ultrasonic energy harvester
TRANSCRIPT
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WELCOME
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Done by,
LIJINRAJ.T.VGuided by,
Muhzina M H
Ultrasonic energy harvester
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CONTENTS
INTRODUCTION DESIGN FABRICATION EXPERIMENTAL RESULTS CONCLUSION REFERENCES
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INTRODUCTION NEED OF ENERGY HARVESTERS
EXISTING HARVESTERS
DRAWBACKS
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ULTRASONIC ENERGY HARVESTER
TWO METHODS.
USING MEMS.
USING PIEZOELECTRIC CANTILEVER.
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ULTRASONIC ENERGY HARVESTER USING MEMS ULTRA SONIC
TRANSDUCERS
MEMS CHIP
STORAGE DEVICES
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BLOCK DIAGRAM
VOLTAGE SOURCE
ULTRASONIC TRANSDUCER
MEMSHARVESTER
RECTIFIER & STORAGE DEVICES
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ULTRASONIC TRANSDUCER A SQ -40T ULTRASONIC
TRANSDUCER WAS USED.
IT TRANSMITS ULTRASONIC WAVES.
IT HAS A RESONANCE FREQUENCY OF 40 KHZ.
DRIVEN BY A 10Vpp AC SIGNAL.
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MEMS
MEMS(Micro Electro Mechanical System).
CONSISTS OF MICRO ACTUATORS
MICRO SENSORS,MICROELECTRONICS
SIZE IS IN µm RANGE.
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DESIGN
3-D VIEW OF MEMS MECHANISM
A 2 DOF MOTION MECHANISM .
VIBRATION ENERGY. SEISMIC MASS MOVES. CHANGES THE
CAPACITANCE OF THE X&Y FRAMES.
CONITRIBUTE THE CHARGING OF THE LOAD.
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MOTION MECHANISM TO HARVEST VIBRATION ENERGY TO A PLANE
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TWO MODES.
TWO RESONANCE FREQUENCIES.
MECHANICAL COUPLING IN THE COMBS FROM ONE MODE TO ANOTHER IS LESS THAN 2%.
VIBRATION IN Z-DIRECTION CAN BE IGNORED.
RESONANCE FREQUENCY DEPENDS ON THE STIFFNESS OF THE BEAMS AND MASS,
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MECHANICAL STRUCTURE DESIGN SHOWING THE MOVEMENT ALONG THE X-AXIS
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MECHANICAL STRUCTURE DESIGN SHOWING THE MOVEMENT ALONG THE Y-AXIS
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DESIGN PARAMETERS FOR 2-DOF ENERGY HARVESTER
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FABRICATIONMEMS FOUNDRY PROCESS
SURFACE METALPADS ARE
PATTERNED FOR OHMIC CONTACT
DRIE IS PERFORMED FROM THE FRONT SIDE OF THE WAFER
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A PROTECTIVE POLYMIDE LAYER IS APPLIED TO THE FRONT SIDE
A DEEP TRENCH UNDERNEATH
THE MOVABLE STRUCTURES
IS CREATED
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THE EXPOSED BURIED OXIDE
IS REMOVED USING A WET HF
ETCH
THE POLYMIDE COAT
IS REMOVED BY OXYGEN
PLASMA
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SEM IMAGE OF THE FABRICATED ENERGY HARVESTER
PHOTOGRAPH OF THE PACKAGED DEVICE
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ENERGY HARVESTING CIRCUIT DIAGRAM
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ULTRASONIC ENERGY IS CONVERTED INTO ELECTRICAL ENERGY.
A RECTIFYING CIRCUIT IS USED.
DIODES (1N5711).
CAPACITOR CHARGED(1µF).
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ULTRASONIC TRANSDUCER & PACKAGED MEMS CHIP
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MAGNITUDE CURVES OF THE OUTPUT VOLTAGE V/S FREQUENCY
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COMPARISON BETWEEN EXPERIMENTAL RESULTS &STIMULATION
RESULTS
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USING PIEZOELECTRIC CANTILEVER
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MEMS V/S PIEZOELECTRIC CANTILEVER
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ADVANTAGES
SMALL SIZE.
BETTER SENSITIVITY.
COST EFFECTIVE.
LESS HARM TO PATIENT.
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APPLICATIONS
A BETTER APPLICATION IS IN POWERING THE IMPLANTABLE BIOSENSORS.
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CONCLUSION THESE CAN EXTRACT ULTRASONIC ENERGY FROM
ALL DIRECTIONS IN THE DEVICE PLANE.
INCREASES EFFICIENCY OF THE ENERGY SCAVENGING.
A POWER LEVEL OF 21.4nw CAN BE OBTAINED.
BETTER SENSITIVITY.
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REFERENCES
Yong Zhu, S. O. Reza Moheimani, Mehmet Rasit Yuce, “A 2-DOF MEMS Ultrasonic Energy Harvester”, IEEE SENSORS JOURNAL, VOL. 11, NO. 1, JANUARY 2011
WWW.WIKIPEDIA .COM
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THANKS
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QUERIES???