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Development of EUV sources with tin fuelDevelopment of EUV sources with tin fuel

and rotating disk electrodesand rotating disk electrodes

V.V. BorisovBorisov

StateState ResearchResearch CenterCenterofofRussianRussian FederationFederation

TROITSK INSTITUTE FOR INNOVATIONTROITSK INSTITUTE FOR INNOVATION & FUSION RESEARCH& FUSION RESEARCH(SRC RF TRINITI)(SRC RF TRINITI)

SRC RF TRINITI 2006 EUVL Symposium

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Evolution of discharge

produced plasma source

at SRC RF TRINITI

Rotating

disc cathode

Tin layer Rotating disc anode

EUV light

Insulator

AnodeCathode

2001

Xe, CE=0.5%

2002Sn, CE=2%

2003Sn, CE=2%

& long electrode life time

Sn

Laser beam

Cathode

Preionizer

Insulator

Cooling

EUV light

Laser beam

Cooling

Anode

Xe gas

EUV light

SRC RF TRINITI 2006 EUVL Symposium

ROTATING DISC ELECTRODES (RDE)

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RDE SOURCE

Design # 1

SRC RF TRINITI 2006 EUVL Symposium

Features.Capacitors are arrangedoutside the vacuumchamber and connect withRDE by liquid metal slidingcontacts.Operation with solid or liquid

tin is possible.

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RDE SOURCE

Design # 2

SRC RF TRINITI 2006 EUVL Symposium

Features.

Capacitors are placed insidethe vacuum chamberbetween the rotating discelectrodes.Operation with solid or liquidtin is possible.

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RDE SOURCE

Design # 3

SRC RF TRINITI 2006 EUVL Symposium

Features.Tin is delivered by passing

the rotating disc electrodesthrough the baths withliquid tin.The liquid tin into the bathsis used for both heat

removal from electrodesand sliding contacts.Simple system of tinsurface regeneration.

Laser

Vacuum chamber

Turbopump

Discharge

HeaterCoolingcanal

Bath withliquid tin

Pulse

powersystem

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0 4 8 12 16 20 24

Energy input, J

0

0.5

1

1.5

2

2.5

CE,%

Conversion efficiency as function of input energy

SRC RF TRINITI 2006 EUVL Symposium

High- effective operation at high input energies (Ein

~ 8 J /pulse) gives the possibility to

achieve the required EUV source parameters at acceptable repetition rates (7 10 kHz).

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Effects of Sn vapor plum generation

at the cathode or at the anode

SRC RF TRINITI 2006 EUVL Symposium

EUVEne

rgy,a.u.

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Configuration of EUV emitting region

for different discharge conditions

a b c

SRC RF TRINITI 2006 EUVL Symposium

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Operation with liquid tin:

increase of the tin droplets production

0 5 10 150

40

80

EUVene

rgy/pulse,

mJ/2s

r/2%BW

Time,ms

Output power 240 W/2 sr at 4 kHz

Design #3

SRC RF TRINITI 2006 EUVL Symposium

The use of liquid tin provides simplemethod of tin surface regeneration forrotating disc electrodes, but leads to highlevel of tin droplets production.

Design # 2

O ti ith lid ti ll t f t i

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Time, 50 msec/divEU

VEnergy,mJ/2

sr

70

Operation with solid tin: small amount of tin

droplets production

SRC RF TRINITI 2006 EUVL Symposium

Rotating disc electrodes

0 200 400

Pulse number

0 200 400

Pulse numberEUVEnergy,mJ/2

sr

70

EUV signals after 6 mil lions pulses at 3 kHz if

the system of tin surface regeneration is not used

EUVEnergy,m

J/2

sr

70

Time, 50 msec/div

Tin surface after 6 millions pulses if systemof t in sur face regenerat ion is not used

decrease of EUV energy with pulse number

Ion detector signals, provided by laser beam

Non- rotating disc electrodes:

EUV signals with fresh sol id t in surface at 3 kHz

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Output power 220 W/2

sr at 3 kHz

SRC RF TRINITI 2006 EUVL Symposium

Start of operation

1 hour of operation

2 hours of operation

Long time operation of EUV source with

tin surface regeneration system

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EUV source operation at 20 kW input

power and 4 kHz

Output power 280 W/2 sr

SRC RF TRINITI 2006 EUVL Symposium

0 1000 2000 3000 4000 5000

0

50

100

150

200PRR=4000Hz; Ein=5J ;

EUVE

nergy,mJ/2

sr

Time, msec

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Pulse-to-pulse stability over 100 shots

for solid (a) and for liquid (b) tin

0 20 40 60 80 1000,0

0,2

0,4

0,6

0,8

1,0

1,2

1,4

NormalisedEUV

=11,5%

0 20 40 60 80 1000,0

0,2

0,4

0,6

0,8

1,0

1,2

1,4

=8,6%

NormalisedEUV

b)

a)

SRC RF TRINITI 2006 EUVL Symposium

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SRC RF TRINITI 2006 EUVL Symposium

Several designs of RDE source have been investigated at SRC RFSeveral designs of RDE source have been investigated at SRC RF

TRINITI during the two last years. RDE sources can operate withTRINITI during the two last years. RDE sources can operate with solidsolid

and/or liquid tin at input power up to 20 kW and pulse repetitioand/or liquid tin at input power up to 20 kW and pulse repetition rate up ton rate up to

4 kHz. The obtained experimental results do clearer both the ma4 kHz. The obtained experimental results do clearer both the mainin

problems to meet HVM requirements and the directions of next efproblems to meet HVM requirements and the directions of next efforts.forts.

Conclusion