zyvex microassembly capability micro-interferometer 7 july 2005 matt ellis senior scientist james...
TRANSCRIPT
Zyvex Microassembly CapabilityMicro-interferometer
7 July 2005
Matt EllisSenior ScientistJames WyldeApplications Engineer
Outline
Zyvex Corporate Overview
Micro Interferometer Concept
Current Micro Interferometer Demonstrator
Backup Information:
Micro Assembly Capabilities
Micro Assembled Device Reliability
Advantages to Zyvex Microassembled Approach
Zyvex Corporate Overview
• Privately held company founded in 1997
• Located in Richardson, Texas (near Dallas)
• 10 Products• 5 active government grants• Aggressive IP strategy - 18 issued
patents, 46 in process• Headcount: 52 and increasing
— 15 Ph.D.s, 7 M.S.— 33 Engineers, scientists,
technical management• 44,000 sq. ft. facility• Equipment: SEMs (with nano-
manipulators), TEM, AFM, SPM, UHV STM, MEMS motion analyzer, MEMS probing station
Corporate Overview
• Nanomaterials— CNT functionalization— CNT processing
• Microassembly— Assembly of microcomponents (MEMS-based) for integrated microsystems
• Nanomanipulators (S100, F100, A100, L100)— Characterization and manipulation of nanostructures in SEM, FIB, optical
microscopes
Corporate Overview
Assembly Program Overview
NIST-ATP, Five-year (Oct 2001-Dec2006), $25M research award
Title: Assemblers for Nanotechnology Applications and Manufacturing: Enabling the Nanotechnology Era
Zyvex and partners will develop low-cost, computer controlled, microscale assemblers that operate in parallel to assemble three-dimensional, microscale components.
Team consists of Honeywell as our Joint Venture Partner; University of Texas at Dallas, and University of Virginia as sub-contractors.
Example - Micro-assembled Device
Micro Assembled Interferometer
• Small size (1 cm3) self contained micro assembled interferometer that can be used for sub micron positioning (2.5 nm) displacement sensing over ~ 10 mm travel
Design Concept
• Self-contained Unit— Laser, detector, and optics integrated with optics using Zyvex micro-
assembly techniques— Integrated signal conditioning— Small size (integrated unit ~1cm3) / low weight
• Versatility— Small sizes means device can be mounted unobtrusively— No allowance needed for optical cabling, external laser, large control
box, etc— Device can be mounted on moving elements in vibration environment,
reducing need for vibration consideration or large air tables
• Cost target— $3000/axis in development quantities— $2000/axis for production volumes
– With automated assembly and test
Key Features / Advantages
Target Markets / Applications
Key Feature Aerospace Semi-conductor Manufacturing and Automation
Low Weight Space flight (antenna, etc)
Vibration Environments
Low Cost Wafer Dicing Saws Diamond lathes and turning tools
Small Size Antenna positioning Metrology Tools
Optical alignment / lithography tools
Triangulation Detectors Linear displacement
Roadmap
Milestone Date Range / Resolution
Package Comments
Mar 2005 15 mm / 500 nm Breadboard Homodyne micro-assembled optics technology demonstrator
Apr 2005 15 mm / 5 nm “Big Box” Homodyne, demonstrate integrated packaging and E/O
Jul 2005 15 mm / 2.5 nm Butterfly or DIP style
Demonstrate 2xPD or heterodyne architecture, integrated micro-controller
Sep 2005 15 mm / 2.5 nm Custom “Cube” Alpha Release
Fall 2005 Trials and Demonstrations with advance customers
Feedback on specifications, performance, application
• Micro interferometer configuration— Homodyne detection
– Three photodetectors- One for laser diode intensity- Two for quadrature detection
— Signal conditioning in package
System overview
Optics and Electronics
Ceramic PCB with interconnect and signal conditioning electronics
Micro optical bench with detectors, optics, and light source
Micro optical bench
Photodetectors
Micro optical bench
Beam splitters
Laser diode
Fixed mirror
Interferometer Optics
• Micro-assembly of base plate and optics
Test Platform
Zyvex SiOB
External LD
Machined test bench
Initial system tests
• Initial system tests— Machined test bench with
microassembled Si components— Tested with HeNe laser— Tested with 650 nm laser diode— Sufficient fringe contrast available for
counting fringes over 10 mm of travel
Package
Zyvex Can Provide
SiOB / optics
E/O
Micro controller
Optical I/O
Conditioned Signal
Supply
Need Partnership For:
• Technical advice and feedback
• Market acceptance and penetration / application expertise
• Support infrastructure
• Human interface
Thank You
• Feedback
• Questions
• Comments
• Next Steps