ultra low leakage probes cables for fine probe cards
TRANSCRIPT
Ultra Low Leakage Probes & Cables For Fine Pitch Probe Cards
June 6 to 9, 2010
San Diego, CA
Hiroyuki KamibayashiMitsubishi Cable Industries
June 6 to 9, 2010 IEEE SW Test Workshop 2
Agenda• Introduction
• Need for superior quality coated probes
• Advantages of MEXCEL electro‐depositedpolyimide coatings
• Need for super‐fine coaxial cable products
• Advantages of Mitsubishi ultra miniature coaxial cables
• Summary
June 6 to 9, 2010 IEEE SW Test Workshop 3
Mitsubishi Product Divisions• Cable Division
– Electric wires and cables, high frequency cables
• Instrument Components Division– Seals, rubber products, engineering plastic products,metal products, OA equipment, electromagnetic wave absorbers, MEXCEL products.
• Car Electronics and Optics Division– Automotive wire harnesses, connectors, gaskets, datalink and optic devices, optic fiber bundles, optical largecore fibers
June 6 to 9, 2010 IEEE SW Test Workshop 4
World Network
(Thailand) MCI & TSH Co., LTD.
(Thailand) Thai Summit MCI Component Co., LTD.
(Indonesia) P. T. Dia Electro Circuit Systems Indonesia
(France) Dia Automotive Systems, S.A.S
(Indonesia) P. T. MCI Prima Gasket
(China) Dalian Ryosei Automotive Components Co., LTD.
(Korea) Dia Automotive Systems Korea Co., LTD.
(U.S.A.) Mitsubishi Cable America Inc. Santa Clara CA 408-486-9915
(China)Dalian Liaison Office
(China)Shanghai Liaison Office
June 6 to 9, 2010 IEEE SW Test Workshop 5
PART 1
• This section features the MEXCEL coating process developed by Mitsubishi’s Instrument Components Division
• This process can be used to advance performance of fine‐pitch coated probes.
June 6 to 9, 2010 IEEE SW Test Workshop 6
Need for Superior Quality Coated Probes
• High resistance for low leakage applications
• High breakdown for high voltage applications
• Coating must be tough, peel resistant, andwithstand high temperatures
• Coating must be thin for tight pitch applications and free of pin hole defects
• Barrier to corrosion, chemicals & Moisture
June 6 to 9, 2010 IEEE SW Test Workshop 7
The MEXCEL Coated Probe
• Polyimide is applied by a patentedelectro‐deposition process
• Much superior to dip‐coatings or the use of polyimide “sleeving”
• Tight control over thickness and uniformity– Coatings from 1 micron to 100 microns thick– Uniformity better than 5%– Free of bubbling and pin holes
June 6 to 9, 2010 IEEE SW Test Workshop 8
MEXCEL Manufacturing Method
0.07mm0.09mm
30mm
Example of coated probe pin
Material : PolyimideThickness : 1 to 100μmCoating Length : As you like
Probe Pin
Electro-depositionCoating
Removed coating by laser or special solvent
Resin
Thickness is Tightly Controlled
June 6 to 9, 2010 IEEE SW Test Workshop 9
MEXCEL Cross‐section & Flexibility
The uniformity of the coating and ability to withstand extreme flexing and bending is ideally suited for the abuse probe needles experience.
Cross‐section
Flexibility
June 6 to 9, 2010 IEEE SW Test Workshop 10
MEXCEL Coating Breakdown Voltage
A 10 micron coating reliably exceeds 1KV AC breakdown.For fast pulse ESD applications the expected breakdown is 4x higher.
June 6 to 9, 2010 IEEE SW Test Workshop 11
Other Applications
Planar Transformer
Lead Frame
High InductancePlanar Coil
Pipe
Spring
Thermistor
June 6 to 9, 2010 IEEE SW Test Workshop 12
PART 2
• The section features ultra miniature coaxial cable developed by Mitsubishi’s Cable Division.
• Original developed to advance miniaturization of mobile products, these cable are well suited for use in many probe card applications.
June 6 to 9, 2010 IEEE SW Test Workshop 13
Need for Super‐Fine Coaxial Cable Products
• Ultra low leakage DC applications– Driven guard eliminates probe capacitance allowing much faster settling time fA‐level measurements
• Controlled impedance RF applications– Miniature 50‐ohm flexible probes are possible using tungsten wire as the inner conductor.
– These can help solve routing problems in tight pitch applications where flexibility is an issue
June 6 to 9, 2010 IEEE SW Test Workshop 14
Construction of Ultra Miniature Coaxial Cable
Only 210 micronoutside diameter!
(8.3 mils)
Inner Conductor
Insulation
Outer Conductor
Jacket
φ0 .05φ0 .19φ0 .21
190 µm210 µm
50 µmItem Construction O.D (µm)
Inner Conductor Gold plated tungsten 50
Insulation Fluororesin -
Outer Conductor Tin plated copper alloy 190
Jacket Polyester 210
June 6 to 9, 2010 IEEE SW Test Workshop 15
Impedance of Ultra Miniature Coaxial Cable
Characteristic impedance (TDR)of 50±3 ohms can be achievedwith 210 µm in overall diameter.
50ohms52ohms54ohms
Time base range(20mm) 48ohms46ohms
June 6 to 9, 2010 IEEE SW Test Workshop 16
Ultra Miniature Coaxial Cable Handles 8KV ESD Pulse
This cable/probe allows flexiblerouting of ESD pulse waveformsin fine pitch applications.
Measurement courtesy ofwww.grundtech.com
June 6 to 9, 2010 IEEE SW Test Workshop 17
Construction of Mini Low‐Loss Cable
Flexible low‐losscable is 810 µm O.D.
(31.9 mils)
Inner Conductor
Insulation
Outer Conductor
Jacket
φ0 .81810 µm (microns)
Item Construction O.D (µm)
Inner Conductor Silver plated copper 240
Insulation Fluororesin -
Outer Conductor Silver plated copper alloy 710
Jacket Fluororesin 810
June 6 to 9, 2010 IEEE SW Test Workshop 18
Attenuation of Mini Low‐Loss Cable
Flexible low‐losscable is 810 um OD.
0
1
2
3
4
5
6
7
8
90 1000 2000 3000 4000 5000 6000
Frequncy [MHz]
Atte
nuat
ion
[dB
/m]
Mitsubishi cable
General Cable
2000MHz
2.6dB/m Mitsubishi cable
4.3dB/m General cable
50
June 6 to 9, 2010 IEEE SW Test Workshop 19
VSWR of Mini Low‐Loss Cable
1.00
1.05
1.10
1.15
1.20
1.25
1.30
1.35
1.40
1.45
1.50
0 1000 2000 3000 4000 5000 6000
Fequency [MHz]
VSW
R
Length : 2mConnector : SMA Plug
50
810 Micron OD
June 6 to 9, 2010 IEEE SW Test Workshop 20
Other Mini Low‐Loss Cable Applications
Coax Cable
Mobile Phone
Mobile PC
June 6 to 9, 2010 IEEE SW Test Workshop 21
Summary• Electro‐deposition produces superior coated probes
– MEXCEL coatings can advance tight pitch probing application– They extend probing at high temperatures and voltages
• New miniature coax cable advances signal technology– Cross sections in 200 micron are now possible– Wide bandwidth, temperature, and voltages are achievable
June 6 to 9, 2010 IEEE SW Test Workshop 22
Next Step• These advance technologies require partnerships
– Mitsubishi Cable Industries wishes to partner with probecard vendors and/or end users to provide custom solutionsfor the semiconductor wafer test industry.
• Custom probe coatings and cables– In the US, please contact
Mitsubishi Cable America3333 Bowers Avenue, Suite 251Santa Clara, CA 95054408‐486‐9915Yutaka [email protected]
Tip Length
Thickness
Uncoated length (>5mm)