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swiss quality www.nanosurf.com www.getec-afm.com AFSEM™ AFM-SEM correlated microscopy TEC Did you know YOUR SEM could do this?

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Page 1: AFM-SEM correlated microscopy - Nanosurf · PDF fileAFM-SEM correlated microscopy. TEC. Did you know . YOUR. SEM . ... No AFM laser alignment due to self-sensing cantilever. ... Phase

swiss qualitywww.nanosurf.com www.getec-afm.com

AFSEM™AFM-SEM correlated microscopy

TEC

Did you know YOUR SEM could

do this?

Page 2: AFM-SEM correlated microscopy - Nanosurf · PDF fileAFM-SEM correlated microscopy. TEC. Did you know . YOUR. SEM . ... No AFM laser alignment due to self-sensing cantilever. ... Phase

2

Two microscopes are better than one!AFSEM™ is an Atomic Force Microscope (AFM) designed for integration into SEM or Dualbeam (SEM/FIB) microscopes. Its open access design allows to simultaneously operate SEM and AFM inside the SEM vacuum chamber.

Main features

• Direct 3D information (topography and phase)

• Correlated microscopy of the exact same sample position by SEM and AFM • Topography and Element analysis

• Nanometer scale analysis before SEM sample contamination

• Correlated microscopy without air exposure

• Easy to operate • No AFM laser alignment due to self-sensing cantilever

AFSEM™

The flexible AFSEM™ approach allows SEM integration of nanoindentors and AFM for in-situ experiments

Flexible microscope integration

Premounted microfabricated cantilevers

Specifications

Scan head type Tip scanner

Scan range (XYZ) 35 × 35 × 5 µm

Scanner resolution 24-bit

Closed loop scanning XY

Sample size 150 mm (SEM-dependent)

Motorized approach 25 mm (at tip position)

Positioning stage (XY) ±4 mm

Scan head weight 500 g

Scan head dimensions 44 × 110 × 77 mm

HV compatibility <1 × 10–6 mbar

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AFM modes supported by AFSEM™

• Static Force

• Dynamic Force

• Phase Contrast

• Conductive AFM

• Force spectroscopy

• Lithography

Some modes may require additional hardware and/or controller options

The complimentary capabilities of AFM and SEM allow for unique sample characterization possibilities. AFSEM™ lets you image your sample with high resolution, create true 3D topography representations and accurately measure heights, distances and even material properties, all while maintaining the large SEM field of view to position your AFSEM™ cantilever exactly where you want it.

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2Nanosurf and the Nanosurf Logo are trademarks of Nanosurf AG Copyright © 2016 Nanosurf AG, Switzerland — BT06411-01


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