div class=ts-pagebutton class=gotoPage data-page=1Page 1button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=1 data-page=1 class=ts-thumb lazyload alt=Page 1: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails1jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=2Page 2button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=2 data-page=2 class=ts-thumb lazyload alt=Page 2: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails2jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=3Page 3button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=3 data-page=3 class=ts-thumb lazyload alt=Page 3: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails3jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=4Page 4button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=4 data-page=4 class=ts-thumb lazyload alt=Page 4: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails4jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=5Page 5button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=5 data-page=5 class=ts-thumb lazyload alt=Page 5: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails5jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=6Page 6button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=6 data-page=6 class=ts-thumb lazyload alt=Page 6: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails6jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=7Page 7button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=7 data-page=7 class=ts-thumb lazyload alt=Page 7: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails7jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=8Page 8button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=8 data-page=8 class=ts-thumb lazyload alt=Page 8: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails8jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=9Page 9button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=9 data-page=9 class=ts-thumb lazyload alt=Page 9: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails9jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=10Page 10button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=10 data-page=10 class=ts-thumb lazyload alt=Page 10: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails10jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=11Page 11button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=11 data-page=11 class=ts-thumb lazyload alt=Page 11: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails11jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=12Page 12button div class=ts-imageimg data-url=05389371-ibm-mode-figure-1-6-this-internal-availability-of-sensitive-resisthtmlpage=12 data-page=12 class=ts-thumb lazyload alt=Page 12: 05389371 - IBM · mode Figure 1 6 This internal availability of sensitive resist systems based on chemical amplification motivated IBM to further deep-UV lithography by developing loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422055ea75ee72ac86d62300e1a11html5thumbnails12jpg width=140 height=200 divdiv