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DTU NanolabMarch 10th 2020 Techforum 2020 #1
CoViD 19
”as a public institution we have the
obligation to follow the official
instructions”
Coronasmitte.dk
CoViD-19
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DTU Nanolab
Tool category - R
• “R” for “Reserved” or “Nanolab Research”
• Maintenance by research group
• Not available for general use
• Used by others through research collaboration
• Visible to everyone in LabManager
• Cost of “0” kr/hour
Examples• Raith E-Line
• Nanoscribe 2PP system
• All tools in Phoeneex Lab
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DTU Nanolab
Tool category - P
• “P” for “Prep” -307/314
• Decouple tools from “F” category
• Available for general use after proper training
• Visible to everyone in LabManager
• Cost like Cat-A for commercial, waiting for price calculations
Examples• Nanomill
• Quorum coater
• Softmatter sample prep
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
User Activity Report
user and project administration
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User usage lifecycle:
Contact to NLAB Registration Usage Usage … Expired access ???
User Activity Report:
Monthly PDF sent to active users
Includes info about equipment usage, cleanroom access and supervised users.
Our goal: To help users get an overview AND receive info back if no longer true
Project administration:
-We will de-activate projects when not used for > 12 months.
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Scheduled for decommissioning
• Noble Furnace – Has left the cleanroom
• Dielectric Evaporator – Has left the cleanroom
• Jipelec RTP – Hot swap
• Black Magic
• LEO-SEM/ELPHY (Re-located to building 425)
• KS Aligner
• Laurell Spinner
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
B307 basement Soft Matter Lab
• Soft Matter lab for:
– Sample preparation
– Cryo SEM and TEM
– No Cell Growth !!!
• Key requirements include:
– Temperature stability 1oC P-P/24hrs
– Humidity as low as 20% 100m2 (901,905,907)
• Technical Room in 909 for ventilation
access
Idea Users Funds Tender Contract FAT SAT Manual Released
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
NEW EQUIPMENT
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
New FIB System
Key Features we are looking at are :
– Automation for higher throughput and
consistency:
• TEM lamella liftout with Pick and
Place
• Auto Atom and Nano-probe
– Machine learning
– Auto alignment “CRITICAL”
– Extreme resolution for the Electron
beam at low kV
Idea Users Funds Tender Contract FAT SAT Manual Released
Example of a possible candidate
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Cluster-Sputtering system from Kurt J LeskerRobotic cluster tool including new functionalities:
- 2 x PRO Line PVD75 sputter systems (PC1 & PC3)
- Separation: Metal oxides / Metal nitrides
- PC1: 6 x 3” magnetrons, DC/RF/pulsed DC/HiPIMS
- PC3: 1 x 4” + 2 x 3” magnetrons: DC/RF/pulsed DC/HiPIMS
- Distribution chamber (Genmark robot)
- Cassette station (10 wafer cassette)
Idea Users Funds Tender Contract FAT SAT Manual Released
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Sputter-System Metal-Oxide (PC1)/Sputter-System Metal-Nitride (PC3)
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6 sources (all 3’’)
PC1
3 sources (3’’,3’’ and 4’’)
PC3
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Sputter-System: Front side + Load-lock (Operator)
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Chip 4-inch wafer 6-inch wafer
Cassette station
(Up to 10 wafers)
Operation area Load lock with Cassette
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DTU NanolabMarch 10th 2020 Techforum 2020 #113
Recipe name Material Pressure(mTorr) Power (W) Deposition rate
(nm/min)
Uniformity (%)
On 6-inch wafer
Comments
MD PC1 Src1 RF Upstream SiO2 3 140(RF) 2.3 0.5
MD PC1 Src2 RF Upstream SiO2 3 140(RF) 2.6 3
MD PC1 Src3 DC Upstream Ni 3 500(DC) 23.3 2.5
MD PC1 Src4 DC Upstream Cu 3 500(DC) 52.2 2.2
MD PC1 Src5 DC Al 3 200(DC) 7.9 3.2
MD PC1 Src5 Pulse DC
Downstream with Reactive O2 gas
Al2O3 (Al) 3 500(PDC)Frequency: 100Hz
Revers time: 2µs
1.7 3.4 Ar flow:50 sccmO2 flow:15 sccm
MD PC1 Src6 Pulse DC Upstream ITO 3 140(PDC)Frequency: 100Hz
Revers time: 2µs
11 4.5
MD PC1 Src6 Pulse DC
Downstream with Reactive O2 gas
ITO 3 140(PDC)Frequency: 100Hz
Revers time: 2µs
11.3 - Ar flow:50 sccmO2 flow: 2 sccm
MD PC1 Src1 RF Upstream Si 3 120(RF) 1.8 -
MD PC3 Src1 Pulse DC
Downstream with Reactive N2 gas
AlN (Al) 3 900(PDC)Frequency: 100Hz
Revers time: 2µs
29 3.2 Ar flow:50 sccmN2 flow:15 sccm
Sputter-System: Starting recipes / materials
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Sputter-System Metal-Nitride (PC3): AlN sputtering
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O1s
N1s
Al2p
Oxygen level below 1.5%
O1s
Surface oxidation
Bulk sample
XPS data of AlxNy by reactive pulsed-DC sputtering: (x,y) = (0.53 , 0.47)
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DTU NanolabMarch 10th 2020 Techforum 2020 #115
Cu deposition using HiPIMS on Si trench (200 nm) Co-deposition of Cu (HiPIMS) and Ni (DC) on
structured 6’’ wafer (thickness 20 nm)
Sputter-System: High-Power Pulsed Magnetron Sputtering (HiPIMS)
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DTU NanolabMarch 10th 2020 Techforum 2020 #116
Target
size
Available target material
3 inch Al
Au
Ag
Cu
Ni
Ti
Ge
Si
SiO2ITO
Cr
BaTiO3NbTi
4 inch Al
Contact Thinfilm group ([email protected]) to help creating the film that fits your needs.
Available Target Materials
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
PVD-200 ProLine Sputter Lesker system (bought used)
Stand alone sputter system:
- First installation: Primo 2018
- 4 x 4” magnetrons, DC/RF/pulsed DC
- Setup for ITO & Ni deposition
- Up to 8” wafer transfer
- Setup done by Lesker-US (Pittsburgh)
Idea Users Funds Tender Contract FAT SAT Manual Released
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Twin-Pegasus
Pegasus 3
DRIE (Si) – 6”
High-throughput
Cassette-Cassette
”Workhorse”
Pegasus 4
DRIE (Dielectrics) – 6”
Reconfigure (Dielectrics)
High-throughput
Cassette-Cassette
”Workhorse”
Installation on-going
CPX Platform
twin vacuum cassette cluster (Brooks handler)
- Main issues:
Same handler problem as Peg-3
Gas manifold for H2/CF4 –
Waiting for spare parts
/ gas-install
- Main issue:
Robot-handler (Aligner)
“Sort of working” –aligner off
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Pegasus 3 process development in progress
Some recipes being transferred from Pegasus 1 to Pegasus 3:‘Conventional’ recipes like Poly.SOI.4a: 25 cycles on silicon wafer with DUV lithography pattern
• ‘DREM’ types with picoscope process monitoring require much more optimizationbut the whole setup is ready.
• Do you need any specific processes to be available – please let us know!!
• Working on the alignment issues at the same time
Poly.SOI.4a DEP Etch
Duration (s) 2.5 5
Pressure (mtorr) 10 10
C4F8 (sccm) 50 10
SF6(sccm) 0 70
O2(sccm) 0 5
Power (Cl/Pl) 600/0 400/1@1,
1@100
Temperature (oC) 20
Peg 1: 100 mm waferPeg 3: 150 mm wafer
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Idea Users Funds Tender Contract FAT SAT Manual Released
Standard RTP system Jipelec JetFirst 200C (ECM)
Jipelec JetFirst 200C (ECM)
Purpose/specs:
Replacing current Jipelec system (semi-swap)
- Cold-wall system (water cooled stainless steel)
- Temp range: ambient to 1000 C (1200 C for 1 min)
- Temperature control: TC & Pyrometer
- 3 gas lines (MFCs) + purge line
- Dry pump (nXDS6i scroll)
Status: Delivered 9 March
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Characterization in 346 basement
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DTU NanolabMarch 10th 2020 Techforum 2020 #1 22
Idea Users Funds Tender Contract FAT SAT Manual Released
XPS-2: Thermo Scientific Nexsa
Specs:
Measuring techniques: XPS (ARXPS), UPS (ARUPS), ISS,
REELS, Raman spectroscopy
Highly automatic, user friendly, high throughput
Status: Commisioning starting 10 March
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Idea Users Funds Tender Contract FAT SAT Manual Released
Powder XRD outside cleanroom
”Mini Tender”: Aeris Benchtop XRD from
Malvern Panalytical
Powder XRD
• Dedicated for powder analysis
• Crystal structure analysis: phase identification,
crystallinity, piezoelectricity, mechanical strength, conductivity
• Incl. 6 pos. Sample changer (various holders) + Hi Temp stage (500 C)
• Easy to use
• Located in ”Hawaii Lab” (XPS room in 346)
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Idea Users Funds Tender Contract FAT SAT Manual Released
HF vapour phase etch• Isotropic oxide etch
• Aluminium/polysilicon as mask
• Tool installed and accepted
• Need external F gas sensor – portable for now
• Expected ready Q2 2020
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Idea Users Funds Tender Contract FAT SAT Manual Released
Aligner: Maskless 03 (MLA3)
• Chips, 2, 4, 6 inch – no 8 Inch
• Only 405 nm – no 375 nm
• Only pneumatic focus – no optical focus
• 1.0 µm lines in 0.5 µm resist
• BSA ca. +/- 1 µm
• 4” wafer: ca. 10 min
• Fast, less accurate supplement to MLA3
• Not suitable for nLOF and SU-8
• Open for training
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Idea Users Funds Tender Contract FAT SAT Manual Released
Increased capacity for stepper resist and developer
• Upgrade 1 liter resist canisters to 3.8 litres (1 gallon)
– New canisters
– New chemical cabinet
– All-Süss solution
– Under installation
– Ready next week
• Upgrade TMAH tanks to autofill
– Only autofill system from Süss
– 200 litre TMAH supply station
needs design
– Ready Q42020
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
FACILITY
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Light rail
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• Very good news
– Vibration damping near cleanroom, -12 dB
– EMI reduction near cleanroom (Siemens patent), -66% => max ca. 550 nT
• Still need larger EMI cancellation system for e-beam
• Still need cancellation systems for SEMs
• But challenge is getting easier
• A million thanks to ”Light Rail Laila”
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
UPS on the entire B346
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or
• CapEx: 6.5 mill DKK
• OpEx: Ca. 125.000 DKK/yr (loss+service)
• 2 x 35 m2 in basement
• CapEx: 11.8 mill DKK
• OpEx: Ca. 375.000 DKK/yr (loss+service)
• 105 m2 new building in P-space
• Funds provided by Nanolab and CAS
• Will be carried out in Q42020 or later
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
FFU
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• 3 candidates
– 2 refurbishment solutions
– 1 new FFU
• Power savings
• Interesting noise measurements
• Next step: Install the 3 candidates in F-2 (”SEM City”)
• Aim for stepwise FFU exchange – if possible
• Maybe late in 2020
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Shelf space
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• 350-400 cleanroom
users
• User shelves filled up
• No space for more
shelves
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Many users/groups are no longer active in the cleanroom
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Two years ago: Users ”cleaned up” themselves
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
The shelf space challenge
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• Increasing number of users in decreasing space
• Many users/groups fail to clean up their shelves
• Many “wafer tombs”
• Cleanroom shelves are only for work in progress
• A solution is urgently needed
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Suggestion – Shelf space per user
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• Shelf section for
dedicated user
• When user expires the
section is emptied by
Facility
• Not enough dedicated
space for all users
• 3 weeks students don’t
need shelves
• Other ideas?
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DTU NanolabMarch 10th 2020 Techforum 2020 #1
Take home messages
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• Expanded characterization capabilities outside
cleanroom
• Activity reports
• The shelves will become tidy