towards a flexible oled display with an organic
TRANSCRIPT
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Towards a flexible OLED display with
an organic active matrix backplane
P. Heremans1, J. Genoe1, S. Steudel1, K. Myny1, S. Smout1,
P. Vicca1, L. Ruppel3, C. Grillberger3, O. R. Hild3, F.Furthner2, B. van der Putten2, A. K. Tripathi2, G. H. Gelinck2
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Acknowledgement
FP7 STREP project #216546
start Jan 2008
Flexible Organic Active Matrix OLED displays
forNomadic Applications
FLAMEhttp://www.imec.be/FLAME
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Introduction
Goal: Technology for flexible and rollable OLED display
Implementation: Plastic foil substrate (with moisture barrier)
Organic transistor backplane
Small molecule top-emitting OLED stack
Topstrate barrier foil
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State of the art
48X48 bottom-emitting monochrome OLEDs on flexible substrateT. Jackson: Pentacene TFT driven AM OLED displays, Electron deviceletters 26, 640 (2005)T. Jackson: All-organic active matrix flexible display, Appl. Phys. Lett.
88, 083502 (2006)
12X12 (2mm pixel size), Ta2O5 gate dielectric, aperture ratio 37%M. Mizukami et al.: Flexible AM OLED panel driven by bottom-contactOTFTs, IEEE El. Dev. Lett. 26, 9 (2006)
SONYSID07-1753QQVGAfull color
T. Someya and T. Sekitani: many other backplane appliations!Examples: pressure sensors, image scanner, actuators,
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Outline
Backplane
OLED
Integration
Moisture Barrier
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Pixel
< 1pAIOFF
Requirement
Mobility 0.5 0.03 cm2/Vs
L 5 m
Cox > 20 nF/cm2
VT 0.2 V
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Technology
Laminate foil on carrier Freedom of foil type
Flexibility in process
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Technology
Laminate foil on carrier Freedom of foil type
Flexibility in process
Use of conventional process technology Transferable to flat panel line
CD 2 m
cfr. DowCorning
cfr. Yokogawa
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Technology
Laminate foil on carrier Freedom of foil type
Flexibility in process
Use of conventional process technology Transferable to flat panel line
CD 2 m
Organic thin-film transistors Pentacene (and soluble derivatives) semiconductor (p-type only)
Bottom-gate bottom-contact geometry
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Carrier
glue
PEN Teonex
Planarization
Au (30nm)
resist
Al2O3 (100-150 nm)
Carrier
glue
PEN Teonex
Planarization
Au (30nm)
resist
Al2O3 (100-150 nm)
Drop-on-demand Ink jet
Au (30nm) Au (30nm)
Organic Vapor Phase Deposition
C. Rolin et al., Appl. Phys. Expr. 2, 086503 (2009) C. Kjellanderet al., MRS Fall (2009)
J. Anthony,
JACS123, 9482, (2001)
T. Jackson,
AdvMat15,2009 (2003)
Backplane process
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Performance evaporated pentacene
7
6
5
4
3
2
1
0
um
er
1.00.80.60.40.20.0
[cm2/ Vs]
(AVG) =0.472 cm2/ Vs
(StDev) =0.0174 cm2/ Vs
3.0
2.5
2.0
1.5
1.0
0.5
0.0
Number
-10 -5 0 5 10VT [V]
VT (AVG) = 0.906096 V
VT (StDev) = 0.496683 V
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Inkjet printed TIPS pentacene formulation
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Performance
< 1pA< 1pAIOFF
Requirement Pentacene/Al2O3
Mobility 0.5 0.03 cm2
/Vs 0.5 0.05 cm2
/Vs
L 5 m 5 m
Cox > 20 nF/cm2 50-70 nF/cm2
VT 0.2 V 0.4 V
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Array
Generation 1: 32 x 32
Pixels 1 mm2
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OLED on foil
Top emitting (transparent cathode)
Silver anode
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target
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Transparent cathode
OLED layer stack
interlayer dielectric
Integration of OLED on backplane
Carrier
gluePEN Teonex
Planarization
Au (30nm)
resist
Al2O3 (100-150 nm)
Au (30nm)pentacene
Viahole
Ag anode
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Example green OLED
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Example orange OLED
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Aperture ratio
Top-emitting OLED
Aperture ratio : 79.7%
off
on
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Brightness
D65 white color point
100
80
60
40
20
0
Cox[nF/cm
2]
2 3 4 5 6
0.12 3 4 5 6
12 3 4
Carrier Mobility [cm2/Vs]
2000 Cd/m2
500 Cd/m
2
200 Cd/m2
800 Cd/m2
Al2O3
Polymer gate dielectrics
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Brightness
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Moisture barrier
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5 X 5 mRMS 1.1 nmRmax 10 nm
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Barrier foil
Integration of barrier with OLED on foil
Radius 0.8 cm
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OLED stack
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Summary
Status : Pentacene/Al2O3 backplane with green and orange OLEDs integrated
on foil in 32x32 test vehicles
Moisture barrier with OLEDs integrated on foil and tested forrollability
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Near future : Integrate row and column drivers
Develop top-emitting blue OLED pixels on foil
Apply 3 colors on backplane
Scale pixel size Integrate all in demonstrator
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Thank you
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