zdot™opticalprofiler optical profiler multi‐mode optics · 2018-10-25 · optical profiler yppy...
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ZDot™ Optical Profiler
Zeta3D™ Measurement System
Zeta’s unique and patented ZDot™ technology is idealthat are transparent and multi‐layer, have low reflectivvariations. ZDot has also demonstrated unmatched peprovides the most efficient light path possible in a 3Dpossible with white light interferometers or laser confo
Powered by this exceptional capability, the Zeta‐300 p
ZDot Optical Profiler
y p p y pform factor is an ideal solution for all types of research
Multi‐Mode OpticsThe Zeta‐300 is available with several advanced techniques:
• ZDotTM innovative 3D imaging is standard on all our optiZDot™ technology with our unique transmissive and darkillumination schemes as well as a variety of objectives allohandle the most ‘difficult’ of surfaces.
• ZIC Zeta’s enhanced differential interference contrast imnanometer level surface roughness
• ZSI Zeta Shearing Interferometer provides Angstrom leveresolution independent of the objective used
• ZX5, ZX100 vertical scanning interferometry for nanom, g yover large field of view
• ZFT reflectometry based Zeta Film Thickness measurem
Microfluidic Device (mm)Film Contamination (Å)
Solar Cell (µm)VCSEL (µm)
lly suited for measuring difficult surfaces, including those vity, low contrast, high roughness or large height erformance on high aspect ratio holes and trenches. ZDot D profiler, enabling accurate z‐height metrology not ocal microscopes.
latform with its built‐in vibration isolation and compact ph and production applications.
cal profilers. The k field ows the tool to
maging for
el vertical
eter heights g
ment
Measurement Channels and Sensitivity
© Copyright 2015 Zeta Instruments Inc., All rights reserved
MEMS Device (µm) Micro Gear (mm) IC Wafer Surface (nm)
20 i i d i h SI20nm pit imaged with ZSI
Solar Cell Textur
HDD Slider
Technical Specifications
Patterned Sapphire(PSS)
Dimensions (inches) Operating SpecificationsMicroscope (with Computer): Voltage: 100 ‐ 230 VAC32 x 37 x 61 Current: 4AMonitor: 22 x 5 x 16 Op. Temp.: 18‐30° C, non‐Total Weight: 360lbs/164 kg condensing, ±1° C per hour
Optical Specifications
5x 10x 20x 50x 100x
N.A. 0.15 0.30 0.45 0.80 0.90
FOV (µm)1 1894 x 1420 944 x 708 468 x 351 189 x 142 93 x 70
FOV (µm)2 4697 x 3522 2327 x 1745 1169 x 877 466 x 349 234 x 17
1 1/3” CCD Camera with 0.5x Coupling Lens2 2/3” CCD Camera with 0.35x Coupling Lens3 Static repeatability based on VLSI 0.94 μm step‐height standard, 100x/0.9NA objective, piezo stage, and standard ZDot™ imaging mode
ZETA Instruments 2528 Qume Drive Suite 12 San Jose CA 95131 Tel +1.408.573.7285 Fax +1.408.573.7627
www.zeta‐inst.com
System Information
Application Specific PackagesThe Zeta‐300 can be configured with specific optics,
h k ll d l fstages, chucks, illumination and analysis software to optimize the performance for a specific application. These packages are ideal for production environment where easy and reliable data collection is important. Here are a couple of examples:
PSS Metrology & Defect analysisHeight, Diameter & Pitch for PSSPhoto‐resist or post‐etch PSS bumps
rePhoto resist or post etch PSS bumpsDefect Classification and AOI2”, 4” & 6” wafer vacuum chucks
Micro‐fluidics and MEMSTransparent multi surface profilingDeep trench & high aspect ratio capabilityProgrammable recipes for automated scans
Flexible Hardware OptionsFlexible Hardware OptionsDark Field or Transmissive IlluminationDiamond Scribe6‐objective Auto‐TurretDiamond Wire measurementWafer or Disk Chamfer measurement Long Working Distance, Refractive Index Corrected or Liquid Immersion objectivesq j… and many more …
Performance Configuration3D Acquisition: ~ 1 sec/site typical (ZIC)
~ 10 sec/site typical (ZSI) ~ 30 sec/site typical (ZDot)
Pixel (XY) Res: 0.09 μm with 0.5x coupler and 100xMin Z‐Step: 2 nm with available piezo stage
13 nm with standard Z driveZ‐Resolution: 0.1Å with ZSI option
0
5
13 nm with standard ZDot™Repeatability3: ±15 nm (1σ) 3 (or ±1%)
System FeaturesCamera options: 640x480, 1024x768, 1280x960,
1920x1440Magnification: 35,000x combined optical & digitalIllumination: Dual Ultra‐Bright White LEDsMotorized Stage: Up to 200mm x 200mm XY travel
Objective specifications are nominal values for reference only. Actual features included will depend on final configuration.
Specifications subject to change without notice.‐‐‐‐.
Motorized Stage: Up to 200mm x 200mm XY travelZ Travel: 40mm Standard (100mm optional)