ust company profile eng 201312 v1 · tel clean track mark and acttel clean track mark and act--8,12...

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Universal Semiconductor Technology WWW.SEMI-UST.COM Services provide by UST CO.,LTD UST Co.,Ltd will put customer' need before us and promise that all UST staffs will do their best for maximization of satisfaction

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Page 1: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

Universal Semiconductor Technology

WWW.SEMI-UST.COMServices provide by UST CO.,LTD

UST Co.,Ltd will put customer' need before us andpromise that all UST staffs will do their best for maximization of satisfaction

Page 2: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

Head Office and R&D CenterTechno Park D-908, Yatap-Dong 151,Bundang-Gu, Seongnam-City,Gyeonggi-Do, KOREA (463760)

TEL : +82-31-604-1004FAX : +82-31-711-6344E-mail : [email protected]

Clean Room & Facility150-1, Seongju-ri, Wongog-myeon,Anseong,Gyeonggi-do, KOREA (456-812)

E-mail : [email protected]

Yatap Subway Station

Page 3: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

Head Office and R&D CenterTechno Park D-908, Yatap-Dong 151, Bundang-Gu, Seongnam-City, Gyeonggi-Do, KOREA (463760)

Clean Room & Facility150-1, Seongju-ri, Wongog-myeon, Anseong,Gyeonggi-do, KOREA (456-812)

Page 4: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

CEOCEO

AccountingTeam

Sales TeamSales Team

R&D Dept.R&D Dept.

TRACK Dept.TRACK Dept.

CMP Dept.CMP Dept.

Engineering Team

Engineering Team

EquipmentTool Dept.EquipmentTool Dept.

Page 5: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

We’ve got your solution Semiconductor Equipment toolWe’ve got your solution Semiconductor Equipment toolUST supplies FAB, SUB/FAB of semiconductor equipment and specialize refurbishment.UST supplies FAB, SUB/FAB of semiconductor equipment and specialize refurbishment.

Page 6: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

TEL MARKTEL MARK--7,8 and ACT7,8 and ACT--8,12 Modification, Up8,12 Modification, Up--grade and Overhaul grade and Overhaul System Configuration Free change, Modification and up-grade.Open Cassette Type to SMIF Type modification and Size conversion

6inch and 8inch Multi FlowCassette Unit and Robot modificationMapping Sensor Block modificationMain Robot Arm modificationCOAT Unit and Cup modificationDEV Unit and Cup modificationWDS/Plate modification

TELTEL MARKMARK--II,V,VII,V,VZZ,7,8,7,8 Machine’s inch Conversion (2,4,5,6,8 inch)Machine’s inch Conversion (2,4,5,6,8 inch)

TELTEL ACTACT--8,12 Machine’s inch Conversion (4,6,8 inch)8,12 Machine’s inch Conversion (4,6,8 inch)6inch and 8inch Multi FlowCassette Unit and Robot modificationMapping Sensor Block modificationMain Robot Arm modificationCOAT Unit and Cup modificationDEV Unit and Cup modificationWDS/Plate modification

Page 7: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

TEL MARKTEL MARK--II,V,VII,V,VZZ,,7,8 and ACT7,8 and ACT--8,12 8,12 의의 22ndnd Source Parts and Unit Source Parts and Unit Fast delivery and low-cost and same condition with OEM partsCassette stage assembly manufactureC/S Arm, Main Arm (Ceramic, Vacuum Arm, Aluminum and Anodizing Type) manufacturePlate (LHP, HHP, CPL, HCP, ADH, HEL and CP Power Supply) manufactureFan Filter Unit A,B Type (Include HEPA Filter)Oven Central Stack manufacture of TEL ACT 8,12

L/E Tank (45cc, 100cc, 150cc, 200cc, etc) manufactureTEL MARK and ACT SMIF Type Unit manufacture of same condition with OEMCOAT Nozzle Assembly (EBR, Back Side Rinse and Photo Resist Nozzle Tip) manufactureDEV Nozzle Assembly (H, SH, Spray and Stream type) manufacturePlasma to TFT LCD modification and upgrade for TEL Mark on Low Cost

22ndnd Source parts Unit o f TEL MarkSource parts Unit o f TEL Mark--II, V, II, V, VzVz, 7,8 and ACT, 7,8 and ACT--8,128,12

Page 8: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate

Hot / Cooling Plate ProductionCPL, HCP, ADH, LHP, HHP Assembly ProductionHot Plate Modification (LHP ⇔ HHP, CPL ⇔ HCP)Thermo Controller ProductionSame condition with OEMThermo Controller and SMC 200mm / 300mm ‘s Circulator Repair

Page 9: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

Chemical Cabinet / Auto Chemical Supply System Overhaul and upgradeChemical Cabinet / Auto Chemical Supply System Overhaul and upgrade

CSS or Manual Supply or Both Type ModificationBuffer Tank Auto Exchange Type System ModificationSolvent/Develop/HMDS Chemical Supply System Resist Cabinet Photo Resist Auto-Exchange SystemAuto Drain Controller and Tray System

Page 10: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

TEL/DNS/SEMES Spin Scrubber TEL/DNS/SEMES Spin Scrubber Refurbishment and Overhaul Refurbishment and Overhaul

6inch and 8inch Multi flowCassette Unit and Robot modificationMapping Sensor Block modificationConsumable Parts Support2nd Source Parts SupportLabor and Service Support

Page 11: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

StepperStepper HP Laser 5711X Series Repair HP Laser 5711X Series Repair

MODEL MACHINEG Line I Line

5517A NSR-G6 , G7 , G8 NSR-I6 , I7 , I8 5517B NSR-I9 , I10 , I11 5517C NSR-I12, NSR-I14

REFERENCEFREQUENCY BEAM DIAMETER POLARIZATION INDICATORS SHUTTER

5517A 1.5 MHz to 2.0 MHz 6mm f1 Horiz f2 Vert LASER ON READY

Open,Reduced, Closed

5517B 1.9 MHz to 2.4 MHz 6mm f1 Horiz f2 Vert

+15V POWER ON -15VPOWER ON LASER ON READ

Y

Open, Reduced,

Closed

5517C 2.4 MHz to 3.0 MHz

6mm(std) 3mm(5517C-003) 9mm(5517C-009)

f1 Horiz f2 Vert+15V POWER ON -15V

POWER ON LASER ON READY

Open, Reduced,

Closed

5517D 3.4 MHz to 4.0 MHz 6mm f1 Horiz f2 Vert

+15V POWER ON -15V POWER ON LASER ON READ

Y

Open, Reduced,

Closed f1 is the lower frequency, and f2 is the higher frequency. The Agilent 5517A is the basic head.

The HP Laser’s Model with MachineThe HP Laser’s Model with Machine

The HP Laser 5517x SpecificationThe HP Laser 5517x Specification

Page 12: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

StepperStepper LSA (Laser Step Alignment) / LIA RepairLSA (Laser Step Alignment) / LIA Repair

LSA(LIA) Model Out Put Polarization Mode Wavelength

LSA(5mW) ≥ 5mW 500:01:00 TEM00 632.8nm

LIA(10mW) (Option) ≥ 10mW 500:01:00 TEM00 632.8nm

LAS (5mW)LAS (5mW)

LIA (10mW)LIA (10mW)Repair

LSA and LIA SpecificationLSA and LIA Specification

Page 13: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

EPO2226/EPO2228Trouble Shooting and Labor serviceFree conversion between 6inch and 8inchI-Head repair and change2nd Source Parts support-Rotary Joint production and modification-I-Head production and modification-Consumable Parts support

EBARA EPO2226,2228 modification, upEBARA EPO2226,2228 modification, up--grade and Overhaulgrade and Overhaul

Page 14: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

Single/DoubleSingle/Double--Layer PCBLayer PCBMultiMulti--Layer PCB (4Layer ~ 26Layer)Layer PCB (4Layer ~ 26Layer)P.C.B Art WorkP.C.B Art WorkMetal / Flexible PCBMetal / Flexible PCBMicomMicom Firmware DevelopFirmware DevelopWire DesignWire DesignBuild up etc.Build up etc.

P.C.B (Printed Circuit Board) ArtP.C.B (Printed Circuit Board) Art--work and Assembly Supportwork and Assembly Support

OEM / ODM OEM / ODM R&DR&D ServiceService

We are provide the special and improved semiconductor machine which has applied creative We are provide the special and improved semiconductor machine which has applied creative controller and developed by ourselvescontroller and developed by ourselves

Page 15: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

Development process chartDevelopment process chartDevelopment Planning and Review Development Planning and Review -- Item Concept arrangement Item Concept arrangement -- technology deployment for Item and Review technology deployment for Item and Review -- Making a Development PlanMaking a Development PlanProduct Design Product Design -- Product FeaturesProduct Features-- 3D Rendering or Make a Design Mock3D Rendering or Make a Design Mock--up and Assemblyup and AssemblyThe design and mold developmentThe design and mold development-- Product FeaturesProduct Features-- Make a each Standard Plane for Mechanism, Make a each Standard Plane for Mechanism,

Electronic and CircuitElectronic and Circuit-- 3D modeling design and 2D drawing 3D modeling design and 2D drawing -- Mold supplier selection and order Mold supplier selection and order -- Parts assembly, test and reviewParts assembly, test and review-- Written specifications of Product and PartsWritten specifications of Product and Parts

Product Design and Development SupportProduct Design and Development Support

OEM / ODM OEM / ODM R&DR&D ServiceService

Page 16: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

Wafer Pre-Aligner-- Wafer Size (2inch ~ 18inch)Wafer Size (2inch ~ 18inch)-- Notch, Flat Wafer, Notch, Flat Wafer, Ring Type, Thin Wafer (50um)Ring Type, Thin Wafer (50um)-- Si, Glass, Film, Sapphire Si, Glass, Film, Sapphire -- Compact SizeCompact Size-- Fast Alignment (< 3.5sec)Fast Alignment (< 3.5sec)-- High Performance Accuracy and RepeatabilityHigh Performance Accuracy and Repeatability-- Easy to use and InstallEasy to use and Install-- Ethernet , RSEthernet , RS--232 Communication232 Communication-- Auto Detect function of Notch and Flat Type Auto Detect function of Notch and Flat Type -- Si, Glass, Sapphire Type Simultaneous use Si, Glass, Sapphire Type Simultaneous use -- Wafer Edge Crack and Broken Detect Wafer Edge Crack and Broken Detect -- 2inch ~ 12inch Simultaneous use (CCD Stage Moving Type)2inch ~ 12inch Simultaneous use (CCD Stage Moving Type)-- Poor Coating and Cracked wafer support alignment Poor Coating and Cracked wafer support alignment -- Crack Point's degree and quantity information output function (max. 500ea)Crack Point's degree and quantity information output function (max. 500ea)-- Covered Tape at Notch point by Laminator support alignment Covered Tape at Notch point by Laminator support alignment -- Wafer Serial Number Reading, Detect by OCR and output informationWafer Serial Number Reading, Detect by OCR and output information

Page 17: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

Wafer Pre-AlignerNormal Type Wafer Pre Aligner FeatureNormal Type Wafer Pre Aligner Feature

Edge Crack DetectEdge Crack Detect

Compact Embedded SystemCompact Embedded System

Wafer Vision Function by CCD- Compact Embedded System (Window XP OS)

Page 18: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

Auto Track Spinner SystemAuto Track Spinner System2~4inch, 6~8inch, 12inchInch Multi Flow ProcessCompact and Small Size Sapphire, Glass, SiPSS, MEMS, Bumping processProgrammable EBR, Back Rinse as well as Bowl Bar Code System (Optional) and USB connectionProgrammable EBR and Back Rinse

Page 19: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

Auto Track Spinner SystemAuto Track Spinner SystemGeneral Specification 1) Main frame with system controllera) System Controller

- User Friendly Software Based on PC Windows XP- User Interface : 15” LCD Touch Screen

b) Program Recipes- Recipe Editing / Storage: Process, Flow, Dummy Dispense and Recipe can be made and modified by Operation Panel

- Flow Recipe: Almost Operation of Machine can done by Recipe on Touch Panel

- Recipe Capacity: Unit Recipe : 50 sets each of 20 step

c) Throughput: > 60 wafers, depend upon process2) System lay-outa) 2~4inch Main Body Size : 1,700(W) X 1,400(D) X 1,600(H)b) 12inch Main Body Size : 2,100(W) X 2,000(D) X 2,100(H)

Page 20: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

NEW Miracle 4NEW Miracle 4--Spin Auto Track Spinner SystemSpin Auto Track Spinner SystemGeneral Specification 1) 2COAT 2DEV SYSTEM2) High Throughput3) More Compact Size 4) 2~4inch Main Body Size :1370 x 1340 x 1580

Page 21: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

NEW Miracle 4NEW Miracle 4--Spin Auto Track Spinner SystemSpin Auto Track Spinner System

Page 22: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

BLDC (BRUSHLESS DC) MOTOR FAN FILTER UNITBLDC (BRUSHLESS DC) MOTOR FAN FILTER UNIT

BLDC MOTOR1.Excellent Speed, Toque and Safety2. Compact and High Powerful Speed3. energy-saving4. High Strength and Long life Gear Head5. Low noise6. High Effectiveness7. Strong against Particle induction by FAN

Analog Control AC MOTOR FAN FILTER UNITAnalog Control AC MOTOR FAN FILTER UNIT

Page 23: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

New Digital Type BLDC FFUNew Digital Type BLDC FFU

Support Chemical FilterInstalled ULPA FilterVarious Size and OptionProvide the Aging Test DataQuickly ResponseRemove the Particle induction by BL Motor

Application MachineTrack System. Etcher, Spotter, EEPM, Etc

Test Room for FFU (Fan Filter Unit)Test Room for FFU (Fan Filter Unit)

DIGITAL CONTROLLER1.RS- 485 Communication2. Remote Controller3. Wide and Fan Speed Range (0~100 Step)4. Monitoring Lamp

Page 24: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

Manual Spinner Coater / Develop / StripperManual Spinner Coater / Develop / StripperThe machine has designed and manufactured a compact and easyThe machine has designed and manufactured a compact and easy--to to ––use spin coater.use spin coater.The process recipe can saved 20ea and provide the simple GUIThe process recipe can saved 20ea and provide the simple GUI

ApplicationApplication-- University, R&D center and etc. Chip processing, PR Coating / Developing / StrippingUniversity, R&D center and etc. Chip processing, PR Coating / Developing / StrippingWaferWafer-- FPD / FPD / GaAsGaAs / / GaNiGaNi / OLED/ OLEDSpecificationSpecification-- Substrate Manual Loading, up to 12inchSubstrate Manual Loading, up to 12inch-- Operation : Manual operation switch (Tachometer, Timer), Operation : Manual operation switch (Tachometer, Timer), MicomMicom or PLCor PLC

Page 25: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

PHOTO RESIST SDP-2150S PUMPIt’s Stepping Motor Pump which is suitable for a constant delivery pump.

IT EM D ESCRIPTIONPR OCESS

Maximum Dispense Volume 8.0ccDispense / Reload Rate 0.1cc/sec ~ 4.0cc/sec

Dispense Volume Resolution 0.05ccDispense Repeatability ±0.05 (0.8cp, 23°C)

Viscosity Max : 150cpElectrical Specification

Drive System Built in Motor Driver and Controller

Control System Micom controller andOptional External Graphic Panel

Main Power AC100~200V Free Voltage or DC 24V

Output Port

RS-232C Port or USB or RJ-45 External TP Panel Port (Serial 9P)DI/O Port (Serial 9P)Main AC Power or DC Power Cable (Select)

H ardwareInput Pulse / Dispense Volume 812 pulse (full step) / 1cc

Input Signal Pump Ready, Dispense and SpareOutput Signal Alarm and SpareResist In/Out 1/4 inch Teflon

Input Pulse / Encoder Output Pulse Full step – 1:1 Half step – 2:1Weight 3.2kg

Dimension 56(W) x 241 (L) x 153.5 (H) mm

Driving MethodInner Type Bellows, No ripple & No shaking.Discharge & Control Method- 5 phase step motor controls with stable- Optional External Graphic Panel- Built in Motor Driver and CPU Board- LAN Port for Pump maintenance by Laptop- Pump status LED (Dispense, Pump, Home and Alarm)- Easy Software update by User request (Optional)- Compatible Pump Signal w ith MachinePump Specification

Page 26: UST Company Profile ENG 201312 v1 · TEL Clean Track Mark and ACTTEL Clean Track Mark and ACT--8,12 Hot and Cooling Plate 8,12 Hot and Cooling Plate Hot / Cooling Plate Production

PHOTO RESIST SDP-2150 PUMPIt’s Stepping Motor Pump which is suitable for a constant delivery pump.

Driving MethodInner Type Bellows, No ripple & No shaking.

Driving Method- Inner Type Bellows, No ripple & No shakingDischarge & Control Method- 5 phase step motor controls with stable- Optional External Mono LCD Key Pad- Pump status LED (Pump Run, Ready, Home and Alarm)Signal is same as RRC Pump (ACT/MARK)

ITEM DESCRIPTIONPROCESS

Maximum Dispense Volume 8.0ccDispense / Reload Rate 0.1cc/sec ~ 4.0cc/sec

Dispense Volume Resolution 0.1ccDispense Repeatability ±0.1 (0.8cp, 23°C)

Viscosity Max : 150cpElectrical Specification

Drive System Phase Stepping Motor, Driver Current : 300~500mA/cycle

Control System Pow er 5VMain Pow er N/A

Input Port Encoder and 5-Phase Port (same w ith RRC)Hardware

Input Pulse / Dispense Volume 812 pulse (full step) / 1ccResist In/Out 1/4 inch Teflon

Input Pulse / Encoder Output Pulse Full step – 1:1 Half step – 2:1

Weight 2.3kgDimension 56(W) x 250 (L) x 153.5 (H) mm

Pump Specification