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MF Type EUC0127500 E37 Ver. 5.00 User’s Manual YAMAHA LINEAR MOTOR ROBOTS PHASER series

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Ver. 1.09

MF Type

EUC0127500

E37Ver. 5.00

User’s Manual

YAMAHA LINEAR MOTOR ROBOTS PHASER series

i

General C

ontents

General Contents

Introduction

Chapter 1 Using the Robot Safely

1-1 Safety information 1-1

1-2 Essential precautions 1-3

1-3 Industrial robot operating and maintenance personnel 1-9

1-4 Robot safety functions 1-10

1-5 Safety measures for the system 1-11

1-6 Trial operation 1-11

1-7 Work within the safety enclosure 1-12

1-8 Automatic operation 1-13

1-9 Warranty 1-14

Chapter 2 Product Overview

2-1 Checking the product 2-1

2-2 Robot part names 2-2

2-3 Robot internal structure 2-3

Chapter 3 Installation and connections

3-1 Carrying the robot 3-1

3-2 Robot installation conditions 3-23-2-1 Installation environments 3-2

3-2-2 Installation base 3-3

3-3 Installing the robot 3-5

3-4 Installing an external leakage breaker and circuit protector 3-7

3-5 Protective bonding 3-8

3-6 Connecting the robot to the controller 3-9

General C

ontents

ii iii

3-7 Precautions during user wiring and air tube installation 3-12

Chapter 4 Robot operation

4-1 Notes on robot operation 4-14-1-1 Magnetic pole estimation action 4-1

4-1-2 Absolute search (semi-absolute specification) 4-1

4-1-3 Return to origin (incremental specification) 4-2

4-2 Setting operating conditions 4-44-2-1 Process flow for setting operating conditions 4-4

4-2-2 Duty monitor 4-5

4-2-3 Acceleration setting 4-6

4-3 Pulse train control (SRCP, SRCP30) 4-84-3-1 Acceleration/deceleration and position proportional gain 4-8

4-3-2 Setting the maximum speed 4-10

Chapter 5 Periodic inspection and maintenance

5-1 Before beginning work 5-1

5-2 Periodic inspection 5-45-2-1 Daily inspection 5-4

5-2-2 Three-month inspection 5-5

5-2-3 Six-month inspection 5-6

5-2-4 Three-year inspection 5-6

5-2-5 Greasing to the linear guides 5-7

5-3 Replacing the shutter 5-10

5-4 Replacing the shutter roller 5-12

5-5 Maintenance parts 5-15

Chapter 6 Troubleshooting

6-1 If you suspect trouble 6-1

6-2 Feedback error 6-1

6-3 Magnetic pole detection error 6-3

6-4 Overload 6-4

6-5 Position deviation error 6-5

ii iii

General C

ontents

Chapter 7 Specifications

7-1 Main unit 7-17-1-1 MF7 7-1

7-1-2 MF15 7-8

7-1-3 MF20 7-14

7-1-4 MF30 7-20

7-1-5 MF50 7-26

7-1-6 MF75 7-30

7-1-7 MF100 7-34

7-2 Robot connector (I/O signal connector) 7-38

7-3 Robot connector (motor connector) 7-38

7-4 Robot cable (I/O signal wires) 7-39

7-5 Robot cable (motor wires) 7-39

iv

MEMO

Introduction

IntroductionThe YAMAHA single-axis robots MF type is an industrial robot that uses the semi-absolute

positioning method as standard and has improved ease of use, resistance to environmental

conditions, and maintenance work. A wide varaiety of product lineup allows you to select

the desired robot model that best matches your application.

This user's manual describes the safety measures, handling, adjustment and maintenance

of the MF type robots for correct, safe and effective use.

Be sure to read this manual carefully before installing the MF type robots. Even after you

have read this manual, keep it in a safe and convenient place for future reference.

• Thisuser'smanualshouldbeusedwiththerobotandconsideredanintegralpartof

it. When the robot is moved, transferred or sold, send this manual to the new user

along with the robot. Be sure to explain to the new user the need to read through this

manual.

• Specificationsofrobotmodelsotherthanstandardmodelsmaybeomittedinthis

manual if they are common to those of standard models. In this case, refer to the

specifications of standard models.

• Fordetailsonspecificoperationoftherobot,refertotheseparateuser’smanualfor

the robot controller being used.

NOTES

The contents of this manual are subject to change without prior notice.

While every effort has been made to ensure the contents of this manual are

correct, please contact us if you find any part of this manual to be unclear,

confusing or inaccurate.YAMAHA MOTOR CO., LTD. IM Operations

MEMO

Chapter 1 Using the Robot Safely

Contents

1-1 Safety information 1-1

1-2 Essential precautions 1-3

1-3 Industrial robot operating and maintenance personnel 1-9

1-4 Robot safety functions 1-10

1-5 Safety measures for the system 1-11

1-6 Trial operation 1-11

1-7 Work within the safety enclosure 1-12

1-8 Automatic operation 1-13

1-9 Warranty 1-14

1-1

1

Using the R

obot Safely

1-1 Safety information

1-1

1-1 Safety informationIndustrial robots are highly programmable, mechanical devices that provide a large degree of freedom when performing various manipulative tasks. To ensure correct and safe use of YAMAHA industrial robots, carefully read this manual and make yourself well acquainted withthecontents.FOLLOWTHEWARNINGS,CAUTIONSANDINSTRUCTIONSincludedin this manual. Failure to take necessary safety measures or mishandling due to not following the instructions in this manual may result in trouble or damage to the robot and injury to personnel (robot operator or service personnel) including fatal accidents.

Warning symbols and signal words used in this manual are classified as explained below. Make sure that you fully understand the meaning of each symbol and comply with the instructions.

wDANGER FAIlURE TO FOllOW DANGER INSTRUCTIONS WIll RESUlT IN SEvERE INjURy OR DEATh TO ThE ROBOT OPERATOR, BySTANDERS OR PERSONS INSPECTING OR REPAIRING ThE ROBOT.

wWARNING FAIlURE TO FOllOW WARNING INSTRUCTIONS COUlD RESUlT IN SEvERE INjURy OR DEATh TO ThE ROBOT OPERATOR, BySTANDERS OR PERSONS INSPECTING OR REPAIRING ThE ROBOT.

cCAUTION Failure to follow CAUTION instructions may result in injury to the robot operator, bystanders or persons inspecting or repairing the robot, or damage to the robot and/or robot controller.

nNOTE

Explains the key point in the operation in a simple and clear manner.

Reference

Gives useful information related to the robot operation.

Using the R

obot Safely

1

1-1 Safety information

1-2 1-3

Refer to the user's manual by any of the following methods to operate or adjust the robot

safely and correctly.

1. Operate or adjust the robot while referring to the printed version of the user's

manual (available for an additional fee).

2.OperateoradjusttherobotwhileviewingtheCD-ROMversionoftheuser's

manual on your computer screen.

3. Operate or adjust the robot while referring to a printout of the necessary pages

fromtheCD-ROMversionoftheuser'smanual.

It is not possible to list all safety items in detail within the limited space of

this manual. So it is essential that the user have a full knowledge of basic

safety rules and also that the operator makes correct judgments on safety

procedures during operation.

For specific safety information and standards, refer to the applicable local

regulations and comply with the instructions. This manual and warning labels

supplied with or attached to the robot are written in English. Unless the

robot operators or service personnel understand English, do not permit them

to handle the robot.

* CautionsregardingtheofficiallanguageofEUcountries

ForequipmentthatwillbeinstalledinEUcountries,thelanguageusedforthe

user'smanuals,CEdeclarations,andoperationscreencharactersisEnglishonly.

Warning labels only have pictograms or else include warning messages in English.

In the latter case, Japanese messages might be added.

1-2

1

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1-2 Essential precautions

1-3

1-2 Essential precautionsParticularly important cautions for handling or operating the robot are described below. In

addition, precautions during installation, operation, inspection and maintenance are also

provided in each chapter. Be sure to comply with these instructions to ensure safe use of

the robot.

(1) Observe the following cautions during automatic operation.

•Installasafeguard(protectiveenclosure)tokeepanypersonfromenteringwithin

the movement range of the robot and suffering injury due to being struck by

moving parts.

•Installasafetyinterlockthattriggersemergencystopwhenthedoororpanelis

opened.

•Installsafeguardssothatnoonecanenterinsideexceptfromdoorsorpanels

equipped with safety interlocks.

•Warninglabels1aresuppliedwiththerobotandshouldbeaffixedtoconspicuous

spots on doors or panels equipped with safety interlocks.

wDANGER SERIOUS INjURy OR DEATh WIll RESUlT FROM IMPACT WITh MOvING ROBOT. • Keepoutsideofguardduringoperation. • LocKoutpowerbeforeapproachingrobot.

Warning label 1

DANGERSerious injury or death will result from impact with moving robot.• Keep outside of guard

during operation.• Lock out power before

approaching robot.

(2) Use caution to prevent hands or fingers from being pinched or crushed.

Warninglabel2isaffixedtotherobot.Usecautiontopreventhandsorfingersfrom

being pinched or crushed by the moving parts when carrying the robot or during

teaching.

(The labels for the MF7 are supplied with the robot.)

wWARNING MOvING PARTS CAN PINCh OR CRUSh. Keephandsawayfromrobotarms.

Using the R

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1

1-2 Essential precautions

1-4 1-5

Warning label 2

Moving parts can pinch or crush.Keep hands away from robot arms.

WARNING

(3) Follow the instructions on warning labels and in this manual.

•Besuretoreadthewarninglabelsandthismanualcarefullyandmakesureyou

thoroughly understand their contents before attempting installation and operation

of the robot.

•Beforestartingrobotoperation,besuretorereadtheproceduresandcautions

relatingtoyourworkaswellasdescriptionsinthischapter(Chapter1,"Usingthe

RobotSafely").

•Neverinstall,adjust,inspectorservicetherobotinanymannerthatdoesnot

comply with the instructions in this manual.

•Thewarninglabels3aresuppliedwiththerobotandshouldbeaffixedtotherobot

or conspicuous spots near the robot.

wWARNING IMPROPER INSTAllATION OR OPERATION CAN RESUlT IN SERIOUS INjURy OR DEATh. READ ThE USER'S MANUAl AND All WARNING lABElS BEFORE INSTAllATION AND OPERATION.

Warning label 3

Improper Installation or operation can result in serious injury or death. Read user's(owner's) manual and all warning labels before operation.

WARNING

(4) Be aware of strong magnets inside the robot.

wWARNING POWERFUl MAGNETS ARE INSTAllED INSIDE ThE ROBOT. DO NOT DISASSEMBlE ThE ROBOT SINCE ThIS MAy CAUSE INjURy. DEvICES ThAT MIGhT maLfunctionduetomagneticfieLdsmustbeKeptawayfromthisROBOT.

1-4

1

Using the R

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1-2 Essential precautions

1-5

(5) Do not remove, alter or stain the warning labels.

wWARNING IF WARNING lABElS ARE REMOvED OR DIFFICUlT TO SEE, ThEN ESSENTIAl precautionsmightnotbetaKen,resuLtinginaccidents. • donotremoVe,aLterorstainthewarningLabeLsontherobot. • donotaLLowthewarningLabeLstobehiddenbydeVicesinstaLLed ONTO ThE ROBOT By ThE USER. • proVideproperLightingsothatthesymboLsandinstructionson ThE WARNING lABElS CAN BE ClEARly SEEN EvEN FROM OUTSIDE ThE SAFETy ENClOSURE.

(6) Do not use the robot in environments containing inflammable gas, etc.

wWARNING • thisrobotwasnotdesignedforoperationinenVironmentswhere INFlAMMABlE OR EXPlOSIvE SUBSTANCES ARE PRESENT. • donotusetherobotinenVironmentscontaininginfLammabLe GAS, DUST OR lIQUIDS. EXPlOSIONS OR FIRE MIGhT OThERWISE RESUlT.

(7) Do not use the robot in locations possibly subject to electromagnetic interference, etc.

wWARNING DO NOT USE ThE ROBOT IN lOCATIONS SUBjECT TO ElECTROMAGNETIC INTERFERENCE, ElECTROSTATIC DISChARGE OR RADIO FREQUENCy INTERFERENCE. MAlFUNCTIONS MIGhT OThERWISE OCCUR.

(8) Provide safety measures for end effector (gripper, etc.).

wWARNING • endeffectorsmustbedesignedandmanufacturedsothatthey createnohaZards(foreXampLe,aworKpiecethatcomesLoose) EvEN IF POWER (ElECTRICITy, AIR PRESSURE, ETC.) IS ShUT OFF OR POWER FlUCTUATIONS OCCUR. • ifthereisapossibLedangerthattheobJectgrippedbytheend EFFECTOR MAy Fly OFF OR DROP, ThEN PROvIDE APPROPRIATE SAFETy protectiontaKingintoaccounttheobJectsiZe,weight, TEMPERATURE AND ChEMICAl PROPERTIES.

Using the R

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1

1-2 Essential precautions

1-6 1-7

(9) Be careful not to touch the motor and peripheral parts when hot.

wWARNING The motor and speed reduction gear casing are extremely hot after automatic operation, so burns may occur if these are touched. Before handling these parts during inspection or servicing, turn off the controller, wait for a while and check that the parts have cooled.

(10) Take the following safety precautions during inspection of controller.

wWARNING • whenyouneedtotouchtheterminaLsorconnectorsonthe OUTSIDE OF ThE CONTROllER DURING INSPECTION, AlWAyS FIRST TURN OFF ThE CONTROllER POWER SWITCh AND AlSO ThE POWER SOURCE IN ORDER topreVentpossibLeeLectricaLshocK. • donotdisassembLethecontroLLer.neVertouchanyinternaL partsofthecontroLLer.doingsomightcausebreaKdowns, MAlFUNCTIONS, INjURy OR FIRE. IF ANy PARTS OF ThE CONTROllER NEED TO BE REPlACED, FOllOW ThE SPECIFIED INSTRUCTIONS. • refertothecontroLLeruser'smanuaLforprecautionson hANDlING ThE CONTROllER.

(11) Consult us for corrective action when the robot is damaged or malfunctions occur.

wWARNING IF ANy PART OF ThE ROBOT IS DAMAGED OR ANy MAlFUNCTION OCCURS, CONTINUING ThE OPERATION MAy BE vERy DANGEROUS. PlEASE CONSUlT US FOR CORRECTIvE ACTION.

Damage or Trouble Possible Danger

Damage to machine harness or robot cable Electrical shock, malfunction of robot

Damage to exterior of robotFlying outwards of damaged parts during robot operation

Abnormal operation of robot (positioning error, excessive vibration, etc.)

Malfunction of robot

Z-axis (vertical axis) brake trouble Dropping of load

(12) Protective bonding

wWARNING BE SURE TO GROUND ThE ROBOT AND CONTROllER TO PREvENT ElECTRICAl shocK.

1-6

1

Using the R

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1-2 Essential precautions

1-7

(13) Be sure to make correct parameter settings.

cCAUTION The robot must be operated with correct tolerable moment of inertia and acceleration coefficients according to the manipulator tip mass and moment of inertia. If these are not correct, drive unit service life may end prematurely, and damage to robot parts or residual vibration during positioning may result.

(14) Follow the specified procedures when installing, adjusting or inspecting the robot.

wWARNING AlWAyS FOllOW ThE SPECIFIED PROCEDURES WhEN INSTAllING, ADjUSTING OR INSPECTING ThE ROBOT. NEvER ATTEMPT ANy PROCEDURE NOT DESCRIBED IN ThIS MANUAl.

(15) Do not attempt any repair, parts replacement and modification.

wWARNING DO NOT ATTEMPT ANy REPAIR, PARTS REPlACEMENT AND MODIFICATION UNlESS DESCRIBED IN ThIS MANUAl. theseworKsreQuiretechnicaLKnowLedgeandsKiLL,andmayaLsoinVoLVeworKhaZards.

(16) Do not use the robot in locations where strong magnetic sources are present.

wWARNING DO NOT USE ThE ROBOT NEAR A STRONG MAGNETIC SOURCE. ThE ROBOT mightotherwisebreaKdownormaLfunction.

(17) Precautions when disposing of the robot

When disposing of the robot, handle it as industrial waste.

wWARNING hANDlE ThE ROBOT CAREFUlly WhEN DISPOSING OF IT SINCE POWERFUl MAGNETS ARE INSTAllED INSIDE.

(18) Location for installing the controller and the programming box or Handy Terminal

The robot controller, programming box, and Handy Terminal should be installed at a

location that is outside the robot movement range yet where it is easy to operate and

view the robot performing tasks.

(19) Protect electrical wiring and hydraulic/pneumatic hoses as needed.

Install a cover or similar item to protect the electrical wring and hydraulic/pneumatic

hoses from possible damage.

Using the R

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1

1-2 Essential precautions

1-8 1-9

(20) Install an operation status light.

Install an operation status light (signal light tower, etc.) at an easy-to-see position so

the operator will know whether the robot is merely stopped or is in emergency-error

stop.

(21) Clean work tools, etc.

Work tools such as welding guns and paint nozzles which are mounted in the robot

arm will preferably be cleaned automatically.

(22) Provide adequate lighting.

Make sure to provide enough lighting to ensure safety during work.

(23) Prevent the gripped object from flying outwards.

If the object or workpiece gripped by the robot might fly outward or drop and create

a hazard to the operator, then protective equipment should be installed by taking the

size, weight, temperature and chemical properties of the object into account.

(24) Draw up "work instructions" and makes sure the operator learns them well.

Decideon"workinstructions"forthefollowingitemsincaseswherepersonnel

must work within the robot movement range to perform teaching, maintenance or

inspection.Makesuretheworkersknowthese"workinstructions"well.

(1) Robot operating procedures needed for tasks such as startup procedures and

handling switches

(2) Robot speeds used during tasks such as teaching

(3) Methods for workers to signal each other when two or more workers perform

tasks

(4) Stepsthattheworkershouldtakewhenaproblemoremergencyoccurs

(5) Stepstotakeaftertherobothascometoastopwhentheemergencystopdevice

was triggered, including checks for cancelling the problem or error state and

safety checks in order to restart the robot.

(6) In cases other than above, the following actions should be taken as needed to

prevent hazardous situations due to sudden or unexpected robot operation or

faulty robot operation, as listed below.

1.Showadisplayontheoperatorpanel

2. Ensure the safety of workers performing tasks within the robot movement range

3.Clearlyspecifypositionandpostureduringwork

Position and posture where worker can constantly check robot movements and

immediately move to avoid trouble if an error/problem occurs

4. Install noise prevention measures

5.Usemethodsforsignalingoperatorsofrelatedequipment

6.Usemethodstodecidethatanerrorhasoccurredandidentifythetypeoferror

1-8

1

Using the R

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1-3 Industrial robot operating and maintenance personnel

1-9

Implementthe"workinstructions"accordingtothetypeofrobot,installation

location, and type of work task.

Whendrawingupthe"workinstructions",makeanefforttoincludeopinionsfrom

the workers involved, equipment manufacture's technicians, and workplace safety

consultants, etc.

(25) Display a sign on operation panel during work

Displayaneasytounderstandsignormessageontheprogrammingbox,Handy

Terminal, and operation panel during the job task, to prevent anyone other than the

operators for that job task from mistakenly operating a start or selector switch. If

needed, take other measures such as locking the cover on the operation panel.

(26) Make daily and periodic inspections.

(1) Always make sure that daily and periodic inspections are performed, and make

a pre-work check to ensure there are no problems with the robot or related

equipment. If a problem or abnormality is found, then promptly repair it or take

other measures as necessary.

(2) When you make periodic inspections or repairs, make a record and store it for at

least 3 years.

1-3 Industrial robot operating and maintenance personnelOperators or persons who handle the robot such as for teaching, programming, movement

check, inspection, adjustment, and repair must receive appropriate training and also have

the skills needed to perform the job correctly and safely. They must read the user's manual

carefully to understand its contents before attempting the robot operation.

Tasks related to industrial robots (teaching, programming, movement check, inspection,

adjustment, repair, etc.) must be performed by qualified persons who meet requirements

established by local regulations and safety standards for industrial robots.

Using the R

obot Safely

1

1-4 Robot safety functions

1-10 1-11

1-4 Robot safety functions

(1) Overload detection

This function detects an overload applied to the motor and shuts off the servo power.

(2) Overheat detection

This detects an abnormal temperature rise in the controller driver and shuts off the

servo power.

If an overload or overheat error occurs, take the following measures.

1. Reduce the speed.

2.Inserta"stopperiod"intheoperation.

3. Reduce the acceleration coefficient.

(3) Soft limits

Softlimitscanbesetoneachaxistolimittheworkingenvelopeinmanualoperation

after return-to-origin and during automatic operation.

Note: The working envelope is the area limited by soft limits.

wWARNING SOFT lIMITS MUST BE SET WIThIN ThE MOvEMENT RANGE (MEChANICAl STOPPER). IF ThE SOFT lIMIT IS SET OUTSIDE ThE MOvEMENT RANGE, ThE ROBOT AXIS MAy COllIDE WITh ThE MEChANICAl STOPPER AT hIGh SPEED, CAUSING ThE OBjECT GRIPPED By ThE END EFFECTOR TO Fly OR DROP AND ThE ROBOT TO MAlFUNCTION.

(4) Mechanical stoppers

If the servo power is shut off during robot operation by emergency stop or safety

functions, the mechanical stoppers prevent the axis from exceeding the movement

range.

Note: The movement range is the area limited by mechanical stoppers.

wWARNING ROBOT MOvEMENT WIll NOT STOP IMMEDIATEly AFTER ThE SERvO POWER SUPPly IS ShUT OFF By EMERGENCy STOP OR OThER SAFETy FUNCTIONS.

wWARNING WhEN ThE SlIDER (CARRIAGE) COllIDES WITh ThE MEChANICAl STOPPER, thismightdamagethepartsoftherobot.afteracoLLision,checKThAT NO PARTS OF ThE ROBOT ARE DAMAGED.

1-10

1

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1-5 Safety measures for the system

1-11

1-5 Safety measures for the systemSincetherobotiscommonlyusedinconjunctionwithanautomatedsystem,dangerous

situations are more likely to occur from the automated system than from the robot

itself. Accordingly, appropriate safety measures must be taken on the part of the system

manufacturer according to the individual system. The system manufacturer should provide

a proper instruction manual for safe, correct operation and servicing of the system.

1-6 Trial operationAfter making installations, adjustments, inspections, or maintenance or repairs to the

robot, make a trial run using the following procedures.

(1) If a safety enclosure has not yet been provided right after installation of the robot, rope off or chain off around the movement area of the manipulator in place of the safeguard, and observe the following points.

1.Usesturdy,stablepostswhichwillnotfallovereasily.

2. The rope or chain should be easily visible by everyone around the robot.

3. Place a sign to keep the operator or other personnel from entering the movement

range of the manipulator.

(2) Check the following points before turning on the controller.

1. Is the robot securely and correctly installed?

2. Are the electrical connections to the robot correct?

3. Are air tubes correctly and securely connected?

4. Is the robot correctly connected to peripheral equipment?

5. Have safety measures (safety enclosure, etc.) been taken?

6.Doestheinstallationenvironmentmeetthespecifiedstandards.

(3) After the controller is turned on, check the following points from outside the safety enclosure.

1.Doestherobotstartandstopasintended?Cantheoperationmodebeselected

correctly?

2.Doeseachaxismoveasintendedwithinthesoftlimits?

3.Doestheendeffectormoveasintended?

4. Are the signal transmissions to the end effector and peripheral equipment correct?

5.Doesemergencystopwork?

6. Are the teaching and playback functions normal?

7. Are the safety enclosure and interlock working as intended?

8.Doestherobotmovecorrectlyduringautomaticoperation?

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1

1-7 Work within the safety enclosure

1-12 1-13

Reference

When starting the PHASER series robots, the slider always moves a few

millimeters right after the servo is turned on and emits a high pitched noise.

This is just the routine pre-action for estimating the magnetic pole and is not

a problem.

1-7 Work within the safety enclosure

(1) Work within the safety enclosure

When work is required inside the safety enclosure, always turn off the controller and

place a sign indicating that the robot is being adjusted or serviced in order to keep

any other person from touching the controller switch or operation panel, except for

the soft limit setting and teaching. For soft limit setting, follow the suitable cautions,

notes, etc. in this manual. For teaching, follow the procedure shown below.

(2) Teaching

When performing teaching within the safety enclosure, comply with the instructions

listed below.

1)Checkorperformthefollowingpointsfromoutsidethesafetyenclosure.

1. Make sure that no hazards are present within the safety enclosure by a visual

check.

2.CheckthattheprogrammingboxorHandyTerminalisoperatingnormally.

3.Checkthatnofailuresarefoundintherobot.

4.Checkthatemergencystopworkscorrectly.

5.Selectteachingmodeandprohibitautomaticoperation.

2) Never enter the movement range of the manipulator while within the safety

enclosure.

1-12

1

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1-8 Automatic operation

1-13

1-8 Automatic operationAutomaticoperationdescribedhereincludesalloperationsinAUTOmode.

(1) Check the following before starting automatic operation.

1. No one is within the safety enclosure.

2. The programming box or Handy Terminal, tools, etc. are in their prescribed

positions.

3. The alarm or error lamps on the robot and peripheral equipment do not flash.

4. The safety enclosure is securely installed with safety interlocks actuated.

(2) Observe the following during automatic operation or in cases where an error occurs.

1) After automatic operation has started, check the operation status and signal light to

ensure that the robot is in automatic operation.

2) Never enter the safety enclosure during automatic operation.

3) If an error occurs in the robot or peripheral equipment, observe the following

procedure before entering the safety enclosure.

1. Press the emergency stop button to set the robot to emergency stop.

2. Place a sign on the start switch, indicating that the robot is being inspected in

order to keep any other person from touching the start switch and restarting the

robot.

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1

1-9 Warranty

1-14

1-9 WarrantyFor information on the warranty period and terms, please contact our distributor where you purchased the product.

n This warranty does not cover any failure caused by:

1. Installation, wiring, connection to other control devices, operating methods, inspection or maintenance that does not comply with industry standards or instructions specified in the YAMAHA manual;

2.UsagethatexceededthespecificationsorstandardperformanceshownintheYAMAHA manual;

3. Product usage other than intended by YAMAHA;

4.Storage,operatingconditionsandutilitiesthatareoutsidetherangespecifiedinthe manual;

5.Damageduetoimpropershippingorshippingmethods;

6. Accident or collision damage;

7. Installation of other than genuine YAMAHA parts and/or accessories;

8. Modification to original parts or modifications not conforming to standard specifications designated by YAMAHA, including customizing performed by YAMAHA in compliance with distributor or customer requests;

9. Pollution, salt damage, condensation;

10. Fires or natural disasters such as earthquakes, tsunamis, lightning strikes, wind and flood damage, etc;

11. Breakdown due to causes other than the above that are not the fault or responsibility of YAMAHA;

n The following cases are not covered under the warranty:

1. Products whose serial number or production date (month & year) cannot be verified.

2.Changesinsoftwareorinternaldatasuchasprogramsorpointsthatwerecreatedor changed by the customer.

3. Products whose trouble cannot be reproduced or identified by YAMAHA.

4. Products utilized, for example, in radiological equipment, biological test equipment applications or for other purposes whose warranty repairs are judged as hazardous by YAMAHA.

THEWARRANTYSTATEDHEREINPROVIDEDBYYAMAHAONLYCOVERSDEFECTS

INPRODUCTSANDPARTSSOLDBYYAMAHATODISTRIBUTORSUNDERTHIS

AGREEMENT.ANYANDALLOTHERWARRANTIESORLIABILITIES,EXPRESSOR

IMPLIED,INCLUDINGBUTNOTLIMITEDTOANYIMPLIEDWARRANTIESOF

MERCHANTABILITYORFITNESSFORAPARTICULARPURPOSEAREHEREBYEXPRESSLY

DISCLAIMEDBYYAMAHA.MOREOVER,YAMAHASHALLNOTBEHELDRESPONSIBLE

FORCONSEQUENTORINDIRECTDAMAGESINANYMANNERRELATINGTOTHE

PRODUCT.Ver.1.00_201205

Chapter 2 Product Overview

Contents

2-1 Checking the product 2-1

2-2 Robot part names 2-2

2-3 Robot internal structure 2-3

2-1

2

Product Overview

2-1 Checking the product

2-1

2-1 Checking the productAfter unpacking, make sure that all components and accessories are included (as specified

in your order). Also check the product for any damage on the exterior which might have

occurred during shipping. If there are any missing parts or damage due to shipping, please

notify your YAMAHA sales office or representative immediately.

Product name Qty

Single-axis robot 1

Controller 1

Robot cable 1

I/O connector 1

Warning label 1 (DANGER label)

English and Japanese, one each

Stick the label at easy-to-see position of system.

Warning label 3 (WARNING label)

English and Japanese, one each

Stick the label at easy-to-see position of system.

wWARNING • aLwaysusetwoormorepeopLetotaKetherobotunitoutofthe pacKage.eachpersonshouLdgriptherobotunitnearoneend FROM ThE lOWER SIDE. CARRy WITh ThE ROBOT FACING UPWARD (SlIDER SIDE UPWARDS). • whenunpacKing,carefuLLyhoLdtherobotnottodropit.ifthe ROBOT FAllS, SERIOUS INjURy MAy OCCUR OR ThE ROBOT MAy BE DAMAGED.

Product Overview

2

2-2 Robot part names

2-2 2-3

2-2 Robot part names

Robot part names

External components

End coverSlider cover

Shutter

End cover

Slider

Cable carrierRobot cable (motor wires)

Robot cable (I/O signal wires)

Ground wire

Side cover

<MF50>

Reference

The direction of the cables coming out of the cable carrier depends on the

specifications you ordered. The above illustration shows an example of RH

(right and horizontal) type.

2-2

2

Product Overview

2-3 Robot internal structure

2-3

2-3 Robot internal structureTheYAMAHAlinearsingle-axisrobotPHASERseriesMFtypeisatrulyinnovativesingle-axis robot using a linear motor as its drive source. The internal robot structure and features are described here.

wWARNING ThE FOllOWING DRAWINGS AND DESCRIPTIONS ARE GIvEN TO ASSIST IN UNDERSTANDING AND SAFEly USING ThE PhASER SERIES ROBOTS. DO NOT ATTEMPT TO DISASSEMBlE ThE ROBOT. POWERFUl PERMANENT MAGNETS ARE FIXED By ADhESIvE TO ThE MAGNETIC PlATE SO DISASSEMBly WIThOUT PROPER PREPARATION IS hAzARDOUS. AlSO, ThE REQUIRED PERFORMANCE MAy NOT BE OBTAINED.

Magnet plate

Linear motion guide

PHASER series internal layout

Moving coil (internal)

Magnetic scale

Magnetic head

<MF50>

Magnet plateThe robot contains powerful permanent magnets laid out at equally spaced intervals. The magnetic field generated by these permanent magnets is utilized as propulsive power by the robot.

Moving coilThe slider contains an internal moving coil. Passing current through this coil changes the magnetic flux from the magnetic plate into a propulsive force. Passing current through the coil also generates heat but heat sink fins efficiently dissipate this heat.

100

180

210 88

99

Moving coil

Structure

Magnet Magnetic scale

<MF50>

Product Overview

2

2-3 Robot internal structure

2-4

Linear guideThe MF50 use a linear guide assembled with a ball retainer that efficiently eliminates

friction between adjacent balls. This achieves low noise, long service life and long

maintenance-free operation.

Magnetic scale and magnetic headThe magnetic scale utilizes YAMAHA's superb magnetic signal detection technology

developed in-house. The scale is made of a special alloy that retains a high-strength

magnetic field with virtually no weakening over time. Integrating it with a magnetic head

yields an astonishingly high resolution of one micrometer. Fully closed control directly

detects the table (slider) position for stable and highly precise positioning.

cCAUTION Do not bring a strong magnet close to the magnetic scale. A strong magnet may erase the information recorded on the scale and cause the robot to malfunction. A magnetic force of about 10mT (100 Gauss) does not cause any problem. As shown in the photos below, for example, bringing the magnetized side of a magnetic base close to the side of the robot may erase the information on the magnetic scale, so use caution.

Magnetized side of magnetic base Magnetized side of magnetic base

cCAUTION The magnetic flux slightly leaks from the robot surface. (Max. 10mT) When a device (sensor) that responds to the magnetism is installed, it may respond incorrectly. Install such device 100 mm or more apart from the robot, make the fine adjustment to eliminate incorrect response, or use a device designed for the strong magnetic field.

Magnetic flux leak rangeRobotRobot

Chapter 3 Installation and connections

Contents

3-1 Carrying the robot 3-1

3-2 Robot installation conditions 3-23-2-1 Installation environments 3-2

3-2-2 Installation base 3-3

3-3 Installing the robot 3-5

3-4 Installing an external leakage breaker and circuit protector 3-7

3-5 Protective bonding 3-8

3-6 Connecting the robot to the controller 3-9

3-7 Precautions during user wiring and air tube installation 3-12

3-1

3

Installation and connections

3-1 Carrying the robot

3-1

3-1 Carrying the robotAlways use 2 people to carry the robot unit. Each person should grip the robot unit near

oneendfromthelowersideasshownandcarrywiththeloadwellbalanced.Carrywith

the robot facing upward (slider side upwards).

wWARNING AlWAyS OBSERvE ThE FOllOWING PRECAUTIONS WhEN CARRyING ThE ROBOT. • remoVeanyandaLLobJectssuchashandsandgrippersattached TO ThE ROBOT SlIDER BEFORE MOvING ThE ROBOT. ThE SlIDER WIll lOSE BAlANCE IF MOvED WITh OBjECTS STIll ATTAChED AND CAUSE INjURIES. • KeeptherobotbaLancedanddon'tLetittiLtwhiLemoVingit.ifthe ROBOT TIlTS, ThE SlIDER MAy MOvE UNDER ITS OWN WEIGhT CAUSING SERIOUS INjURIES SUCh AS CRUShED FINGERS. • neVerattempttohoLdtherobotinanyofthefoLLowingmanners.

[Never try this when moving!]

• Do not carry by holding the slider.• Do not carry by holding the cable.• Do not carry by holding the cable carrier.• Do not carry by gripping the end cover.

Installation and connections

3

3-2 Robot installation conditions

3-2 3-3

3-2 Robot installation conditions

3-2-1 Installation environmentsBe sure to install the robot in the following environments.

Items Specifications

Allowable ambient temperature

0 to 40°C

Allowable ambient humidity 35 to 85% RH (no condensation)

Altitude 0 to 1000 meters above sea level

Ambient environments

Avoid installing near water, cutting water, oil, dust, metallic chips and organic solvent.

Avoid installation near corrosive gas and corrosive materials.

Avoid installation in atmosphere containing inflammable gas, dust or liquid.

Avoid installation near objects causing electromagnetic interference, electrostatic discharge or radio frequency interference.

Vibration Do not subject to impacts or vibrations.

Working spaceAllow sufficient space margin to perform jobs (teaching, inspection, repair, etc.)

For detailed information on how to install the robot controller, refer to the separate

"YAMAHARobotControllerUser'sManual".

wWARNING AvOID INSTAllING ThE ROBOT IN lOCATIONS WhERE ThE AMBIENT CONDITIONS MAy EXCEED ThE AllOWABlE TEMPERATURE OR hUMIDITy, OR IN ENvIRONMENTS WhERE EXCESSIvE MOISTURE, CORROSIvE GASES, METAllIC POWDER OR DUST ARE GENERATED. MAlFUNCTIONS, FAIlURES OR ShORT CIRCUITS MAy OThERWISE RESUlT.

wWARNING • thisrobotwasnotdesignedforoperationinenVironmentswhere INFlAMMABlE OR EXPlOSIvE SUBSTANCES ARE PRESENT. • donotusetherobotinenVironmentscontaininginfLammabLe GAS, DUST OR lIQUIDS. EXPlOSIONS OR FIRE COUlD OThERWISE RESUlT.

wWARNING AvOID USING ThE ROBOT IN lOCATIONS SUBjECT TO ElECTROMAGNETIC INTERFERENCE, ElECTROSTATIC DISChARGE OR RADIO FREQUENCy INTERFERENCE. MAlFUNCTIONS MAy OThERWISE OCCUR.

3-2

3

Installation and connections

3-2 Robot installation conditions

3-3

wWARNING DO NOT USE ThE ROBOT IN lOCATIONS SUBjECT TO EXCESSIvE vIBRATION. ROBOT INSTAllATION BOlTS MAy OThERWISE BECOME lOOSE CAUSING ThE ROBOT TO FAll OvER.

3-2-2 Installation baseTo mount the robot, use an installation base that satisfies the following conditions.

1) The installation base is subjected to a great deal of stress while the robot is in operation.

Prepare a sufficiently rigid and stable installation base, taking into account the robot

weight including the end effector (gripper) and workpiece.

wWARNING IF ThE INSTAllATION BASE IS NOT SUFFICIENTly RIGID AND STABlE, vIBRATION (RESONANCE) MAy OCCUR DURING OPERATION, CAUSING ADvERSE EFFECTS ontherobotworK.

2) The installation base surface must be machined within a flatness of ±0.05mm/500mm.

cCAUTION The robot positioning accuracy, acceleration and duty might not satisfy the required performance or the service life might be reduced if the installation surface precision is insufficient. In worst cases, the coil inside the robot might burn out.

Installation and connections

3

3-2 Robot installation conditions

3-4 3-5

3)Useaninstallationbaseofsufficientsizetomatchtherobotbodysothattherobotcan

be installed with the specified number of bolts. Avoid installing the robot with less than

the specified number of bolts or installing the robot closer to one end as shown at the

lower right.

Good example

Installation base

Bad example

Installation base

Robot installation example

wWARNING WhEN INSTAllING ThE ROBOT, AlWAyS USE All ThE INSTAllTION hOlES OR M8 TAPPED hOlES IN ThE BOTTOM OF ThE ROBOT FRAME. USING lESS ThAN ThE SPECIFIED NUMBER OF BOlTS TO INSTAll ThE ROBOT MAy CAUSE vIBRATION AND POOR POSITIONING ACCURACy. ThIS MAy AlSO RESUlT IN POSITIONING ERRORS AND REDUCED SERvICE lIFE IN ThE WORST CASES.

nNOTE

Positions of robot mounting holes differ according to the stroke length of

each robot. Refer to the outline dimension drawings shown in Chapter 7,

"Specifications".

3-4

3

Installation and connections

3-3 Installing the robot

3-5

3-3 Installing the robot

wWARNING • beforeinstaLLingtherobot,aLwaysmaKesurethattherobot CONTROllER IS NOT CONNECTED TO ThE ROBOT OR ThE POWER TO ThE CONTROllER IS OFF. SERIOUS ACCIDENTS MIGhT OCCUR IF ThE ROBOT STARTS TO OPERATE DURING INSTAllATION. • besuretousetheboLtsofthecorrectLengthandtightenthem SECUREly TO ThE CORRECT TORQUE. FAIlURE TO FOllOW ThIS INSTRUCTION MAy CAUSE ROBOT vIBRATIONS, POSITION ERRORS AND SERIOUS ACCIDENTS.

UsethefollowingmethodtoinstalltheMF7robot.1.DrillholesthroughtheinstallationbaseandsecuretherobottothebasewithM4

bolts from the bottom. (M4 tapped holes are already machined in the bottom of the robot frame.)

UsethefollowingmethodtoinstalltheMF15/MF20/MF30robot.1.DrillholesthroughtheinstallationbaseandsecuretherobottothebasewithM6

bolts from the bottom. (M6 tapped holes are already machined in the bottom of the robot frame.)

There are two methods for installing the MF50/MF75/MF100 robot.1.DrillandtapM8holesintotheinstallationbaseandsecuretherobottothebase

withM8boltsfromthetopoftherobotframe.(Usethemountingholesprovidedinthe robot frame.)

2.DrillholesthroughtheinstallationbaseandsecuretherobottothebasewithM8bolts from the bottom. (M8 tapped holes are already machined in the bottom of the robot frame.)

<When installing the MF50/MF75/MF100 from the top>

Installation and connections

3

3-3 Installing the robot

3-6 3-7

φ9

Installation baseHex socket-head bolt: M8×1.25(Length under head: 25 to 30mm)

Robot Bolt Tightening torque

MF7M4 hex socket-head bolt, Strength: 8.8T Length: installation base thickness +9-2

+0 mm30kgf•cm to 45kgf•cm

MF15/MF20/MF30M6 hex socket-head bolt, Strength: 8.8T Length: installation base thickness +10-2

+0 mm100kgf•cm to 130kgf•cm

MF50/MF75/MF100

M8 hex socket-head bolt, Strength: 8.8T Length: installation base thickness +15-2

+0 mm230kgf•cm to 370kgf•cm

3-6

3

Installation and connections

3-4 Installing an external leakage breaker and circuit protector

3-7

3-4 Installing an external leakage breaker and circuit protectorTo ensure safety, a leakage breaker and circuit protector must be installed in the power supply connection section of the robot controller. Make power connections to the controller by following the instructions in the controller user's manual.

wWARNING • eLectricaLshocKs,inJuriesorfiresmightoccurifthemotor breaKsdownwhiLetherobotcontroLLerisusedwithout instaLLingaLeaKagebreaKerinthepowersuppLysection. • eLectricaLshocKs,inJuriesorfiresmightoccurifthemotor breaKsdownwhiLetherobotcontroLLerisusedwithoutmaKing CORRECT CONNECTIONS TO ThE POWER SUPPly. useawirethicKerthan2.0sQuaremiLLimeters.

cCAUTION • besurethatthepowersupplyvoltageandtheterminalconnectionsare correct. Incorrect voltage and connections could cause an equipment failure. • shutthecontrolpoweroffwhileina"servooff"condition.

Installation and connections

3

3-5 Protective bonding

3-8 3-9

3-5 Protective bonding

wWARNING AlWAyS GROUND ThE ROBOT AND CONTROllER UNIT TO PREvENT ElECTRICAl shocK.

Always use the ground terminal (M4 screw) on the robot unit to make ground connection.

The ground terminal location is shown below.

Ground terminal

Ground terminal (M4 screw) for protective bonding

Ground terminal (M4 screw) for robot cable

cCAUTION • asecuregroundconnection(lessthan100-ohmresistancetoground)is recommended. • useelectricalwirethickerthanawg14(2mm2) as the ground wire.

wWARNING beforemaKingthegroundconnection,maKesurethattheCONTROllER IS NOT CONNECTED TO ThE ROBOT OR ThE POWER TO ThE CONTROllER IS OFF.

Provideaterminalmarked"PE"astheprotectiveconductorfortheentiresystem,and

connect it to an external protective conductor. Also securely connect the ground terminal

on the robot frame to the protective conductor.

(Symbol 417-IEC5019)

3-8

3

Installation and connections

3-6 Connecting the robot to the controller

3-9

3-6 Connecting the robot to the controllerConnecttherobotcablestothematingconnectorsonthecontrollerasshown.Forthe

connectors on the controller, refer to the user's manual of the YAMAHA robot controller

being used.

wWARNING • beforeconnectingthecabLes,checKthattherearenobendsor breaKsintherobotcabLeconnectorpinsandthatthecabLesare notdamaged.bentorbroKenpinsorcabLedamagemaycause ROBOT MAlFUNCTIONS. • aLwaysmaKesurethatthepowertotherobotcontroLLerisoff BEFORE CONNECTING ThE CABlES OR GROUND WIRES.

cCAUTION • After connecting the robot cable intermediate connectors together, fit the connector hoods together securely. • Standard robot cables do not permit much movement, so attach the robot cable securely to prevent unwanted movement of the motor power and signal wires.

wWARNING • iftheconnectorsarenotsecureLyinsertedandtheconnector pinsmaKepoorcontact,therobotmaymaLfunctioncausing hAzARDOUS SITUATIONS. BEFORE TURNING ON POWER TO ThE ROBOT, aLwaysmaKesurethateachconnectoriscorrectLyandsecureLy INSERTED. • DO NOT PlACE A STRAIN OR lOAD ON ThE CONNECTOR By PUllING ON ThE ROBOT CABlE ITSElF.

wWARNING INSTAll ThE ROBOT CABlE SO ThAT IT WIll NOT INTERFERE WITh ThE ROBOT MOvEMENT. DO NOT USE AN AREA WhERE INTERFERENCE MIGhT OCCUR BETWEEN ThE robotcabLeandLoadattachedtothetipoftherobotasaworKarea.therobotcabLemightbreaKifithangsuponthemoVingPARTS OF ThE ROBOT AND CAUSE hAzARDOUS SITUATIONS DUE TO MAlFUNCTION.

wWARNING INSTAll ThE CONNECTED ROBOT CABlE IN A POSITION WhERE IT WIll NOT interferewithotherworKersoroperators.peopLemighttripoVerThE CABlE AND FAll CAUSING INjURIES.

Installation and connections

3

3-6 Connecting the robot to the controller

3-10 3-11

1)Connecttherobotcables(motorandI/Osignalwires)tothematingconnectorscoming

out from the robot.

Robot cable connector (signal wires)

Robot cable connector (motor wires)

2) After making the connections, fit the connector hoods together securely.

Hood

3)Connecttherobotcablegroundterminal(powerandsignallines)tothegroundterminal

on the robot frame.

<MF7><MF7>

<MF15><MF15>

<MF20/30><MF20/30>

<MF50/MF75/MF100><MF50/MF75/MF100>

cCAUTION Be sure to connect the ground terminal. Failure to do so may cause malfunctions.

3-10

3

Installation and connections

3-6 Connecting the robot to the controller

3-11

n Robot cable connectionsReferto"7-4Robotcable(I/Osignalwires)"and"7-5Robotcable(motorwires)"when

wiring the cables.

Robot cable connections (when connecting to SR1)

* Programming box HPB and support software POPCOM are sold separately.

SR1-Pcontroller

RS-232C communication control

or

Programming box HPB

SD memory card

Powersupply

General-purpose input: 8 points, custom input: 8 pointsGeneral-purpose output: 5 points, custom output: 3 points

Support softwarePOPCOM

Gripper, limit switches, etc.

External control(PLC and similar units)

I/O control

Personal computer

AC100/200V for I/O devices

Hood

After making connections, fasten the hoods securely.

Linear Single-axis Robot (PHASER series)

SD

ME

MO

RY

CA

RD

Rob

ot c

able

(m

otor

wire

s)

Rob

ot c

able

(si

gnal

wire

s)

Installation and connections

3

3-7 Precautions during user wiring and air tube installation

3-12

3-7 Precautions during user wiring and air tube installation

Cable carries (plastic chain for cable guide)

UsercablesandairtubescanberoutedinthecablecarrieroftheMFtyperobots.

Observe the following precautions when routing user cables and air tubes in the

cable carrier.

cCAUTION • thecableandairtubesshouldtakeuplessthan30%ofthespacewhen storing them inside the cable carrier. lay out the cables and air tubes in rows inside the cable carrier so they do not cross each other. Use the table below as a general guide for cable and air tube installation. • thecablesandairtubesinsidethecablecarrierwillshiftwhiletherobot is operating, becoming taut and placing a strain on the connectors at both ends. To prevent this loosely fasten the cables and air tube to the cable carrier with cable ties to prevent strain from being applied. (Fasten them lightly since the cables and air tubes might break if secured too tightly.) • donotremoveormountbracketsinstalledonthecablecarrieror attempt to modify them.

n Cable and air tube installation (reference)

Robot modelOptional

cable carrier typeCable and air tube

MF7/15/20/30

S f8 flexible cable ×1, f4 air tube ×1

M f8 flexible cable ×2, f6 air tube ×2

L f8 flexible cable ×2, f6 air tube ×3

MF50/75/100 – f8 flexible cable ×2, f6 air tube ×3

Chapter 4 Robot operation

Contents

4-1 Notes on robot operation 4-14-1-1 Magnetic pole estimation action 4-1

4-1-2 Absolute search (semi-absolute specification) 4-1

4-1-3 Return to origin (incremental specification) 4-2

4-2 Setting operating conditions 4-44-2-1 Process flow for setting operating conditions 4-4

4-2-2 Duty monitor 4-5

4-2-3 Acceleration setting 4-6

4-3 Pulse train control (SRCP, SRCP30) 4-84-3-1 Acceleration/deceleration and position proportional gain 4-8

4-3-2 Setting the maximum speed 4-10

4-1

4

Robot operation

4-1 Notes on robot operation

4-1

4-1 Notes on robot operationOn the MF7/MF15/MF20/MF30/MF50/MF75, two linear scale specifications are provided:

incremental specification and semi-absolute specification. The MF100 is available only

in incremental specification. Action after power-on differs depending on the linear scale

specifications. Keep the following points in mind.

4-1-1 Magnetic pole estimation action•WhenstartingthePHASERseriesrobots,theslideralwaysmovesafewmillimeters

right after the servo is turned on and emits a high pitched noise. This is just the

routine pre-action for estimating the magnetic pole and is not a problem.

•Donotapplyanyexternalforceorimpactontherobotduringthemagneticpole

estimationaction.Doingsomaycauseafailureinthemagneticpoleestimation

action.

•Bothintheincrementalandsemi-absolutespecifications,themagneticpole

estimation action is performed at servo-on immediately after turning the power on.

4-1-2 Absolute search (semi-absolute specification)On the semi-absolute specification, absolute search (absolute position detection) must be

performedafterturningpoweronbeforestartingoperation.Currentpositionisfoundby

reading the signal recorded on the linear scale during absolute search. The slider (carriage)

moves a maximum of 76mm while reading the signal. (The distance that the slider moves

can be shortened by allowing the slider to move back and force for signal read.

n Absolute search motion

•Absoluteresetspeedissetto20(mmpersecond)priortoshipment.Thisspeed

can be reduced by parameter entry.

•Absolutesearchsequence: Whenanabsolutesearch(return-to-origin)command

is input or the HPB is used to perform absolute

search, the slider moves in the direction specified by

parameter and then stops when the origin position is

found, allowing automatic operation.

Robot operation

4

4-1 Notes on robot operation

4-2 4-3

4-1-3 Return to origin (incremental specification)

n Origin position

•Ontheincrementalspecification,return-to-originmustbeperformedafterturning

power on before starting operation. Magnetic poles are also detected during return-

to-origin. Once return-to-origin is completed, there is no need to perform it again

unless the controller power is turned off or an error occurs.

•Therearetwopositionsatwhichtheorigincanbeset.Thesearelocatedone

each on both ends of the stroke. Refer to the outline dimension drawings shown

inChapter7,"Specifications".Unlessspecifiedotherwise,theoriginpositionis

set on the L side prior to shipment. The origin position can be set on the R side

bychangingtheparameter.(Seetheseparate"SR1ControllerUser'sManual"for

information on changing the parameter.)

Return-to-origin direction

L side R side : Magnetic pole detection point

L side R side

Slider

: Magnetic pole detection point

Cable carrier

n Return-to-origin operation

•Return-to-originspeedissetat20(mmpersecond)priortoshipment.Thisspeed

can be changed in increments of 1 to 100 (mm per second) by parameter entry.

•Return-to-originsequence: Robotmovesasfollowsbyenteringareturn-to-origin

command or a return-to-origin operation from the HPB.

(1) Slidermovesinthespecifiedreturn-to-origindirectionataspeedsetbythe

parameter.

Return-to-origin direction

L side R side : Magnetic pole detection point

4-2

4

Robot operation

4-1 Notes on robot operation

4-3

(2) Slidermovesinreversedirectionaftercontactingthemechanicalstopper(stroke

end detected).

cCAUTION If the magnetic pole was not detected in the operation above in (1), in other words, if return-to-origin started from a position on the left of the magnetic pole detection point), then the slider returns to the magnetic pole detection point (). There, the slider moves in the reverse direction and re-performs the operation in (1). (This is not an equipment problem.)

Direction of movement

L side R side

(3) Slider(carriage)movesfromthestrokeendtotheoriginpositionandthenstops

to complete return-to-origin. Refer to the outline dimension drawings shown in

Chapter7,"Specifications".

L side R side

Origin position

Reference

See the separate "SR1 Controller User's Manual" for more information on

return-to-origin operation.

Robot operation

4

4-2 Setting operating conditions

4-4 4-5

4-2 Setting operating conditionsYou must set operating parameters such as the payload, speed and acceleration in order to

obtainmaximumperformancefromthePHASERseriesrobot.

4-2-1 Process flow for setting operating conditionsSetoptimumparametersusingtheflowchartbelowasareference.

Reference

For details on the parameter setting method, refer to the user's manual of

the YAMAHA robot controller being used.

Set payload parameter

Check actual operation (duty check)

Does overload appear? Is total cycle time appropriate?

Any margin in total cycle time to allow shortening it?

Lower robot speed and/or acceleration, or increase stop time

After lowering robot speed and/or acceleration, reduce cycle time with tasks other than robot operation

Change robot speed and/or acceleration

Setting is appropriate

Process flow for setting operating conditions

NO NO

NO

YES YES

YES

4-4

4

Robot operation

4-2 Setting operating conditions

4-5

4-2-2 Duty monitorAn overload error appears to warn the motor is working too hard during tough robot

operation. In these cases, either the robot acceleration or maximum speed must be

lowered, or the robot stop time increased (lower the duty). On the other hand, if you want

to shorten the cycle time even further, when there is currently no overload, you can raise

the acceleration or maximum speed, or shorten the robot stop time (raise the duty).

Viewingthedutymonitorallowsyoutoeasilycheckthecurrentrobotoperatingstatusto

find out how hard the robot can still work versus overload criteria. By checking the duty

monitor, you can repeatedly change the settings and view the available duty to obtain

ideal operating conditions.

How to monitor the operation duty

To monitor the operation duty using the programming box (HPB), follow these steps.

1) ConnecttheHPBtotheSR1

controller and turn on the

controller power.

The initial menu then appears on

the HPB.

[MENU]select menu

1EDIT2OPRT3SYS 4MON

2) Press (MON) on the initial

menu to enter MONITOR mode.

[MON]select menu

1DI0 2DUTY

3) Press (DUTY).

[MON-DUTY]select menumeasuring ...1RUN 2STOP3RSLT

4) Press (RUN)tostart

measuring the operation duty.

5) Press the (STOP)keytoquit

measurement.

Pressing the (STOP)key

retains the measurement data.

Robot operation

4

4-2 Setting operating conditions

4-6 4-7

6) Press the (RSLT)keyto

display the measurement data.

[MON-DUTY]measurement dataX = 50%

The operation duty value in the

period from pressing (RUN)

up to pressing the (STOP)

then appears as a percentage.

Reference

The operation duty can also be monitored while the program is running by

using a program command. See the "SR1 Controller User's Manual" for more

information.

4-2-3 Acceleration settingOptimalaccelerationforthePHASERseriesrobotsisautomaticallysetbyenteringthe

payload parameter value. In the payload parameter, set the total weight of the workpiece

and the end effectors such as hands or grippers attached to the robot slider. (Acceleration

can also be changed by parameter.)

cCAUTION Be sure to enter an accurate value when making this setting, since a mistake will cause troubles such as vibration or a shorter service life span.

Setting the payload parameter

To set the payload parameter by using the programming box (HPB), follow these

steps.

[MENU]select menu

1EDIT2OPRT3SYS 4MON

1) ConnecttheHPBtotheSR1

controller and turn on the power

to the controller.

The initial menu screen appears

on the HPB.

[SYS]select menu

1PRM 2B.UP 3INIT 4next

2) Press (SYS)ontheinitial

menuscreentoenterSYSTEM

mode.

[SYS-PRM]select menu

1AXIS2DATA3SYS14SYS2

3) Press (PRM).

The parameter setting mode is

entered.

4-6

4

Robot operation

4-2 Setting operating conditions

4-7

[SYS-PRM-AXIS]PRM100 = 4210robot typeread only

4) Selecttheparametergroup.

Press (AXIS)toselectthe

axis parameters.

The current setting for PRM100

(robot type) appears on the

screen.

Press the keys to scroll

up or down the parameters until

PRM112 (payload) is displayed.

[SYS-PRM-AXIS]PRM112 = 10 [kg]payloadrange 0→MAX

5) When PRM112 (payload) is

displayed, use the number keys

to enter the payload and press .

[SYS-PRM-AXIS]PRM112 = 10 [kg]payloadrange 0→MAX

6) The cursor returns to the top of

data when the parameter has

been set correctly.

Robot operation

4

4-3 Pulse train control (SRCP, SRCP30)

4-8 4-9

4-3 Pulse train control (SRCP, SRCP30)When you control the robot movement by pulse train input, read the following description

and comply with the precautions. For detailed information on pulse train control and

specifications,refertotheseparate"SRCPcontroller:Pulsetrainmode"supplementary

manual.

4-3-1 Acceleration/deceleration and position proportional gain Acceleration/deceleration waveforms

Usesinusoidalacceleration/decelerationtoissueacceleration/deceleration

instructions.Usingotherwaveformsmightadverselyaffectpositioningaccuracyand

current value stability.

Acceleration/deceleration and position proportional gain

Acceleration/deceleration and position proportional gain at different payloads

areshowninthetablesandgraphsbelow.Selectthedesiredparametervaluesby

referring to these tables and graphs.

Combination of MF50 and SRCP

Payload (kg) Acceleration/deceleration (G) Position proportional gain Kpp (PRM19)

0 1.20 80

10 0.94 76

20 0.61 72

30 0.45 68

40 0.36 64

50 0.30 60

Note: Acceleration/deceleration values apply to linear acceleration/deceleration.

0.00

0.20

0.40

0.60

0.80

1.00

1.20

1.40

100 20 30 40 50

0

10

20

30

40

50

60

70

80

90

Acceleration (G)Position proportional gain Kpp

Payload (kg)

Acc

eler

atio

n/de

cele

ratio

n (G

)

Kpp

4-8

4

Robot operation

4-3 Pulse train control (SRCP, SRCP30)

4-9

Combination of MF100 and SRCP30

Payload (kg) Acceleration/deceleration (G) Position proportional gain Kpp (PRM19)

0 1.74 80

20 1.59 50

40 1.00 30

60 0.73 20

80 0.57 15

100 0.47 13

Note: Acceleration/deceleration values apply to linear acceleration/deceleration.

0

0.2

0.4

0.6

0.8

1

1.2

1.4

1.6

1.8

2

0

10

20

30

40

50

60

70

80

90

100

0 20 40 60 80 100Payload (kg)

Kpp

Acc

eler

atio

n/de

cele

ratio

n (G

)

Position proportional gain KppAcceleration (G)

cCAUTION If the acceleration is too high, the robot might not follow the instructions or overloads occur.

Reference

The Position proportional gain parameter (PRM19) is a hidden parameter.

For detailed information on how to display and change hidden parameters,

see the "SRCP Series Controller User's Manual" or "SRCP30 Controller User's

Manual".

Robot operation

4

4-3 Pulse train control (SRCP, SRCP30)

4-10

4-3-2 Setting the maximum speedIn the case of pulse train control, the robot moves 1 micrometer per pulse.

To operate the robot at a maximum speed (2500 mm/sec), a pulse train at 2.5Mpps

must be input. (The maximum speed might not be obtained depending on the operating

conditions.)

As the speed increases, the sliding resistance also increases and overloads tend to occur.

Chapter 5 Periodic inspection and maintenance

Contents

5-1 Before beginning work 5-1

5-2 Periodic inspection 5-45-2-1 Daily inspection 5-4

5-2-2 Three-month inspection 5-5

5-2-3 Six-month inspection 5-6

5-2-4 Three-year inspection 5-6

5-2-5 Greasing to the linear guides 5-7

5-3 Replacing the shutter 5-10

5-4 Replacing the shutter roller 5-12

5-5 Maintenance parts 5-15

5-1

5

Periodic inspection and maintenance

5-1

5-1 Before beginning work

5-1 Before beginning workPeriodic inspection and maintenance are essential to ensure safe and efficient operation of

YAMAHA robots. This chapter describes periodic inspection items and procedures for the

PHASERseries.Beforebeginningwork,readtheprecautionsbelowandalsoinChapter1

"UsingtheRobotSafely"andfollowtheinstructions.

[Safety precautions]

(1) Read and understand the contents of this chapter completely before attempting to

adjust the robot.

(2) Place a sign indicating that the robot is being adjusted or serviced in order to keep

any other person from operating the controller power switch, programming box or

Handy Terminal, and the operation panel, etc.

(3) If a safety enclosure or fence has not yet been provided right after installation of the

robot, rope off or chain off the movement area around the robot in place of a safety

enclosure or fence, and observe the following points.

1.Usestablepostswhichwillnotfallovereasily.

2. The rope or chain should be easily visible by everyone around the robot.

3. Place a conspicuous sign prohibiting anyone other than the person who is adjusting

the robot from entering the movement area of the robot.

(4) Tocheckoperationafteradjustment,referto"1-6TrialOperation"inChapter1.

(5) For precautions on handling the controller, refer to the controller user's manual.

wDANGER IF ThE INSPECTION OR MAINTENANCE PROCEDURE CAllS FOR OPERATION OF therobot,stayoutoftheworKingareaoftherobotduringOPERATION. DO NOT TOUCh ANy PARTS INSIDE ThE CONTROllER. KeepwatchingtherobotmoVementandsurroundingareasothatThE OPERATOR CAN PRESS ThE EMERGENCy STOP BUTTON IF ANy DANGER OCCURS.

Periodic inspection and maintenance

5

5-2

5-1 Before beginning work

5-3

wWARNING • whentherobotdoesnotneedtobeoperatedduringadJustment OR MAINTENANCE, AlWAyS TURN OFF ThE CONTROllER AND ThE EXTERNAl SWITCh BOARD. • donottouchinternaLpartsofthecontroLLerfor10minutes AFTER ThE CONTROllER hAS BEEN TURNED OFF. • whenonLymaKingeLectricaLinspectionsandreQuiringno mechanicaLmoVementoftherobot,Keeptheemergencystop BUTTON PRESSED. • useonLyLubricantandgreasesspecifiedbyyamahasaLesoffice OR REPRESENTATIvE. • useonLypartsspecifiedbyyamahasaLesofficeorrepresentatiVe. taKesufficientcarenottoaLLowanyforeignmatterto CONTAMINATE ThEM DURING ADjUSTMENT, PARTS REPlACEMENT OR REASSEMBly. • donotmodifyanypartsontherobotorcontroLLer. MODIFICATION MAy RESUlT IN UNSATISFACTORy SPECIFICATIONS OR ThREATEN OPERATOR SAFETy. • whenadJustmentormaintenanceiscompLete,retightentheboLts AND SCREWS SECUREly. • duringrobotadJustmentormaintenance,pLaceasign INDICATING ThAT ThE ROBOT IS BEING ADjUSTED OR SERvICED TO PREvENT othersfromtouchingthecontroLKeysorswitches.proVidea LocKontheswitchKeysorasKsomeonetoKeepwatchasneeded.

wWARNING DO NOT DISASSEMBlE ThE ROBOT. ThE INTERNAl MAGNETIC PlATE USES POWERFUl PERMANENT MAGNETS SO DISASSEMBly WIThOUT PROPER PREPARATION IS hAzARDOUS. ATTEMPTING TO DISASSEMBlE IT MIGhT AlSO PREvENT OBTAINING ThE SPECIFIED PERFORMANCE.

5-2

5

Periodic inspection and maintenance

5-3

5-1 Before beginning work

When applying grease to the internal linear guide, take the following precautions.

wWARNING PRECAUTIONS WhEN hANDlING GREASE: • infLammationmayoccurifthisgetsintheeyes. BEFORE hANDlING ThE GREASE, WEAR yOUR SAFETy GOGGlES TO ENSURE ThE GREASE WIll NOT COME IN CONTACT WITh ThE EyES. • infLammationmayoccurifthegreasecomesintocontactwith sKin.besuretowearprotectiVegLoVestopreVentcontactwith sKin. • donottaKeoraLLyoreat.(eatingwiLLcausediarrheaand vOMITING.) • handsandfingersmightbecutwhenopeningthegrease CONTAINER, SO USE PROTECTIvE GlOvES. • KeepoutofthereachofchiLdren. • donotheatthegreaseorpLacenearanopenfLamesincethis couLdLeadtosparKsandfires. EMERGENCy TREATMENT: • ifgreasegetsintheeyes,washLiberaLLywithpurewaterforabout 15 MINUTES AND CONSUlT A PhySICIAN FOR TREATMENT. • ifgreasecomesincontactwiththesKin,washawaycompLeteLy WITh SOAP AND WATER. • iftaKeninternaLLy,donotinduceVomitingbutpromptLyconsuLt A PhySICIAN FOR PROPER TREATMENT.

wWARNING DISPOSAl OF GREASE AND WASTE CONTAINERS • disposaLmethodsaresubJecttoLegaLreguLations.besurethat DISPOSAl METhODS COMPly WITh ThE ESTABlIShED lEGAl REGUlATIONS. • donotappLypressuretoemptycontainers.pressuremightcause ThE CONTAINERS TO RUPTURE. • donotattempttoweLd,heat,driLLhoLesorcutthesecontainers. BESIDES A POTENTIAl EXPlOSION, ThE REMAINING CONTENTS OF ThE CONTAINER MIGhT IGNITE AND CATCh FIRE.

Periodic inspection and maintenance

5

5-4

5-2 Periodic inspection

5-5

5-2 Periodic inspectionThePHASERseriesrobotsusealinearmotorandalinearguidewithballretainer,and

require little user maintenance. However, perform the following daily and periodic

inspections.

5-2-1 Daily inspectionThe following inspections must be performed every day before and after operating the robot.

(1) Inspection to be performed with the controller power turned off

1) Turn off the controller power.

2) Place a sign indicating the robot is being inspected, to keep others from operating

the controller power.

3) Enter the safety enclosure and check the following points.

Check item Description Note

Cables and connectors

Check for scratches, damages and excessively tight bends.

Consult us if damages or abnormal conditions are found.

ShutterCheck scratches and dents. (Refer to "5-3 Replacing the shutter".)

MotorCheck for unusual vibration and noise, and for abnormal temperature rise.

Using the duty monitor, check that the duty ratio is less than 100%.

(2) Inspection to be performed with the controller power turned on

1)Checkthatnooneisinsidethesafetyenclosure,andthenturnonthecontroller

power.

2) Place a sign indicating that the robot is being adjusted or serviced in order to

keep any other person from operating the controller, programming box or Handy

Terminal, and the operation panel, etc.

3)Checkthefollowingpointsfromoutsidethesafetyenclosure.

Check item Description

Safety enclosure or fence

Check if the safety enclosure or fence is in place. Check if emergency stop is triggered when the door is opened. Check if warning labels are affixed at the entrance.

Emergency stop device Press the emergency stop button to check if it works.

Robot movementCheck for abnormal movement and excessive vibration and noise. (Contact us if any abnormal operation is found.)

Z-axis brake operation *1Check if the brake works to stop the Z-axis from dropping more than 3mm from the stationary point. (Contact us if any abnormal operation is found.)

*1: Visually check the Z-axis movement from outside the safety enclosure by pressing the emergency stop button and also by turning off the controller.

5-4

5

Periodic inspection and maintenance

5-5

5-2 Periodic inspection

wWARNING ThE CONTROllER MUST BE INSTAllED OUTSIDE ThE SAFETy ENClOSURE. WhEN INSPECTING ThE CONTROllER, ENTERING ThE SAFETy ENClOSURE WhIlE ThE CONTROllER POWER IS ON IS DANGEROUS AND MUST BE AvOIDED.

Reference

When starting the PHASER series robots, the slider always moves a few

millimeters right after the servo is turned on and emits a high pitched noise.

This is just the routine pre-action for estimating the magnet pole and is not a

problem.

5-2-2 Three-month inspectionTake the following precautions when performing 3-month inspection.

1) Turn off the controller power.

2) Place a sign indicating the robot is being inspected, to keep others from operating

the controller power.

3) Enter the safety enclosure and check the following points.

Checkpoints Check items Notes

Linear guide

• Check for dust buildup or debris. Clean if necessary. Apply grease after cleaning.

• Check to see if linear guide is lubricated (not dry). Apply grease if necessary.

ShutterCheck for slack. Adjust if necessary. (Refer to "5-3 Replacing the shutter".)

Recommended grease: <MF7/MF15> AFA (THK)

<MF20/MF30/MF50/MF75/MF100> AlbaniaS2(Shell)

cCAUTION The linear guide service life may be reduced if our recommended grease is not used.

Periodic inspection and maintenance

5

5-6

5-2 Periodic inspection

5-7

5-2-3 Six-month inspectionTake the following precautions when performing 6-month inspection.

1) Turn off the controller power.

2) Place a sign indicating the robot is being inspected, to keep others from operating

the controller power.

3) Enter the safety enclosure and check the following points.

Checkpoints Check items Notes

Bolts and screws on robot

Check for looseness. Tighten if loose.

Linear guide Check for backlash caused by air.Contact us if any abnormal condition is found.

Controller• Check if terminals are loose.• Check if connectors are loose.

Greasing to linear guide

Apply recommended grease to linear guide every 6 months.

ShutterCheck for slack (gap). Adjust if necessary. (Refer to "5-3 Replacing the shutter".)

Shutter rollerCheck for wear, and replace if necessary. (Refer to "5-4 Replacing the shutter roller".)

Recommended grease: <MF7/MF15> AFA (THK)

<MF20/MF30/MF50/MF75/MF100> AlbaniaS2(Shell)

cCAUTION The linear guide service life may be reduced if our recommended grease is not used.

5-2-4 Three-year inspectionCheckthefollowingpointsevery3yearsormoreofteniftherobotisusedfrequently.

Checkpoints Check items Notes

Linear guide Check for backlash caused by air.Contact us if any abnormal condition is found.

5-6

5

Periodic inspection and maintenance

5-7

5-2 Periodic inspection

5-2-5 Greasing to the linear guidesWhen applying grease to the linear guide according to periodic inspection, follow the

procedure below.

cCAUTION Using grease other than those recommended by yAMAhA might shorten the service life of the linear guide.

<MF7/MF15>

1) Prepare the following tools required for replacement.

• Phillipsscrewdriver

• Greasegun(recommendedgreasegun:THKMG70withTypeNnozzle)

2) Turn off the controller power.

3) Place a sign indicating the robot is being inspected, to keep others from operating the

controller power.

4) Enter the safety enclosure.

5) Apply grease by either of the following methods.

(1) Remove the two screws on the end face of the robot and remove the end cover.

(2) Move the slider (carriage) all the way to one end of the robot.

(3)Usingagreasegun,injectgreaseintothegreasenippleinthegreasehole.

(4)Supplygreasetotheotherendoftherobotinthesameway.

(5) Reattach the end cover.

End cover

w Move the slider to one end of the robot.

q Remove the screws and remove the end cover.

e Using a grease gun, inject grease into the grease nipple in the greasing hole.

Periodic inspection and maintenance

5

5-8

5-2 Periodic inspection

5-9

<MF20/MF30>

1) Prepare the following tools required for replacement.

• Phillipsscrewdriver

• Greasegun(recommendedgreasegun:THKMG70withTypeLnozzle)

2) Turn off the controller power.

3) Place a sign indicating the robot is being inspected, to keep others from operating the

controller power.

4) Enter the safety enclosure.

5) Apply grease by either of the following methods.

(1) Insert a grease gun into the grease supply hole provided on the side of the robot.

(2) Inject grease into the grease hole in the guide bearing.

* It is recommended to open the shutter as shown and to perform work while visually

checking.

5-8

5

Periodic inspection and maintenance

5-9

5-2 Periodic inspection

<MF50/MF75/MF100>

1) Prepare the following tools required for replacement.

• Phillipsscrewdriver

• Greasegun(recommendedgreasegun:THKMG70withTypeNnozzle)

2) Turn off the controller power.

3) Place a sign indicating the robot is being inspected, to keep others from operating the

controller power.

4) Enter the safety enclosure.

5) Apply grease by either of the following methods.

(1) Remove the four screws on the end face of the robot and remove the end cover.

(2) Move the slider (carriage) all the way to one end of the robot.

(3)Usingagreasegun,injectgreaseintothegreasenipple.

(4)Supplygreasetotheotherendoftherobotinthesameway.

(5) Reattach the end cover.

w Move the slider to one end of the robot.

e Using a grease gun, inject grease into the grease nipple.

q Remove the screws and remove the end cover.

End cover

Periodic inspection and maintenance

5

5-10

5-3 Replacing the shutter

5-11

5-3 Replacing the shutter

wWARNING BE CAREFUl NOT TO lET ThE ShUTTER DROP INSIDE ThE ROBOT BODy DURING shutterrepLacement.thiscouLdcausebreaKdownsordamageinBOTh ThE ShUTTER AND ThE ROBOT.

1) Remove both shutter clamp plates located at the ends of the robot body.

Shutter clamp plate

<MF50><MF50>

2) Fasten the new shutter onto the old shutter (for replacement) with tape as shown in

the photo.

Old shutter

New shutter

<MF50><MF50>

Fasten with tape

<MF50><MF50>

cCAUTION Attach the tape strongly enough so it will not come loose during the pull-in task. If the tape is too thick the shutter will be impossible to pull in, so use tape with the right thickness such as insulating tape.

5-10

5

Periodic inspection and maintenance

5-11

5-3 Replacing the shutter

3) Pull gently on the old shutter as shown in the photo so that it will not come loose

from the groove in the stroke cover, and draw in the new shutter.

Be careful at this time not to let the new shutter twist, warp or hang up.

<MF50><MF50>

<MF50><MF50>

4) After finished installing the new shutter, adjust its position. Then reinstall the

shutter clamp plate so that there is no looseness or play in the shutter.

Shutter clamp plate

<MF50><MF50>

Periodic inspection and maintenance

5

5-12

5-4 Replacing the shutter roller

5-13

5-4 Replacing the shutter roller

wWARNING BE CAREFUl NOT TO DROP ThE TOOlS AND BOlTS ONTO ThE ShUTTER OR INTO ThE ROBOT BODy DURING ShUTTER ROllER REPlACEMENT. ThIS COUlD CAUSE breaKdownsordamageinboththeshutterandtherobot.

cCAUTION This procedure applies only to the MF7 and MF75. To replace the shutter roller for the other MF series robots, the carried object must be removed.

<For MF7>

(1) Remove the eight screws (four on each side) holding the slider cover, and remove

the slider cover.

Slider cover

(2) Make a protective sheet for prevention of bolt fall-down.

Bend a 1cm-portion of 5cm-square sheet 90° as shown below.

5-12

5

Periodic inspection and maintenance

5-13

5-4 Replacing the shutter roller

(3) Insert the protective sheet into the clearance, remove the two screws (one on each

side) that secure the shutter roller, and remove the shutter roller.

Protective sheet Shutter roller

(4) With the protective sheet kept inserted into the clearance, install a new shutter

roller. When installing the new shutter roller, place its metal plate against the

slider.

Place the shutter roller against the slider.

(5) Reattach the slider cover and cap.

<For MF75>

(1) Remove the cap on the side cover.

Cap

Periodic inspection and maintenance

5

5-14

5-4 Replacing the shutter roller

5-15

(2) Remove the eight screws (four on each side) holding the slider cover, and remove

the slider cover.

Slider cover

(3) Remove the two screws (one on each side) holding the shutter roller, and remove

the shutter roller.

(4) Install the new shutter roller and place its metal plate against the slider.

Place the shutter roller against the slider.

(5) Reattach the slider cover and cap.

5-14

5

Periodic inspection and maintenance

5-15

5-5 Maintenance parts

5-5 Maintenance parts

<MF7>

Part name Part No. Remarks

Shutter KCT-M229J-X00 MF7/MF7D: up to serial No. 3000st

KCT-M22LK-X00 MF7/MF7D: serial No. 3000st and up

Shutter roller KCT-M224M-000

<MF15>

Part name Part No. Remarks

Shutter KBW-M229J-X00 MF15: up to serial No. 3000st

KBW-M22LK-X00 MF15: serial No. 3100st and up

KBW-M225M-X00 MF15D: up to serial No. 2800st

KBW-M225N-X00 MF15D: serial No. 2900st and up

<MF20/MF30>

Part name Part No. Remarks

Shutter KBS-M229J-X01MF20: up to serial No. 3050st, MF30: up to serial No. 3000st

KBS-M22LK-X01MF20: serial No. 3150st and up, MF30: serial No. 3100st and up

KBS-M225M-X03MF20D: up to serial No. 3050st, MF30D: up to serial No. 2950st

KBS-M225N-X03MF20D: serial No. 3150st and up, MF30D: serial No. 3050st and up

<MF50/MF100>

Part name Part No. Remarks

Shutter KBD-M229J-X03 MF50/MF100

KBD-M22LK-X01 MF50D/MF100D

<MF75>

Part name Part No. Remarks

Shutter KCN-M229J-X00 MF75

KCN-M22LK-X00 MF75D

Shutter roller KCN-M224M-000

5-16

MEMO

Chapter 6 Troubleshooting

Contents

6-1 If you suspect trouble 6-1

6-2 Feedback error 6-1

6-3 Magnetic pole detection error 6-3

6-4 Overload 6-4

6-5 Position deviation error 6-5

6-1

6

Troubleshooting

6-1

6-1 If you suspect trouble

6-1 If you suspect troubleIf an error such as a feedback error and overload occurs, check the following points to

find the solution before you determine the robot or controller has malfunctioned. If the

trouble still exists even after checking these points, please contact us with a detailed

description of the trouble.

6-2 Feedback error

Feedback error 1

External force or friction is applied to slider when power is turned on.

Robot mechanical movement is heavy at point where power is turned on.

Turn power off and check slider movement by moving it by hand.

Check wiring by referring to robot manual.

Check robot number on HPB screen while referring to SR1 controller user's manual.

If replacement controller is available, check by exchanging the controllers.

Connector wiring is incorrect. Correct wiring or replace defective connector pins.

Replace the controller.

Repair the robot. *

Robot number parameter is incorrect.

Remove external force and friction and restart the robot.

Initialize parameters.

Take noise reduction measures.

Controller is defective.

External noise is large.

Consult us.

YES

NO

NO

NO

NO

NO

NO

YES

YES

YES

YES

YES

* Try to turn on power in another place to check whether the robot operates normally.

Requires repair or parts replacement. Contact us.

Troubleshooting

6

6-2

6-2 Feedback error

6-3

Feedback error 2Feedback error 4

Poor wiring connection or connector is disconnected.

Wiring or cable is broken.(Electrical discontinuity)

• Check signal wire if feedback error 2 occurs.• Check motor wire if feedback error 4 occurs.

Check resistance between wires (U-V, V-W, W-U). MF7/MF15 : 6.5Ω MF20 : 7.5Ω MF30 : 8.3Ω MF50 : 3.6Ω MF75 : 3.1Ω MF100 : 1.0Ω

Enter teaching mode in emergency stop and check current position display.

Check robot number on HPB screen while referring to SR1 controller user's manual.

Motor resistance is abnormal. Repair

Repair

Replace the cable.

Current position display on HPB fluctuates. *

Securely connect wires and connectors.

Take noise reduction measures.

Initialize parameters.Robot number parameter is incorrect.

External noise is large.

Consult us.

YES

NO

NO

NO

NO

NO

NO

YES

YES

YES

YES

If replacement controller is available, check by exchanging the controllers. Replace the controller.Controller is defective.

NO

YES

YES

* Current reading varies even though slider is stopped.

Requires repair or parts replacement. Contact us.

6-2

6

Troubleshooting

6-3

6-3 Magnetic pole detection error

6-3 Magnetic pole detection error

Magnetic pole detection error

Motor wire is disconnected.

External force or friction is applied to slider when power is turned on.

Turn power off and check slider movement by moving it by hand.

Check wiring by referring to robot manual.

Robot mechanical movement is heavy at point where power is turned on.

Repair the robot. *

Correct wiring or replace defective connector pins.

Connector wiring is incorrect.

Securely make connections.

Remove external force and friction and restart the robot.

Consult us.

YES

NO

NO

NO

NO

YES

YES

YES

Requires repair or parts replacement. Contact us.

* Try to turn on power in another place to check whether the robot operates normally.

Troubleshooting

6

6-4

6-4 Overload

6-5

6-4 Overload

Overload

Operation duty is too high.

External force or friction is applied to slider.

Check with duty monitor.

Turn power off and check slider movement by moving it by hand.

Check robot number on HPB screen while referring to SR1 controller user's manual.

Robot mechanical movement is heavy. Repair

Replace the cable.

Remove external force and friction.

Motor cable is broken or frayed.

Motor resistance is abnormal.

Check operating conditions by referring to the manual.

Take noise reduction measures.

Initialize parameters.Robot number parameter is incorrect.

External noise is large.

Consult us.

YES

NO

NO

NO

NO

NO

NO

YES

YES

YES

Repair

NO

YES

YES

If replacement controller is available, check by exchanging the controllers.

Replace the controller.Controller is defective.

NO

YES

YES

Requires repair or parts replacement. Contact us.

Check resistance between wires (U-V, V-W, W-U). MF7/MF15 : 6.5Ω MF20 : 7.5Ω MF30 : 8.3Ω MF50 : 3.6Ω MF75 : 3.1Ω MF100 : 1.0Ω

6-4

6

Troubleshooting

6-5

6-5 Position deviation error

6-5 Position deviation error

Robot bumped into something,or there are traces of bumping into (rubbing against) something.

The position deviates aftermoving the robot or set up of workpiece tool.

Operation was correct,but position deviates.

Position deviates.

(1) Check for looseness of mechanical parts. Retighten if necessary.(2) Replace mechanical parts.

(1) Check tool and workpiece for warping.(2) Check robot alignment.

Are cables correctly wired?Are connectors correctly fitted?

Are the robot, tools andworkpiece correctly installed?

Yes

Yes

No

Check installation method.

Check wiring and connectors.

Check for looseness ofrobot mechanical parts.

No

Check or replace the motor, cable and controller.

No

Take measures against noise.

Yes

Is cable broken?

No

Does the position returnafter return-to-origin operation?

Is there a large source ofnoise nearby?

No

Electrical cause

Mechanical cause

Replace the cable.

Yes

Yes

6-6

MEMO

Chapter 7 Specifications

Contents

7-1 Main unit 7-17-1-1 MF7 7-1

7-1-2 MF15 7-8

7-1-3 MF20 7-14

7-1-4 MF30 7-20

7-1-5 MF50 7-26

7-1-6 MF75 7-30

7-1-7 MF100 7-34

7-2 Robot connector (I/O signal connector) 7-38

7-3 Robot connector (motor connector) 7-38

7-4 Robot cable (I/O signal wires) 7-39

7-5 Robot cable (motor wires) 7-39

7-1

7

Specifications

7-1

7-1 Main unit

7-1 Main unit

7-1-1 MF7 Basic specifications

Model name MF7 MF7D

Driving method Steel cored linear motor flat magnet

Repeated positioning accuracy (µm) ±5

Scale (µm) Magnetic method, resolution: 1

Maximum speed (mm/sec) 2 2500

Maximum carrying weight (kg) 1 10

Rated thrust (N) 37

Maximum stroke (mm) 4000 3800

Bearing method 1 guide rails and 2 blocks (with retainer)

Maximum cross-section outside dimensions (mm)

W85×H80 (excluding cable carrier)

Overall length (mm) Stroke length + 280 Stroke length + 480

Cable length (m) Standard : 3.5 Option: 5/10

Controller SR1-P, RCX221, RCX240, RDP, TS-P

1: Weight per one carrier2: See the maximum speed table below.

Payload (kg) Maximum speed (m/s)

7 or less 2.5

8 2.3

9 2.2

10 2.1

Static load moment

(Unit: N•m)

MY MP MR

156 156 194

Allowable overhang **Distancefromthecenteronthetopfaceofslidertothegravitycenteroftheitembeing

carried. (This is calculated assuming that the service life of the guide is 10,000km.)

n Horizontal installation

A

C

B

(Unit: mm)A B C

1kg 3000 3000 6803kg 3000 1350 2155kg 2900 830 1257kg 2400 580 859kg 2200 460 60

10kg 2100 410 55

0 1 2 3 4 5 6 7 8 9 10Payload (kg)

Max

imum

spe

ed (

m/s

) 3.0

2.5

2.0

1.5

1.0

0.5

0

M P

M R

M Y

Specifications

7

7-2

7-1 Main unit

7-3

MF7

sin

gle-

carr

iage

hor

izon

tal m

ount

mod

el S

tand

ard

type

S

Cro

ss-s

ectio

n of

cab

le c

arrie

r

M49

20.5

40

14

15

20.514

24

Det

ail o

f sec

tion

D

3.25.7

1.5

2.6

5

Opt

iona

l cab

le c

arrie

r S ty

peO

ptio

nal c

able

car

rier M

type

80 : Top face of slider

7710

(79.5)

10

42.4

(100)

58.7

D

116.

485

.814

5.4

170.

4

Hor

izon

tal-l

eft-t

ype

cabl

e ca

rrie

r (LH

)

90C

±0.0

2(9

0)

100

40A×

100

(40)

50

B-M

4×0.

7 D

epth

9

2-φ1

0H7

Ref

er to

cro

ss-s

ectio

n of

E-E

.

Gro

und

term

inal

(M4)

64.5

30±0

.02

5080

65(79)

140±

5 (L

sid

e or

igin

pos

ition

)

(140

)

LEf

fect

ive

stro

ke

4-φ4

H7

Dep

th 1

08-

M5×

0.8

Dep

th 1

0

(190

)

110

40±1

(Not

e 1)

(1

40)

140±

5 (R

sid

e or

igin

pos

ition

)40

±1(N

ote

1)

(Between φ4H7±0.02)

E E

(φ10H7)

611 2

Cro

ss-s

ectio

n of

E-E

No

te1

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 2

. T

he

ori

gin

is

set

on

th

e L

sid

e at

th

e ti

me

of

ship

men

t. I

t ca

n b

e ch

ange

d t

o t

he

R s

ide

by

par

amet

er s

etti

ng.

No

te 3

. T

he

dra

win

gs o

n t

his

pag

e sh

ow

th

e u

nit

wit

h h

ori

zon

tal-

righ

t-ty

pe

cab

le c

arri

er (

RH

).

Effe

ctive

stro

ke10

020

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

00

L38

048

058

068

078

088

098

010

8011

8012

8013

8014

8015

8016

8017

8018

8019

8020

8021

8022

80

A3

45

67

89

1011

1213

1415

1617

1819

2021

22

B8

1012

1416

1820

2224

2628

3032

3436

3840

4244

46

C20

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

00

Wei

ght (

kg)

5.8

6.5

7.3

8.0

8.7

9.4

10.1

10.

9 11

.6 1

2.3

13.0

13.

7 14

.5 1

5.2

15.9

16.

6 17

.3 1

8.1

18.8

19.

5

7-2

7

Specifications

7-3

7-1 Main unitM

F7 s

ingl

e-ca

rria

ge h

oriz

onta

l mou

nt m

odel

Sta

ndar

d ty

pe (F

or o

ptio

nal L

-typ

e ca

ble

carr

ier)

Hor

izon

tal-l

eft-t

ype

cabl

e ca

rrie

r (FL

H)

80 : Top face of slider

10

(79.5)

10

58.7

D

84.8

173.537(216.5)

77

138.5

(Diameter of roller:φ30)Note 4

179

Cro

ss-s

ectio

n of

cab

le c

arrie

r

66 50

3529

φ6.7

φ7.5

Det

ail o

f sec

tion

D

3.25.7

1.5

2.6

5

90C

±0.0

2(9

0)

100

40A×

100

(40)

50

B-M

4×0.

7 D

epth

92-

φ10H

7 Re

fer t

o cr

oss-

sect

ion

of E

-E.

64.5

105

Gro

und

term

inal

(M4)

30±0

.025080

65(79)

140±

5 (L

sid

e or

igin

pos

ition

)

(1

40)

LEf

fect

ive

stro

ke

(140

)

140±

5 (R

sid

e or

igin

pos

ition

)

4-φ4

H7

Dep

th 1

0

8-M

5×0.

8 D

epth

10

(190

)

110

(50)

Note

5

40±1

(Not

e 1)

40±1 (Not

e 1)

(Between φ4H7±0.02)EE

(φ10H7)2611

Cro

ss-s

ectio

n of

E-E

No

te1

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 2

. T

he

ori

gin

is

set

on

th

e L

sid

e at

th

e ti

me

of

ship

men

t. I

t ca

n b

e ch

ange

d t

o t

he

R s

ide

by

par

amet

er s

etti

ng.

No

te 3

. T

he

dra

win

gs o

n t

his

pag

e sh

ow

th

e u

nit

wit

h h

ori

zon

tal-

righ

t-ty

pe

cab

le c

arri

er (

RH

).

No

te 4

. Fo

r m

od

els

wit

h a

3,0

00

mm

or

lon

ger

stro

ke,

a ro

ller

is

inst

alle

d t

o p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.N

ote

5.

Pro

tru

sio

n i

s th

e d

ista

nce

th

e ca

ble

car

rier

ext

end

s fr

om

th

e ed

ge o

f th

e u

nit

.

Effe

ctive

stro

ke10

020

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

00

L38

048

058

068

078

088

098

010

8011

8012

8013

8014

8015

8016

8017

8018

8019

8020

8021

8022

8023

8024

8025

8026

8027

8028

8029

8030

8031

8032

8033

8034

8035

8036

8037

8038

8039

8040

8041

8042

80

A3

45

67

89

1011

1213

1415

1617

1819

2021

2223

2425

2627

2829

3031

3233

3435

3637

3839

4041

42

B8

1012

1416

1820

2224

2628

3032

3436

3840

4244

4648

5052

5456

5860

6264

6668

7072

7476

7880

8284

86

C20

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

0041

00

Wei

ght (

kg)

5.8

6.5

7.3

8.0

8.7

9.4

10.1

10.

9 11

.6 1

2.3

13.0

13.

7 14

.5 1

5.2

15.9

16.

6 17

.3 1

8.1

18.8

19.

5 20

.2 2

0.9

21.7

22.

4 23

.1 2

3.8

24.5

25.

3 26

.0 2

6.7

27.4

28.

1 28

.9 2

9.6

30.3

31.

0 31

.7 3

2.5

33.2

33.

9

Specifications

7

7-4

7-1 Main unit

7-5

MF7

sin

gle-

carr

iage

hor

izon

tal m

ount

mod

el F

lat t

ype

Hor

izon

tal-l

eft-t

ype

cabl

e ca

rrie

r (FL

H)

Opt

iona

l cab

le c

arrie

r S ty

peO

ptio

nal c

able

car

rier M

type

80 : Top face of slider

7710

(79.5)

10

58.7

D

118

84.8

12.5

(92)

Inst

alla

tion

surfa

ce17

214

742

.4

30±0

.02

5080

65(79)

140±

5 (L

sid

e or

igin

pos

ition

)

(1

40)

LEf

fect

ive

stro

ke

(140

)

140±

5 (R

sid

e or

igin

pos

ition

)

4-φ4

H7

Dep

th 1

08-

M5×

0.8

Dep

th 1

0

(190

)

110

40±1

(Not

e 1)

40±1

(Not

e 1)

(Between φ4H7±0.02)

Gro

und

term

inal

(M4)

64.5

90C

±0.0

2(9

0)

100

40A×

100

(40)

50

B-M

4×0.

7 D

epth

9

2-φ1

0H7

Ref

er to

cro

ss-s

ectio

n of

E-E

.S

Cro

ss-s

ectio

n of

cab

le c

arrie

r

M49

20.5

40

14

15

20.514

24

Det

ail o

f sec

tion

D

3.25.7

1.5

2.6

5

Cro

ss-s

ectio

n of

E-E

E E

6

(φ10H7)

11 2

No

te1

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 2

. T

he

ori

gin

is

set

on

th

e L

sid

e at

th

e ti

me

of

ship

men

t. I

t ca

n b

e ch

ange

d t

o t

he

R s

ide

by

par

amet

er s

etti

ng.

No

te 3

. T

he

dra

win

gs o

n t

his

pag

e sh

ow

th

e u

nit

wit

h h

ori

zon

tal-

righ

t-ty

pe

cab

le c

arri

er (

RH

).

Effe

ctive

stro

ke10

020

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

00

L38

048

058

068

078

088

098

010

8011

8012

8013

8014

8015

8016

8017

8018

8019

8020

8021

8022

80

A3

45

67

89

1011

1213

1415

1617

1819

2021

22

B8

1012

1416

1820

2224

2628

3032

3436

3840

4244

46

C20

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

00

Wei

ght (

kg)

5.8

6.5

7.3

8.0

8.7

9.4

10.1

10.

9 11

.6 1

2.3

13.0

13.

7 14

.5 1

5.2

15.9

16.

6 17

.3 1

8.1

18.8

19.

5

7-4

7

Specifications

7-5

7-1 Main unitM

F7D

dou

ble-

carr

iage

hor

izon

tal m

ount

mod

el S

tand

ard

type

Opt

iona

l cab

le c

arrie

r S ty

peO

ptio

nal c

able

car

rier M

type

80 : Top face of slider

7710

(79.5)

10

42.4

(100)

58.7

D

116.

485

.814

5.4

170.

4

30±0

.02

5080

65(79)

140±

5 (N

ote

1)L

Effe

ctiv

e st

roke

140±

5 (N

ote

1)

4-φ4

H7

Dep

th 1

08-

M5×

0.8

Dep

th 1

0

(190

)

110

40±1

(Not

e 2)

40±1

(Not

e 2)

Effe

ctiv

e st

roke

(200

: M

inim

um d

istan

ce b

etwe

en c

arria

ges)

(Between φ4H7±0.02)

Gro

und

term

inal

(M4)

64.590

C±0

.02

(90)

100

40A×

100

(40)

50

B-M

4×0.

7 D

epth

9

2-φ1

0H7

Ref

er to

cro

ss-s

ectio

n of

E-E

.S

Cro

ss-s

ectio

n of

cab

le c

arrie

r

M49

20.5

40

14

15

20.514

24

Det

ail o

f sec

tion

D

3.25.7

1.5

2.6

5

E E

(φ10H7)

611 2

Cro

ss-s

ectio

n of

E-E

No

te 1

. P

osi

tio

n o

f th

e ta

ble

sli

der

wh

en r

etu

rned

to

th

e o

rigi

n.

No

te2

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

Effe

ctive

stro

ke10

020

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

00

L58

068

078

088

098

010

8011

8012

8013

8014

8015

8016

8017

8018

8019

8020

8021

8022

8023

8024

80

A5

67

89

1011

1213

1415

1617

1819

2021

2223

24

B12

1416

1820

2224

2628

3032

3436

3840

4244

4648

50

C40

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

00

Wei

ght (

kg)

9.3

10.2

11.

1 12

.0 1

2.9

13.9

14.

8 15

.7 1

6.6

17.5

18.

5 19

.4 2

0.3

21.2

22.

1 23

.1 2

4.0

24.9

25.

8 26

.7

Specifications

7

7-6

7-1 Main unit

7-7

MF7

D d

oubl

e-ca

rria

ge h

oriz

onta

l mou

nt m

odel

Sta

ndar

d ty

pe (F

or o

ptio

nal L

-typ

e ca

ble

carr

ier)

80 : Top face of slider

10

(79.5)

10

58.7

D

84.8

173.537(216.5)

77

138.5

(Diameter of roller:φ30)Note 3

179

Cro

ss-s

ectio

n of

cab

le c

arrie

r

66 50

3529

φ6.7

φ7.5

Det

ail o

f sec

tion

D

3.25.7

1.5

2.6

5

90C

±0.0

2(9

0)

100

40A×

100

(40)

50

B-M

4×0.

7 De

pth

92-

φ10H

7 Re

fer t

o cr

oss-

sect

ion

of E

-E.

(Between φ4H7±0.02)64.5

105

Gro

und

term

inal

(M4)

Gro

und

term

inal

(M4)

30±0

.025080

65

(79)

L

4-φ4

H7

Dep

th 1

08-

M5×

0.8

Dep

th 1

0

(190

)

110

40±1

(Not

e 2)

40±1 (N

ote

2)

Effe

ctiv

e st

roke

140±

5 (N

ote

1)

Effe

ctiv

e st

roke

140±

5 (N

ote

1)(2

00 :

Min

imum

dist

ance

bet

ween

car

riage

s)

(50)

Note

4

(50)

Note

4

Cro

ss-s

ectio

n of

E-E

6

(φ10H7)

11 2

E E

No

te 1

. P

osi

tio

n o

f th

e ta

ble

sli

der

wh

en r

etu

rned

to

th

e o

rigi

n.

No

te2

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 3

. Fo

r m

od

els

wit

h a

3,0

00

mm

or

lon

ger

stro

ke,

a ro

ller

is

inst

alle

d t

o p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.N

ote

4.

Pro

tru

sio

n i

s th

e d

ista

nce

th

e ca

ble

car

rier

ext

end

s fr

om

th

e ed

ge o

f th

e u

nit

.

Effe

ctive

stro

ke10

020

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

00

L58

068

078

088

098

010

8011

8012

8013

8014

8015

8016

8017

8018

8019

8020

8021

8022

8023

8024

8025

8026

8027

8028

8029

8030

8031

8032

8033

8034

8035

8036

8037

8038

8039

8040

8041

8042

80

A5

67

89

1011

1213

1415

1617

1819

2021

2223

2425

2627

2829

3031

3233

3435

3637

3839

4041

42

B12

1416

1820

2224

2628

3032

3436

3840

4244

4648

5052

5456

5860

6264

6668

7072

7476

7880

8284

86

C40

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

0041

00

Wei

ght (

kg)

9.3

10.2

11.

1 12

.0 1

2.9

13.9

14.

8 15

.7 1

6.6

17.5

18.

5 19

.4 2

0.3

21.2

22.

1 23

.1 2

4.0

24.9

25.

8 26

.7 2

7.7

28.6

29.

5 30

.4 3

1.3

32.3

33.

2 34

.1 3

5.0

35.9

36.

9 37

.8 3

8.7

39.6

40.

5 41

.5 4

2.4

43.3

7-6

7

Specifications

7-7

7-1 Main unitM

F7D

dou

ble-

carr

iage

hor

izon

tal m

ount

mod

el F

lat t

ype

E E

Opt

iona

l cab

le c

arrie

r S ty

peO

ptio

nal c

able

car

rier M

type

80 : Top face of slider

7710

(79.5)

10

58.7

D

118

84.8

12.5

(92)

Inst

alla

tion

surfa

ce17

214

742

.4

30±0

.02

5080

65

(79)

L

4-φ4

H7

Dep

th 1

08-

M5×

0.8

Dep

th 1

0

(190

)

110

40±1

(Not

e 1)

40±1

(Not

e 1)

Effe

ctiv

e st

roke

140±

5 (N

ote

1)

Effe

ctiv

e st

roke

140±

5 (N

ote

1)(2

00 :

Min

imum

dist

ance

bet

ween

car

riage

s)

(Between φ4H7±0.02)

Gro

und

term

inal

(M4)

64.5

Gro

und

term

inal

(M4)

90C

±0.0

2(9

0)

100

40A×

100

(40)

50

B-M

4×0.

7 D

epth

9

2-φ1

0H7

Ref

er to

cro

ss-s

ectio

n of

E-E

.S

Cro

ss-s

ectio

n of

cab

le c

arrie

r

M49

20.5

40

14

15

20.514

24

Det

ail o

f sec

tion

D

3.25.7

1.5

2.6

5

Cro

ss-s

ectio

n of

E-E

(φ10H7)

611 2

No

te 1

. P

osi

tio

n o

f th

e ta

ble

sli

der

wh

en r

etu

rned

to

th

e o

rigi

n.

No

te2

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

Effe

ctive

stro

ke10

020

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

00

L58

068

078

088

098

010

8011

8012

8013

8014

8015

8016

8017

8018

8019

8020

8021

8022

8023

8024

80

A5

67

89

1011

1213

1415

1617

1819

2021

2223

24

B12

1416

1820

2224

2628

3032

3436

3840

4244

4648

50

C40

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

00

Wei

ght (

kg)

9.3

10.2

11.

1 12

.0 1

2.9

13.9

14.

8 15

.7 1

6.6

17.5

18.

5 19

.4 2

0.3

21.2

22.

1 23

.1 2

4.0

24.9

25.

8 26

.7

Specifications

7

7-8

7-1 Main unit

7-9

7-1-2 MF15 Basic specifications

Model name MF15 MF15-W MF15D MF15D-W

Driving method Steel cored linear motor flat magnet

Repeated positioning accuracy (µm) ±5

Scale (µm) Magnetic method, resolution: 1

Maximum speed (mm/sec) 2 2500

Maximum carrying weight (kg) 1 30

Rated thrust (N) 54

Maximum stroke (mm) 4000 2000 3800 1800

Bearing method 2 guide rails and 4 blocks (with retainer)

Maximum cross-section outside dimensions (mm)

W100×H80 (excluding cable carrier)

Overall length (mm) Stroke length + 260 Stroke length + 460

Cable length (m) Standard : 3.5 Option: 5/10

Controller SR1-P, RCX221, RCX240, RDP, TS-P

1: Weight per one carrier2: See the maximum speed table below.

Payload (kg) Maximum speed (m/s)

15 or less 2.5

20 2.2

25 1.8

30 1.5

Static load moment

(Unit: N•m)

MY MP MR

290 291 256

0 5 10 15 20Payload (kg)

25 30 35Max

imum

spe

ed (

m/s

) 3.0

2.5

2.0

1.5

1.0

0.5

0

M P

M R

M Y

7-8

7

Specifications

7-9

7-1 Main unit

Allowable overhang **Distancefromthecenteronthetopfaceofslidertothegravitycenteroftheitembeing

carried. (This is calculated assuming that the service life of the guide is 10,000km.)

n Horizontal installation

A

C

B

(Unit: mm)

A B C

5kg 3000 3000 915

10kg 2604 1542 481

15kg 2368 1051 340

20kg 1820 600 260

25kg 1470 450 175

30kg 1250 310 145

n Vertical installation

C

BA

(Unit: mm)

A B C

5kg 865 1880 3060

10kg 410 905 2115

15kg 255 575 1910

20kg 170 410 1780

25kg 120 295 1660

30kg 90 215 1440

Specifications

7

7-10

7-1 Main unit

7-11

MF1

5 si

ngle

-car

riag

e ho

rizo

ntal

mou

nt m

odel

Opt

iona

l cab

le c

arrie

r S /

M ty

peO

ptio

nal c

able

car

rier L

type

186.

5 : M

type

(161

.5 :

S ty

pe)

100

184

188

16790

φ30Diameter of roller

20

100

G10

0

6680 : Top face of slider

32.5

Det

ail o

f sec

tion

G

23.

7

7.24.5

LS

Cro

ss-s

ectio

n of

cab

le c

arrie

r

M49

20.5

40

14

15

20.514

2466 50

3529

φ8 φ7.5

(Between φ6H7±0.02)

6848

±0.0

2

186

31±1

(Not

e 2)

8494

2-φ6

H7

Dep

th 1

04-

M6x

1.0

Dep

th 1

2

90

Effe

ctiv

e st

roke

L13

0±5

(L s

ide

orig

in p

ositi

on)

(130

: W

hen

at R

sid

e or

igin

)

31±1

(Not

e 2)

(130

: W

hen

at L

sid

e or

igin

)13

0±5

(R s

ide

orig

in p

ositi

on)

Gro

und

term

inal

(M4)

30

(Not

e 3)

A20

0Bx

200

(A)

80D

±0.0

2

60

C-M

6x1.

0 D

epth

10

2-φ1

0H7

Dep

th 7

No

te1

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 2

. T

he

ori

gin

is

set

on

th

e L

sid

e at

th

e ti

me

of

ship

men

t. I

t ca

n b

e ch

ange

d t

o t

he

R

sid

e b

y p

aram

eter

set

tin

g.N

ote

3.

For

mo

del

s w

ith

a 2

,10

0m

m o

r lo

nge

r st

roke

, o

pti

on

al L

typ

e ca

ble

car

rier

s ca

n

on

ly b

e u

sed

.

No

te 4

. Fo

r m

od

els

wit

h a

3,0

00

mm

or

lon

ger

stro

ke a

nd

an

op

tio

nal

L t

ype

cab

le c

arri

er,

a ro

ller

is

inst

alle

d t

o p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.N

ote

5.

Pro

tru

sio

n i

s th

e d

ista

nce

th

e ca

ble

car

rier

ext

end

s fr

om

th

e ed

ge o

f u

nit

wh

en a

n

op

tio

nal

L t

ype

cab

le c

arri

er i

s u

sed

.

Effe

ctive

stro

ke30

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

00L

560

660

760

860

960

1060

1160

1260

1360

1460

1560

1660

1760

1860

1960

2060

2160

2260

2360

2460

2560

2660

2760

2860

2960

3060

3160

3260

3360

3460

3560

3660

3760

3860

3960

4060

4160

4260

A80

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

30B

23

34

45

56

67

78

89

910

1011

1112

1213

1314

1415

1516

1617

1718

1819

1920

2021

C6

88

1010

1212

1414

1616

1818

2020

2222

2424

2626

2828

3030

3232

3434

3636

3838

4040

4242

44D

400

500

600

700

800

900

1000

1100

1200

1300

1400

1500

1600

1700

1800

1900

2000

2100

2200

2300

2400

2500

2600

2700

2800

2900

3000

3100

3200

3300

3400

3500

3600

3700

3800

3900

4000

4100

Wei

ght (

kg)

8.3

9.3

10.3

11.3

12.3

13.3

14.3

15.4

16.4

17.4

18.4

19.4

20.4

21.4

22.4

23.4

24.4

25.4

26.4

27.4

28.4

29.4

30.4

31.4

32.4

33.4

34.4

35.8

36.8

37.8

38.8

39.8

40.8

41.8

42.8

43.8

44.8

45.8

7-10

7

Specifications

7-11

7-1 Main unitM

F15

sing

le-c

arri

age

wal

l mou

nt m

odel

l

LM

SC

ross

-sec

tion

of o

ptio

nal c

able

car

rier

1524 14

20.5

20.514

404966 50

2935

φ7.7

φ7.5

31±2

48±0

.02

68 90(1

86)

(94)

(130

)Ef

fect

ive

stro

keL

(50:

Not

e 3)

(Not

e 1)

(Not

e 1)

(130

)13

0±5

(L si

de or

igin p

ositio

n)

Gro

und

term

inal

(M4)

Stan

dard

and

S ty

pes

M ty

pe

Gro

und

term

inal

(M4)

20E

L ty

peGro

und

term

inal

(M4)

A20

0B×

200

80D

±0.0

2

(A)

60

2066

80:

Top

face

of s

lider

79

100197

6

S ty

pe Stan

dard

and

S ty

pes

G20

197

99.5

Opt

iona

l cab

le c

arrie

r M

type

24

292.4

103.

5

Opt

iona

l cab

le c

arrie

r L

type

4.5

7.2

23.76.2

Det

ail o

f sec

tion

G

C-M

6×1.

0 D

epth

10

2-φ1

0H7

Dep

th 7

130±

5 (R

side

origi

n pos

ition)

84 (Between φ6H7±0.02)

31±2

4-M

6×1.

0 D

epth

13

2-φ6

H7

Dep

th 1

0

112

No

te 1

. D

ista

nce

fro

m b

oth

en

ds

to t

he

mec

han

ical

sto

pp

er.

No

te 2

. T

he

ori

gin

is

set

on

th

e R

sid

e at

th

e ti

me

of

ship

men

t. I

t ca

n b

e ch

ange

d t

o t

he

L si

de

by

par

amet

er s

etti

ng.

No

te 3

. P

rotr

usi

on

is

the

dis

tan

ce t

he

cab

le c

arri

er e

xten

ds

fro

m t

he

edge

of

un

it w

hen

an

op

tio

nal

L t

ype

cab

le c

arri

er i

s u

sed

.

Effe

ctive

stro

ke3

00

40

05

00

60

07

00

80

09

00

10

00

110

01

20

01

30

01

40

01

50

01

60

01

70

01

80

01

90

02

00

0L

56

06

60

76

08

60

96

01

06

011

60

12

60

13

60

14

60

15

60

16

60

17

60

18

60

19

60

20

60

21

60

22

60

A8

03

08

03

08

03

08

03

08

03

08

03

08

03

08

03

08

03

0B

23

34

45

56

67

78

89

91

01

011

C6

88

10

10

12

12

14

14

16

16

18

18

20

20

22

22

24

D4

00

50

06

00

70

08

00

90

01

00

011

00

12

00

13

00

14

00

15

00

16

00

17

00

18

00

19

00

20

00

21

00

E3

20

37

04

20

47

05

20

57

06

20

67

07

20

77

08

20

87

09

20

97

01

02

01

07

011

20

117

0W

eigh

t (kg

)8

.3

9.3

1

0.3

11

.3

12

.3

13

.3

14

.3

15

.4

16

.4

17

.4

18

.4

19

.4

20

.4

21

.4

22

.4

23

.4

24

.4

25

.4

Specifications

7

7-12

7-1 Main unit

7-13

MF1

5D d

oubl

e-ca

rria

ge h

oriz

onta

l mou

nt m

odel

Opt

iona

l cab

le c

arrie

r S /

M ty

pe

Opt

iona

l cab

le c

arrie

r L ty

pe100

186

: M ty

pe(1

61 :

S ty

pe)

184

188

16790

φ30Diameter of roller

32.5

80 : Top face of slider66

100

G

100

20

Det

ail o

f sec

tion

G

23.

7

7.24.5

LS

Cro

ss-s

ectio

n of

cab

le c

arrie

r

M49

20.5

40

14

15

20.514

2466 50

φ8 φ7.5

(Between φ6H7±0.02)

(Between φ6H7±0.02)

6848

±0.0

2

186

31±1

(Not

e 2)

31±1

(Not

e 2)

8494

2-φ6

H7

Dep

th 1

04-

M6x

1.0

Dep

th 1

290

L13

0±5

(Not

e 1)

130±

5 (N

ote

1)

90

84

186

48±0

.02

68

Effe

ctiv

e st

roke

Effe

ctiv

e st

roke

(200

: M

inim

um d

ista

nce

betw

een

carri

ages

)

2-φ6

H7

Dep

th 1

0

4-M

6x1.

0 D

epth

12

30

(Not

e 3)

Gro

und

term

inal

(M4)

Gro

und

term

inal

(M4)

30

(Not

e 3)

A20

0Bx

200

(A)

80D

±0.0

2

60

C-M

6x1.

0 D

epth

10

2-φ1

0H7

Dep

th 7

3529

No

te 1

. P

osi

tio

n o

f th

e ta

ble

sli

der

wh

en r

etu

rned

to

th

e o

rigi

n.

No

te2

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 3

. Fo

r m

od

els

wit

h a

2,1

00

mm

or

lon

ger

stro

ke,

op

tio

nal

L t

ype

cab

le c

arri

ers

can

o

nly

be

use

d.

No

te 4

. Fo

r m

od

els

wit

h a

3,0

00

mm

or

lon

ger

stro

ke a

nd

an

op

tio

nal

L t

ype

cab

le c

arri

er,

a ro

ller

is

inst

alle

d t

o p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.N

ote

5.

Pro

tru

sio

n i

s th

e d

ista

nce

th

e ca

ble

car

rier

ext

end

s fr

om

th

e ed

ge o

f u

nit

wh

en a

n

op

tio

nal

L t

ype

cab

le c

arri

er i

s u

sed

.

Effe

ctive

stro

ke10

020

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

00

L56

066

076

086

096

010

6011

6012

6013

6014

6015

6016

6017

6018

6019

6020

6021

6022

6023

6024

6025

6026

6027

6028

6029

6030

6031

6032

6033

6034

6035

6036

6037

6038

6039

6040

6041

6042

60

A80

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

3080

30

B2

33

44

55

66

77

88

99

1010

1111

1212

1313

1414

1515

1616

1717

1818

1919

2020

21

C6

88

1010

1212

1414

1616

1818

2020

2222

2424

2626

2828

3030

3232

3434

3636

3838

4040

4242

44

D40

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

0041

00

Wei

ght (

kg)

10.3

11.5

12.6

13.7

14.8

16.0

17.1

18.2

19.3

20.5

21.6

22.7

23.8

25.0

26.1

27.2

28.3

29.5

30.6

31.7

32.8

34.0

35.1

36.2

37.4

38.5

39.6

41.0

42.2

43.3

44.4

45.5

46.7

47.8

48.9

50.0

51.2

52.3

7-12

7

Specifications

7-13

7-1 Main unitM

F15D

dou

ble-

carr

iage

wal

l mou

nt m

odel

l

31±2

(200

: Min

imum

distan

ce be

tween

carria

ges)

Effe

ctiv

e st

roke

Effe

ctiv

e st

roke

31±2

48±0

.02

68 90(1

86)

(94)

130±

5

112

130±

5L

112

48±0

.02

68 90 (186

)(94)

(50)

(50:

Not

e 3)

(Not

e 1)

(Not

e 1)

(Note

3)

Stan

dard

and

S ty

pes

Gro

und

term

inal

(M4)

M ty

pe

Gro

und

term

inal

(M4)

2020

EE

L ty

pe

Gro

und

term

inal

(M4)

60

A20

0B×

200

80D

±0.0

2

(A)

79

100

6680

:To

p fa

ce o

f slid

er20

1976

S ty

pe

G

2099.5

197

103.

5

24

292.47.

24.

5

23.76.2

LM

S

1524 14

20.5

20.514

404966 50

2935

φ7.7

φ7.5

Stan

dard

and

S ty

pes

Opt

iona

l cab

le c

arrie

r M

type

Opt

iona

l cab

le c

arrie

r L

type

C-M

6×1.

0 D

epth

10

2-φ1

0H7

Dep

th 7

84 (Between φ6H7±0.02)

4-M

6×1.

0 De

pth

122-

φ6H

7 D

epth

10

4-M

6×1.

0 D

epth

12

2-φ6

H7 D

epth

10

84 (Between φ6H7±0.02)

Cro

ss-s

ectio

n of

opt

iona

l cab

le c

arrie

rD

etai

l of s

ectio

n G

No

te 1

. D

ista

nce

fro

m b

oth

en

ds

to t

he

mec

han

ical

sto

pp

er.

No

te 2

. P

rotr

usi

on

is

the

dis

tan

ce t

he

cab

le c

arri

er e

xten

ds

fro

m t

he

edge

of

un

it w

hen

an

op

tio

nal

L t

ype

cab

le c

arri

er i

s u

sed

.

Effe

ctive

stro

ke1

00

20

03

00

40

05

00

60

07

00

80

09

00

10

00

110

01

20

01

30

01

40

01

50

01

60

01

70

01

80

0L

56

06

60

76

08

60

96

01

06

011

60

12

60

13

60

14

60

15

60

16

60

17

60

18

60

19

60

20

60

21

60

22

60

A8

03

08

03

08

03

08

03

08

03

08

03

08

03

08

03

08

03

0B

23

34

45

56

67

78

89

91

01

011

C6

88

10

10

12

12

14

14

16

16

18

18

20

20

22

22

24

D4

00

50

06

00

70

08

00

90

01

00

011

00

12

00

13

00

14

00

15

00

16

00

17

00

18

00

19

00

20

00

21

00

E2

20

27

03

20

37

04

20

47

05

20

57

06

20

67

07

20

77

08

20

87

09

20

97

01

02

01

07

0W

eigh

t (kg

)1

0.3

11

.5

12

.6

13

.7

14

.8

16

.0

17

.1

18

.2

19

.3

20

.5

21

.6

22

.7

23

.8

25

.0

26

.1

27

.2

28

.3

29

.5

Specifications

7

7-14

7-1 Main unit

7-15

7-1-3 MF20

Basic specifications

Model name MF20 MF20D

Driving method Steel cored linear motor flat magnet

Repeated positioning accuracy (µm) ±5

Scale (µm) Magnetic method, resolution: 1

Maximum speed (mm/sec) 2 2500

Maximum carrying weight (kg) 1 40

Rated thrust (N) 86

Maximum stroke (mm) 4050 3850

Bearing method 2 guide rails and 6 blocks (with retainer)

Maximum cross-section outside dimensions (mm)

W150×H80 (excluding cable carrier)

Overall length (mm) Stroke length + 260 Stroke length + 460

Cable length (m) Standard : 3.5 Option: 5/10

Controller SR1-P, RCX221, RCX240, RDP, TS-P

1: Weight per one carrier2: See the maximum speed table below.

Payload (kg) Maximum speed (m/s)

20 or less 2.5

25 2.3

30 2.0

35 1.8

40 1.5

Static load moment

(Unit: N•m)

MY MP MR

373 373 328

0 5 101520Payload (kg)

2530 3540 45Max

imum

spe

ed (

m/s

) 3.0

2.5

2.0

1.5

1.0

0.5

0

M P

M R

M Y

7-14

7

Specifications

7-15

7-1 Main unit

Allowable overhang **Distancefromthecenteronthetopfaceofslidertothegravitycenteroftheitembeing

carried. (This is calculated assuming that the service life of the guide is 10,000km.)

n Horizontal installation

A

C

B

(Unit: mm)

A B C

10kg 3156 1747 1196

15kg 2811 1176 883

20kg 2679 890 717

25kg 2190 720 505

30kg 1830 605 370

35kg 1580 525 275

40kg 1390 465 225

n Vertical installation

C

BA

(Unit: mm)

A B C

10kg 1220 1320 2540

15kg 870 850 2200

20kg 670 610 2030

25kg 485 400 1280

30kg 350 325 1050

35kg 265 270 890

40kg 235 230 765

Specifications

7

7-16

7-1 Main unit

7-17

MF2

0 si

ngle

-car

riag

e ho

rizo

ntal

mou

nt m

odel

Det

ail o

f sec

tion

G

73.

72.

5

4.57.2

(100)

240.

5 (M

opt

ion)

215.

5 (S

opt

ion)

Opt

iona

l cab

le c

arrie

r S /

M ty

pe

1464

80 : Top face of slider

186

(100)

150

32.5

G

24

1420.5

1540

1420.5

49

Cro

ss-s

ectio

n of

cab

le c

arrie

r

MS

2935

5066

φ8 φ7.5

L

L13

0±5

(L s

ide

orig

in p

ositi

on)

(130

: W

hen

at R

sid

e or

igin

)Ef

fect

ive

stro

ke(1

30 :

Whe

n at

L s

ide

orig

in)

130±

5 (R

sid

e or

igin

pos

ition

)

(Between φ6H7±0.02)

136

120

190

70

29±1

(Not

e 1)

50±0

.02

4-φ6

H7

+0.0

12 0

Dep

th 1

04-

M6x

1.0

Dep

th 1

229

±1(N

ote

1)

(A)

30

(Not

e 5)

Gro

und

term

inal

(M4)

105

D±0

.02

2-φ1

0H7

+0.0

15 0

Dep

th 1

0

ABx

200

200

C-M

6x1.

0 D

epth

10

10098

Opt

iona

l cab

le c

arrie

r L ty

pe

90φ30Diameter of roller

167

238

Not

e 4

No

te1

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 2

. T

he

ori

gin

is

set

on

th

e L

sid

e at

th

e ti

me

of

ship

men

t. I

t ca

n b

e ch

ange

d t

o t

he

R

sid

e b

y p

aram

eter

set

tin

g.N

ote

3.

For

mo

del

s w

ith

a 2

,05

0m

m o

r lo

nge

r st

roke

, o

pti

on

al L

typ

e ca

ble

car

rier

s ca

n

on

ly b

e u

sed

.

No

te 4

. Fo

r m

od

els

wit

h a

3,0

50

mm

or

lon

ger

stro

ke a

nd

an

op

tio

nal

L t

ype

cab

le c

arri

er,

a ro

ller

is

inst

alle

d t

o p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.N

ote

5.

Pro

tru

sio

n i

s th

e d

ista

nce

th

e ca

ble

car

rier

ext

end

s fr

om

th

e ed

ge o

f u

nit

wh

en a

n

op

tio

nal

L t

ype

cab

le c

arri

er i

s u

sed

.

Effe

ctive

stro

ke15

025

035

045

055

065

075

085

095

010

5011

5012

5013

5014

5015

5016

5017

5018

5019

5020

5021

5022

5023

5024

5025

5026

5027

5028

5029

5030

5031

5032

5033

5034

5035

5036

5037

5038

5039

5040

50

L41

051

061

071

081

091

010

1011

1012

1013

1014

1015

1016

1017

1018

1019

1020

1021

1022

1023

1024

1025

1026

1027

1028

1029

1030

1031

1032

1033

1034

1035

1036

1037

1038

1039

1040

1041

1042

1043

10

A10

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

55

B1

22

33

44

55

66

77

88

99

1010

1111

1212

1313

1414

1515

1616

1717

1818

1919

2020

21

C4

66

88

1010

1212

1414

1616

1818

2020

2222

2424

2626

2828

3030

3232

3434

3636

3838

4040

4242

44

D20

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

0041

00

Wei

ght (

kg)

8.4

10.1

11.7

13.3

15.0

16.6

18.2

19.8

21.5

23.1

24.7

26.4

28.0

29.6

31.3

32.9

34.5

36.1

37.8

39.4

41.0

42.7

44.3

45.9

47.6

49.2

50.8

52.4

54.1

55.7

57.3

59.0

60.6

62.2

63.9

65.5

67.1

68.7

70.4

72.0

7-16

7

Specifications

7-17

7-1 Main unitM

F20

sing

le-c

arri

age

wal

l mou

nt m

odel

24 15

20.514

S Cro

ss-s

ectio

n of

opt

iona

l cab

le c

arrie

r

20.514

M49 403529

66 50

φ7.5

φ8L

100

A20

0Bx

200

C-M

6x1.

0 D

epth

10

(A)

105

D±0

.02

2-φ1

0H7

+0.0

15 0

Dep

th 1

0

Det

ail o

f sec

tion

G

7.2

4.5

73.7 2.5

325

φ30

Dia

met

er o

f rol

ler

105

Opt

iona

l cab

le c

arrie

r L ty

peO

ptio

nal c

able

car

rier M

type

41.3

(5) 2901509

120.

3

Opt

iona

l cab

le c

arrie

r S ty

pe79

250150

G14 80

Top

face

of s

lider

64

Gro

und

term

inal

(M4)

E13

Gro

und

term

inal

(M4)

(30

: Not

e 5)

130±

5 (R

sid

e or

igin

pos

ition

)(1

30: W

hen

at L

sid

e or

igin

)

M a

nd L

type

s

Stan

dard

and

S ty

pes

(130

: W

hen

at R

sid

e or

igin

)13

0±5

(L s

ide

orig

in p

ositi

on)

Effe

ctiv

e st

roke

L

108

4-M

6x1.

0 D

epth

12

29±1

(Not

e 1)

4-φ6

H7

+0.0

12 0

Dep

th 1

029

±1(N

ote

1)19

070

50±0

.02

136(Between φ6H7±0.02)

120

No

te1

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 2

. T

he

ori

gin

is

set

on

th

e R

sid

e at

th

e ti

me

of

ship

men

t. I

t ca

n b

e ch

ange

d t

o t

he

L si

de

by

par

amet

er s

etti

ng.

No

te 3

. Fo

r m

od

els

wit

h a

2,0

50

mm

or

lon

ger

stro

ke,

op

tio

nal

L t

ype

cab

le c

arri

ers

can

o

nly

be

use

d.

No

te 4

. Fo

r m

od

els

wit

h a

3,0

50

mm

or

lon

ger

stro

ke a

nd

an

op

tio

nal

L t

ype

cab

le c

arri

er,

a ro

ller

is

inst

alle

d t

o p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.N

ote

5.

Pro

tru

sio

n i

s th

e d

ista

nce

th

e ca

ble

car

rier

ext

end

s fr

om

th

e ed

ge o

f u

nit

wh

en a

n

op

tio

nal

L t

ype

cab

le c

arri

er i

s u

sed

.

Effe

ctive

stro

ke15

025

035

045

055

065

075

085

095

010

5011

5012

5013

5014

5015

5016

5017

5018

5019

5020

5021

5022

5023

5024

5025

5026

5027

5028

5029

5030

5031

5032

5033

5034

5035

5036

5037

5038

5039

5040

50

L41

051

061

071

081

091

010

1011

1012

1013

1014

1015

1016

1017

1018

1019

1020

1021

1022

1023

1024

1025

1026

1027

1028

1029

1030

1031

1032

1033

1034

1035

1036

1037

1038

1039

1040

1041

1042

1043

10

A10

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

55

B1

22

33

44

55

66

77

88

99

1010

1111

1212

1313

1414

1515

1616

1717

1818

1919

2020

21

C4

66

88

1010

1212

1414

1616

1818

2020

2222

2424

2626

2828

3030

3232

3434

3636

3838

4040

4242

44

D20

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

0041

00

E22

027

032

037

042

047

052

057

062

067

072

077

082

087

092

097

010

2010

7011

2011

7012

2012

7013

2013

7014

2014

7015

2015

7016

2016

7017

2017

7018

2018

7019

2019

7020

2020

7021

2021

70

Wei

ght (

kg)

8.4

10.1

11.7

13.3

15.0

16.6

18.2

19.8

21.5

23.1

24.7

26.4

28.0

29.6

31.3

32.9

34.5

36.1

37.8

39.4

41.0

42.7

44.3

45.9

47.6

49.2

50.8

52.4

54.1

55.7

57.3

59.0

60.6

62.2

63.9

65.5

67.1

68.7

70.4

72.0

Specifications

7

7-18

7-1 Main unit

7-19

MF2

0D d

oubl

e-ca

rria

ge h

oriz

onta

l mou

nt m

odel

72.

53.

7

7.24.5

Det

ail o

f se

ctio

n G

Opt

iona

l cab

le c

arrie

r S /

M ty

pe

240.

5 (M

opt

ion)

215.

5 (S

opt

ion)

(100)

32.5

150

80 : Top face of slider6414

G

(100)

186

20.514

1524

20.514

49 40

3529

66 50 LS

Cro

ss-s

ectio

n of

opt

iona

l cab

le c

arrie

r

Mφ8 φ7

.5

C-M

6x1.

0 D

epth

10

200

(A)

Bx20

0A

2-φ1

0H7

+0.0

150

Dep

th 1

0D

±0.0

210

5

100

(30)

(Not

e 5)

30 (Not

e 5)

Gro

und

term

inal

(M4)

L

130±

5 (N

ote

1)

190 70

50±0

.02

29±1

(Not

e 2)

(Between φ6H7±0.02) 120

136

(Between φ6H7±0.02)

29±1

(Not

e 2)

120

Effe

ctiv

e st

roke

(200

: M

inim

um d

ista

nce

betw

een

carri

ages

)

4-φ6

H7+0

.012

0 D

epth

10

4-M

6x1.

0 D

epth

12

4-M

6x1.

0 D

epth

12

Effe

ctiv

e st

roke

4-φ6

H7

+0.0

120

Dep

th 1

050

±0.0

270

130±

5 (N

ote

1)

190

167

Opt

iona

l cab

le c

arrie

r L ty

pe

φ30

Dia

met

er o

f rol

ler

90

238

Not

e 4

No

te 1

. P

osi

tio

n o

f th

e ta

ble

sli

der

wh

en r

etu

rned

to

th

e o

rigi

n.

No

te2

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 3

. Fo

r m

od

els

wit

h a

2,0

50

mm

or

lon

ger

stro

ke,

op

tio

nal

L t

ype

cab

le c

arri

ers

can

o

nly

be

use

d.

No

te 4

. Fo

r m

od

els

wit

h a

3,0

50

mm

or

lon

ger

stro

ke a

nd

an

op

tio

nal

L t

ype

cab

le c

arri

er,

a ro

ller

is

inst

alle

d t

o p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.N

ote

5.

Pro

tru

sio

n i

s th

e d

ista

nce

th

e ca

ble

car

rier

ext

end

s fr

om

th

e ed

ge o

f u

nit

wh

en a

n

op

tio

nal

L t

ype

cab

le c

arri

er i

s u

sed

.

Effe

ctive

stro

ke15

025

035

045

055

065

075

085

095

010

5011

5012

5013

5014

5015

5016

5017

5018

5019

5020

5021

5022

5023

5024

5025

5026

5027

5028

5029

5030

5031

5032

5033

5034

5035

5036

5037

5038

50

L61

071

081

091

010

1011

1012

1013

1014

1015

1016

1017

1018

1019

1020

1021

1022

1023

1024

1025

1026

1027

1028

1029

1030

1031

1032

1033

1034

1035

1036

1037

1038

1039

1040

1041

1042

1043

10

A10

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

B2

33

44

55

66

77

88

99

1010

1111

1212

1313

1414

1515

1616

1717

1818

1919

2020

21

C6

88

1010

1212

1414

1616

1818

2020

2222

2424

2626

2828

3030

3232

3434

3636

3838

4040

4242

44

D40

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

0041

00

Wei

ght (

kg)

14.9

16.6

18.3

20.0

21.7

23.5

25.2

26.9

28.6

30.3

32.0

33.7

35.4

37.2

38.9

40.6

42.3

44.0

45.7

47.4

49.1

50.8

52.6

54.3

56.0

57.7

59.4

61.1

62.8

64.5

66.3

68.0

69.7

71.4

73.1

74.8

76.5

78.2

7-18

7

Specifications

7-19

7-1 Main unitM

F20D

dou

ble-

carr

iage

wal

l mou

nt m

odel

24 15

1420.5

4049

Cro

ss-s

ectio

n of

opt

iona

l cab

le c

arrie

rM

SL

1420.5

φ8 φ7.5

5066

2935

73.7 2.5

Det

ail o

f sec

tion

G

4.5

7.2

φ30

Dia

met

er o

f rol

ler

325105

Opt

iona

l cab

le c

arrie

r M ty

peO

ptio

nal c

able

car

rier L

type

41.31509

290(5)

79O

ptio

nal c

able

car

rier S

type

120.

3

G

150250

14 64 80To

p fa

ce o

f slid

er

ABx

200

(A)

200

C-M

6x1.

0 D

epth

10

100

105

D±0

.02

2-φ1

0H7

+0.0

15 0

Dep

th 1

0

M a

nd L

type

s

Stan

dard

and

S ty

pes

13E

13E

Gro

und

term

inal

(M4)

Gro

und

term

inal

(M4)

(Between φ6H7±0.02)

136

120

30 (N

ote

5)

50±0

.02

29±1

(Not

e 2)

70 190

4-φ6

H7

+0.0

120

Dep

th 1

0

4-M

6x1.

0 D

epth

12

50±0

.02

70 190

29±1

(Not

e 2)

4-φ6

H7

+0.0

12 0

Dep

th 1

0

4-M

6x1.

0 D

epth

12

(Between φ6H7±0.02) 120

136

Effe

ctiv

e st

rokeL

30 (N

ote

5)

130±

5 (N

ote

1)

130±

5 (N

ote

1)Ef

fect

ive

stro

ke(2

00 :

Min

imum

dis

tanc

e be

twee

n ca

rriag

es)

108

108

No

te 1

. P

osi

tio

n o

f th

e ta

ble

sli

der

wh

en r

etu

rned

to

th

e o

rigi

n.

No

te2

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 3

. Fo

r m

od

els

wit

h a

2,0

50

mm

or

lon

ger

stro

ke,

op

tio

nal

L t

ype

cab

le c

arri

ers

can

o

nly

be

use

d.

No

te 4

. Fo

r m

od

els

wit

h a

3,0

50

mm

or

lon

ger

stro

ke a

nd

an

op

tio

nal

L t

ype

cab

le c

arri

er,

a ro

ller

is

inst

alle

d t

o p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.N

ote

5.

Pro

tru

sio

n i

s th

e d

ista

nce

th

e ca

ble

car

rier

ext

end

s fr

om

th

e ed

ge o

f u

nit

wh

en a

n

op

tio

nal

L t

ype

cab

le c

arri

er i

s u

sed

.

Effe

ctive

stro

ke15

025

035

045

055

065

075

085

095

010

5011

5012

5013

5014

5015

5016

5017

5018

5019

5020

5021

5022

5023

5024

5025

5026

5027

5028

5029

5030

5031

5032

5033

5034

5035

5036

5037

5038

50

L61

071

081

091

010

1011

1012

1013

1014

1015

1016

1017

1018

1019

1020

1021

1022

1023

1024

1025

1026

1027

1028

1029

1030

1031

1032

1033

1034

1035

1036

1037

1038

1039

1040

1041

1042

1043

10

A10

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

B2

33

44

55

66

77

88

99

1010

1111

1212

1313

1414

1515

1616

1717

1818

1919

2020

21

C6

88

1010

1212

1414

1616

1818

2020

2222

2424

2626

2828

3030

3232

3434

3636

3838

4040

4242

44

D40

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

0041

00

E22

027

032

037

042

047

052

057

062

067

072

077

082

087

092

097

010

2010

7011

2011

7012

2012

7013

2013

7014

2014

7015

2015

7016

2016

7017

2017

7018

2018

7019

2019

7020

2020

70

Wei

ght (

kg)

14.9

16.6

18.3

20.0

21.7

23.5

25.2

26.9

28.6

30.3

32.0

33.7

35.4

37.2

38.9

40.6

42.3

44.0

45.7

47.4

49.1

50.8

52.6

54.3

56.0

57.7

59.4

61.1

62.8

64.5

66.3

68.0

69.7

71.4

73.1

74.8

76.5

78.2

Specifications

7

7-20

7-1 Main unit

7-21

7-1-4 MF30

Basic specifications

Model name MF30 MF30D

Driving method Steel cored linear motor flat magnet

Repeated positioning accuracy (µm) ±5

Scale (µm) Magnetic method, resolution: 1

Maximum speed (mm/sec) 2 2500

Maximum carrying weight (kg) 1 60

Rated thrust (N) 125

Maximum stroke (mm) 4000 3750

Bearing method 2 guide rails and 6 blocks (with retainer)

Maximum cross-section outside dimensions (mm)

W150×H80 (excluding cable carrier)

Overall length (mm) Stroke length + 310 Stroke length + 560

Cable length (m) Standard : 3.5 Option: 5/10

Controller SR1-P, RCX221, RCX240, RDP, TS-P

1: Weight per one carrier2: See the maximum speed table below.

Payload (kg) Maximum speed (m/s)

30 or less 2.5

40 2.2

50 1.8

60 1.5

Static load moment

(Unit: N•m)

MY MP MR

373 373 328

0 10 20 30 40Payload (kg)

50 60 70Max

imum

spe

ed (

m/s

) 3.0

2.5

2.0

1.5

1.0

0.5

0

M P

M R

M Y

7-20

7

Specifications

7-21

7-1 Main unit

Allowable overhang **Distancefromthecenteronthetopfaceofslidertothegravitycenteroftheitembeing

carried. (This is calculated assuming that the service life of the guide is 10,000km.)

n Horizontal installation

A

C

B

(Unit: mm)

A B C

10kg 3364 2485 1284

20kg 2298 1265 694

30kg 2060 859 507

40kg 1570 600 310

50kg 1265 400 180

60kg 1070 350 135

n Vertical installation

C

BA

(Unit: mm)

A B C

10kg 1290 1320 2730

20kg 650 610 1750

30kg 430 360 1460

40kg 205 230 610

50kg 145 175 470

60kg 105 140 380

Specifications

7

7-22

7-1 Main unit

7-23

MF3

0 si

ngle

-car

riag

e ho

rizo

ntal

mou

nt m

odel

73.

72.

5

4.57.2 D

etai

l of s

ectio

n G

240.

5 (M

opt

ion)

215.

5 (S

opt

ion)

(100)

Opt

iona

l cab

le c

arrie

r S /

M ty

pe

80 : Top face of slider6414

186

(100)

32.5

150

G

24 15

1420.5

1420.5

4049

2935

5066

φ8 φ7.5

(Betweenφ6H7±0.02)

120136

Effe

ctiv

e st

roke

(155

: W

hen

at L

sid

e or

igin

)15

5±5

(R s

ide

orig

in p

ositi

on)

L

54±1

(Not

e 1)

155±

5 (L

sid

e or

igin

pos

ition

)(1

55 :

Whe

n at

R s

ide

orig

in)

4-M

6x1.

0 D

epth

12

4-φ6

H7

+0.0

120

Dep

th 1

0

50±0

.02

70190

54±1

(Not

e 1)

Gro

und

term

inal

(M4)

98

ABx

200

(A)

200

C-M

6x1.

0 D

epth

10

105

D±0

.02

2-φ1

0H7

+0.0

15 0

Dep

th 1

0

100

Cro

ss-s

ectio

n of

opt

iona

l cab

le c

arrie

rM

SL

238

Opt

iona

l cab

le c

arrie

r L ty

pe

Not

e 4167

90

φ30

Dia

met

er o

f rol

ler

No

te 1

. D

ista

nce

from

bot

hen

dst

oth

em

echa

nica

lst

oppe

r.N

ote

2.

Th

e o

rigi

n i

s se

t o

n t

he

L si

de

at t

he

tim

e o

f sh

ipm

ent.

It

can

be

chan

ged

to

th

e R

si

de

by

par

amet

er s

etti

ng.

No

te 3

. Fo

r m

odel

s w

ith

a 2,

100m

m o

r lo

nger

str

oke,

opt

iona

l L

type

cab

le c

arri

ers

can

only

be

use

d.N

ote

4.

For

mo

del

s w

ith

a 3

,00

0m

m o

r lo

nge

r st

roke

an

d a

n o

pti

on

al L

typ

e ca

ble

car

rier

, a

roll

er i

s in

stal

led

to

pre

ven

t th

e ca

ble

car

rier

fro

m s

aggi

ng.

Effe

ctive

stro

ke10

020

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

00

L41

051

061

071

081

091

010

1011

1012

1013

1014

1015

1016

1017

1018

1019

1020

1021

1022

1023

1024

1025

1026

1027

1028

1029

1030

1031

1032

1033

1034

1035

1036

1037

1038

1039

1040

1041

1042

1043

10

A10

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

55

B1

22

33

44

55

66

77

88

99

1010

1111

1212

1313

1414

1515

1616

1717

1818

1919

2020

21

C4

66

88

1010

1212

1414

1616

1818

2020

2222

2424

2626

2828

3030

3232

3434

3636

3838

4040

4242

44

D20

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

0041

00

Wei

ght (

kg)

9.0

10.7

12.3

13.9

15.6

17.2

18.8

20.4

22.1

23.7

25.3

27.0

28.6

30.2

31.9

33.5

35.1

36.7

38.4

40.0

41.6

43.3

44.9

46.5

48.2

49.8

51.4

53.0

54.7

56.3

57.9

59.6

61.2

62.8

64.5

66.1

67.7

69.3

71.0

72.6

7-22

7

Specifications

7-23

7-1 Main unitM

F30

sing

le-c

arri

age

wal

l mou

nt m

odel

24

1420.5

15

Cro

ss-s

ectio

n of

opt

iona

l cab

le c

arrie

r

MS

Lφ7

.5

1420.5

40495066

2935

φ8

Det

ail o

f sec

tion

G

4.5

7.2

73.7 2.5

325105φ3

0D

iam

eter

of r

olle

r

1509290 41

.3

(5)

Opt

iona

l cab

le c

arrie

r S ty

pe

120.

3

G

150250

Opt

iona

l cab

le c

arrie

r M ty

peO

ptio

nal c

able

car

rier L

type

14 64 80To

p fa

ce o

f slid

er

79

M a

nd L

type

s

Stan

dard

and

S ty

pes

(155

: W

hen

at R

sid

e or

igin

)15

5±5

(L s

ide

orig

in p

ositi

on)

54±1

(Not

e 1)

ABx

200

(A)

200

C-M

6x1.

0 D

epth

10

100

105

D±0

.02

2-φ1

0H7

+0.0

15 0

Dep

th 1

0

13G

roun

d te

rmin

al (M

4)

Gro

und

term

inal

(M4)

155±

5 (R

sid

e or

igin

pos

ition

)(1

55 :

Whe

n at

L s

ide

orig

in)

(Between φ6H7±0.02)

L

Effe

ctiv

e st

roke

108

190

54±1

(Not

e 1)

50±0

.02

704-

φ6H

7+0

.012

0 D

epth

10

4-M

6x1.

0 D

epth

12

120

136

No

te1

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 2

. T

he

ori

gin

is

set

on

th

e R

sid

e at

th

e ti

me

of

ship

men

t. I

t ca

n

be

chan

ged

to

th

e L

sid

e b

y p

aram

eter

set

tin

g.

No

te 3

. Fo

r m

od

els

wit

h a

2,1

00

mm

or

lon

ger

stro

ke,

op

tio

nal

L t

ype

cab

le c

arri

ers

can

on

ly b

e u

sed

.N

ote

4.

For

mo

del

s w

ith

a 3

,00

0m

m o

r lo

nge

r st

roke

an

d a

n o

pti

on

al L

typ

e ca

ble

car

rier

, a

roll

er i

s in

stal

led

to

p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.

Effe

ctive

stro

ke10

020

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

00

L41

051

061

071

081

091

010

1011

1012

1013

1014

1015

1016

1017

1018

1019

1020

1021

1022

1023

1024

1025

1026

1027

1028

1029

1030

1031

1032

1033

1034

1035

1036

1037

1038

1039

1040

1041

1042

1043

10

A10

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

55

B1

22

33

44

55

66

77

88

99

1010

1111

1212

1313

1414

1515

1616

1717

1818

1919

2020

21

C4

66

88

1010

1212

1414

1616

1818

2020

2222

2424

2626

2828

3030

3232

3434

3636

3838

4040

4242

44

D20

030

040

050

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

0041

00

E22

027

032

037

042

047

052

057

062

067

072

077

082

087

092

097

010

2010

7011

2011

7012

2012

7013

2013

7014

2014

7015

2015

7016

2016

7017

2017

7018

2018

7019

2019

7020

2020

7021

2021

70

Wei

ght (

kg)

9.0

10.7

12.3

13.9

15.6

17.2

18.8

20.4

22.1

23.7

25.3

27.0

28.6

30.2

31.9

33.5

35.1

36.7

38.4

40.0

41.6

43.3

44.9

46.5

48.2

49.8

51.4

53.0

54.7

56.3

57.9

59.6

61.2

62.8

64.5

66.1

67.7

69.3

71.0

72.6

Specifications

7

7-24

7-1 Main unit

7-25

MF3

0D d

oubl

e-ca

rria

ge h

oriz

onta

l mou

nt m

odel

(Between φ6H7±0.02) 120

136D

etai

l of s

ectio

n G

7

7.24.52.

53.

7

54±1

(Not

e 2)

(Between φ6H7±0.02)

54±1

(Not

e 2)

Effe

ctiv

e st

roke

L

50±0

.027019

04-

φ6H

7+0

.012

0 D

epth

10

4-M

6x1.

0 D

epth

12

4-M

6x1.

0 D

epth

12

4-φ6

H7

+0.0

12 0

Dep

th 1

050

±0.0

270190

Effe

ctiv

e st

roke

(250

: M

inim

um d

istan

ce b

etwe

en c

arria

ges)

155±

5 (N

ote

1)

155±

5 (N

ote

1)

120

240.

5 (M

opt

ion)

215.

5 (S

opt

ion)

(100)

Opt

iona

l cab

le c

arrie

r S /

M ty

pe

15

20.514

24

150

1464

80 : Top face of slider18

6

32.5(100)

G

20.514

49 40

3529

66 50 LS C

ross

-sec

tion

of o

ptio

nal c

able

car

rier

Mφ8 φ7

.5

Gro

und

term

inal

(M4)

98

2-φ1

0H7

+0.0

150

Dep

th 1

0D

±0.0

210

5

C-M

6x1.

0 D

epth

10

200

(A)

Bx20

0A

100

238

Opt

iona

l cab

le c

arrie

r L ty

pe 167

φ30Diameter of roller 90 N

ote

4

No

te 1

. P

osi

tio

n o

f th

e ta

ble

sli

der

wh

en r

etu

rned

to

th

e o

rigi

n.

No

te2

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 3

. Fo

r m

od

els

wit

h a

2,0

50

mm

or

lon

ger

stro

ke,

op

tio

nal

L t

ype

cab

le c

arri

ers

can

on

ly b

e u

sed

.N

ote

4.

For

mo

del

s w

ith

a 3

,05

0m

m o

r lo

nge

r st

roke

an

d a

n o

pti

on

al L

typ

e ca

ble

car

rier

, a

roll

er i

s in

stal

led

to

p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.

Effe

ctive

stro

ke15

025

035

045

055

065

075

085

095

010

5011

5012

5013

5014

5015

5016

5017

5018

5019

5020

5021

5022

5023

5024

5025

5026

5027

5028

5029

5030

5031

5032

5033

5034

5035

5036

5037

50

L71

081

091

010

1011

1012

1013

1014

1015

1016

1017

1018

1019

1020

1021

1022

1023

1024

1025

1026

1027

1028

1029

1030

1031

1032

1033

1034

1035

1036

1037

1038

1039

1040

1041

1042

1043

10

A55

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

B3

34

45

56

67

78

89

910

1011

1112

1213

1314

1415

1516

1617

1718

1819

1920

2021

C8

810

1012

1214

1416

1618

1820

2022

2224

2426

2628

2830

3032

3234

3436

3638

3840

4042

4244

D50

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

0041

00

Wei

ght (

kg)

17.6

19.3

21.0

22.8

24.5

26.2

27.9

29.6

31.3

33.0

34.7

36.5

38.2

39.9

41.6

43.3

45.0

46.7

48.4

50.2

51.9

53.6

55.3

57.0

58.7

60.4

62.1

63.9

65.6

67.3

69.0

70.7

72.4

74.1

75.8

77.5

79.3

7-24

7

Specifications

7-25

7-1 Main unitM

F30D

dou

ble-

carr

iage

wal

l mou

nt m

odel

155±

5 (N

ote

1)M

SL

24

1420.5

154049

1420.5

Det

ail o

f sec

tion

G

4.5

7.2

73.7 2.5

Cro

ss-s

ectio

n of

opt

iona

l cab

le c

arrie

r

5066

2935

φ8 φ7.5

ABx

200

(A)

200

C-M

6x1.

0 D

epth

10

100

105

D±0

.02

2-φ1

0H7

+0.0

150

Dep

th 1

0

325

105φ30

Dia

met

er o

f rol

ler

1509290 41

.3

(5)

120.

3

79O

ptio

nal c

able

car

rier S

type

Opt

iona

l cab

le c

arrie

r M ty

peO

ptio

nal c

able

car

rier L

type

G14 64 80

Top

face

of s

lider150

250

M a

nd L

type

s

Stan

dard

and

S ty

pes

13E

13E

Gro

und

term

inal

(M4)

Gro

und

term

inal

(M4)

(Between φ6H7±0.02)136

120

(Between φ6H7±0.02) 120

136

L

(250

: M

inim

um d

ista

nce

betw

een

carri

ages

)

108

108

155±

5 (N

ote

1)

Effe

ctiv

e st

roke

Effe

ctiv

e st

roke

50±0

.02

70 190

4-φ6

H7

+0.0

120

Dep

th 1

0

4-M

6x1.

0 D

epth

12

50±0

.02

70 190

4-φ6

H7

+0.0

120

Dep

th 1

0

4-M

6x1.

0 D

epth

12

54±1

(Not

e 2)

54±1

(Not

e 2)

No

te 1

. P

osi

tio

n o

f th

e ta

ble

sli

der

wh

en r

etu

rned

to

th

e o

rigi

n.

No

te2

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 3

. Fo

r m

od

els

wit

h a

2,0

50

mm

or

lon

ger

stro

ke,

op

tio

nal

L t

ype

cab

le c

arri

ers

can

on

ly b

e u

sed

. N

ote

4.

For

mo

del

s w

ith

a 3

,05

0m

m o

r lo

nge

r st

roke

an

d a

n o

pti

on

al L

typ

e ca

ble

car

rier

, a

roll

er i

s in

stal

led

to

p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.

Effe

ctive

stro

ke15

025

035

045

055

065

075

085

095

010

5011

5012

5013

5014

5015

5016

5017

5018

5019

5020

5021

5022

5023

5024

5025

5026

5027

5028

5029

5030

5031

5032

5033

5034

5035

5036

5037

50

L71

081

091

010

1011

1012

1013

1014

1015

1016

1017

1018

1019

1020

1021

1022

1023

1024

1025

1026

1027

1028

1029

1030

1031

1032

1033

1034

1035

1036

1037

1038

1039

1040

1041

1042

1043

10

A55

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

105

5510

555

B3

34

45

56

67

78

89

910

1011

1112

1213

1314

1415

1516

1617

1718

1819

1920

2021

C8

810

1012

1214

1416

1618

1820

2022

2224

2426

2628

2830

3032

3234

3436

3638

3840

4042

4244

D50

060

070

080

090

010

0011

0012

0013

0014

0015

0016

0017

0018

0019

0020

0021

0022

0023

0024

0025

0026

0027

0028

0029

0030

0031

0032

0033

0034

0035

0036

0037

0038

0039

0040

0041

00

E22

027

032

037

042

047

052

057

062

067

072

077

082

087

092

097

010

2010

7011

2011

7012

2012

7013

2013

7014

2014

7015

2015

7016

2016

7017

2017

7018

2018

7019

2019

7020

20

Wei

ght (

kg)

17.6

19.3

21.0

22.8

24.5

26.2

27.9

29.6

31.3

33.0

34.7

36.5

38.2

39.9

41.6

43.3

45.0

46.7

48.4

50.2

51.9

53.6

55.3

57.0

58.7

60.4

62.1

63.9

65.6

67.3

69.0

70.7

72.4

74.1

75.8

77.5

79.3

Specifications

7

7-26

7-1 Main unit

7-27

7-1-5 MF50

Basic specifications

Model name MF50 MF50D

Driving method Steel cored linear motor flat magnet

Repeated positioning accuracy (µm) ±5

Scale (µm) Magnetic method, resolution: 1

Maximum speed (mm/sec) 2 2500

Maximum carrying weight (kg) 1 150

Rated thrust (N) 200

Maximum stroke (mm) 4020 3700

Bearing method 2 guide rails and 6 blocks (with retainer)

Maximum cross-section outside dimensions (mm)

W210×H100 (excluding cable carrier)

Overall length (mm) Stroke length + 360 Stroke length + 680

Cable length (m) Standard : 3.5 Option: 5/10

Controller SR1-P, RCX221, RCX240, RDP, TS-P

1: Weight per one carrier2: See the maximum speed table below.

Payload (kg) Maximum speed (m/s)

50 or less 2.5

60 2.4

70 2.2

80 2.1

90 2.0

100 1.9

110 1.8

120 1.7

130 1.6

140 1.6

150 1.5

Static load moment

(Unit: N•m)

MY MP MR

830 831 730

0 50 60 70 80Payload (kg)

90 100 110 120 130 140 150

Max

imum

spe

ed (

m/s

) 3.0

2.5

2.0

1.5

1.0

0.5

0

M P

M R

M Y

7-26

7

Specifications

7-27

7-1 Main unit

Allowable overhang **Distancefromthecenteronthetopfaceofslidertothegravitycenteroftheitembeing

carried. (This is calculated assuming that the service life of the guide is 10,000km.)

n Horizontal installation

A

C

B

(Unit: mm)

A B C

10kg 4000 4000 3514

20kg 3397 2841 1840

30kg 3045 1873 1247

40kg 2795 1389 964

50kg 2602 1096 797

60kg 2200 530 450

70kg 2000 290 180

80kg 1800 175 150

90kg 1650 150 125

100kg 1500 130 110

110kg 1350 115 95

120kg 1250 100 80

130kg 1150 85 70

140kg 1100 80 65

150kg 1000 70 55

Specifications

7

7-28

7-1 Main unit

7-29

MF5

0 si

ngle

-car

riag

e ho

rizo

ntal

mou

nt m

odel

80±0

.02

120

286

120(Betweenφ6H7±0.02)

150

4-φ6

H7

+0.0

12 0

Dep

th 1

04-

M8x

1.25

Dep

th 2

0

66 50

3529

Cro

ss-s

ectio

n of

opt

iona

l cab

le c

arrie

r

Det

ail o

f sec

tion

G

2.5

73.

7

4.57.2

Cro

ss-s

ectio

n of

H-H

Rem

ove

two

top

caps

.

Inse

rt bo

lt fro

mla

tera

l sid

e of

axi

s.(N

ote

3)Tool

mou

ntin

g ho

le

Rem

ove

cap

from

each

tool

hol

e.φ9

14

3.25.71.

42.

64.

8

Det

ail o

f sec

tion

J

(11.5)

Det

ail o

f slid

er 100 (Top face of slider)

(99)11.5 G

2218

175(180)

(Roller diameter: φ30)(107)

210

88

141

J

31±1

(Not

e 1)

180±

5 (L

sid

e or

igin

pos

ition

)(1

80 :

Whe

n at

R s

ide

orig

in)

L

Effe

ctiv

e st

roke

(180

: W

hen

at L

sid

e or

igin

)18

0±5

(R s

ide

orig

in p

ositi

on)

31±1

(Not

e 1)

Slot

wid

th 2

0: ln

sert

M3

nut t

hrou

gh th

is s

lot.

(Nut

mou

ntab

le ra

nge:

145

)

Not

e 4

Gro

undi

ng te

rmin

al (M

4)

97

H H

ABx

200

200

C-φ

9 D

epth

14

(Ref

er to

cro

ss-s

ectio

n of

H-H

.)

(A)

160196

2-φ1

0H7

+0.0

15 0

Dep

th 1

0Ex

200

200

F-M

8x1.

25 D

epth

15

G±0

.02

D10

5(D

)

No

te1

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 2

. T

he

ori

gin

is

set

on

th

e L

sid

e (a

s sh

ow

n a

bo

ve)

at t

he

tim

e o

f sh

ipm

ent.

It

can

be

chan

ged

to

th

e R

sid

e b

y p

aram

eter

set

tin

g.

No

te 3

. T

he

len

gth

un

der

hea

d o

f M

8 h

ex s

ock

et h

ead

bo

lts

for

inst

alli

ng

the

rob

ot

bo

dy

mu

st n

ot

be

lon

ger

than

30

mm

.N

ote

4.

For

mo

del

s w

ith

a 3

,07

5m

m o

r lo

nge

r st

roke

, a

roll

er i

s in

stal

led

to

pre

ven

t th

e ca

ble

ca

rrie

r fr

om

sag

gin

g.

Effe

ctive

stro

ke1

05

011

85

13

20

14

55

15

90

17

25

18

60

19

95

21

30

22

65

24

00

25

35

26

70

28

05

29

40

30

75

32

10

33

45

34

80

36

15

37

50

38

85

40

20

L1

41

01

54

51

68

01

81

51

95

02

08

52

22

02

35

52

49

02

62

52

76

02

89

53

03

03

16

53

30

03

43

53

57

03

70

53

84

03

97

54

110

42

45

43

80

A2

05

72

.51

40

20

7.5

75

14

2.5

21

07

7.5

14

52

12

.58

01

47

.52

15

82

.51

50

21

7.5

85

15

2.5

22

08

7.5

15

52

22

.59

0

B5

77

79

99

1111

111

31

31

31

51

51

51

71

71

71

91

91

92

1

C1

21

61

61

62

02

02

02

42

42

42

82

82

83

23

23

23

63

63

64

04

04

04

4

D1

05

17

2.5

40

10

7.5

17

54

2.5

110

17

7.5

45

112

.51

80

47

.511

51

82

.55

011

7.5

18

55

2.5

12

01

87

.55

51

22

.51

90

E6

68

88

10

10

10

12

12

12

14

14

14

16

16

16

18

18

18

20

20

20

F1

41

41

81

81

82

22

22

22

62

62

63

03

03

03

43

43

43

83

83

84

24

24

2

Wei

ght (

kg)

51

55

58

62

66

70

74

78

82

86

90

94

98

10

11

05

10

911

311

71

21

12

51

29

13

31

37

7-28

7

Specifications

7-29

7-1 Main unitM

F50D

dou

ble-

carr

iage

hor

izon

tal m

ount

mod

el

120(Betweenφ6H7±0.02)

150

80±0

.02

120

286

66 50

3529

(Roller diameter: φ30)

4-φ6

H7

+0.0

120

Dep

th 1

04-

M8x

1.25

Dep

th 2

0

100 (Top face of slider)

Det

ail o

f slid

er

Cro

ss-s

ectio

n of

opt

iona

l cab

le c

arrie

r

72.

53.

7

7.24.5

Det

ail o

f sec

tion

GRem

ove

two

top

caps

.

Inse

rt bo

lt fro

mla

tera

l sid

e of

axi

s.(N

ote

3)

Cro

ss-s

ectio

n of

H-H

Tool

mou

ntin

g ho

le

Rem

ove

cap

from

each

tool

hol

e.φ9

14

Det

ail o

f sec

tion

J

4.8

2.6

1.4

5.73.2

(11.5)

8821

0

(99)22 G

11.518

141

J

(107)175(180)

972-

φ10H

7+0

.015

0 D

epth

10

160196

Not

e 4

Gro

und

term

inal

(M4)

31±1

(Not

e 2)

31±1

(Not

e 2)

180±

5 (N

ote

1)

L

Effe

ctiv

e st

roke

180±

5 (N

ote

1)(3

20 :

Min

imum

dis

tanc

e be

twee

n ca

rriag

es)

Effe

ctiv

e st

roke

Slot

wid

th 2

0: ln

sert

M3

nut t

hrou

gh th

is s

lot.

(Nut

mou

ntab

le ra

nge:

145

)

Ex20

0(D

)G

±0.0

2

200

F-M

8x1.

25 D

epth

15

D10

5

ABx

200

200

C-φ

9 D

epth

14

(Ref

er to

cro

ss-s

ectio

n of

H-H

.)(A

)

HH

No

te 1

. P

osi

tio

n o

f th

e ta

ble

sli

der

wh

en r

etu

rned

to

th

e o

rigi

n.

No

te2

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 3

. T

he

len

gth

un

der

hea

d o

f M

8 h

ex s

ock

et h

ead

bo

lts

for

inst

alli

ng

the

rob

ot

bo

dy

mu

st n

ot

be

lon

ger

than

3

0m

m.

No

te 4

. Fo

r m

od

els

wit

h a

3,0

25

mm

or

lon

ger

stro

ke,

a ro

ller

is

inst

alle

d t

o p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.

Effe

ctive

stro

ke7

30

86

51

00

011

35

12

70

14

05

15

40

16

75

18

10

19

45

20

80

22

15

23

50

24

85

26

20

27

55

28

90

30

25

31

60

32

95

34

30

35

65

37

00

L1

41

01

54

51

68

01

81

51

95

02

08

52

22

02

35

52

49

02

62

52

76

02

89

53

03

03

16

53

30

03

43

53

57

03

70

53

84

03

97

54

110

42

45

43

80

A2

05

72

.51

40

20

7.5

75

14

2.5

21

07

7.5

14

52

12

.58

01

47

.52

15

82

.51

50

21

7.5

85

15

2.5

22

08

7.5

15

52

22

.59

0

B5

77

79

99

1111

111

31

31

31

51

51

51

71

71

71

91

91

92

1

C1

21

61

61

62

02

02

02

42

42

42

82

82

83

23

23

23

63

63

64

04

04

04

4

D1

05

17

2.5

40

10

7.5

17

54

2.5

110

17

7.5

45

112

.51

80

47

.511

51

82

.55

011

7.5

18

55

2.5

12

01

87

.55

51

22

.51

90

E6

68

88

10

10

10

12

12

12

14

14

14

16

16

16

18

18

18

20

20

20

F1

41

41

81

81

82

22

22

22

62

62

63

03

03

03

43

43

43

83

83

84

24

24

2

Wei

ght (

kg)

63

67

71

75

79

83

87

91

95

99

10

31

07

111

115

119

12

31

27

13

11

35

13

91

43

14

71

51

Specifications

7

7-30

7-1 Main unit

7-31

7-1-6 MF75

Basic specifications

Model name MF75 MF75D

Driving method Steel cored linear motor flat magnet

Repeated positioning accuracy (µm) ±5

Scale (µm) Magnetic method, resolution: 1

Maximum speed (mm/sec) 2 2500

Maximum carrying weight (kg) 1 160

Rated thrust (N) 260

Maximum stroke (mm) 4000 3680

Bearing method 2 guide rails and 6 blocks (with retainer)

Maximum cross-section outside dimensions (mm)

W210×H100 (excluding cable carrier)

Overall length (mm) Stroke length + 360 Stroke length + 680

Cable length (m) Standard : 3.5 Option: 5/10

Controller SR1-P, TS-P, RDP RCX221, RDP

1: Weight per one carrier2: See the maximum speed table below.

Payload (kg) Maximum speed (m/s)

75 or less 2.5

90 2.31

100 2.2

110 2.09

120 2.0

130 1.92

140 1.84

150 1.77

160 1.7

Static load moment

(Unit: N•m)

MY MP MR

830 831 730

Payload (kg)

Max

imum

spe

ed (

m/s

)

0 50 60 70 80 90 100 110 120 130 140 150 160

3.0

2.5

2.0

1.5

1.0

0.5

0

M P

M R

M Y

7-30

7

Specifications

7-31

7-1 Main unit

Allowable overhang **Distancefromthecenteronthetopfaceofslidertothegravitycenteroftheitembeing

carried. (This is calculated assuming that the service life of the guide is 10,000km.)

n Horizontal installation

A

C

B

(Unit: mm)

A B C

20kg 3397 2841 1840

40kg 2795 1389 964

60kg 2200 530 450

80kg 1800 175 150

100kg 1500 130 110

120kg 1250 100 80

140kg 1100 80 65

160kg 950 60 50

Specifications

7

7-32

7-1 Main unit

7-33

MF7

5 si

ngle

-car

riag

e ho

rizo

ntal

mou

nt m

odel

4.57.2

2.5

73.

7

(11.5)

3.25.71.

42.

64.

8

φ9

14

175(180)

141

210

88

2218 G11.5

J

: φ30) (107)

(99)

80±

0.02

120

286

120(Betweenφ6H7±0.02)

150

4-φ6

H7

+0.

012

0

+0.

015

0

66 50

3529

ABx

200

DEx

200

200

200

160196

0.02

130

2-φ1

0H7

( A)

( D)

H H

97

31±

2

L

31±

2

Rem

ove

two

top

caps

.

Tool

mou

ntin

g ho

leIn

sert

bolt

from

late

ral s

ide

of a

xis.

(Not

e 3)

Rem

ove

cap

from

each

tool

hol

e.

Cro

ss-s

ectio

n of

H-H

Det

ail o

f sec

tion

GD

etai

l of s

ectio

n J

Cro

ss-s

ectio

n of

cab

le c

arrie

r

100 (Top face of slider)

(Roller diameter

4-M

8x1.

25 D

epth

20

Dep

th 1

0

Det

ail o

f slid

er

Dep

th 1

0F-

M8x

1.25

Dep

th 1

5

C-φ

9 D

epth

14

(Ref

er to

cro

ss-s

ectio

n of

H-H

.)Gro

und

term

inal

(M4)

Not

e 4

(Not

e 1)

180±

5 (L

sid

e or

igin

pos

ition

)(1

80 :

Whe

n at

R s

ide

orig

in)

(180

: W

hen

at R

sid

e or

igin

)Sl

ot w

idth

20:

lnse

rt M

3 nu

t thr

ough

this

slo

t.(N

ut m

ount

able

rang

e: 1

45)

Effe

ctiv

e st

roke

(180

Whe

n at

L s

ide

orig

in)

180±

5 (R

sid

e or

igin

pos

ition

)

(Not

e 1)

No

te1

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 2

. T

he

ori

gin

is

set

on

th

e L

sid

e (a

s sh

ow

n a

bo

ve)

at t

he

tim

e o

f sh

ipm

ent.

It

can

be

chan

ged

to

th

e R

sid

e b

y p

aram

eter

set

tin

g.

No

te 3

. T

he

len

gth

un

der

hea

d o

f M

8 h

ex s

ock

et h

ead

bo

lts

for

inst

alli

ng

the

rob

ot

bo

dy

mu

st n

ot

be

lon

ger

than

30

mm

.N

ote

4.

For

mo

del

s w

ith

a 3

,00

0m

m o

r lo

nge

r st

roke

, a

roll

er i

s in

stal

led

to

pre

ven

t th

e ca

ble

ca

rrie

r fr

om

sag

gin

g.

Effe

ctive

stro

ke1

00

011

00

12

00

13

00

14

00

15

00

16

00

17

00

18

00

19

00

20

00

21

00

22

00

23

00

24

00

25

00

26

00

27

00

28

00

29

00

30

00

31

00

32

00

33

00

34

00

35

00

36

00

37

00

38

00

39

00

40

00

L1

36

01

46

01

56

01

66

01

76

01

86

01

96

02

06

02

16

02

26

02

36

02

46

02

56

02

66

02

76

02

86

02

96

03

06

03

16

03

26

03

36

03

46

03

56

03

66

03

76

03

86

03

96

04

06

04

16

04

26

04

36

0

A1

80

23

08

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

B5

57

77

79

99

911

1111

111

31

31

31

31

51

51

51

51

71

71

71

71

91

91

91

92

1

C1

21

21

61

61

61

62

02

02

02

02

42

42

42

42

82

82

82

83

23

23

23

23

63

63

63

64

04

04

04

04

4

D8

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

13

01

80

E6

66

68

88

81

01

01

01

01

21

21

21

21

41

41

41

41

61

61

61

61

81

81

81

82

02

02

0

F1

41

41

41

41

81

81

81

82

22

22

22

22

62

62

62

63

03

03

03

03

43

43

43

43

83

83

83

84

24

24

2

G11

00

12

00

13

00

14

00

15

00

16

00

17

00

18

00

19

00

20

00

21

00

22

00

23

00

24

00

25

00

26

00

27

00

28

00

29

00

30

00

31

00

32

00

33

00

34

00

35

00

36

00

37

00

38

00

39

00

40

00

41

00

Wei

ght (

kg)

46

49

51

54

56

59

61

64

66

69

71

74

76

79

81

84

86

89

91

94

96

99

10

11

04

10

61

09

111

114

116

119

12

1

7-32

7

Specifications

7-33

7-1 Main unitM

F75D

dou

ble-

carr

iage

hor

izon

tal m

ount

mod

el

4.57.2

2.5

73.

7

14

φ9

(11.5)

3.25.71.

42.

64.

8

175(180)

141

210

88

2218 G11.5

J

: φ30) (107)

(99)

80±

0.02

120

286

150

4-φ6

H7

+0.

012

0

66 50

3529

A

D20

0

200

160196

130

2-φ1

0H7

+0.

015

0

Bx20

0

Ex20

0

0.02

( A)

( D)

H H

97

L

180

±5

31±

231

±2

Rem

ove

two

top

caps

.

Tool

mou

ntin

g ho

leIn

sert

bolt

from

late

ral s

ide

of a

xis.

(Not

e 3)

Rem

ove

cap

from

each

tool

hol

e.

Det

ail o

f sec

tion

GC

ross

-sec

tion

of H

-HD

etai

l of s

ectio

n J

Cro

ss-s

ectio

n of

cab

le c

arrie

r

100 (Top face of slider)

(Roller diameter

120 (Betweenφ6H7±0.02)

4-M

8x1.

25 D

epth

20

Det

ail o

f slid

er

Dep

th 1

0 D

epth

10

F-M

8x1.

25 D

epth

15

C-φ

9 D

epth

14

(Ref

er to

cro

ss-s

ectio

n of

H-H

.)

(Not

e 2)

(Not

e 1)

Slot

wid

th 2

0: ln

sert

M3

nut t

hrou

gh th

is s

lot.

(Nut

mou

ntab

le ra

nge:

145

)Sl

ot w

idth

20:

lnse

rt M

3 nu

t thr

ough

this

slo

t.(N

ut m

ount

able

rang

e: 1

45)

Not

e 4

Gro

und

term

inal

(M4)

Effe

ctiv

e st

roke

Effe

ctiv

e st

roke

(320

: M

inim

um d

ista

nce

betw

een

carri

ages

)

(Not

e 2)

180±

5 (N

ote

1)

No

te 1

. P

osi

tio

n o

f th

e ta

ble

sli

der

wh

en r

etu

rned

to

th

e o

rigi

n.

No

te2

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 3

. Th

e le

ngth

und

er h

ead

of M

8 he

x so

cket

hea

d bo

lts

for

inst

alli

ng t

he r

obot

bod

y m

ust

not

be l

onge

r th

an 3

0mm

.N

ote

4.

For

mo

del

s w

ith

a 3

,08

0m

m o

r lo

nge

r st

roke

, a

roll

er i

s in

stal

led

to

pre

ven

t th

e ca

ble

car

rier

fro

m s

aggi

ng.

Effe

ctive

stro

ke6

80

78

08

80

98

01

08

011

80

12

80

13

80

14

80

15

80

16

80

17

80

18

80

19

80

20

80

21

80

22

80

23

80

24

80

25

80

26

80

27

80

28

80

29

80

30

80

31

80

32

80

33

80

34

80

35

80

36

80

L1

36

01

46

01

56

01

66

01

76

01

86

01

96

02

06

02

16

02

26

02

36

02

46

02

56

02

66

02

76

02

86

02

96

03

06

03

16

03

26

03

36

03

46

03

56

03

66

03

76

03

86

03

96

04

06

04

16

04

26

04

36

0

A1

80

23

08

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

B5

57

77

79

99

911

1111

111

31

31

31

31

51

51

51

51

71

71

71

71

91

91

91

92

1

C1

21

21

61

61

61

62

02

02

02

02

42

42

42

42

82

82

82

83

23

23

23

23

63

63

63

64

04

04

04

04

4

D8

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

13

01

80

23

08

01

30

18

02

30

80

13

01

80

E6

66

68

88

81

01

01

01

01

21

21

21

21

41

41

41

41

61

61

61

61

81

81

81

82

02

02

0

F1

41

41

41

41

81

81

81

82

22

22

22

22

62

62

62

63

03

03

03

03

43

43

43

43

83

83

83

84

24

24

2

G11

00

12

00

13

00

14

00

15

00

16

00

17

00

18

00

19

00

20

00

21

00

22

00

23

00

24

00

25

00

26

00

27

00

28

00

29

00

30

00

31

00

32

00

33

00

34

00

35

00

36

00

37

00

38

00

39

00

40

00

41

00

Wei

ght (

kg)

57

60

62

65

67

70

73

75

78

81

83

86

88

91

94

96

99

10

11

04

10

71

09

112

114

117

12

01

22

12

51

27

13

01

33

13

5

Specifications

7

7-34

7-1 Main unit

7-35

7-1-7 MF100

Basic specifications

Model name MF100 MF100D

Driving method Steel cored linear motor flat magnet

Repeated positioning accuracy (µm) ±5

Scale (µm) Magnetic method, resolution: 1

Maximum speed (mm/sec) 2 2500

Maximum carrying weight (kg) 1 250

Rated thrust (N) 400

Maximum stroke (mm) 4000 3510

Bearing method 2 guide rails and 6 blocks (with retainer)

Maximum cross-section outside dimensions (mm)

W210×H100 (excluding cable carrier)

Overall length (mm) Stroke length + 515 Stroke length + 1005

Cable length (m) Standard : 3.5 Option: 5/10

Controller SRCP30

1: Weight per one carrier2: If the payload exceeds 100kg, then adjust to reduce the speed by referring to the table below.

Payload (kg) Maximum speed (m/s)

100 or less 2.5

120 2.3

140 2.1

160 2.0

180 1.9

200 1.8

220 1.7

240 1.6

250 1.5

Static load moment

(Unit: N•m)

MY MP MR

1971 1975 1734

0 50 100 150 200Payload (kg)

250 300

Max

imum

spe

ed (

m/s

) 3.0

2.5

2.0

1.5

1.0

0.5

0

M P

M R

M Y

7-34

7

Specifications

7-35

7-1 Main unit

Allowable overhang **Distancefromthecenteronthetopfaceofslidertothegravitycenteroftheitembeing

carried. (This is calculated assuming that the service life of the guide is 10,000km.)

* The service life may be reduced if a collision occurs while the overhang is large.

n Horizontal installation

A

C

B

(Unit: mm)

A B C

20kg 3397 3104 1358

40kg 2210 1505 697

60kg 1969 975 488

80kg 1846 710 373

100kg 1751 624 339

120kg 1670 240 165

140kg 1655 195 135

160kg 1555 160 110

180kg 1475 130 90

200kg 1465 110 75

220kg 1425 90 60

240kg 1355 75 50

250kg 1315 70 45

Specifications

7

7-36

7-1 Main unit

7-37

MF1

00 s

ingl

e-ca

rria

ge h

oriz

onta

l mou

nt m

odel

80±0

.02

120

446

200

120(Betweenφ6H7±0.02)

150

4-φ6

H7

+0.0

120

Dep

th 1

08-

M8x

1.25

Dep

th 2

0 Det

ail o

f slid

er

66 50

3529

Cro

ss-s

ectio

n of

opt

iona

l cab

le c

arrie

r

18 2211.5

100 (Top face of slider)

G

(99)

(Roller diameter: φ30)

(180)175

(107)

141

8821

0

J

7.24.52.

57

3.7

Det

ail o

f sec

tion

GD

etai

l of s

ectio

n J

Cro

ss-s

ectio

n of

H-H

Rem

ove

two

top

caps

.

Tool

mou

ntin

g ho

leIn

sert

bolt

from

late

ral s

ide

of a

xis.

(Not

e 3)

Rem

ove

cap

from

each

tool

hol

e.

14

φ9

3.2

(11.5)

5.71.4

2.6

4.8

28.5

±1(N

ote

1)

257.

5±5

(L s

ide

orig

in p

ositi

on)

(257

.5 :

Whe

n at

R s

ide

orig

in)

L

Effe

ctiv

e st

roke

Slot

wid

th 2

0: ln

sert

M3

nut t

hrou

gh th

is s

lot.

(Nut

mou

ntab

le ra

nge:

145

)

(257

.5 W

hen

at L

sid

e or

igin

)25

7.5±

5 (R

sid

e or

igin

pos

ition

)

28.5

±1(N

ote

1)

Gro

und

term

inal

(M4)

Not

e 4

ABx

200

DEx

200

200

200

160196

C-φ

9 D

epth

14

(Ref

er to

cro

ss-s

ectio

n of

H-H

.)

F-M

8x1.

25 D

epth

15

(A)

(D)

2-φ1

0H7

+0.0

150

Dep

th 1

010

5G

±0.0

2

HH

97

No

te1

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 2

. T

he

ori

gin

is

set

on

th

e L

sid

e (a

s sh

ow

n a

bo

ve)

at t

he

tim

e o

f sh

ipm

ent.

It

can

be

chan

ged

to

th

e R

sid

e b

y p

aram

eter

set

tin

g.

No

te 3

. T

he

len

gth

un

der

hea

d o

f M

8 h

ex s

ock

et h

ead

bo

lts

for

inst

alli

ng

the

rob

ot

bo

dy

mu

st n

ot

be

lon

ger

than

30

mm

.N

ote

4.

For

mo

del

s w

ith

a 3

,05

5m

m o

r lo

nge

r st

roke

, a

roll

er i

s in

stal

led

to

pre

ven

t th

e ca

ble

ca

rrie

r fr

om

sag

gin

g.

Effe

ctive

stro

ke8

95

10

30

116

51

30

01

43

51

57

01

70

51

84

01

97

52

110

22

45

23

80

25

15

26

50

27

85

29

20

30

55

31

90

33

25

34

60

35

95

37

30

38

65

40

00

L1

41

01

54

51

68

01

81

51

95

02

08

52

22

02

35

52

49

02

62

52

76

02

89

53

03

03

16

53

30

03

43

53

57

03

70

53

84

03

97

54

110

42

45

43

80

45

15

A2

05

72

.51

40

20

7.5

75

14

2.5

21

07

7.5

14

52

12

.58

01

47

.52

15

82

.51

50

21

7.5

85

15

2.5

22

08

7.5

15

52

22

.59

01

57

.5

C5

77

79

99

1111

111

31

31

31

51

51

51

71

71

71

91

91

92

12

1

D1

05

17

2.5

40

10

7.5

17

54

2.5

110

17

7.5

45

112

.51

80

47

.511

51

82

.55

011

7.5

18

55

2.5

12

01

87

.55

51

22

.51

90

57

.5

E6

68

88

10

10

10

12

12

12

14

14

14

16

16

16

18

18

18

20

20

20

22

F1

41

41

81

81

82

22

22

22

62

62

63

03

03

03

43

43

43

83

83

84

24

24

24

6

Wei

ght (

kg)

53

57

61

65

69

73

77

81

84

88

92

96

10

01

04

10

811

211

61

20

12

41

27

13

11

35

13

91

43

7-36

7

Specifications

7-37

7-1 Main unitM

F100

D d

oubl

e-ca

rria

ge h

oriz

onta

l mou

nt m

odel

2.5

73.

7

4.57.2

Det

ail o

f sec

tion

GD

etai

l of s

ectio

n J

Cro

ss-s

ectio

n of

H-H

Rem

ove

two

top

caps

.

Tool

mou

ntin

g ho

leIn

sert

bolt

from

late

ral s

ide

of a

xis.

(Not

e 3)

Rem

ove

cap

from

each

tool

hol

e.φ9

14

3.25.71.

42.

64.

8

(11.5)

Cro

ss-s

ectio

n of

opt

iona

l cab

le c

arrie

r

66 50

3529

(99)100 (Top face of slider)

11.52218

(107)175

(180)

(Roller diameter: φ30)

210

88

141

J

G80±0

.02

120

446

200

120(Betweenφ6H7±0.02)

150

Det

ail o

f slid

er4-

φ6H

7+0

.012

0 D

epth

10

8-M

8x1.

25 D

epth

20

28.5

±1(N

ote

2)

L

28.5

±1(N

ote

2)

257.

5 (N

ote

1)Ef

fect

ive

stro

ke(4

90 :

Min

imum

dis

tanc

e be

twee

n ca

rriag

es)

257.

5 (N

ote

1)Ef

fect

ive

stro

keSl

ot w

idth

20:

lnse

rt M

3 nu

t thr

ough

this

slo

t.(N

ut m

ount

able

rang

e: 1

45)

Gro

und

term

inal

(M4)

Not

e 4

97

HH

ABx

200

DEx

200

200

200

160196

C-φ

9 D

epth

14

(Ref

er to

cro

ss-s

ectio

n of

H-H

.)

F-M

8x1.

25 D

epth

15

(A)

(D)

G±0

.02

105

2-φ1

0H7

+0.0

150

Dep

th 1

0

No

te 1

. P

osi

tio

n o

f th

e ta

ble

sli

der

wh

en r

etu

rned

to

th

e o

rigi

n.

No

te2

.D

ista

nce

fro

mb

oth

en

ds

tot

he

mec

han

ical

sto

pp

er.

No

te 3

. T

he

len

gth

un

der

hea

d o

f M

8 h

ex s

ock

et h

ead

bo

lts

for

inst

alli

ng

the

rob

ot

bo

dy

mu

st n

ot

be

lon

ger

than

3

0m

m.

No

te 4

. Fo

r m

od

els

wit

h a

3,1

05

mm

or

lon

ger

stro

ke,

a ro

ller

is

inst

alle

d t

o p

reve

nt

the

cab

le c

arri

er f

rom

sag

gin

g.

Effe

ctive

stro

ke40

554

067

581

094

510

8012

1513

5014

8516

2017

5518

9020

2521

6022

9524

3025

6527

0028

352

97

03

10

53

24

03

37

53

51

0

L1

41

01

54

51

68

01

81

51

95

02

08

52

22

02

35

52

49

02

62

52

76

02

89

53

03

03

16

53

30

03

43

53

57

03

70

53

84

03

97

54

110

42

45

43

80

45

15

A2

05

72

.51

40

20

7.5

75

14

2.5

21

07

7.5

14

52

12

.58

01

47

.52

15

82

.51

50

21

7.5

85

15

2.5

22

08

7.5

15

52

22

.59

01

57

.5

C5

77

79

99

1111

111

31

31

31

51

51

51

71

71

71

91

91

92

12

1

D1

05

17

2.5

40

10

7.5

17

54

2.5

110

17

7.5

45

112

.51

80

47

.511

51

82

.55

011

7.5

18

55

2.5

12

01

87

.55

51

22

.51

90

57

.5

E6

68

88

10

10

10

12

12

12

14

14

14

16

16

16

18

18

18

20

20

20

22

F1

41

41

81

81

82

22

22

22

62

62

63

03

03

03

43

43

43

83

83

84

24

24

24

6

Wei

ght (

kg)

68

72

76

80

84

88

92

96

10

01

04

10

811

211

61

20

12

41

28

13

21

36

14

01

44

14

81

52

15

61

60

Specifications

7

7-38

7-2 Robot connector (I/O signal connector)

7-39

7-2 Robot connector (I/O signal connector)

Cable carrier on robotHood

To robot cable (I/O signal wires)

D.G

6

5

4

3

2

1

Z-

Z+

S+

C+

C-

7

9F.G

+5 V

S-

0.15mm2 twisted pair

Shield

8

6

5

4

3

2

1

7

9

8

Signal Connection RemarksPin No. Pin No.*

Blue

Orange

Green

Brown

Gray

Red

Black

Yellow

*Internally connected

7-3 Robot connector (motor connector)

Ground wireCable carrier on robotHood

To robot cable (motor wires)

3

2

1

4

3

2

1

0.5 mm2, 1.25 mm2 Green

0.5 mm2, 1.25 mm2 Red

0.5 mm2, 1.25 mm2 White

0.5 mm2, 1.25 mm2 Black

Signal Pin No. Pin No.*Connection Remarks

Round terminalMotor wire FG

U

W

V

*Internally connected

7-38

7

Specifications

7-39

7-4 Robot cable (I/O signal wires)

7-4 Robot cable (I/O signal wires)

To controller To robot

Hood

Ground wire

Signal

RobotController CN1

Connect to: RemarksConnect to:Connection Pin No.Pin No.

1

7

3

6

2

54

98

0.3 mm2 Blue

0.3 mm2 Gray

OrangeGreenBrownGrayRedBlackYellow

5

1

3

8

2

74

206

Z+

C+S-

C-

S+

Z-

FG

+5VD.G.

Round terminal

7-5 Robot cable (motor wires)

Ground wire

Hood

To controller To robot

n SR1/SRCP

Motor wire FG

U

V

W

0.75 mm2 Yellow/Green

0.75 mm2

0.75 mm2

0.75 mm2

1

2

4

3

Round terminal

1

2

3 Black

White

Red

Signal RemarksConnection Pin No.Pin No.

n RCX

Motor wire FG

U

V

W

0.75 mm2 Yellow/Green

0.75 mm2

0.75 mm2

0.75 mm2

1

2

3

4

Round terminal

1

2

3 Black

White

Red

Signal RemarksConnection Pin No.Pin No.

All rights reserved. No part of this publication may be reproduced in any form without the permission of YAMAHA MOTOR CO., LTD. Information furnished by YAMAHA in this manual is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. If you find any part unclear in this manual, please contact your distributor..

LINEAR MOTOR ROBOTS PHASER series

User's Manual

YAMAHA MOTOR CO., LTD. IM Operations

MF TypeJul. 2012Ver. 5.00This manual is based on Ver. 5.00 of Japanese manual.

Revision record

Manual version Issue date Description

Ver. 2.05 Oct. 2009 Addition and correction of explanations in "Chapter 1 Using the Robot Safely". Addition and correction of "Chapter 5 Periodic inspection and maintenance". Clerical error corrections, etc.

Ver. 3.00 Dec. 2008 Addition of descriptions regarding the addition of MF75. Addition and correction of "Chapter 5 Periodic inspection and maintenance". Clerical error corrections.

Ver. 4.00 Aug. 2010 Addition of descriptions regarding the addition of MF7. Clerical error corrections.

Ver. 4.01 Jan. 2011 External view of MF7 in "7-1 Specifications" was modified/added. The description regarding "Warranty" was changed. Clerical error corrections, etc.

Ver. 4.02 Jun. 2011 Clerical error corrections.

Ver. 5.00 Jul. 2012 Wall-mount model was added to MF15. The description regarding "Warranty" was changed. Clerical errors were corrected, etc.

http://www.yamaha-motor.co.jp/global/industrial/robot/

Robot manuals can be downloaded from our company website. Please use the following for more detailed information.

YAMAHA MOTOR CO., LTD.

IM Operations

882 Soude, Nakaku, Hamamatsu, Shizuoka, 435-0054, JapanTel. 81-53-460-6103 Fax. 81-53-460-6811