vacuum valves - ideal · pdf filec25.03 gate valves gate valves allow a 100 % open position...
TRANSCRIPT
VACUUM VALVES
C25.02
VACUUM VALVES
Common specificationsAll vacuum valves have the followingcommon specifications:
• Guaranteed tightness• Individually tested• Standard flanges• High conductance• High reliability• Operation in all positions
Isolation and tightnessCertain functionalities are necessaryfor vacuum technology:• Connections: The majority of
vacuum systems require connectionswith either pumping systems ordifferent peripheral accessories.
• Tightness: It is often necessary thatconnections are perfectly tight whenclosed in order to preserve vacuumintegrity, while still allowing servicing.
• Specific parameters: Differentvacuum applications will havedifferent needs, with stringentrequirements regarding: materials,dimensions,… These parametersmust be considered in order toselect the best vacuum valvesolution for the specific application.
Vacuum valves: the Alcatel offer
Alcatel supplies customers with complete pumping systems thatcombine pumps with top-qualityaccessories, including vacuum valves.The new Adixen range of vacuumvalves has been created incooperation with VAT, world leader invacuum valves and sealingtechnology.
A number of products presented inthis section of the catalogue aredesigned and manufactured by VATfor Alcatel. This partnership helps toensure that we offer our customers thebest vacuum components available onthe market.
A broad range
Alcatel offers a solution for eachapplication.• Variations by type: Each type of
valve (Gate, Butterfly, Angle…) isavailable in different versions,offering different materials, flanges,actuators, etc…, to provide themost appropriate solution to any ofa wide range of demands.
• Special valves: A variety of specialvacuum valves (vent valves, 3 wayvalves, leak valves, throttlingvalves…) complements the Alcateloffer.
Introduction
C25.03
Gate valves
Gate valves allow a 100 % open positionand thus a maximum conductance. In the open position, the mechanism (gateand counter plate) is completely insertedin the body; no obstacle will modify thegas flow.• Compact and low profile, they can be
easily integrated into equipment in anyposition.
• The locking device, designed with unlubricated balls, allows minimal closing shock and minimal wear, preventing seat seal damage when closing and opening.
• UHV gate valves (stainless steel body)have a bellow sealed shaft feedthroughand metal seal between body and bon-net. Vacuum gate valves (Aluminium
body) have FPM seals for shaft feedthrough and bonnet.
• Models with pneumatic actuators areclosed in case of power failure. Theystay mechanically locked even with compressed air failure.
Butterfly valves
• Butterfly valves can be a compact andeconomic alternative for gate valves.Based on a rugged and simple design,they consist of a circular plate rotatinginto the valve body.
• Models DN 63 to DN 200 have aunique plate actuating mechanism.The plate first swings to the closed position without any friction from
the plate seal. The sealing procedure issimilar to that of a gate valve, with alinear movement (driven by the patentedspiral mechanism). Only for applicationsin clean vacuum systems because ofexposed plate seal.
• Available with stainless steel body (CF-Fflanges) and aluminium body (ISO-F flanges) they have a bellow sealed shaft
feedthrough.• Models with pneumatic actuators are
delivered with position indicator andsolenoid.
• Models DN 40 and DN 50 (manualactuators) are suitable for numerousapplications: accessory isolation, venting...
Angle valves
• The angle valve range is characterizedby its variety of models and its actuating principles.
• Manual, pneumatic and electromagneticangle valves are among the most used inall applications of vacuum technology.
• The choice of materials, of differenttightness designs and levels, make itpossible to find suitable solutions forthe majority of requirements:
- pumping systems- connection between pumps- pure gas- corrosive gas
- medium vacuum- high vacuum- ultra-high vacuum
• From DN 16 to DN 250, the broadrange of angle valve configurations letsusers select the best compromise between cost and performances.
Special valves
As a complement to its range of Gate,Butterfly and Angle valves, Alcatel offersa line of special vacuum valves for speci-fic demands.• Isolation valves for medium vacuum
and high pressure (gas and fluids)- diaphragm valves DN 16-25-40
- ball valves DN 16-40 (2 ways - 3 ways)
• Micro flow regulation valves DN 16• Leak valves DN 16• Vent valves DN 16• Safety Isolation Valves for rotary vane
pumps DN 16-25
Other modelsFor applications that require valves otherthan those listed above, Alcatel will bepleased to advise suitable solutions.
p C25.05
p C25.13
p C25.19
p C25.31
C25.04
VACUUM VALVES
Vacuum valves:
Direct current
Frequency50/60 Hz
Frequency50 Hz
Frequency60 Hz
12 V24 V48 V100 V100/115 V110/115 V200 V200/230 V220/230 V
ABK
EUFCGHDI
JS
L
V
P
Q
R
Gate valveUHVHV
S.S.alu
DN 63 to 250DN 16 to 250
manual or pneumaticmanual or pneumatic
Butterfly valve
Angle valve
UHVHV
S.S.alu
DN 63 to 200DN 63 to 200
pneumaticpneumatic
UHVHVHVHVHV
S.S.alualuS.S.alu
DN 16 - 40 - 63DN 25 - 40
DN 16 to 160DN 16 to 80DN 16 to 160
manual or pneumaticelectro-magnetic
manual or pneumaticmanual or pneumatic
pneumatic
All valves with pneumatic actuatorsare delivered with position indicatorsand solenoids.
Table of voltages
This table of voltages provides theletters required to complete the codeswhen ordering some valve models.The letter is to be added to the codenumber, in order to define theappropriate voltage.
Seal kit
For any seals kit of valves not refered in this catalogue, please contact the Alcatel Vacuum Technology Commercial Department.
Seal kit = 1 seal for the plate + 1 seal for the body.
C25.05
HV Gate valvesDN 16 - 250
HV Gate valves DN 16 - 250
(aluminium body, FPM/shaft feedthrough)Manual and pneumatic actuators(double acting cylinder, with position indicator and solenoid)
PART NUMBERmm
Flange DN
inch
30385K30386K30387K30388K31152K31546K31153K31532K31533K31534K
162540506380100160200250
5/8
111/2
221/2
346810
Main Specifications
Aluminium bodyThin profile and light weightHigh quality shaft feedthrough: FPM sealsLeak rate, body seat: <10 -9 mbar.l/sPressure range: DN 16 - 50: 1.10-7 mbar to 1 bar (abs)
DN 63 - 200: 1.10-7 mbar to 1.6 bar (abs)DN 250: 1.10-7 mbar to 1.2 bar (abs)
Differential pressure on the gate:DN 16 - 50: ≤ 1 bar in either directionDN 63 - 200: ≤ 1.6 bar in either directionDN 250: ≤ 1.2 bar in either direction
Max differential pressure at opening ≤ 30 mbarCycles until first service: DN 16 - 50: 50 000
DN 63 - 100: 200 000DN 160 - 250: 100 000
Bake-out temperature:• Valve DN 16 - 50 ≤ 100 °C• Valve DN 63 - 250 ≤ 120 °C• Manual and pneumatic actuator 80 °C• Position indicator 80 °C• Solenoid 50 °CSeals:• Bonnet FPM• Plate FPM
* Please indicate the appropriate letter:- M for manual actuator- for pneumatic actuator, one of the options A, B, E, F, G, H, I, K, U from voltages table page C25.04.- DN 200 - DN 250 not available with manual actuator
Seal kits (see page C25.04)
For HV gate valves, DN 16 - 250Manual and pneumatic actuators
JISISO-FISO-KF
PART NUMBER
mm
Flange DN
inch
31545 *31033 *31034 *31035 *31036 *
31024 *31544 *31025 *31026 *31027 *31028 *
30381 *30382 *30383 *30384 *
162540506380100160200250
5/8
111/2
221/2
346810
C25.06
VACUUM VALVES
U
AK
I
O
B D
TM
NQ
*L
H
V
DN 16 - 50 (5/8" - 2 ")
seat side
required for dismantling
leak detection portmech. pos. indication
Technical data Manual Pneumatic
DN(nom. I. D)
Standard flanges
ISO-KF ISO-F JIS
Clos
ing
orop
enin
g tim
e
Mol
ecula
r flo
wco
nduc
tanc
e
Weight
Compressed airpressure
min. - max.overpressure
Volume of aircylinder Weight
mm inch I/s kg Ibs bar psig I Ft3 s kg Ibs
162540506380100160200250
5/8
111/2
221/2
3468
10
16254050
6380100160200250
6380100150200250
10341402605501000200060001200022000
0.40.40.71.43
3.84.59--
0.90.91.53791020--
4.5 - 74.5 - 74.5 - 74.5 - 74 - 74 - 74 - 74 - 74 - 74 - 7
65 - 10065 - 10065 - 10065 - 10055 - 10055 - 10055 - 10055 - 10055 - 10055 - 100
0.010.030.070.070.160.200.220.500.901.50
.0004
.0010
.0020
.0020
.0060
.0007
.0080
.0180
.0320
.0530
0.80.11.21.31.51.72.02.03.05.0
0.80.81.21.23
3.84.591825
1.81.82.72.77910203855
Dimensions manual actuator DN mminch
165/8
251
4011/2
502
A mminch
B mminch
D mminch
H mminch
I mminch
K mminch
L mminch
M mminch
N mminch
O mminch
Q mminch
T mminch
U mminch
V mminch
552.1775
2.9549
1.9352.22.06
3.1233
1.302409.4537.51.481084.2575
2.9565
2.5693
3.6740
1.5755
2.17
401.5730
1.1815.5917.2.683
.1225.981003.9415.5939
1.5530
1.1828.9837
1.4625.9830
1.18
501.9740
1.5724.9426.21.03
3.1232
1.261395.4722.8759
2.3244
1.7335
1.3850
1.9732
1.2630
1.18
512.0155
2.1739
1.5441.21.62
3.1231
1.222088.1932.51.2893
3.6665
2.5655
2.1785
3.3540
1.5750
1.97
HV Gate valvesDN 16 - 250
V
0
W
U
P
K
N
L
T
Q
C25.07
DN 63 -100 (21/2" - 4")
seat side
required for dismantling
Dimensions manual actuator
DN mminch
6321/2
K mminch
L mminch
N mminch
O mminch
P mminch
Q mminch
T mminch
U mminch
V mminch
W mminch
1004
361.42413
16.26203.58.011405.5148
1.8925
0.98209.58.2543
1.69943.775
2.95
803
361.42363
14.29173.56.831184.6548
1.8925
0.98189.57.4643
1.69943.775
2.95
DN 160 (6")
seat side
required for dismantling
U
PK
NT
LQ
*V
W
O
DN mminch
1606
K mminch
L mminch
N mminch
O mminch
P mminch
Q mminch
T mminch
U mminch
V mminch
W mminch
361.42329.512.97155.56.121003.9448
1.8925
0.981746.8543
1.69943.775
2.95
582.28547
21.54280
11.021927.5670
2.7660
2.36267
10.5165
2.561224.895
3.74
HV Gate ValvesDN 16 - 250
C25.08
VACUUM VALVES
DN 16 - 50 (5/8 " - 2")
seat side
required for dismantlingmech. pos. indication
comp. air connection(1/8" NPT for USA)
electrical connection
B D H
N
A
I
OK
ML
Q *
R1/8"
M5 V W
W 1
U
Dimensions pneumatic actuator
DN mminch
165/8
251
4011/2
502
A mminch
B mminch
D mminch
H mminch
I mminch
K mminch
L mminch
M mminch
N mminch
O mminch
Q mminch
U mminch
V mminch
W mminch
W1 mminch
552.1775
2.9549
1.9352.22.06
3.1233
1.302208.6637.51.481034.0675
2.9565
2.5640
1.5765
2.5666
2.6050
1.97
401,5730
1.1815.5917.2.683
.1225.981054.1315.5939
1.5530
1.1825.9825.9856
2.2055
2.1750
1.97
501.9740
1.5724.9426.21.03
3.1232
1.261365.3522.8756
2.2044
1.7335
1.3832
1.2661
2.4060
2.3650
1.97
512.0155
2.1739
1.5441.21.62
3.1231
1.221967.7232.51.2888
3.4665
2,5655
2.5740
1.5765
2.5661
2.4050
1.97
HV Gate valvesDN 16 - 250
C25.09
DN 63 - 100 (2 1/2" - 4")
seat siderequired fordismantlingemergencyposition
comp. air connection(1/8" NPT for USA)electricalconnectionposition indicator
Dimensions pneumatic actuator
DN mminch
632 1/2
K mminch
L mminch
N mminch
O mminch
P mminch
Q mminch
T mminch
U mminch
V mminch
W mminch
W1 mminch
1004
361.42425
16.69203.58.011405.5158
2.2825
0.98221.58.7255
2.17562.272
2.8336.51.44
803
361.42375
14.76173.56.831184.6558
2.2825
0.98201.57.9355
2.17562.272
2.8336.51.44
DN 160 - 250 (6" - 10")
seat siderequired for dismantlingcomp. air connection(1/8" NPT for USA)electrical connection
DN mminch
1606
2008
25010
K mminch
L mminch
N mminch
O mminch
P mminch
Q mminch
T mminch
U mminch
W mminch
V mminch
762.99843
33.19453
17.83308
12.1396
3.781003.94390
15.3586
3.3984.53.3367
2.64
662.6688
27.09363.514.312409.4580
3.1580
3.15324.512.78
752.9576.53.0162
2.44
361.42341.513.45155.56.121003.9458
2.2825
0.981867.3255
2.17562.272
2.8336.51.44
582.28547
21.54280
11.021927.5670
2.7660
2.36267
10.5165
2.5671.52.8257
2.24
HV Gate valvesDN 16 - 250
NT
LQ
R 1/8"
O
V WU
P
K
VL
NTW
Q
O
R 1/8"
W1
K
P
U
C25.10
VACUUM VALVES
ISO F - DN 63 - 250 (2 1/2" - 10")
Flange dimensions DN mminch
632 1/2
A mminch
B mminch
C mminch
D mminch
E x F
G mminch
H mminch
I mminch
M mminch
O1 mminch
JIS - DN 63 - 250 (2 1/2" - 10")
602.361305.121104.3365
2.56
4 x M8
120.4770
2.763
0.1265.52.581315.16
803
602.361455.711254.9280
3.15
8 x M8
120.4783
3.273
0.1273
2.871465.75
1004
602.361656.51455.711003.94
8 x M8
120.471024.02
30.1283
3.271666.54
1606
702.762359.252007.871505.91
8 x M10
160.631536.02
50.2
117.54.632379.33
2008
803.15288
11.34260
10.242007.87
12 x M10
160.632138.39
50.21445.6729011.42
25010
1003.94350
13.7831012.2261
10.27
12 x M10
160.63
----
1756.8935213.86
DN mminch
632 1/2
A mminch
B mminch
C mminch
D mminch
E x F
G mminch
M mminch
O1 mminch
602.361455.711204.7265
2.56
4 x M10
120.4773
2.871465.75
803
602.361606.31355.3180
3.15
4 x M10
120.4781
3.191616.34
1004
602.361857.281606.31003.94
8 x M10
120.4793
3.661867.32
1506
702.762359.252108.271505.91
8 x M10
160.63117.54.632379.33
2008
803.15288
11.34270
10.632007.87
8 x M12
160.631445.6729011.42
25010
1003.94350
13.7832012.6261
10.27
12 x M12
160.631756.8935213.86
HV Gate valves
C
O1
ExF
A
M
G
DB
seat side
seat side
C
G
O1
ExF
A
M
DB H
C25.11
UHV Gate valvesDN 63 - 250
UHV Gate valves DN 63 - 250
(stainless steel body, bellows sealed)Manual and pneumatic actuators(double acting cylinder, with position indicator and solenoid)
ASA-LPISO-FCF-FUNF threads
CF-Fmetric threads
PART NUMBER
mm
Flange DN
inch
30015 *30550 *(1)
30016 *30017 *30018 *30019 *
30010 *30549 *30011 *30012 *30013 *30014 *
30005 *30548 *30006 *30007 *30008 *30009 *
30000 *30547 *30001 *30002 *30003 * 30004 *
6380100160200250
21/2
346810
* please indicate the appropriate letter:- M for manual actuators- for pneumatic actuator, one of the options A, B, E, F, G, H, I, K, U from voltages table page C25.04.
- (1) 30550 *: on request.
Seal kits (see page C25.04)
For UHV gate valves DN 63 - 250Manual and pneumatic actuators
PART NUMBERmm
Flange DN
inch
30100K30551K30101K30102K30103K30104K
6380100160200250
21/2
346810
Main Specifications
Stainless steel body
Cycles until first service: 50 000
Bake-out temperature:
• Valve ≤ 250 °C (open) ≤ 200 °C (closed)
• Manual actuator 250 °C
• Pneumatic actuator 200 °C
• Position indicator 80 °C
• Solenoid 50 °C
Leak rate:
• Body < 5.10-10 mbar.l/s
• Seat < 1.10-9 mbar.l/s
Pressure range: DN 63 - 200: 1.10-10 mbar to 1.6 bar (abs)
DN 250: 1.10-10 mbar to 1.2 bar (abs)
Differential pressure on the gate: DN 63 - 200: ≤1.6 bar in either direction
DN 250: ≤1.2 bar in either direction
Max differential pressure at opening: ≤ 30 mbar
Seals:
• Gate FPM
• Bonnet metal
Shaft feedthrough: non lubricated bellow
U
Ø10
DN
160
/200
K
P
Q*
LM
NT
O1
S
O
U1
V
C25.12
VACUUM VALVES
UHV Gate valvesDN 63 - 250
Manual Pneumatic
DN(nom. I. D)
Standard flanges
ISO-F CF-FASA-LPASA
Mol
ecul
ar fl
owco
nduc
tanc
e
Clos
ing
orop
enin
g tim
e
Turn
s pe
rst
roke Weight
Compressed airpressure
min. - max.overpressure
Volume of aircylinder
Weight
mm inch O.D I/s n kg Ibs bar psig I Ft3 s kg Ibs
6380100160200250
21/2
34683
6380100160200250
41/2
41/2
681012
2-3468
600800170060001200026000
1010131717-
9912182952
2020264062
114
4 - 74 - 74 - 74 - 74 - 75 - 7
55 - 10055 - 10055 - 10055 - 10055 - 10070 - 100
0.080.080.110.140.250.35
.0028
.0028
.0038
.0049
.0087
.0122
1.01.01.21.52.04.0
99 12182842
202026406292
Technical data
DN 63 - 200 (21/2" - 8")
seat side
required for dismantling
leak detection port
mech. pos. indication
for attachment
DN mminch
632
1/2
1004
1606
2008
K mminch
L mminch
M mminch
N mminch
O mminch
O1 mminch
P mminch
Q mminch
S mminch
T mminch
U mminch
U1 mminch
V mminch
351.38660
25.981254.92430
16.932509.842409.4580
3.15350
13.7838.51.522007.8790
3.541034.0694
3.70
271.06408
16.0657
2.241927.561154.531124.4170
2.761807.0911
0.431847.2470
2.7683
3.2777
3.03
803
271.06421
16.5757
2.242058.071154.531124.4170
2.761807.0911
0.431847.2470
2.7683
3.2777
3.03
271.06462
18.1973
2.872479.721455.711425.5970
2.762208.66
90.351847.2470
2.7683
3.2777
3.03
271.06552
21.7399
3.90336
13.232007.871927.5670
2.76290
11.4225
0.981847.2470
2.7683
3.2777
3.03
Dimensions manual actuator
C25.13
UHV Gate valvesDN 63 - 200
DN 63 - 200 (2 1/2" - 8")
seat side
required for dismantling
leak detection portmech. pos. indication
electrical connectioncomp. air connection(1/8" NPT for USA)
MN
TL
Q*
V W
S
O
U1
U
P
KO1
Dimensions pneumatic actuator
DN mminch
632
1/2
1004
1606
2008
K mminch
L mminch
M mminch
N mminch
O mminch
O1 mminch
P mminch
Q mminch
S mminch
T mminch
U mminch
U1 mminch
V mminch
W mminch
271.06346
13.6257
2.241927.561154.531124.4170
2.761807.0911
0.431546.0670
2.7683
3.271455.7177
3.03
803
271.06358
14.0757
2.242058.071154.531124.4170
2.761807.0911
0.431546.0670
2.7683
3.271455.7177
3.03
271.06418
16.4673
2.872479.721455.711425.5970
2.762208.66
90.351716.7370
2.7683
3.271455.7177
3.03
271.06523
20.5999
3.90336
13.232007.871927.5670
2.76290
11.4225
0.981877.3670
2.7683
3.271455.7177
3.03
351.38630
24.801254.92430
16.932509.842409.4580
3.15350
13.7838.51.522007.8790
3.541034.061556.1087
3.42
25010
411.61800
31.501616.3455922345
13.5032212.680
3.15450
17.7265
2.562409.4590
3.541034.061556.1087
3.42
C25.14
VACUUM VALVES
ISO F - DN 63 - 250 (2 1/2" - 10")
DN mminch
632 1/2
A mminch
B mminch
C mminch
D mminch
E x F
G mminch
H mminch
I mminch
702.761305.121104.3370
2.76
4 x M8
130.51
----
803
702.761455.711254.92763
8 x M8
130.5183
3.274.5
0.18
1004
702.761656.51455.711003.94
8 x M8
130.511024.02
30.12
1606
702.762258.862007.871505.91
8 x M10
150.591536.02
50.2
2008
803.15285
11.22260
10.242007.87
8 x M10
150.592138.39
50.2
25010
1003.94350
13.7831012.2261
10.27
12 x M10
150.59
----
DN mminch
632 1/2
O.D.inch
A mminch
B mminch
C mminch
D mminch
E x F
H1 mminch
H2 mminch
4 1/2
702.76113.54.4792.13.6370
2.76
8 x M8
82.53.2577.43.05
803
4 1/2
702.76117.54.63102.44.08763
10 x M8
91.53.686.33.4
1004
6
702.76151.65.97130.25.131003.94
16 x M8
120.654.75115.54.55
1606
8
702.76202.47.971817.131505.91
20 x M8
171.456.751666.54
2008
10
803.15253.29.97231.89.132007.87
24 x M8
222.38.752178.54
25010
12
1003.94350
13.78284
11.1825410
32 x M8
273.1510.75267
10.51
DN mminch
632 1/2
O.D.inch
A mminch
B mminch
C mminch
D mminch
E x F
H1 mminch
H2 mminch
4 1/2
702.76113.54.4792.13.6370
2.768 x 5/16”
24 UNF82.53.2577.43.05
803
4 1/2
702.76117.54.63102.44.08763
10 x 5/16”
24 UNF91.53.686.33.4
1004
6
702.76151.65.97130.25.131003.94
16 x 5/16”
24 UNF120.65
4.75115.54.55
1606
8
702.76202.47.971817.131505.91
20 x 5/16”
24 UNF171.45
6.751666.54
2008
10
803.15253.29.97231.89.132007.87
24 x 5/16”
24 UNF222.38.752178.54
25010
12
1003.94350
13.78284
11.1825410
32 x 5/16”
24 UNF273.1510.75267
10.51
CF - F - DN 63 - 250 (2 1/2" - 10")Metric threads
CF-F - DN 63 - 250 (2 1/2" - 10")UNF threads
UHV Gate valves
Flanges dimensions
seat side
seat side
seat side
C25.15
ASA-LP - DN 63 - 250 (2 1/2" - 10")
UHV Gate valves
DN mm
inch
63
2 1/2
80
3
100
4
160
6
200
8
250
10
ASA - LP
A mminch
B mminch
C mminch
D mminch
E x F
G mminch
H mminch
O’ringI.D. X d
2
702.76
152.46
120.74.7570
2.764 x 3/8”
16 UNC15
0.5988.93.5
88.49 x 3.533.48 x 0.139
-
702.76
177.87
139.75.5763
4 x 3/8”
16 UNC15
0.5988.93.5
88.49 x 3.533.48 x 0.139
3
702.76
190.57.5
152.46
1003.94
4 x 3/8”
16 UNC15
0.59120.654.75
120.24 x 3.534.73 x 0.139
4
702.762258.86190.5
7.51505.918x 3/8”
16 UNC15
0.59158.75
6.25158.34 x 3.536.23 x 0.139
6
803.15279.4
11241.3
9.52007.87
8 x 3/4”
10 UNC19
0.75206.48.13
202.79 x 3.537.98 x 0.139
8
1003.94350
13.78298.511.7525410
8 x 3/4”
10 UNC19
0.75266.710.5
266.29 x 3.5310.48 x 0.139
Flanges dimensions
seat side
"A"
A
ExF
"B"
B D H
HG
C25.16
VACUUM VALVES
Main Specifications
Stainless steel and aluminium body
Bellow sealed from atmosphere to UHV
Linear movement with patented spiral mechanism, first swing,
then pivot, no friction from the plate seal.
Leak rate
• Body < 1. 10 -9 mbar.l/s
• Seat < 1.10 -9 mbar.l/s
Pressure range 1.10 -8 mbar to 2 bar (abs)
Differential pressure on the plate ≤ 1.2 bar in opening direction
≤ 1.6 bar in closing direction
Max differential pressure at opening: ≤ 500 mbar
Cycles until first service 100 000
Bake-out temperature
• Valve ≤ 120 °C
• Position indicator ≤ 80 °C
• Solenoid ≤ 50 °C
Seals
• Plate FPM
• Bonnet FPM
Feedthrough bellow
Butterfly valves
(Aluminium or stainless steel body, bellows sealed)Pneumatic actuators(double acting cylinder with position indicator and solenoid)
AluminiumISO-F
PART NUMBER PART NUMBER
mm
Flange DN
inch Stainless steelISO-F
31041 *31554 *31042 *31043 *31044 *
6380100160200
21/2
3468
* Please indicate the appropriate letter:- for pneumatic actuator, one of the options A, B, E, G, H, U from voltages table page C25.04.
Seal kits (See p. C25.04)
DN 63 - 200Pneumatic actuators
PART NUMBERmm
Flange DN
inch
31114K31555K31115K31116K31117K
6380100160200
21/2
3468
Butterfly valvesDN 63 - 200
31037 *31553 *31038 *31039 *31040 *
C25.17
Technical dataPneumatic
DN(nom. I. D)
ISO-F CF-F
Mol
ecul
ar fl
owco
nduc
tanc
e
Clos
ing
orop
enin
g tim
e
Stainless steelbody Aluminium
WeightVolume of air
cylinder
mm
6380100160200
inch
21/2
3468
6380100160200
O.D
41/2
-68
10
I/s
550700140035007500
4 - 74 - 74 - 74 - 74 - 7
60-10060-10060-10060-10060-100
0.040.080.080.130.30
.0014
.0003
.0003
.0045.001
0.40.80.81.41.8
4.67.58
15.634.2
10.116.517.634.475.4
2.33.84
7.416.1
5.18.48.816.335.5
bar psig I Ft3 s kg Ibs kg Ibs
Standardflanges
Compressed airpressure
min. - max.overpressure
Butterfly valvesDN 63 - 200
C25.18
VACUUM VALVES
Flange dimensions
Dimensions pneumatic actuator
Butterfly valvesDN 63 - 200
DN 63 - 200 (21/2" - 8")
seat side
comp. air connection
electrical connection
DN mminch
632
1/2
1004
1606
2008
A mminch
B mminch
D mminch
L mminch
M mminch
N mminch
O mminch
S mminch
U mminch
U1 mminch
V mminch
W mminch
903.54300
11.811927.56371
14.611405.51147.55.812007.8745
1.771034.0690
3.5480
3.1530
1.18
501.971305.1263
2.481817.1376
2.9965
2.5667
2.6425
0.9860
2.3650
1.9760
2.3644
1.73
803
602.361455.7176
2.992288.9886
3.3982.53.2580
3.1530
1.1870
2.7660
2.3665
2.5640
1.57
602.361656.595
3.742288.9886
3.3982.53.251003.9430
1.1870
2.7660
2.3665
2.5640
1.57
702.762258.861425.59285
11.221104.331134.451475.7935
1.3883
3.2770
2.7670
2.7640
1.57
W
D
N
L
U1 UV
M
B
R1/8"
SA
A1
O
ISO-F - DN 63 - 200 (21/2" - 8") DN mminch
632
1/2
1004
1606
2008
A mminch
B mminch
C mminch
D mminch
E x F
G mminch
H mminch
I mminch
S mminch
903.54300
11.81260
10.241927.56
12 x M10
150.592138.394.50.1846
1.77
501.971305.121104.3363
2.48
4 x M8
120.4770
2.762.50.125
0.98
803
602.361455.711254.9276
2.99
8 x M8
120.4783
3.272.50.130
1.18
602.361656.51455.7195
3.74
8 x M8
120.471024.022.50.130
1.18
702.762258.862007.871425.59
8 x M10
150.591536.024.50.1835
1.38
seat side
D H
IG
ExF
SA
A1
C
B
H(H
)
C25.19
DN 40 - DN 50
D
A
DN
DN
B
C
DN mm 40 50
ABCDWeight (g)
97.5684044550
152.51117060
1350
Main Specifications
Stainless steel body
Bronze shaft
Quarter turn for opening and closing
Visual indication of valve position
Closes and opens against atmospheric pressure
Leak rate:
• External 10-8 mbar.l/s
• Plate 10-8 mbar.l/s
Conductance: DN 40: 135 l/s at 1 mbar
DN 50: 385 l/s at 1 mbar
Seal: Perbunan
Ordering informationManual actuator
Dimensions in mm
PART NUMBERISO-KFmm
Flange DN
inch
786557786365
PART NUMBERSeal kits
033591033592
4050
11/2
2
Butterfly valvesDN 40 - DN 50
C25.20
VACUUM VALVES
Double Butterfly Valve DN 40
Butterfly valvesDouble butterfly valve DN 40
Main Specifications
Stainless steel body
Two butterfly plates in the same body
In-line main way, angle by-pass port
with smooth tube 27.5 mm O.D.
Quarter turn for opening and closing
Visual indication of valve position
Leak rate:
• External 10 -8 mbar.l/s
• Plate 10 -8 mbar.l/s
Seals: Perbunan
Weight: 1600 g
Ordering informationManual actuator
Dimensions in mm
PART NUMBERISO-KFmm
Flange DN
inch
786558
PART NUMBERSeal kits
03359040 11/2
130.
597.568
104
Ø27.5
DN DN
60 22
92
29
62.5
Ø59
C25.21
Three Port Butterfly Valves DN 25 - DN 40
DN mm 25 40
ABCDEWeight (g)
5010924.565
54.5550
7011434.56562
3300
Main Specifications
Stainless steel body
Bronze shaft
Quarter turn for opening and closing
Visual indication of valve position
Closes and opens against atmospheric pressure
Leak rate:
• External 10-8 mbar.l/s
• Plate 10-8 mbar.l/s
Conductance: DN 25: 65 l/s at 1 mbar
DN 40: 135 l/s at 1 mbar
Seal: Perbunan
Ordering informationManual actuator
Dimensions in mm
PART NUMBERISO-KFmm
Flange DN
inch
786967785121
PART NUMBERseal kits
033588033589
2540
111/2
DC
B
A
DNDN
DN E
A
Butterfly valvesThree port butterfly valves DN 25 - DN 40
C25.22
VACUUM VALVES
HV Angle valves DN 16 - 160
(aluminium or stainless steel body, bellows sealed)Manual and pneumatic actuators(single acting cylinders, with position indicator and solenoid)
ISO-KISO-KF
PART NUMBER - Aluminium PART NUMBER - Stainless steel
mm
Flange DN
inch ISO-K ISO-KF
31069 *31070 *31071 *31072 *
162540506380100160
5/8
111/2
221/2
346
Seal kits (see page C25.04)
HV DN 16 - 160Manual and pneumatic actuators
PART NUMBERmm
Flange DN
inch
31132K31133K31134K31135K31136K31543K31530K31531K
162540506380100160
5/8
111/2
221/2
346
Main Specifications
Stainless steel and aluminium body
Bellow feedthrough
Cycles until first service DN 16 - 80: 3 millions
DN 100 - 160: 1 million
Leak rate: Body, Seat <1.10-9 mbar.l/s
Pressure range (open and closed in closing direction) :
DN 16 - 50: 1.10-8 mbar to 4 bar (abs)
DN 63 - 160: 1.10-8 mbar to 5 bar (abs)
Max. differential pressure at opening: ≤ 1 bar in either direction
Differential pressure on the plate
Manual actuator: DN 16 - 25: 4 bar
DN 40 - 50: 3 bar
DN 63: 2 bar
Pneumatic actuator: DN 16 - 63: 2 bar
DN 100 - 160: 1.2 bar
Bake-out temperature:
• Valve body ≤ 150 °C
• Manual and pneumatic actuator ≤ 150 °C
• Position indicator ≤ 80 °C
• Solenoid ≤ 80 °C
Seals:
• Plate, Bonnet FPM
31062 *31063 *31064 *31065 *
31066 *31542 *31067 *31068 *
31073 *
Angle valvesHV Angle valves DN 16 - 160
* Please indicate the appropriate letter: - M for manual actuator- for pneumatic actuator, one of the options DN 16 - 50: A, B, F, H / DN 63 - 160: A, B, F, H, J, S, L, P, V, Q, Rfrom the voltages table page C25.04.
- DN 100 - DN 160 not available with manual actuator
C25.23
Technical data
Manual Pneumatic
DN(nom. I. D)
ISO-KF ISO-K Aluminiumbody
Stainlesssteel body M
olec
ular
flow
cond
ucta
nce
Turn
s pe
r str
oke
Clos
ing
time
Weight
Aluminiumbody
Stainlesssteel body
WeightVolume ofair cylinder
mm
162540506380100160
inch
5/8
111/2
221/2
346
16254050----
----
6380100160
I/s
5144580160200440
1000
3.63.84.54.86.66.6
--
0.200.270.60.942.93.1
--
0.4410.5951.3232.0726.3936.834
--
0.260.340.751.11.7
---
0.5730.7501.6532.4253.748
---
4 - 84 - 84 - 84 - 84 - 84 - 84 - 84 - 8
60-11560-11560-11560-11560-11560-11560-11560-115
0.0040.0110.0350.0470.1120.1120.3301.050
0.00010.00040.00120.00170.00400.00400.01170.0371
0.10.2 0.550.650.70.71.0
2.00
0.370.51.061.542.993.198.0914.79
0.8151.1022.3363.3956.5917.03217.83530.622
0.430.61.221.71.79
---
0.9481.3222.6893.7473.946
---
n kg Ibs kg Ibs bar psig I Ft3 s kg Ibs kg Ibs
Standardflanges
Compressedair pressuremin. - max.overpressure
DN 16 - 50 (5/8" - 2") ISO-KF
Dimensions Manual actuator
DN mminch
165/8
251
4011/2
502
A mminch
B mminch
D mminch
L mminch
L1 mminch
Q mminch
V mminch
Z mminch
702.7677
3.0350
1.97101.13.98104.1
4.185.53.3560
2.369.30.37
652.5665
2.5640
1.5794.33.7197.33.8373.52.8960
2.367.9
0.31
401.5740
1.5716
0.6364.92.5667.42.6546
1.8140
1.573.60.14
501.9748
1.8925
0.9860.92.464.32.5344
1.7340
1.574.7
0.19
Angle valvesHV Angle valves DN 16 - 160
A
AD
L/L1
Z
Q
V
B
B
seat side
required for dismantling
leak detection portmech. pos. indication
L: aluminiumL1:stainless steel
C25.24
VACUUM VALVES
DN 63 - 80 (2 1/2" - 3) ISO-K
A
AD
L/L1
ZQ
V
B
DN mminch
6321/2
A mminch
B mminch
D mminch
L mminch
L1 mminch
Q mminch
V mminch
Z1) mminch
683.461234.84632.5
114.84.52114.84.521054.1369
2.7213.30.55
803
883.461234.84803
114.84.52114.84.521054.1369
2.7213.30.55
Angle ValvesHV Angle Valves DN 16 - 160
seat side
required for dismantling
leak detection portmech. pos. indication
L: aluminiumL1:stainless steel
Dimensions Manual actuator
A
AL/
L1QZ
E/E1
DB
B
F
M5
C25.25
Dimensions Pneumatic Actuator
DN 16 - 50 (5/8" - 2") ISO-KF DN 63 - 160 (2 1/2" - 6" ) ISO-K
AL
Z
Q
TD
U
R1/8"
B
A
DN mminch
165/8
A mminch
B mminch
D mminch
E mminch
E1 mminch
F mminch
L mminch
L1 mminch
Q mminch
Z mminch
401.5740
1.5716
0.6335.61.4
38.11.59
0.3565.22.5767.72.67 46
1.812
0.08
251
501.9748
1.8925
0.9830.61.234
1.3413
0.5160.62.3864
2.52 44
1.734
0.16
4011/2
652.5665
2.56 40
1.5751.62.0354.62.1518.90.7487.73.4590.73.57 73.52.899.5
0.37
502
702.7677
3.0350
1.9758.42.361.42.4220
0.7996
3.78993.9 85.53.3510.50.41
DN mminch
6321/2
A mminch
B mminch
D mminch
E mminch
L mminch
Q mminch
T mminch
U mminch
Z mminch
883.461234.8463
2.4871.42.811234.841054.1345.11.78943.7 21.60.85
803
903.541234.8480
3.1571.42.811234.841054.1345.11.78943.7 21.60.85
1004
1084.251556.1 1024.021315.16206.58.131706.6981
3.191234.84
60.24
1606
1385.432168.5 1536.021174.612027.951957.6886.53.411807.09
60.24
Angle valvesHV Angle valves DN 16 - 160
seat side
required for dismantlingmech. pos. indication
leak detection port
comp. air connection(1/8" NPT for USA)
E: aluminiumE1:stainless steelL: aluminiumL1:stainless steel
C25.26
VACUUM VALVES
Angle valvesUHV Angle valves DN 16 - 40 - 63
Technical Data
DN
Mol
ecul
ar fl
owco
nduc
tanc
e
Clos
ing
time
Compressed airpressure
min. - Max.overpressure
WeightVolume of air cylin-
derWeight
mm
164063
inch
5/8
11/2
21/2
I/s
545160
Turn
s pe
r str
oke
n
CF-F
flan
ge
36
8.5
11/3
23/4
41/2
kg
0.551.86.3
Ibs
1.24.013.9
bar
4 - 84 - 84 - 8
psig
60 - 11560 - 11560 - 115
I
0.0050.0320.100
Ft3
0.00020.00110.0035
s
0.050.30.7
kg
0.72.06.3
Ibs
1.544.413.9
Main Specifications
Formed stainless steel body without corners
Extremely low outgassing rate
Suited for most corrosive gases
Bellow sealed
Cycles until first service: DN 16 - 40: 3 millions
DN 63: 1 million
Leak rate:
• Body < 5.10 -10 mbar.l/s
• Seat < 1.10 -9 mbar.l/s
Pressure range:
Open and closed in closing direction 1.10 -10 mbar to 5 bar (abs)
Differential pressure on the plate in opening direction
Manual actuator: DN 16: ≤ 5 bar
DN 40: ≤ 3 bar
DN 63: ≤ 2 bar
Pneumatic actuator: DN 16 - 63: ≤ 2 bar
Max. differential pressure at opening: ≤ 1 bar in either direction
Bake-out temperature:
• Valve ≤ 200° C open, 150° C closed
• Manual and pneumatic actuator ≤ 150° C
• Position indicator ≤ 80° C
• Solenoid ≤ 80° C
Seals:
• Plate FPM
• Bonnet metal
Feedthrough: bellow
Manual and pneumatic actuator(simple acting cylinder, with position indicator and solenoid)
CF-R
PART NUMBER
mm
Flange DN
inch
30076 *30077 *30078 *
SEAL KITS(see page C25.04)
30139K30140K30141K
164063
5/8
11/2
21/2
* Please indicate the appropriate letter: M for manualactuator, for pneumatic actuator, one of the options A, B, F,H, J, L, P, Q, R, S, V from the voltages table page C25.04.
Manual Pneumatic
C25.27
seat siderequired for dismantling
comp. air connection(1/8" NPT for USA)mech. pos. indication
seat siderequired for dismantling
comp. air connection(1/8" NPT for USA)mech. pos. indication
Manual actuatorDN 16 - 63 (5/8" - 21/2") CF-R
Pneumatic actuatorDN 16 - 63 (5/8" - 21/2") CF-R
ExF A
AL
Q
ZD
U
V
R1/8"
P
DN mminch
165/8
4011/2
6321/2
O.D inchA mm
inchD mm
inchE X F mm
inchL mm
inchP mm
inchQ mm
inchU mm
inchV mm
inchZ mm
inch
41/2
1054.1364
2.528 x 8.48 x .33
1305.121003.941405.511094.2946.51.8318.71
23/4
632.4840
1.576 x 6.66 x .26
973.8168
2.6895
3.7485
3.3534.51.3613.51
11/3
381.5016.63
6 x 4.36 x .17
682.6835
1.3855
2.1754
2.1320.50.81
6.24
DN mminch
165/8
4011/2
6321/2
O.D inchA mm
inchD mm
inchE x F mm
inchL mm
inchP mm
inchQ mm
inchU mm
inchV mm
inchZ mm
inch
41/2
1054.1364
2.528 x 8.48 x .33
1546.061003.941405.511094.2982
3.2919.75
23/4
632.4840
1.576 x 6.66 x .26
1184.6568
2.6895
3.7482
3.2363
2.4813.51
11/3
381.5016
0.636 x 4.36 x .17
933.6635
1.3855
2.1747
1.8550
1.976
.24
Angle valvesUHV Angle Valves DN 16 - 40 - 63
Dimensions actuator
See page C25.28 for position indicator and solenoid dimensions
C25.28
VACUUM VALVES
DN mminch
165/8
4011/2
6321/2
A mminch
B mminch
C mminch
D mminch
E x F mminch
H1 mminch
H2 mminch
K mminch
L mminch
M mminch
N mminch
O mminch
SW mminch
T mminch
U mminch
Z mminch
1054.13113.54.4792.13.6364
2.528 x 8.4
82.53.2577.43.05141.55.5719
0.7556.62.2374
2.91943.722
0.8751.52.0354
2.1320
0.79
632.4869.52.7458.72.3140
1.576 x 6.6
48.31.942
1.6570
2.7613
0.5133.61.3251.72.04712.810
0.39––––
2.50.1
381.5034
1.3427
1.0616
0.636 x 4.3
21.40.8418.50.73662.67.30.2925.6
127.51.0834
1.3410
0.3930.51.219
0.758.5
0.33
Angle valves
Flanges dimensions
Position indicator and solenoid for pneumatic angle valve DN 16 to DN 63
Indicator
Solenoid
PG9
105
PG9
46
72
72
comp. air connection (1/8" NPT for USA)
electrical connection
C25.29
Technical data
Main Specifications
Aluminium body
Electromagnetic actuator with solenoid and electronic booster (delivered with the valve)
Pressure range: < 1.10 -8 mbar to 2 bar
Leak rate:
• Body < 1.10 -9 mbar.l/s
• Seat < 1.10 -9 mbar.l/s
Max. differential pressure at plate: 2 bar in either direction
Cycles until first service: 200 000
Max. strokes nb: 15 / mn at 20 °C
Working temperature: 0 °C to 40 °C
Seals:
• Body, Plate FPM
Voltage - frequency PART NUMBER
100/115 V - 50/60 Hz200/230 V - 50/60 Hz
30146Z30147Z
DN 4025
Ordering information
Normally closed (power off)
Electronic booster and coil
(identical for both valve sizes)
ISO-KF
PART NUMBER
mm
Flange DN
inch
30082 *30083 *
SEAL KITS(see page C25.04)
30144K30145K
2540
111/2
Delivered with electronic booster andcoil. Normally closed (power off).* Please indicate the appropriateletter: option D or C from the voltages table page C25.04.
7008
0.10.1
45
1.84
0.40.9
7008
0.10.1
14
1.43
1.84
Starting power WHolding power WClosing time sOpening time sConductance molecular flow l/s
Weight valve kglbs
Electronic booster kglbs
Vacuum valvesElectromagnetic Angle Valves DN 25 - 40
C25.30
VACUUM VALVES
DN 25 - 40 (1" - 11/2")
seat side
required for dismantling
electrical connection
LA
D
P
60 Q*68
PG9
A
1818
PG9
PG11
1101150
120
100
60
15.5
32
31
DN mminch
251
4011/2
A mminch
D mminch
L mminch
P mminch
Q mminch
652.5640
1.5793
3.6678
3.0760
2.36
501.9725
0.9883
3.2757
2.2460
2.37
Vacuum valvesElectromagnetic angle valves DN 25 - 40
mech. pos. indication
C25.31
Main Specifications
Aluminium body
Suitable for isolation venting and rough flow regulation
For gas and liquid
Pressure range: 1.10 -7 mbar to 5 bar (abs)
Leak rate: Body, Seat < 1.10 -9 mbar.l/s
Cycles until first service: 100 000
Bake-out temperature:
• Valve ≤ 150 °C
• Hand wheel ≤ 50 °C
Seal: FPM diaphragm
Weight DN 16 - 25 - 40: 0.16 - 0.50 - 1.2 kg
0.35 - 1.1 - 2.60 lbs
PART NUMBER
ISO-KF DIAPHRAGMmm
Flange DN
inch
30122K30123K30124K
30052M30053M30054M
162540
5/8
111/2
Ordering information
Manual Actuator
DN 16DN 25
DN 40
MN
LT
Z
V
O
PA
I
DHB
DN mminch
165/8
251
4011/2
A mminch
B mminch
D mminch
H mminch
I mminch
L mminch
M mminch
N mminch
O mminch
P mminch
T mminch
V mminch
Z mminch
1054.1355
2.1729
1.1441.21.62
3.121325.22.7.1122.3.88
74/792.91/3.11
75/802.95/3.15
773.0369
2.72--
803.1540
1.5719.7526.21.03
3.121114.37
2.0814.55
54/542.13/2.13
54/542.13/2.13
562.247.51.8710.39
522.0530
1.1815.5917.2.683
.1266.52.6210.3910.39
32.5/32.51.28/1.28
32/321.26/1.26
301.1830
1.185.5.22
Special valvesDiaphragm valves DN 16 - 25 - 40
C25.32
VACUUM VALVES
Main Specifications
Nickel-plated brass body
Pressure range: 10-5 mbar to 20 bar
Leak rate:
• External 10-3 mbar.l/s
• Seat 10-3 mbar.l/s
Seals: Teflon and Perbunan
PART NUMBERISO-KFmm
Flange DN
inch
785048785049785050
162540
5/8
111/2
Ordering information
Manual Actuator
Dimensions in mm
BD
C
A
DNDN
DN
DN mm 16 25 40
ABCDWeight (g)
2609519465
1500
10860
10050
1000
70467540
450
Special valvesThree Way Ball Valves DN 16 - 25 - 40
C25.33
Main Specifications
Nickel-plated brass body
Pressure range: 10-5 mbar to 20 bar
Leak rate:
• External 10-3 mbar.l/s
• Seat 10-3 mbar.l/s
Conductance at 1 mbar: DN 16: 24 l/s
DN 25: 150.l/s
Seals: Teflon and Perbunan
PART NUMBERISO-KF
786367786368
Ordering information Manual Actuator
Dimensions in mm B
C
D
A
DNDNDN mm 16 25
ABCDWeight (g)
10860
100158800
704675
107.5360
mm
Flange DN
inch
1625
5/81
Special valvesBall Valves DN 16 - DN 25
C25.34
VACUUM VALVES
Main Specifications
Stainless steel body
For venting small volumes
Leak rate:
• External 5.10-8 mbar.l/s
• Seat 5.10-8 mbar.l/s
PART NUMBERISO-KF
786544786200
Ordering information
Manual actuator
Dimensions in mm
31
Ø 18
DN 16
36
Ø 18
Ø 14
mm
Flange DN
inch
1610/14
5/8
*
* Smooth tube ID: 10 mm OD: 14 mm
Special valvesManual Vent Valves DN 10 - 16
10/14
C25.35
102743100788100789100790102604
102607102608102609102610102611
230 V - 50/60 Hz110/115 V - 50/60 Hz
200 V - 50/60 Hz24 V 50/60 Hz
24 V DC
230 V - 50/60 Hz110/115 V - 50/60 Hz
200 V - 50/60 Hz24 V 50/60 Hz
24 V DC
PART NUMBERVoltageItem
Valve
Spare coil
Ordering information
DN 10 - KFFlange
Technical data
Dimensions in mm
I.D.Status power offClosing timeConductanceVenting timeProtection rateElectrical connectorNb of cycles
6 mmClosed
10 to 15 ms2.5 l/s at 1 mbar
7 s for 15 l 55 s for 100 lIP 65
DIN 43650100 000
34
4 tapped holes M4x6 on Ø 30
32
Special valvesElectromagnetic Isolation Valve DN 10
Main Specifications
Leak rate:
• External 10-8 mbar.l/s
• Seat 10-8 mbar.l/s
Material:
• Body Nickel plated brass
• Seals FPM
85
60
85
C25.36
VACUUM VALVES
PART NUMBERFlange DN mm
78654316
Ordering information
Dimensions in mm
56
72 Max DN 16
DN 16
Technical data
Flow
mba
r. l/
s
Number of turns
100
50
10
1 5 10 15 20
Special valvesMicro flow leak Valve DN 16
Main Specifications
Brass body
Flange DN 16 ISO-KF
Weight 0.2 kg
Settable gas flow 10 to 100 mbar.l/s
DN 16 ISO-KF
130
117.
5
DN 16 ISO-KF30
30
O42
Technical data103
102
101
110-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103
Gas flow (mbar l/s)
Dig
ital d
ispl
ay
Main Specifications
Stainless steel body
Flange DN 16 ISO-KF
Weight 0.4 kg
Settable gas flow5.10-6 to
1000 mbar.l/s
Tightness 1.10-9 mbar.l/s
Max. differential2.5 bar
mesure
PART NUMBERFlange DN mm
30536016
Ordering information
Dimensions in mm
Leak Valve DN 16
• Digital Flow indicator• Quick on/off
C25.37
The ISV valve is used at the inlet ofrotary vane pumps (4 to 20 m3/h) whenever isolation is required withvacuum circuit, in case of power failure.In addition, the ISV acts as a ventingvalve for the rotary vane pump, whileisolating the vacuum chamber.Suitable for neutral or slightly corrosivegas.
Features
• Total safety for pumping systems• Low energy consumption• Low dust production, thanks to slowreturn to atmospheric pressure• Optional dry nitrogen gas, can beinjected instead of air• Operation in all positions• Opens only when the inlet pressureof the pump is lower than the pressureinto the vacuum chamber
Ordering information
Flange DN
DN 16DN 25
Spare coil
Model
ISV 16ISV 25
220 V50/60 HZ
033697066832
038121
240 V50/60 HZ
033683066884
038124
100 V50/60 HZ
033681066883
100/115 V50/60 HZ
033680066881
200 V50/60 HZ
033682066882
24 V - DC
NC066867
038126 038122 038125 038066
Technical data
Weight: 0.640 kgMaterial: aluminium body - elastomermembraneElectrical supply: see ordering informationMaximum working temperature: 40° CFlanges: DN 16 and DN 25 ISO-KFLeak rate: <10-4 mbar.l/sAir venting at closing: 7.10-2 mbar.l/s
Applications
Safety feature between rotary vanepumps and turbomolecular or diffusion pumps.Avoid hydrocarbon backstreamingfrom the rotary vane pump.
Special valvesSafety isolation valves DN 16 - 25
PART NUMBER
C25.38
VACUUM VALVES
a/ Start-up conditions:The different parts of the valve areat atmospheric pressure.No power is supplied to electric coil.The piston (4) is opened under pressure from return spring.
b/ Operating conditions:The electrical coil is powered.The solenoid valve (10) closes, isolating the upper chamber of the valve from external air.The pumping is performed in thedirection of the arrow (“pump”).
Pressure in the chamber over themembrane (8) is progressively reduced (pressure reduction by the nozzle (6)). All valve elementsare at pump inlet pressure. The piston (4) is stable in the openposition.
c/ Stoppage, during power failure:The electrical coil is no longer powered and therefore immediatelyallows air at atmospheric pressure to enter the chamber over the membrane.
The piston (4) is pushed back, compressing the spring (7) and thevalve closes.The pumping unit gradually returns toatmospheric pressure via the opensolenoid valve (10) and the nozzle.
Nota: on closing, a slight flow of air (around7.10-2 mbar.l /s) enters the vacuum chamber.
Conductance
Spare parts Dimension (mm)
P/N
Inlet pressure
10-2 mbar10 -1 mbar1 mbar
6 l/s15 l/s66 l/s
MembraneO-Ring C 2 D 30Spring
066838082252066837
1513471510129
16
14
2 8
3
19
6
17
18
50 (D
N25
)
145 (DN25)
60
60
75
Cable feedthrough
50
80
20
Pum
p
140 (DN16)
45 (D
N16
)
50 (DN25)45 (DN16)
Special valvesSafety isolation valves DN 16 - 25
Operating principle
C25.39
CHINAAlcatel Vacuum Technology Shanghai Tel: (86) 21 5027 0628 Fax: (86) 21 3895 3815
FRANCEAlcatel Vacuum Technology France Tel: 33 (0) 4 50 65 77 77 Fax: 33 (0) 4 50 65 77 89
GERMANYAlcatel Hochvakuum Technik GmbH Tel: (49) 9342 96 10 0 Fax: (49) 9342 96 10 30
I TALYAlcatel Vacuum Systems S.p.a. Tel: (39) 039 686 3855 Fax: (39) 039 667 125
JAPANAlcatel Japan Tel: (81) 44 797 5920 Fax: (81) 44 797 5932
KOREAAlcatel Vacuum Technology KoreaTel: (82) 2 409 6277 Fax: (82) 2 409 6279
NETHERLANDSAlcatel Vacuum TechnologyNetherlandsTel: (31) 306 35 13 60Fax: (31) 306 35 12 21
SINGAPOREAlcatel Singapore Pte LtdTel: (65) 6254 0828Fax: (65) 6254 7018
TAIWANAlcatel Vacuum Technology TaiwanTel: (886) 3 5599 230Fax: (886) 3 5599 231
UNITED KINGDOMAlcatel Vacuum Technology (U.K.) Tel: (44) 1 506 418 000 Fax: (44) 1 506 418 002
USAAlcatel Vacuum Products Tel: (1) 781 331 4200 Fax: (1) 781 331 4230
Alcatel Vacuum Technology98 Avenue de Brogny - BP 2069 - 74009 Annecy Cedex - France - Tel.: 33 (0) 4 50 65 77 77 - Fax: 33 (0) 4 50 65 77 89
www.adixen.com
Part
Num
ber:
791
596
- Apr
il 20
06 -
All
info
rmat
ion
can
be m
odifi
ed w
ithou
t prio
r no
tice
- Rea
lizat
ion: