— automatic optical alignment for afm
DESCRIPTION
The Project on Micro Manipulation Contest. — Automatic Optical Alignment for AFM. Adviser: Li-Chen Fu. Team Members: S. K. Hung,C. F. Tsai, Y. P. Shyu,D. J. Tzou. 2003Sep. 19. Outlines. Introduction A Novel Optical Design for AFM The Profile of This Project. 2/17. 1. Introduction. - PowerPoint PPT PresentationTRANSCRIPT
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— Automatic Optical Alignment for AFM
Adviser: Li-Chen Fu
The Project on Micro Manipulation Contest
Team Members:S. K. Hung, C. F. Tsai,Y. P. Shyu, D. J. Tzou
2003 Sep. 19
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1. Introduction2. A Novel Optical Design for AFM3. The Profile of This Project
Outlines
2/17
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1. Introduction
Typical AFM Block Diagram
Question: Move the Sample or Move the Probe?
3/17
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Scanning Sample Type (move the sample / fix the probe)
simple detective optical arrangementlimited sample size / mass
Scanning Probe Type (move the probe / fix the sample)
unlimited sample size / massdetective optical head is too massive (700g) to movetracking laser path is hard to implement (nm scale tracking error)
Scanning Sample Type v.s. Scanning Probe Type
4/17
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Scanning Sample Type v.s. Scanning Probe Type
Detective Optical Head
4 DOFs to adjust!→ complex mechanism embedded→ massive (700g)→ limited scanning frequency
5/17
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Scanning Sample Scanning Probe
Sample Size small large
Optical Complexity
simple complex
Image Resolution
better worse
Response slow fast
Scanning Sample Type v.s. Scanning Probe Type
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Question:Move the Sample or Move the Probe?Answer: Move the Sample in Horizontal Directions (x, y)
and Move the Probe in the Vertical Direction (z).
Reason: 1. Horizontal scanning motion is slow (<10Hz) a massive sample is OK 2. Vertical tracking motion is fast (>1000Hz) a light probe is OK
Remark: I propose a novel optical design to cause the detective laser spot to track the probe’s vertical motion.
Scanning Sample Type v.s. Scanning Probe Type
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2. A Novel Optical Design for AFM
1. Detective Laser Spot Tracking (novel)2. Traditional Optical Microscope3. Combination
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Detective Laser Spot Tracking
The two lenses can move relatively
KEY: Keep the optical path parallel
9/17
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Traditional Optical Microscope
m100
Magnitude = f2 / f1
The two lenses can move relatively
CCD camera
KEY: Keep the optical path parallel
10/17
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Novel AFM + Traditional Optical Microscope
11/17
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3. The Profile of This Project
Integrating AFM with a traditional optical microscope
Automatic tip exchange (2-dof) and optical alignment (4-dof)
Combining advantages of both scanning types(scanning sample type and scanning probe type)
The Targets of This Projects12/17
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D/A card 6208 with control software
Automation Flow Diagram
13/17
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protection
lens set
probe
magnet
bimorph
piezo z-scanner
base
steel plate
Z-Scanner Mechanism with Lens
14/17
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z
x
y
z
Robot Mechanism
Coil
15/17
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S. K. Hung C. F. TsaiY. P. Shyu D. J. Tzou
Optical Design Robot IP Integrationpreliminary exp. mechanical design Hardware Setup Servo Control
mechanical design motor driving Edge Finding System ProgramAFM setup control program
Human Resources
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Any Comment Is Appreciated!
~ The End ~