Wafer mapping sensorASW Series

Translucent wafer

mode (8 and 12

inch models)

Free from

Electrostatic effects

(comb sensor unit)

（12 Inch） （8 Inch） （6 Inch）

Applicable to 6, 8

and 12 inch wafers

To detect Silicon Carbide, Sapphire,

Silicon and other translucent wafers.

（*1）: Latch mode is for detecting an edge of a wafer. Perform detection test in advance.

The sensor may not detect the edge depending on the thickness or shape of the wafer.

The wafer mapping sensor speeds upthe sensing process while maintaining relaiable detection.

Each comb (sensor unit) can be replacedin a single operation.

Easy maintenance !

Electrostatic malfunction free

● Reliably detects SiC single crystal and other translucent wafers.

● Mixed wafers like Silicon and glass wafers in a cassette are detectable.

Easy

maintenance

Cost saving

The comb unit contains only optical structures with no electrical parts.

N o r m a l m o d e

L a t c h m o d e

： Wafers of 30% or less tansmissivity

： Wafers of 70% or less transmissivity (*1)

Equipped with two detection modes the sensor is capable to

detect the latest high transmittance wafers. (8 and 12 inch models)01POINT

02POINT

03POINT

● Output inhibit functionEnables to inhibit all outputs regardless to the sensor state.

Two sensors connected in parallel can be controlled by a single input. ● Remote teaching and light emission inhibit functionThe output operation can be checked by the light emission inhibit

function. Teaching is restarted when the function is reset and the sensor

gains the best sensitivity.

● Trouble output and self diagnosis functionGenerates an alarm during the teaching process. Each channel output

turns on and off consecutively when a trouble occurs such like low

receiving light intensity, comb breakage or foreign light disturbance.

● CE compliant8 and 12 inch models are CE compliant.

● Robot cable and discrete outputAll models are equipped with discrete output for each channel.

Highly flexible robot cable is employed for 6 and 8 inch models.

■ SPECIFICATIONS

■ INPUT/OUTPUT CIRCUIT

10.0mm

25ch

DC12〜24V ±10% ripple 10% or less

1.9W or less

35ms or less

Connector type OMRON MIL connector XG4A-3031

　Approx. 270g（non including cable）

ASW−SG125VF

12 inch　normal mode： transmittance: 30％ or lesslatch mode： transmittance: 70％ or less

NPN open collectorRating： sink current 30VDC or less,

30mA or less

Light emission inhibit at ON.

Re-teaching at OFF.

Reset the latch output and inhibit light emission at ON.

Re-teaching at OFF.

Normal mode：

Latch mode：

Light emission inhibit at ON

Re-teaching at OFF.

Model

ApplicableWafer

Wafer pitch

Number of channels

Detection method

C o m b

Power supply

Current consumption

Operation mode

Output mode

Response time

Light source

Output inhibit input

Light emissioninhibit input / re-teaching(self diagnosis function)

Connection

Mass

Material

Accessories

6.35mm4.76mm

25ch25ch 26ch

Through beam

DC24V ±10% ripple 10% or less

1.8W or less250mA or less

12ms or less

Infrared LED(870nm)Infrared LED(830nm)

Open collector or contact inputOutput inhibit ON： 1.5V or less OFF： 4V or more　

Attached cable with connector (Fujitsu FCN-361J040-AU）

Sensor unit ： Polycarnonate Housing ： Aluminum

Operation manual

Replaceable

ASW−SG85FASW−SG625AP ASW−SG85F−Y05 ASW−SG86F ASW−SG86F−Y05

6 inch　transmittance: 30％ or less

8 inch　normal mode： transmittance: 30％ or lesslatch mode： transmittance:70％ or less

Dark ONNormal mode / Latch mode selectable(with switch)

ON/OFF when trouble

Dark ONON/OFF when trouble

NPN open collector Rating： sink current 30VDC or less, 20mA or less

Open collector input or contact input Light emission inhibit ON： 1.5V or less OFF: 4V or more

Ambient illumination

Ambient temperature

Ambient humidty

Protective structure

Vibration

Shock

1500 l x or less

-10 - +55℃（non-freezing）

35 - 85%RH （non-condensation）

ＩＰ40

10-55Hz double amplitude 0.5mm X, Y, Z directions, 2 hours each

300m/s2 X, Y, Z directions, 3 times each

Cable length： 3mCable length： 3m Cable length： 0.5m Cable length： 3m Cable length： 0.5m

Approx. 390g Approx. 250g Approx. 400g Approx. 260gApprox. 330g

（For a noise prevention, a capacitor is installed between the 0V power supply and the sensor’s aluminum case.

Do not conduct withstand voltage Test between any input / output and the sensor case. ）

■ OPRATING ENVIROMENT ■ COMPONENTS

ASW-SG625AP

ASW-SG85F

ASW-SG86F

ASW-SG85F-Y05

ASW-SG86F-Y05

ASW-SG125VF

12-24VDC

5VDCLight emissioninhibit input

Output inhibit input

0V

(Capacitor ground)(Capacitor ground)

24VDC

5VDC

Light emissioninhibit inputOutput inhibit input

CH and troubleoutputs

CH and Trouble outputs

0V

■ PIN CONFIGURATION DIAGRAM

Comb

Switch cover

Connector：OMRONXG4A-3031

+24V+24V+24V0V0V0V*1*1*2*2

CH1CH2CH3Ch4Ch5Ch6Ch7CH8CH9CH10CH11CH12CH13Ch14CH15CH16Ch17CH18CH19CH20CH21CH22CH23CH24CH25

CH26 *4

B7B10B11B8B13B14B16B17B19B20A1A2A3A4A5A6A7A8A9A10A11A12A13A14A15A16A17A18A19A20B1B2B3B4B5B6B9

Sensor Connector number

*3

*1：Light emission inhibit input*2：Output inhibit input

*3：Trouble output*4：ASW-SG86F

External wiring and connector number

Comb

8 inch 12 inch

Switch cover

CH1（1st beam axis）mark

*M4×8screw

Connector FujitsuFCN-361J040-AU

Fixing plate for packing（Remove before using sensor）

*（The M4×8 screw are used to fix the fixing plate. 　Do not use these screws to mount the pudoduct. ）

Inte

rnal

circuit

Inte

rnal

circuit

Inte

rnal

circuit

■Dimension （Unit：mm）

ASW-SG625AP

14

Ø6

※1 tail of the protrusion end of the comb

R0.62

(23°)

4

10

(10)2-M4 tap×depth:8

60

L3

2W

25

50

1.8P

4

1.8

※2

※1

L1L2

Cable

sensor unit

optical axiscenter position

B

0.35 A,Bopticalaxis centerposition

1(optical axis width)

3(optical axis width)

(common to each)

ASW-SG85FASW-SG85F-Y05ASW-SG86FASW-SG86F-Y05

Comb sensor unitModel：ASW-F2500

158.75

152.46.35

26

25

166.9

160.554.55

175

168.65ASW-SG85F

ASW-SG85F-Y05

ASW-SG86F

ASW-SG86F-Y05

P(Pitch)Model W

(Width)N

(Channel) L1 L3L2

10

5φ2.2 φ12

(27.5)25

1.8

Comb sensor unitModel：ASW-F2500

10

5φ2.2

φ1

2

(27.5)25

1.8

14

Ø6

10

Cable

sensor unit

optical axiscenter position

3(optical axis width)

※1 tail of the protrusion end of the comb

0.4 0.41

R0.6

2

(23°)

4

optical axis center position

1(optical axis width)

(10)2-M4 Tap×8 60

130

2

25

50

1.82.96

4

1.8

※2

※1

120.8114.24

0.35 A,BAoptical

axis 1ch(common to each)

The dimension shown in these drawingapply to the bottom end （※2）, not the protrusion end（※1） of the comb.

ASW-SG125VF

Ｂ

16

14

14

optical axis center position

3(optical axis width)

(0.7)

Ａ

260

10

70Connector160

The dimension shown in these drawingapply to the bottom end （※2）, not the protrusion end（※1） of the comb.

5

2-M4 depth:82-M4 depth:8

2-M4(through hole)

(14.4)

1.8

211

1.8

4 ※2

※1

251.8240

8

3.5（M4 tap）7(M4 tap)3.5

optical axis(CH1) (CH25)

optical axis 25

optical axiscenter position

1 pin

12

180

210

Optical axis1 ch

Comb sensor unitModel：ASW-F1600

10

16

2

1.8

φ1φ2.2

5

（18.5）

R0.6

2

0.40.4 1

1(optical axis width)

optical axis center position

4

※1 tail of the protrusion end of the comb

(23°)

8.2

0.4 0.41

opticalaxis 1ch

Ａ

0.35 A,B(common to each)

B

The dimension shown in these drawingapply to the bottom end （※2）, not the protrusion end（※1） of the comb.

20

20

50

10