NEW

One-Shot 3D MeasurementInstan t 3D measurement over a l a rge a rea

One-shot 3D Measuring MacroscopeVR-3000 Series

Signifi cant time and skill are required in order to

produce repeatable measurements.

Conventional Measurement Devices

With conventional equipment, only a single line can be measured, making it

challenging and time consuming to analyze an entire sample.

Measurement time: Several hours

2

Simply place the sample on the stage and click

Measure.

The setup is user-independent, enabling anyone to

obtain repeatable and reliable results.

One-shot 3D Measuring MacroscopeThe entire surface area can be measured at once, allowing for accurate

measurement of the intended region.

One-shot 3D measurements over a wide area can be performed instantly.

Measurement time:

4From seconds

Example: Depression in a battery

NEW

One-shot 3D Measuring Macroscope

VR-3000 Series

NEW

3

Here's the difference!

One-shot surface measurement of 3D shapes

allows measurements such as height, angles and

radii to be taken simultaneously.

Conventional measurement devices

Shapes measured with points and lines

It is difficult to measure structures with large

height differences or shapes with steep angles.

Example: Stand for handheld device

es

One-Shot 3D MeasurementAllows non-contact 3D measurement of surfaces.

Analyze difficult-to-reach areas that could not be measured

with conventional systems.

4

Here's the difference!

In addition to visual inspection, multiple measurements

can be made to calculate roughness and waviness.

No. Measurement name Measurement value Unit

1 Evaluated length 1200 47.24 μm Mil

2 Wz 34.3 1.35 μm Mil

3 Wa 10.5 0.41 μm Mil

Conventional measurement devices

Limited viewing area

A small fi eld-of-view makes it difficult to measure

curvature and irregularity over wide areas.

One-Shot 3D MeasurementAllows 3D measurement of wide areas in seconds,including measurement

of curvature and small changes in surface texture.

Conventional field

Example: Irregularity and unevenness in coating

Max. height

Max.-Min.: 34.3 μm (1.35 Mil)

Min. height

5

Inspecting components now requires 3D data

KEYENCE combined the advanced optical design of our digital microscopes with the high-speed, high-accuracy

measurement and 3D technology of our displacement gauges to develop a macroscope that completes instant 3D

measurements.

Some things can only be seen with 3D measurement.

Introducing the One-shot 3D Measuring Macroscope

Internal structure of a watch

6

The 3 Main Benefi ts of One-shot 3D Measurement

P.8

Precise 3D measurement of a wide fi eld with a single click

Innovative optical technology and hardware

User independent 3D measurements

Place and push 3D measurement and measurement assistance functions P.12

A wide range of easy 3D analysis and reporting tools

Extensive measurement and imaging capabilities P.16

One-shot 3D Measuring Macroscope VR-3000 Series

NEW

7

Precise 3D measurement of a wide fi eld

The world's fi rst one-shot measurement algorithm

8

TMT (Telecentric Multi-Triangulation) Algorithm

We combined three, double-telecentric lenses with the multiple triangulation

technology of our displacement gauges to create a unique algorithm for high-

speed, high-accuracy 3D measurement.

Real Color 3D Technology

Our technology produces true color 3D images. Red,

green and blue light are shone from a dedicated real

color lighting unit. This light are captured by a new,

high-accuracy CMOS sensor and images obtained

from each separate color are compiled to create a

full-color image. This process captures accurate and

vivid color information that cannot be obtained with a

standard color camera and white light.

XYZ Traceability

The VR-3000 Series allows any user to obtain highly

reliable measurements based on an international-

standard traceability system. A calibration gauge with

inspection results and a

calibration certifi cate are

included with the system.

This allows calibration to

be performed on-site by

anyone.

Measurement Principle (right)

Bands of light from the transmitter lens are scattered across the surface of the object being

measured. When the refl ected light is observed from another angle (receiver lens), height

differences on the object make the bands of light appear distorted. An image of these

distortions is taken using a CMOS sensor, and triangulation calculations are performed to

measure the height and position at each point.

World's First

National Institute of Advanced Industrial Science and Technology (AIST)

JCSS accredited organization

Gauge block

Height difference measurement device

Calibration block

National Institute of Advanced Industrial Science and Technology (AIST)

JCSS accredited organization

Standard Scale

Coordinate measurement equipment

Calibration chart

National standard National standard

X-YZ

One-shot 3D Algorithm

We combined our TMT one-shot algorithm for high-accuracy, true color

measurements with our high resolution 3D technology to create the world's fi rst

algorithm for instant 3D measurement. CMOS

Receiver lens

Light source

Transmitter lens

Object being measured

9

High accuracy with a telecentric lens

Feature size is unchanged as the lens moves in the Z

When measuring objects with height differences, it is important

that the fi eld-of-view remains constant as the lens moves in

the Z direction. By using a telecentric lens, the VR-3000 can

accurately measure height differences up to ±5 mm ±0.2"

Minimal distortion throughout the fi eld-of-view

A telecentric lens with minimal distortion throughout the

entire viewing area is essential for one-shot measurement of

areas as large as 3 cm 1.18".

Industry's first

Precise one-shot 3D measurement over a large area

An innovative combination of optical technology and hardware

Triple telecentric lensesTo achieve high-accuracy 3D measurement, it is crucial that the transmitter

and receiver lenses are made in such a way to minimize distortion, and that

changes in the distance between the object and lens do not alter the size of the

image.

The VR-3000 contains a total of 3 wide telecentric lenses, used in combination

with the industry's largest CMOS. The advanced optical design allows high-

accuracy one-shot 3D measurement of areas up to 3 cm 1.18".

Contact-type

measurement device

Insta

llatio

n a

rea

12" x

17"

VR-3000 Series3-dimensional

measurement

device

When

viewing

object

from

above

Standard

lens

Telecentric

lens

Standard camera lens

Distortion in periphery of lens

VR-3000 Series

Minimal distortion throughout entire fi eld

Minimal distortion over the

entire measurement area.

Space-saving design requires

minimal operating area

The small footprint allows the unit to be

placed anywhere that has acccess to a 100 VAC

power outlet.

10

Accurate imaging

No vibration isolation required

High-accuracy CMOS sensor

The industry's largest high-

accuracy CMOS is used,

allowing data to be obtained with

minimal noise for high-resolution

image capture.

Specially designed vibration-proof rubberThe VR-3000 is made of a

vibration-proof material with

over four times the vibration

prevention of conventional

materials. The material absorbs

a wide range of vibration from

low to high frequencies, allowing

for steady imaging even at high

magnifi cations.

Real Color Light Unit

The VR-3000 has a light source

that emits red, green and blue

light for true color reproduction.

The combination of an optical

system and optical fi bers

minimizes inaccuracies when

composing the colors.

Designed to withstand large amounts of vibrationStrength analysis was used to

create a highly-rigid frame and

remove the need for vibration

isolation equipment like an air

table. Below is a diagram of the

strength analysis on the casing

on the unit.

11

User-independent measurementsPlace and push 3D measurement

Conventional Measurement Devices

User Measurement results

Person A 0.34

Person B 0.29

Person C 0.35

Person X 0.31

Measurement

length

Measurement

pitch

Measurement

speed

Brightness

adjustment

Measurement

range

2. Probe selection

Different contact probes need to be

selected according to the sample or

purpose of measurement.

1. Positioning

Adjustments such as sample positioning

and stage alignment need to be

completed by the user.

3. Parameter selectionVarious measurement conditions need to be set.

Various adjustments need to be made by the

user, meaning that measurement results may be

inconsistent.

12

u

Just place the sample

and click one button.

One-shot 3D Measuring Macroscope

Without AALG With AALG

User Measurement results

Person A 0.35

Person B 0.35

Person C 0.35

Person X 0.35

Ju

a

AALG (Advanced Auto Light & Gain) algorithm allows accurate data to be obtained

The transmission method of the projected light and the receiver sensitivity

are automatically adjusted to the optimal conditions for the sample being

measured, meaning that users only need to click the Measure button. This

prevents adjustments made by a user from causing inconsistencies when

gathering 3D data.

Industry's fi rst

Measurements are completed instantly with just

one click of the Measure button. Repeatable and

accurate results can be obtained by anyone.

13

u

u

User-independent measurementsVarious measurement assistance functions are available to eliminate inconsistencies between users

Measurement assistance tools identify edges and centers of different shapes

Measurement baselines are created based on a surface area to improve measurement accuracy

Extensive measurement assistance tools make it possible

to measure shapes by automatically establishing baselines

such as top, bottom or intersection points. With contact

type systems, inaccuracies tend to occur with these

measurements. Now, with the measurement assist tools,

these measurements can be made accurately and easily.

It can be difficult to accurately set the proper baseline when using a linear incline correction, which can lead to large errors in

measurement. For example, when measuring two surfaces that are 10 mm 0.39" apart, a measurement error of nearly 20 μm

0.79 Mil will occur with an incline of just 0.1 degrees. The VR-3000 has several functions for determining the baseline based on a

surface area, allowing for accurate setting of the baseline and reducing measurement errors.

Case: Axial direction of a round bar (measuring wear of axles, etc.)

Linear: Standard setting

Example: Height difference of 0.35 mm 0.01" set

Surface: Standard setting

Case: Angle between two surfaces (folding angle of pressed sheet metal, etc.)

Contact-type

Upward

slope

Downward

slope

Fixed

Contact-type

With assistance tools

With assistance tools

Contact-type

Results are greatly affected by the slope of the sample

VR-3000

A base level can be set for wide surfaces,

preventing them from being affected by

the slope of the sample.

Height difference:

0.31 mm 0.01"

Height difference:

0.35 mm 0.01"

14

u

u

Template function for completing repeat measurements on similar parts

Eliminate variations during repeated or comparative measurements

All settings and measurement specifi cations for an image are stored in a template that can be applied to other samples instantly. The

automatic position correction function also makes it possible to complete measurements at the same location on multiple samples,

even when the samples are not placed in the same orientation.

Repeatable comparative measurement *Requires optional VR-H1P Analyzer expansion module

Automatic position correction Regardless of sample orientation

The 3D comparative view displays the images of two samples side-by-side and quantifi es differences in structure, including height

and cross-sectional area.

2. Use this template to automatically measure the

same location on samples B, C and D.1. Complete a profi le measurement for

sample A and save a template.

Automatic position

correction function

Visualize and quantify differences

in the same area

A

B

C

D

15

A wide range of easy 3D analysis tools

Easily complete 3D analysis on any sample

Measure height, width, angle and radius

X, Y and Z measurement

Measurements such as height, width,

cross-sectional area, angle and radius can

be made by simply pointing and clicking

across the desired area.

Profile measurement

16

Measuring difference between Sample A and Sample B

Measure the average height difference, volume, surface area and area-to-surface area ratio of any area selected on the screen.

3D visual comparison and comparative measurement

Average height difference, volume and surface area measurement

Comparative measurement

Place separately captured images side-by-side and

manipulate the 3D displays simultaneously.

The 3D comparison view displays the images of two samples

side-by-side and quantifi es differences found between the

two shapes, including height and cross-sectional area.

Measure average height difference

Measurement results

3D visual comparison Comparative measurement

Measure volume and surface area

Low

17

It is possible to visualize curvature with a height-

color map on a 3D image and quantify the curvature

of a sample. Curvature and waviness parameters will

be automatically calculated by the system.

Roughness parameters including Ra and Rz can

be measured for the intended area while viewing

either a 2D or 3D image.

Various parameters, such as Sa and Sz can be

measured for a selected area in accordance with

ISO 25178. Differences in appearance and texture

can be quantifi ed easily.

Line and surface roughness measurements

Curvature, linear roughness (ISO4287:1997), surface roughness (ISO 25178)The VR-3000 is equipped with a variety of metrology functions for quantifying roughness and surface deformations.

Measure line roughness Measure surface roughness

Measuring curvature and distortion

18

For those wanting to measure a larger area in 3D, a stitching module

allows for 3D measurement of an area up to 270 mm (10.63").

Wide-fi eld 3D Measurement

*Requires VR-H1J Stitching module (optional)

Stitching

19

A wide variety of easy-to-use 3D analysis

and reporting toolsOne-click measurement and simple report creation

Gather and analyze 3D data

By simply placing the sample on the stage and

pressing the "Measure" button, 3D data will

be collected in just a matter of seconds. Once

the data has been obtained, measurement

and analysis can be performed in the Analyzer

software.

A function guide is included for data analysis - eliminating the need for training!

Intuitive software design makes analysis

incredibly easy. The user can simply move their

mouse over each measurement icon in the

function guide to see a brief description of the

measurement type, eliminating confusion when

completing measurements.

STEP1

Data capture

STEP2

Measurement

20

CAD compatible

3D data collected by the VR-3000

can be saved as an .stp fi le and

output to a variety of CAD programs.After completing a measurement, a report can be generated instantly with a single click

Formatted reports can be created and saved easily,

eliminating the trouble of making a report from

scratch for each sample. The Template function

(see page 15) can also automatically perform

measurements and create reports over the same

location on a sample.

STEP3

Report

21

u

u

The VR-3000 is designed with

unique telecentric lenses created

by advanced optical technology

developed through 20 years of

microscope design experience.

The high-quality lenses provide

large depth-of-fi eld observation

with minimal distortion.

Telecentric lenses with a large depth-of-fi eld

Extended depth-of-fi eld function

Telecentric lenses combined with

the KEYENCE depth composition

function allows for sharp focus of

the entire surface without the need

for any manual manipulation of

the part. This function produces

fully-focused images of samples,

even when working at high

magnifi cation, where depth-of-fi eld

is limited.

An easy-to-use microscope for everyday inspection

Large depth-of-fi eld

Conventional microscope

Conventional microscope

VR-3000 Connector 12x

VR-3000 PCB 12x

22

u

High-defi nition imaging

9 megapixel 3 CMOS camera

Observation that surpasses the limits of optics

16-bit HDR function

Capture high-quality microscope images

Extensive 2D measurement functions

Various measurements, such

as distance, angle and radius,

can be taken simply by clicking

the desired points on an image.

An edge extraction function and

measurement assistance tools also

eliminate human error, allowing

for consistent and repeatable

measurements between different

users.

The VR-3000 is able to capture up to 16 bits of red, green

and blue color data to perform signifi cantly more accurate

imaging of a sample than what can be captured with

traditional 8-bit devices.

Samples can be imaged under magnifi cations ranging from

12x to 160x. High resolution images of 9 megapixels can be

captured and saved by simply pushing the Capture button.

9 megapixel 3 CMOS camera

Red, green and blue data are

obtained for each pixel, allowing

for clear observation with excellent

color reproduction.

� Refl ective samples cannot be

imaged clearly due to the limited

levels of color that can be captured.

� Details in low contrast samples

cannot be seen.

With one click the system

will capture additional

color data by varying the

shutter speed

� By increasing the levels of color

gradation, samples with bright spots

or dark spots can be imaged clearly.

� Low contrast samples can be

imaged clearly.

256 times

more levels of

color than a

conventional

deviceE f f e c t sP r o b l e m s

16-bit (65,536-color)

HDR function

8-bit(256-color)

Conventional

method

Without HDR With HDR Resin surface 40x

23

u

Captures information that traditional profi le measurement tools cannot

Captures data that could not be seen with a limited viewing area

Linear measurement device

• Contact-type measurement takes a long time even when measuring a single

line.

• In some cases, the intended area, such as a BGA peak, is not correctly measured.

• Two areas of interest that are far apart cannot be measured simultaneously,

and stitching them together takes a long time.

• Positioning the sample for accurate measurement is extremely difficult.

With One-Shot 3D

The 3D shapes of all BGAs are captured

simultaneously, meaning that in addition to

seeing the peak, the entire BGA shape can

be seen instantly.

With One-Shot 3D

A wide area can be measured in one 3D

image. Surface preparation, like adjusting for

tilt, can be done with a single click.

u

Case: BGA height

Case: Surface height of substrate

Example applications

24

u

Captures data that cannot be obtained with point measurement systems

Captures data that cannot be seen with traditional microscopes

3D measurement device

• Curvature can only be measured at selected points.

• Figures cannot be seen visually.

Optical microscope

• The location of air leakage cannot be seen, even when viewing under high

magnifi cation.

• Small changes in shape cannot be quantifi ed.

With One-Shot 3D

Height differences are displayed in 3D

with color coding, providing a visual

representation of curvature. It is also

possible to instantly measure the highest

and lowest points on a surface that is several

centimeters wide.

With One-Shot 3D

3D data is obtained and height differences are

color coded even for shapes with minute height

differences, ensuring that no surface changes

are missed during inspection. Targeted areas

can also be quantifi ed to create specifi cations

for acceptable or defective parts.

!-------Red point: point being

measured

u

Case: Curvature of a die-casting

Case: Depressions in O-rings

25

14.1

34470

150

496

48428

147

328.4

91 109310

290

171

29011.42"

343310150

14.1

34470

496

48

147

150428

344

228.5

(77)

414

195

11726

25.3

8480

182

8×M6 Depth 10 0.39"

228

32812597 224

35

35

35180 R7.09"R

5.91" 5.91" 5.91"6.73"3.58" 4.29"

12.20"

12.93"

12.20" 16.85"　　　　　　 16.85"　　　　　　

16.30"

13.54"

9.00"

3.82"

4.92" 12.91"

8.82"

8.98"

1.89" 1.89"

0.56" 0.56"

2.76"2.76"

13.54"13.54"

19.53" 19.53"

11.42"

5.79"5.79"

13.50"

3.15"

7.17"

4.61"1.00"

7.68"

1.38"

1.38" 1.38"

(3.03")

3.31"

1.02"

Optional Items

External Dimensions

OP-87708 100 mm 3.94" Spacer

Head: VR-3050 Head: VR-3100

Controller: VR-3000K

OP-87709 Tilt Stage

OP-87717 Manual Slider for Image Stitching

Inserting this 100 mm-high spacer between the

measurement section and the base allows you to

measure objects up to 188 mm 7.40" in height.

Install this on the XY stage to observe and measure

objects from any angle without having to manipulate the

object by hand. The stage is designed so that the sample

securely adheres to the stage when positioned at an angle.

For those wanting to measure a wider area, a stitching

module (optional) allows for an area of up to 270 mm

10.63" to be measured.

188 mm

(7.40")

26

Unit: mm inch

System Configuration Diagram

Specifications

OP-87709 tilt stage (optional)*

OP-87715 XY stage (optional)*

OP-87710 calibration block (standard item)

*Comes standard with the VR-3100.

OP-87708 100 mm 3.94" spacer (optional)

OP-87717 manual slider for stitching (optional)

VR-H1VE Viewer software

VR-H1AE Analyzer software

VR-H1P Analyzer expansion module (optional)

VR-H1J Stitching module (optional)

*1 Low range ±5 mm 0.20" and high range ±0.5 mm ±0.02" around the focal point position. *2 Height measurement resolution. *3 When the KEYENCE VR calibration gauge is measured with average

height difference mode. *4 When using the OP-87717 manual slider for stitching. *5 The VR-3050 requires the XYѲ stage (OP-87715, sold separately). *6 Windows 7 Professional and Ultimate.

ModelController VR-3000K

Head VR-3100 VR-3050

Wide-fi eld mode High magnifi cation mode Wide-fi eld mode

Magnifi cation on a

15" monitor12x 25x 38x 50x 40x 80x 120x 160x 12x 25x 38x 50x

Field-of-view

Horizontal: mm24.0

0.94"

12.0

0.47"

8.0

0.31"

6.0

0.24"

7.6

0.30"

3.8

0.15"

2.5

0.10"

1.9

0.07"

24.0

0.94"

12.0

0.47"

8.0

0.31"

6.0

0.24"

Vertical: mm18.0

0.71"

9.0

0.35"

6.0

0.24"

4.5

0.18"

5.7

0.22"

2.9

0.11"

1.9

0.07"

1.4

0.06"

18.0

0.71"

9.0

0.35"

6.0

0.24"

4.5

0.18"

Optical zoom 1x to 4x

Measurable height*1 10 mm 0.39" (±5 mm ±0.20") 1 mm 0.04" (±0.5 mm ±0.02") 10 mm 0.39" (±5 mm ±0.20")

Standard scale*2 0.1 μm 0.004Mil 0.5 μm 0.02Mil

Repeatability*3Height measurement 0.5 μm 0.02Mil

Width measurement 1 μm 0.04Mil 0.5 μm 0.02Mil 1 μm 0.04Mil

Working distance 75 mm 2.95"

Image receiving element 4 megapixel monochrome CMOS

Transmitter lens Double telecentric lens x2

Receiver lens Double telecentric lens

Light sourcesObservation light source LED ring light (red, green, blue) LED ring light (white)

Measurement light source White LED

Image size 1024 x 768 pix, 2048 x 1536 pix

Stage

XY stroke Up to 270 mm 10.63"*4 (default 70 mm 2.76"*5)

Z stroke 90 mm 3.54" (electric) 88 mm 3.46" (manual)

Rotation ±90° –

Tilt Over ±30° –

Data processing Dedicated PC specifi ed by KEYENCE (OS: Windows 7)*6

Power sourceSupply voltage 100 to 240 VAC 50/60 Hz

Power consumption 150 VA

Environmental

resistance

Ambient temperature for usage 15 to 30°C 59 to 86°F

Relative humidity for usage 35 to 80%, no condensation

WeightController 3.8 kg

Head 21.5 kg (weight of measurement unit: 10.8 kg)

VR-3050 VR-3100 Control PC

Head

ControllerVR-3000K Monitor (optional)

27

VR3-KA-C-US 1043-1 611719 Printed in Japan

* 6 1 1 7 1 9 *

All-in-one imaging and measurement system

Digital MicroscopeVHX-2000

NEW

NEW

Providing non-contact profi le and roughness measurements on nearly any material

3D Laser Scanning MicroscopeVK-X100/X200

❙ 200× - 24,000× magnifi cation❙ 0.5 nanometer Z-axis resolution❙ High-resolution, large depth-of-fi eld observation❙ Profi le and roughness measurements with zero sample preparation❙ Measures thickness and uniformity of clear layers❙ Acquires data on angles approaching 90 degrees

❙ Large depth-of-fi eld: 20x larger than conventional optics❙ Free-angle observation for 360 degree inspection❙ Observe, record and measure - all with a single system❙ 0.1x - 5000x magnifi cation range with brightfi eld, darkfi eld, transmitted, DIC and polarized illumination❙ View low-contrast and highly-refl ective targets❙ 2D & 3D Image Stitching expands viewing area up to 200 times