Tohoku Institute of Technology, Sendai, Japan

Analytical Simulation of the Contact Process for a P 12 407Coupled-Resonance Piezoelectric Motor (CRP)A. Lewalter, G. Diefenbach, C. ReichingerPhilips GmbH Forschungslaboratorien, Aachen, Germany

Concept for Optimised Force Transmission in P 13 411Travelling Wave Type Ultrasonic MotorsJ. MaasDaimlerChrysler AG, Frankfurt, Germany

Investigations of the Loss Power of Stacked Acutators P 14 415D. Rößger, E. HennigPI Ceramic GmbH, Lederhose, Germany

Performance of Piezoelectric Ceramic Multilayer P 15 419Components Based on Hard and Soft PZTB. Andersen, E. Ringgaard, T. Bove, Ferroperm Piezoceramics A/S, Kvistgård, DenmarkA. Albareda, R. Pérez, Universitat Politècnica de Catalunya, Spain

Static and Dynamic Performance of Stacked P 16 423Multilayer Actuators Based on Hard and Soft PZTB. Andersen, E. Ringgaard, Ferroperm Piezoceramics A/S, Kvistgård, DenmarkL. S. Nielsen, PZTech ApS, Hellebæk, Denmark

23

Piezoelectric Actuators


Piezoelectric Driven Press for Production of P 17 427Metallic Microparts by FormingA. HessZentrum für Fertigungstechnik Stuttgart, Germany

Development of a Flexible Piezoelectric Micro-Robot for P 18 431the Handling of Micro-ObjectsS. Fahlbusch, S. Fatikow, J. Seyfried, Universität Karlsruhe (TH), GermanyT. Doll, Intelligente Peripherien für Roboter GmbH, Schwaigern, GermanyW. Kammrath, K. Weiss, Kammrath & Weiss GmbH, Dortmund, Germany

A Note on Minimization of Electrical Losses P 19 435in Controllers of Piezoelectric MotorsM. Berg, P. HagedornTechnische Universität Darmstadt, Germany

Charge Controlled Power Amplifier for High- P 20 439Dynamic Piezoelectrical DrivesR. Kasper, A. Wagner, J. Schröder, W. HeinemannOtto-von-Guericke-Universität Magdeburg, Germany

Characterization of Piezoelectric Multilayer Actuators: P 22 443Low- and High Field BehaviorH.-J. Schreiner, R. Bindig, K. Tzschentke, G. HelkeCeramTec AG, Lauf, Germany

Design and Construction of a Linear Piezo-Electrically P 23 447Driven Forced Travelling Wave MotorB. Houben, W. Symens, M. Versteyhe, D. Reynaerts, H. Van BrusselKatholieke Universiteit Leuven, Belgium

The Inchworm® Piezoelectric Stepping Motor - Advances P 24 451in Design, Performance and ApplicationsD. Henderson, J. Fasick Burleigh Instruments Inc., Fishers, USA

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Mechanisms Based on Piezo Actuators P 25 456F. Claeyssen, R. Le Letty, F. Barillot, N. Lhermet, H. Fabbro, Cedrat Recherche, Meylan, FranceP. Guay, CNES, Toulouse, FranceM. Yorck, SI IKOSS B.V., Leiden, The Netherlands

A New Method for the Calculation of Stresses and P 26 460Reliability in Multilayer Electrostrictive ActuatorsM. Koyuncu, Starlab Research nv/sa, Brussels, BelgiumW. B. Carlson, S. M. Pilgrim, Alfred University, NY, USA

Bistable Mechanism Actuated by Piezoelectrics P 27 464G. Bertolotto Bianc, F. Colombo, P. Mandurino, A. SciaccaABB Ricerca S.p.A., Sesto S. Giovanni, Italy

Novel Digital Control Algorithm Improves Dynamic P29 468Performance of Piezo-NanoScanners by Several 100 TimesX. ZhaoPhysik Instrumente (PI) GmbH & Co., Waldbronn, Germany

Precise Positioning Piezoelectric Actuator: A New P 30 471Concept Based on the Coupling of Travelling WavesB. Nogarède, V. MonturetLaboratoire d'Electrotechnique et d'Electronique Industrielle, Toulouse, France

Reduced Temperature Sensitivity of Low-Voltage P 32 475Oscillating Piezo ChopperP. Drögmöller, J. Sorber, G. Gerlach, Technische Universität Dresden, GermanyP. Bücker, piezosystem jena, Germany

A New Piezo Spindle Drive Combines Microstep P 33 479Movement and Continuous MotionU. Hahn, W. Wischnewskyi, R. GlößPhysik Instrumente (PI) GmbH & Co., Waldbronn, Germany

Actuators and Actuator Systems for Oscillation-Supported P 34 482Metal Forming as Components for Metal-Forming MachinesK.-H. Wurst, M. Conrath, C. LiuUniversität Stuttgart, Germany

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A 3-Dimensional Actuator Based on a Novel Combination P 35 486of Thermally Actuated Planar and Vertical BimorphsH. Sehr, A. G. R. Evans, A. Brunnschweiler, G. J. Ensell, M. KraftUniversity of Southampton, United Kingdom

Optimization of Electro-Mechanical Interactions in P 36 490Sensor and Actuator DesignH.-P. LienISE Integrated Systems Engineering AG, Zürich, Switzerland

Novel Parametric-Effect MEMS Amplifiers/Transducers P 37 494J.-P. Raskin, Université Catholique de Louvain, Louvain-la-Neuve, BelgiumB. T. Khuri-Yakub, Stanford University, USAG. M. Rebeiz, University of Michigan, USA

Optimal Shape Design of Curved Electrodes for a P 38 498Rotary MicroactuatorS. Jung, J. Jeon, Y. E. Pak, S. LeeSamsung Advanced Institute of Technology, Suwon, Rep. of Korea

A Thermally Buckling Microvalve P 39 502M.-J. Tsai, L.-H. Lo, T.-H. Tsai, C.-H. Fan, C.-L. WuMEMS Research Div. MIRL/ITRI, Chutung, Hsinchu, Taiwan

Sub-nl Flow Measurement Method for P 40 507Microfluidic ActuatorsM. Wackerle, M. Richter, P. Woias, F. GoldschmidtböingFraunhofer-Institut für Mikroelektronische Schaltungen und Systeme, München, Germany

26

Microactuators


Effect of Plasma Processes on Magnetostriction P 41 511of Tb-Fe Thin FilmsH. Uchida, Y. Matsumura, M. Wada, M. Ono, K. Nakazato, H.-H. UchidaTokai University, Hiratsuka, Kanagawa, Japan

Design and Simulation of Magnetic Shape Memory P 42 515and Magnetostrictive ActuatorsZ. G. Wei, G. EngdahlRoyal Institute of Technology, Stockholm, Sweden

Linear Controllers for Magnetostrictive Actuators P 43 519M. G. Salloker, G. Fraiß, A. Hartberger, R. Krappinger, G. MangTechnikum Joanneum GmbH, Kapfenberg, Austria

Parameter-Identification for Linear Models P 44 523of Magnetostrictive ActuatorsM. G. Salloker, G. Fraiß, A. Hartberger, R. Krappinger, G. MangTechnikum Joanneum GmbH, Kapfenberg, Austria

Magnetic Shape Memory (MSM) Actuators P 45 527I. Aaltio, K. Ullakko AdaptaMat Ltd., Espoo, Finland

27

Magnetostrictive Actuators


Smart Material Actuators for Information Storage Devices P 46 531S. B. Choi, S. C. Lim, J. S. ParkInha University, Incheon, Rep. of Korea

Control Characteristics of ER/MR Fluid-Based Actuators P 47 535for Automotive ApplicationsS. B. Choi, C. C. Cheong, H. S. Lee, H. J. Song Inha University, Incheon, Rep. of Korea

High Dynamic Electrorheological Actuators: P 48 539Applications - Testing Machines and Adaptronic Transport SystemsH. Rosenfeldt, L. Johnston,Schenck Pegasus GmbH, Darmstadt, GermanyG. Fees, RWTH Aachen, Germany

Force-Feedback Device using Magnetorheological Fluid: P 49 543MR CLUTCHY. Park, B. JungKorea Advanced Institute of Science and Technology, Taejon, Rep. of Korea

A Comparison Between Electrorheological and P 50 547Magnetorheological Fluids Subjected to Impulsive LoadsA. K. El Wahed, J. L. SprostonUniversity of Liverpool, United Kingdom

Nonlinear Robot Control System Including Controllable P 51 551Passive Element Using Magneto-Rheological SuspensionT. Saito, Tokyo Engineering University, JapanN. Sugimoto, H. Ikeda, National Institute of Industrial Safety, Tokyo, Japan

Transitional and Solid State Behaviour of a P 52 555Magnetorheological ClutchD. Lampe, R. GrundmannTechnische Universität Dresden, Germany

28

Actuators Based on ER/MR Fluids


Application of Magnetorheological Fluids in P 53 559Programmable Haptic KnobsB. Ackermann, R. ElferichPhilips GmbH Forschungslaboratorien, Aachen, Germany

Haptic System Based on an Electrorheological Fluid P 54 563H. Böse, H.-J. Berkemeier, A. TrendlerFraunhofer-Institut für Silicatforschung, Würzburg, Germany

Micro-Actuation Principles for High- P 55 567Resolution Graphic Tactile DisplaysW. Brenner, S. Mitic, A. Vujanic, G. PopovicTechnische Universität Wien, Austria

29

Haptic Systems


Engineering Calculation Methods of P 56 571SM Element DeformationsL. Stupelis, Institute of Mathematics and Informatics, Vilnius, LithuaniaE. Kibirkstis, R. Liaudinskas, A. Dabkevicius,Kaunas University of Technology, Lithuania

Designing Microgrippers for Shape Memory Actuators P 57 576R. Salim, Hewlett-Packard GmbH, Bad Homburg, GermanyS. Schwuchow, JET Consulting GmbH & Co. KG, Bad Homburg, Germany

A Highly Flexible and Adaptive Micromechanical P 58 579Actuator System - Potential of ApplicationC. Abel-Keilhack, J. Hesselbach, M. Leester-Schädel,S. Büttgenbach, Technische Universität Braunschweig, Germany

Shape Memory Actuator for Automotive Applications P 59 583S. Alacqua, G. Alessandretti, F. ButeraCentro Ricerche Fiat, Orbassano, Italy

Shape Adaption of Fixed Wing Aircraft by P 60 587Shape Memory Alloys (SMA)G. Pritschow, W. Wadehn, G. KehlUniversität Stuttgart, Germany

Fabrication of Ti-Ni Alloy Foils by Ultrafine P 79 662Laminates MethodK. Tsuchiya, N. Yusop Binti, M. Umemoto,Toyohashi University of Technology, JapanM. Sasaki, D. Imai, Nippon Metal Industry, Co., Ltd., Sagamihara, Japan

30

Shape Memory Actuators


Actuators for Modulation of Brownian Mobility P 61 591of Micro-ObjectsS. DadunashviliGeorgian Technical University, Tbilisi, Georgia

A Novel Micro Manipulating System and its P 62 595Application in Micro AssemblyL. Ning Sun, T. Zhang, W. Bin Rong, X. Jun Deng, H. gao CaiHarbin Institute of Technology, P. R. China

Research on Micromanipulating P 63 599Arm Integrated with Displacement SensorsT. Zhang, L. Ning Sun, Z. Jie Li, H. gao CaiHarbin Institute of Technology, P. R. China

Design of Miniature Manipulators for Integration in a P 64 603Self-Propelling EndoscopeJ. Peirs, D. Reynaerts, H. Van BrusselKatholieke Universiteit Leuven, Belgium

31

Micromanipulation


Reactionless, Momentum Compensated Resonant P 65 607Linear DriveS. Kovalev, R. GlößPhysik Instrumente (PI) GmbH & Co., Waldbronn, Germany

Permanent Magnetic Polymer-Bonded Material Basing on P 66 611NdFeB and their Application in Mini and Micro ActuatorsE. Kallenbach, V. Zöppig, H. Kube,Technische Universität Ilmenau, GermanyF. Beyer, R. Hermann, Steinbeis-Stiftung für Wirtschaftsförderung, Ilmenau, GermanyB. Pawlowski, J. Töpfer, inocermic GmbH, Hermsdorf, GermanyH. Töpfer, Bürkert GmbH & Co. KG, Großröhrsdorf, Germany

Optimal Application Fields for Electromagnetic and P 67 615Piezoceramic ActuatorsJ. Heinrich, R. Hermann, E. Kallenbach, Steinbeis-Stiftung für Wirtschaftsförderung, Ilmenau, GermanyM. Eccarius, Technische Universität Ilmenau, Germany

Control of Drives in a Nonlinear Two-Mass System P 68 619I. Schöling, B. OrlikUniversität Bremen, Germany

Integrated Drive with a New High Dynamic State Control P 69 623for a Mains Side ActuatorH. Raffel, B. OrlikUniversität Bremen, Germany

DVR: A High-Performance 22.5 GB Optical Disk Drive P 70 627with High Numerical Aperture Objective LensP. J. C. H. Smulders, J. W. Aarts, J. P. Baartman, B. H. W. Hendriks Philips Research Laboratories, Eindhoven, The Netherlands

A New Type Single-Phase Stepping Motor P 71 631Y. Qing, Q. JianFeiSouthwest Institute of Electronic Engineering, Sichuan, P. R. China

32

Electromagnetic Actuators


Conducting Polymer Materials and their Mechanical P 72 635Properties for Actuation: The Case of PolypyrroleM. Benslimane, P. Gravesen, Danfoss A/S, Nordborg, DenmarkK. West, L. Bay, S. Skaarup, The Technical University of Denmark, Lyngby, Denmrk

Actuators for Artificial LimbsStiffness Controlled Voice Coil Actuator for P 73 639Musculoskeletal StudiesE. Gallasch, H. P. Taferner, M. Fend, B. Wronski, Physiologisches Institut der Universität Graz, AustriaD. Rafolt, Institut für Biomedizinische Technik und Physik, AKH Wien, Austria

Actuators for Upper Limb Prosthetics: The Experience of P 74 643the Manus ProjectI. Luyckx, D. Reynaerts, H. Van Brussel, Katholieke Universiteit Leuven, BelgiumH. Rodríguez, J. L. Pons, R. Ceres, Consejo Superior de Investigaciones Cientificas, Madrid, Spain

Research on a Functional Anthrobotic Hand for P 75 647Electric Prosthetic HandK. Ohnishi, Y. SaitoTokyo Denki University, Hiki, Saitama, Japan

A New Design for a Hybrid Prosthetic Elbow Motor P 76 653C. Pfeiffer, CyBotic Technologies, Inc., New Jersey, USAC. Mavroidis, The State University of New Jersey, USA

Comparison of Actuators for Prosthetic Finger Control P 77 654J. A. Flint, W. CraeliusThe State University of New Jersey, USA

Biomimitic Systems for Limb Prosthetics Using P 78 658Pneumatic Muscle ActuatorsD. G. Caldwell, N. TsagarakisUniversity of Salford, Manchester, United Kingdom

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Other Actuators


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