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Page 1: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...inst.eecs.berkeley.edu/~ee245/fa07/lectures/LateralResonators.pdf · Both the average residual stress in the polysilicon
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W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, “Laterally driven polysilicon resonant microstructures,” Sensors and Actuators, 20, 25-32, 1989.
Page 2: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...inst.eecs.berkeley.edu/~ee245/fa07/lectures/LateralResonators.pdf · Both the average residual stress in the polysilicon
Page 3: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...inst.eecs.berkeley.edu/~ee245/fa07/lectures/LateralResonators.pdf · Both the average residual stress in the polysilicon
Page 4: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...inst.eecs.berkeley.edu/~ee245/fa07/lectures/LateralResonators.pdf · Both the average residual stress in the polysilicon
Page 5: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...inst.eecs.berkeley.edu/~ee245/fa07/lectures/LateralResonators.pdf · Both the average residual stress in the polysilicon
Page 6: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...inst.eecs.berkeley.edu/~ee245/fa07/lectures/LateralResonators.pdf · Both the average residual stress in the polysilicon
Page 7: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...inst.eecs.berkeley.edu/~ee245/fa07/lectures/LateralResonators.pdf · Both the average residual stress in the polysilicon
Page 8: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...inst.eecs.berkeley.edu/~ee245/fa07/lectures/LateralResonators.pdf · Both the average residual stress in the polysilicon

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