univex experimental vacuum coating systems for research, … · 2016. 9. 12. · chamber system...

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UNIVEXExperimental VacuumCoating Systems for research, development and pilot productionTechnical information 184.04.02

Prp_UNIVEX_e_0307 03.05.2007 17:28 Uhr Seite 3

UNIVEX – from the experiment to series production

In modern technologies, vacuum coating has become indispensable inmany applications.

When developing new products it isrequired to experimentally develop suitable coating processes.Laboratory testing of these processesis an important part of such a develop-ment process.

For use in research and developmentas well as for pilot production facilities,Oerlikon Leybold Vacuum has develo-ped a family of universal UNIVEX experimentation systems.

Their application extends chiefly withinthe area of vacuum coating technologyas well as experiments in the area ofvacuum process engineering.

The universal experimentation systemsare based on a modern modular concept. Upgrading or retrofitting iseasily possible.

The most important benefits ofthis modular concept:

■ Universally usable for almost all vacuum coating processes

■ Uncomplicated to operate

■ Compact

■ Easy retrofitting and upgrading

■ Modern vacuum technology with turbopump or cryogenic pump systems

The universal experimentation systemsfrom Oerlikon Leybold Vacuum aredived into one of three types: bell jar,chamber and cluster systems.

Regardless of what kind of experiment you areplanning, have us put together your tailor-madesystem based on our universal concept. Our application support will be pleased to be of assistance.


UNIVEX 300

UNIVEX 350

Chamber system with doorThe UNIVEX 350 is a chamber systemand consists of two cabinets whichmay be separated. On one side thevacuum chamber (370 mm wide, 500 mm high and 370 mm deep) and the high-vacuum systems areaccommodated. The other half of the cabinet contains the completeelectrical power supply. This systemdesign allows the installation of thesystem in a clean room wall.

The pump system consists as standard of turbomolecular pump andbacking pump. As to the type of pumpand pumping speed these pumps maybe adapted to the process in eachcase.

Both the pump system and the basicfunctions of the UNIVEX 350 are con-trolled by means of a PLC. Optionallythe PLC may also control the processitself in part or in full.

A load lock may be easily fitted to oneof the lateral chamber flanges.

Bell jar systemThe UNIVEX 300 is a bell jar systemsuited for bench top placement.The diameter of the chamber amountsto 300 mm.

The high-vacuum pump system hasbeen integrated in the cabinet sectionand consists as standard of turbo-molecular pump and backing pump.As to the type of pump and pumpingspeed these pumps may be adaptedto the process in each case.

Chamber and pump system form the basic equipment which can beexpanded by adding process components specifically selected bythe customer.

The following options are available:

■ Thermal evaporators

■ Vacuum etching facility

■ Electron beam evaporator

■ DC sputtering sources

■ Auxiliary components like substrate holders, heaters, film

thickness measuring instruments

■ Lifting device for vacuum bell jar

■ Custom installations according to customer requirements

The UNIVEX 300 is the entry levelunit of the UNIVEX system and hasbeen designed specially for themanufacture of simple functionalfilms. Besides of its use in researchit is especially well suited for stu-dent training purposes.


UNIVEX 450B

Chamber system with doorThe UNIVEX 450B is a chambersystem the development of which isbased on the UNIVEX 350. The mechanical section of the systemconsists of the vacuum chamber (490 mm wide, 680 mm high and 500 mm deep) and the high-vacuumpump system. High-vacuum pump and backing pump are adapted to the particular requirements of the processes in each case.

The complete electrical power supplyis accommodated in a separate 19”cabinet. This allows easy installation ofthe chamber in a clean room wall.

Also in the case of the UNIVEX 450Bthe pump system and the basic functions of the system are controlledby a PLC. Optionally the PLC may alsocontrol the process itself in part or infull. A load lock may be easily fitted toone of the lateral chamber flanges.

All process components listed abovemay be installed in the chamber of theUNIVEX 450B. Owing to the additionalspace available, the number of possi-ble combinations is almost limitless.

The UNIVEX 450B has been special-ly designed for the manufacture offunctional layers and systems oflayers on larger substrates. The design of the chamber allowsfor the highest flexibility when itcomes to installing process compo-nents and substrates. The UNIVEX 450B is especially well suited for applications in researchand in pilot production systems alsounder clean room conditions. Theoptional process controller ensuresparticularly well repro-ducible results.The design of this system is alsowell suited for student training.

The basic UNIVEX 350 configurationmay be expanded by adding processcomponents specifically selected by the customer. These process components may be fitted to all available chamber walls.

Besides all the options listed for the UNIVEX 300, the UNIVEX 350 mayalso accommodate RF sputtering sources or other RF supported processes (like RF bias, for example).

The UNIVEX 350 has been speciallydesigned for the production of functional films and systems offilms. The design of the chamberallows highest flexibility when itcomes to installing process components and substrates.The UNIVEX 350 is particularly well suited for research applicationsalso under clean room conditions.The optional process controller ensures particularly well reprodu-cible results.The design of this system is alsowell suited for student training.


UNIVEX 450C

Cluster tool systemThe UNIVEX 450C is a cluster system whereby the size of the chamber is manufactured according to customer’srequirements. The UNIVEX 450C consists of one orseveral process chambers as well as atransfer chamber and a load lockchamber. The chambers are eachequipped with their own high-vacuumpump systems. The entire electricalpower supply is accommodated in aseparate 19” cabinet.

The pump systems will usually consistof a turbomolecular pump and abacking pump. As to the type of pumpand pumping speed these pumps maybe adapted to the process in eachcase.

The pump systems and all processsteps of the UNIVEX 450C are controlled by a PLC. Numerous different processes andparameters can be saved and processed by way of recipes.

A couple of vacuum components can be installed into the processchambers:

■ Thermal evaporators

■ Vacuum etching facility

■ Electron beam evaporator

■ DC sputtering sources

■ RF sputtering sources

■ Auxiliary components like substrate holders, heaters, film thickness measuring instruments

■ Custom installations according to customer requirements

■ RF cleaning

■ Robot controlled transport system

The UNIVEX 450C has been speciallydesigned for the production of functio-nal films and film systems with fullyautomatic processing. The processcontroller allows considerable through-puts and ensures highly reproducibleresults. The design of the chamber isstrictly oriented along the customer’sspecific requirements.

The UNIVEX 450C is especially suited for university and industrialresearch as well as pilot productionalso under clean room conditions.


UNIVEXSpecial applications and test systems

Headquarter Germany

OerlikonLeybold Vacuum GmbHBonner Strasse 498D-50968 Köln

T +49 (0) 221-347-0F +49 (0) [email protected]

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Test systemsIndustrial processes, especially thoseinvolving the manufacture of tubes, special lamps and others, require increasingly complex testing methodswhich need to be run under high-vacuum conditions. For such tasks we can provide complete solutionsperfectly adapted to the customer’srequirements in each case.

Besides the standard concept for theUNIVEX systems there exist severalsystems which have been designed forspecific applications.

UNIVEX 450 dactyloscopyWith this system initially invisible traces(fingerprints, for example) on carriershaving a large surface (plastic bags, for example) can be rendered visible.

The carrier of the traces is evaporationcoated with gold and zinc in a speciallydesigned process chamber. In order toensure even coatings several evapora-ting stations have been accommoda-ted in the chamber. The cabinet section of this system houses thepump system and the electrical powersupplies. The process chamber is placed on aseparate frame beside to the electricalcabinet. As the pump system, a cryo-genic pump with matching backingpump is used.

This provides the basis for the shortpump down times required here.

The UNIVEX 450 dactyloscopy has been developed for use in laboratories specialising in criminalinvestigations.

We shall be pleased to plan and manufacture the high-vacuum test systems specially for your process and precisely in line with your requirements. Simply address our application consulting department with your ideas and requirements!

We deliver a “turnkey” solution fromthe vacuum chamber via the pumpsystem up to fully automatic testingincluding process documentation. Here we provide coverage of the entireproject from the planning stage tocommissioning.


univex experimental vacuum coating systems for research, … · 2016. 9. 12. · chamber system...

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