thesis development of mems piezoelectric energy harvesters
DESCRIPTION
Thesis of energy harvesting field. In a MEMS application, to develop and characterize the piezoelectric material.TRANSCRIPT
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Kftfbnyafl{ nd AFAS Ymfznfbfc{wmc Flfwe} H`wtfs{fws
g}
Jvle!h}vl Y`wo
@ kmssfw{`{mnl ms svgam{{fk {n {hf Ew`kv`{f D`cvb{} nd
@vgvwl Vlmtfwsm{}ml y`w{m`b dvbdmbbafl{ nd {hfwfpvmwfafl{s dnw {hf Kfewff nd
Knc{nw nd Yhmbnsnyh}
@vgvwl" @b`g`a`A`} 0;" 7909
Of}unwks: Ymfznfbfc{wmc" AFAS" Flfwe} H`wtfs{fw" Amcwnynufw
Cny}wmeh{ 7909 g} Jvle!h}vl Y`wo
@yywntfk g}
Knle!Jnn Oma" Ch`mw" @ssncm`{f Ywndfssnw nd A`{fwm`bs FlemlffwmleG`w{nl C, Ywnwno" @ssncm`{f Ywndfssnw nd A`{fwm`bs Flemlffwmle
Zhnle]`le Chfle" @ssncm`{f Ywndfssnw nd A`{fwm`bs Flemlffwmle
[hna`s @, G`emlsom" Ywndfssnw nd Fbfc{wmc`b $ Cnayv{fw Flemlffwmle
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mm
@gs{w`c{
[hf wfsf`wch nd ynufwmle kftmcfs ml ` amcwnu`{{ w`lef h`s gffl `c{mt`{fk `lk kftfbnyfk
g} {hf fafweflcf nd bnu!ynufw Tfw} B`wef Sc`bf Ml{few`{mnl (TBSM- {fchlnbne} ml {hf y`s{ dfu
}f`ws, [hf ynufwmle kftmcfs wfpvmwf ` smzf {h`{ ms cnay`{mgbf um{h {hf `yybmc`{mnl" svddmcmfl{
ynufw" `lk fx{flkfk bmdf{maf vsmle yfwa`lfl{ `lk vgmpvm{nvs flfwe} snvwcfs, [hf ymfznfbfc{wmc
flfwe} h`wtfs{fw vsmle tmgw`{mnl snvwcfs ms `{{w`c{mtf kvf {n m{s hmeh cnltfwsmnl fddmcmflc}"
smaybf kfsmel dnw amlm`{vwmzmle" `lk b`co nd fx{fwl`b tnb{`ef snvwcf, Uhmbf gvbo ymfznfbfc{wmc
flfwe} h`wtfs{fws ywnkvcf flnveh ynufw dnw ` dfu {fls nd aU" {hf mlsvddmcmfl{ ynufw ms s{mbb `
a`jnw mssvf kvwmle amlm`{vwmzmle ml{n amcwn smzf,
[hf ymfznfbfc{wmc flfwe} h`wtfs{fw u`s d`gwmc`{fk g} amcwn!fbfc{wn!afch`lmc`b s}s{fas (AFAS-
`lk kftfbnyfk {n flh`lcf m{s nv{yv{ ynufw, M{ u`s kfsmelfk {n gf wfsnl`{fk `{ {hf dwfpvflc}
w`lef nd `agmfl{ tmgw`{mnl snvwcf (69|399 Hz- `lk cnltfw{ {hf afch`lmc`b s{wfss {n fbfc{wmcm{}
g} ymfznfbfc{wmc {hml dmba, [hf c`l{mbftfw s{wvc{vwf u`s chnsfl ml {hms s{vk} kvf {n m{s b`wef s{w`ml"
`lk ` gme ywnnd a`ss `{ {hf flk nd {my u`s ml{few`{fk dnw {hf s`af wf`snl, [hms s{vk} dncvsfs nl
{hwff syfcmdmc mssvfs wfb`{fk {n {hf wngvs{ d`gwmc`{mnl ywncfss" mlcbvkmle {hf ml{few`{mnl nd
ymfznfbfc{wmc {hml dmba" s{wvc{vwf kfsmel dnw hmeh ynufw kflsm{}" `lk {hf wfbm`gmbm{} nd kftmcf, [hf
Bf`k Zmwcnl`{f [m{`l`{f (YZ[- {hml dmbas ufwf ywfy`wfk g} ` snb!efb ywncfss `lk ufwf vsfk {n
d`gwmc`{f flfwe} h`wtfs{fws g} `l ny{mamzfk AFAS ywncfss, [hf ywnyfw{mfs nd YZ[ {hml dmba
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mmm
ufwf s{vkmfk cnlsmkfwmle {hf svgs{w`{f fddfc{" hf`{ {wf`{afl{" `lk {hmcolfss fddfc{s, [hf
d`gwmc`{fk flfwe} h`wtfs{fw ywnkvcfk 54= aTyo!yo" `lk 4,57 ¶U um{h {hf ny{ma`b wfsms{mtf bn`k
nd 00 o ℤ `{ 075 Hz nd wfsnl`l{ dwfpvflc}, [hf kftmcf h`k kmaflsmnls nd `gnv{ ; aa(B- x 7
aa(u- x 9,970 aa(H-" `lk {hf Sm ywnnd a`ss h`k kmaflsmnls nd 3 aa(B- x 7 aa(U- x 9,6
aa(H-, Gf}nlk {hms wfsvb{" {hf {fchlmc`b yb`{dnwa dnw {hf wngvs{ d`gwmc`{mnl ywncfss u`s
fs{`gbmshfk nl ` Kffy Wf`c{mtf Mnl F{chfw (KWMF-, [hf yb`sa` f{chmle vsmle KWMF u`s
ny{mamzfk {n ywftfl{ k`a`ef nd {hf YZ[ dmba `lk {n ng{`ml vlmdnwa `lk ywfcmsf kmaflsmnl
cnl{wnb,
[hf {w`yfznmk`b sh`yf nd {hf c`l{mbftfw u`s kfanls{w`{fk {n flh`lcf {hf ynufw kflsm{} g} s{wfss kms{wmgv{mnl nl {hf YZ[ dmba, [hf efnaf{w} ch`lef ml c`l{mbftfw sh`yf kms{wmgv{fk {hf
s{w`ml nl ymfznfbfc{wmc dmba `lk maywntfk {hf nv{yv{ ynufw |;9& hmehfw {h`l {h`{ nd {hf
wfc{`levb`w sh`yf kvf {n lnlbmlf`w ymfznfbfc{wmc ywnyfw{mfs, [hf avb{m!gf`a `ww`}s ufwf kfsmelfk
{n ng{`ml ` avb{mybmfk fbfc{wmc ynufw fddfc{ `s md `s lvagfw nd c`l{mbftfws u`s vsfk, [hf avb{m!
gf`a `ww`}fk kfsmel wfpvmwfs {hf vlmdnwa a`chmlmle {n a`{ch {hf vlmdmfk wfsnl`l{ dwfpvflc} nd
f`ch c`l{mbftfw s{wvc{vwf, G`sfk nl {hf ny{mamzfk d`gwmc`{mnl ywncfss" {hf c`l{mbftfw `ww`} {h`{
cnlsms{s nd dnvw c`l{mbftfws eflfw`{fk 08,3= ¶@ `lk 0,367 ¶U um{h ; o ℤ nd ny{mamzfk wfsms{mtf
bn`k ml y`w`bbfb cnllfc{mnl vlkfw 0 E nd `ccfbfw`{mnl dnwcf, [hf wfsvb{ u`s fx`c{b} dnvw {mafs
hmehfw ynufw `lk cvwwfl{ {h`l {h`{ nd mlkmtmkv`b c`l{mbftfw,
Dml`bb}" wfbm`gmbm{} {fs{s ufwf yfwdnwafk dnw {hf ymfznfbfc{wmc AFAS flfwe} h`wtfs{fw
cnlsmkfwmle {hf lvagfw nd c}cbmc bn`ks `lk {fayfw`{vwf" `lk {hf kfew`k`{mnl nd YZ[ kvwmled`gwmc`{mnl u`s `bsn mltfs{me`{fk,
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mt
@colnubfkeafl{s
M unvbk bmof {n fxywfss a} wfsyfc{ `lk {h`los {n a} `ktmsnw" Kw, Knle!Jnn Oma" dnw hms
kmwfc{mnl" y`{mflcf" `lk flcnvw`efafl{" uhmch u`s mlt`bv`gbf kvwmle {hf fl{mwf {maf nd {hms
wfsf`wch, M `a tfw} ew`{fdvb dnw {hf `c{mtf svyynw{ nd Kw, G`w{nl C, Ywnwno" Kw, Zhnle]`le
Chfle" `lk Kw, [hna`s @, G`emlsom gfmle nl a} kmssfw{`{mnl cnaam{{ff, M `yywfcm`{f a}
wfsf`wch ewnvy afagfws dnw {hfmw svyynw{ `lk dwmflkshmy, Dml`bb}" M emtf a} smlcfwf `yywfcm`{mnl
{n a} umdf Fvl!]nvle Bff" k`veh{fw H`ll`h" `lk snl L`{h`lmfb dnw {hfmw bntf `lk
vlkfws{`lkmle" `lk {n a} d`{hfw O}v!Jmco Y`wo `lk an{hfw ]nvle!Jnn ]nn dnw {hfmw bntf `lk
hfby ml lvafwnvs u`}s,
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[`gbf nd Cnl{fl{s
@gs{w`c{․․․․․․,,․․․․․,,․․․․․․,․,,․․․,․․․․․․․․․․․,,mm
@colnubfkeafl{s․․․․․․․,,․․․․․․․․,․,,․․,․․․․,,․․,․․․,,,mt
Bms{ nd Dmevwfs․․․․․․․․․․․․,․,,․․․․․․․․,,․․․․․․․․․,mx
Bms{ nd [`gbfs․․․․․․․․․․․․․․․․․,,․․․․․․․․․․․․․,xmt
0, Ml{wnkvc{mnl
0,0 An{mt`{mnl ․․․․․․․․․․․․,,․․․․․․,․․․․․,,․․․,,,,,,0
0,7 Flfwe} H`wtfs{mle ․․․․․,,․․․․․,,․․․․,,․․,,,․․․․․․․․7
0,3 Cnayf{mle Ynufw Snvwcfs ․․․․․․․․․․․․․․,․․․․․,․,,․․3
0,; Cnltfw{mle Tmgw`{mnl {n Fbfc{wmcm{} ․․․․․,,․․․․․,,․,,․․․․․․․,4
0,6 Wfsf`wch Ngjfc{mtfs ․․․․․․․․․․․․․․․,․․․․․,,․․․․․8
7, Eflfw`b G`coewnvlk
7,0 Ymfznfbfc{wmcm{} `lk YZ[ dmbas ,,,․․,․․,․․․․․․․․,,․․․․․․,,,,09
7,0,0 Ymfznfbfc{wmcm{} ,,․․․․,․․,,․,․․․․․․․․․,,․․․․․09
7,0,7 Ymfznfbfc{wmc A`{fwm`bs dnw Flfwe} H`wtfs{fws․․,,,,,,,,,,,,,,,,,,,,․․․․,,,0;
7,0,3 Bf`k Zmwcnl`{f [m{`l`{f (YZ[- ․․․․․․․․․․․,,․․․․․․047,0,; Ynbmle $ Kfynbmle ․․․․․․․,,,․․․,․․․․․,,․,․․․․08
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tm
7,0,6 Ymfznfbfc{wmc Ankf (k33 $ k30- ․․․,,․․․,․․,,․․․․,․․․70
7,7 Fbfc{wmc`b Ynufw A`l`efafl{ ․․․․․․․,,,,,,,,,,,,,,,․․․․,․․․․․,,,73
7,3 Ymfznfbfc{wmc AFAS Flfwe} H`wtfs{fw ․․․․․․․,,․․․․,․․․․․,,,74
7,3,0 Smlebf Ymfznfbfc{wmc AFAS Flfwe} H`wtfs{fw ․,,․,,․․․,․․․․,74
7,3,7 Avb{m!gf`a @ww`}fk Ymfznfbfc{wmc AFAS Flfwe} H`wtfs{fw ․․․․,․․78
3, Ml{few`{mle Ymfznfbfc{wmc [hml Dmba nl Smbmcnl U`dfw
3,0 Dmba Ch`w`c{fwmz`{mnl ․․․,․․․․․․,․․․․,․․․․․․․․․․,,,30
3,7 [hml Dmba Kfynsm{mnl ․․․․․․․․․,,,,,․․․․․,․․,,․․․․․․․37
3,3 Chfamc`b Snbv{mnl Kfynsm{mnl(CSK- nd YZ[ dmba․․․․,,․․․,,․․․․․․333,3,0 @l`b}sms nd YZ[ [hml Dmba nl Y{ Svgs{w`{f․․․․․․․,,․․․․,․,,34
3,3,7 @khfsmnl B`}fws Fddfc{s nl [hf Fbfc{wmc`b Ywnyfw{mfs YZ[․․․․․,․,,,38
3,3,3 Hf`{ [wf`{afl{ Fddfc{s․․․․․․․․․․,,․,,․․․․․․․,․,,;7
3,3,; YZ[ [hmcolfss Fddfc{s ․․․․․․․․․․․․․․․․․․․,․,,;6
;, Kfsmel `lk D`gwmc`{mnl nd AFAS Flfwe} H`wtfs{fw
;,0 Kfsmel,․․․․․,․․․․․,,․,․,,․․․,․․․․․․․․․․․,․․,,,;=
;,0,0 Wfsnl`l{ Dwfpvflc} ․․,․․․․․․․․․,․․․․․,,․․,․․,,69
;,0,7 S{w`ml nl YZ[ Dmba $ S`df{} D`c{nw ․․․․․․․,․․․․․,,․․,․63
;,0,3 Kfsmel Cnlsmkfw`{mnl dnw Bnu Wfsnl`l{ Dwfpvflc}․․․․․,,․․,6;
;,0,; @l`b}{mc`b Nv{yv{ Ynufw ․․․․․․,․․․․․․․․․․․․,49
;,7 AFAS D`gwmc`{mnl, ․․․․․․․․,․․,․․․․,,․․․․․․․․․․47;,7,0 Bm{hnew`yh} `lk A`so dnw KWMF ․,․․․․․․․․․․․․,,,,․․․46
;,7,7 Smbmcnl Gvbo A`chmlmle (@SF-․․․․,,,,,,,,,,,,,,,․․․,,․․․․․,,․4=
;,7,3 Svwd`cf Amcwna`chmlmle (@NF-․,․,․․․,,․․․․․․․․,,,․․․54
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tmm
;,7,; Kfsmelmle A`sos G`sfk nl Ny{mamzfk yAFAS Ywncfss․․․․․,․․․89
6, Kftmcf ch`w`c{fwmz`{mnl `lk @l`b}sms
6,0 Fxyfwmafl{`b Sf{vy dnw Ch`w`c{fwmz`{mnl․,,․․․․․․․․․․․,,․․,,․=7
6,7 Yfwdnwa`lcf nd Smlebf C`l{mbftfw ․․․․․․․․․․․․,․․․․,,․,,․=3
6,7,0 Kftmcf nl Smbmcnl U`dfw ․․․․,․․․,,․․․․․,․․․,․․․,,=3
6,7,7 Kftmcf nl SNM U`dfw ,․․,,․,,․․․․,․․,․․․․,․,,․․․․090
6,3 Yfwdnwa`lcf nd C`l{mbftfw @ww`} ․․,․․․․․,․,․․․․․․․,,․․․09;
6,3,0 Kftmcf nl Sm `lk SNM U`dfw ․․․․․․․․․․,․․․․,․,․,,․,09;
6,3,7 Hmeh Ynufw Kftmcf ․․․․․․․․․․,․,․․,․․․․․․․,,,,,0966,3,7,0 Y`w`bbfb Cnllfc{mnl ․․․,․․․․,․,,,,,,,,,,,,,․,,․,,․․․095
6,3,7,7 Sfwm`b Cnllfc{mnl ․․․․․․․․․,․․․,,․,,․,,․․,,,006
6,; Vlmdnwa S{wfss Cnl{wmgv{mnl ,,․․․․․․,․․,,․․,․․․․․,․․,,․․004
6,6 Cnay`wmsnl Gf{uffl 30 Ankf `lk 33 Ankf․․․․․,,․․․․,,,․,․․․076
6,6,0 Ynbmle Fddfc{ nl 30 Ankf `lk 33 Ankf ․․․․․,․․․․․,․․․․078
6,6,7 Nv{yv{s nl 30 Ankf `lk 33 Ankf․․․․․․․,,․․․,,․․․․․03;
6,4 Wfbm`gmbm{}․,,․․․․․․,․․․․․․․․,․․․․․․․,,,․․․034
6,4,0 S{wvc{vwf D`mbvwf g} D`{mevf․․․․․․․,,․․․․․․․․․,․․035
6,5 Kfew`k`{mnl nd YZ[․․․․․,․․․․․․․․,․․․․․․,․,,․․․0;9
6,5,0 Kfew`k`{mnl Kvwmle D`gwmc`{mnl ․․․․․,,․․․․․․․,,,,․,․․0;9
6,5,7 Wfbm`gmbm{} Vlkfw C}cbmc Bn`k ,․․․․․․,,․․,․․․․,․․․,,,,0;76,5,3 Wfbm`gmbm{} vlkfw Hmeh [fayfw`{vwf ,,․․․․,,․,․,․․․,,,,․․․,0;3
4, Cnlcbvsmnls `lk Dv{vwf Unwo
4,0 Svaa`w} `lk Cnlcbvsmnls ․․․․․․․․,․․․․․․․,,․,,․,․․․0;8
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tmmm
4,7 Dv{vwf Unwo ․,,,․․․․․․,․․․․․․․․․․․,,․․․․,,․․․069
Gmgbmnew`yh}․․․․․․․․,․․․․․․․․․․․,․․․․․․․․․,,,․,067
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mx
Bms{ nd Dmevwfs
0,0 Flfwe} cnlsvay{mnl nd TBSM umwfbfss sflsnws․․․․․․․․․․․․․․․․․,7
0,7 [hf schfa`{mc `wchm{fc{vwf nd ` sfbd!ynufwfk umwfbfss sflsnw lf{unwo․,․․․․,․3
0,3 Cnay`wmsnl nd {hf `t`mb`gbf ynufw kflsm{} `lk {hf bmdf{maf `anle yn{fl{m`b flfwe}snvwcfs․․․․․․,,․․․․․․․․․․․․․․․․․,,․․․․․․․․,;
0,; Mbbvs{w`{mnl nd {hf fbfc{wnafch`lmc`b {w`lskvcfw s}s{fas: (`- fbfc{wns{`{mc" (g-fbfc{wna`elf{mc" `lk (c- ymfznfbfc{wmc․․․․․․․,,,․․․․․․․․․․․․․,5
7,0 [hf ymfznfbfc{wmc fddfc{ `lk {hfmw t`wm`gbfs․․․․․․․․,․․․․․․․․․,․00
7,7 Yfwntsom{f s{wvc{vwf․․․․․․․․․․․․․․․․․․․․․․․․․․,,․05
7,3 Yh`sf km`ew`a nd YZ[․․․․․․․․․․․․․․․․․․․․․․․․․,,․08
7,; [hf kmynbf anafl{ kvwmle ynbmle ywncfss ․․․․․․․․․․․․․․․․․,,․0=
7,6 [hf sh`yf ch`lef g} {hf ynb`wmz`{mnl `s {hf cw}s{`bbnew`yhmc s{wvc{vwfs․․․․․․․79
7,4 Fbfc{wnkf cnldmevw`{mnls nd k30 `lk k33 dnw c`l{mbftfw gf`a․․․․․․․․․․․․70
7,5 @ schfa`{mc km`ew`a nd ` s{`lk`wk flfwe} h`wtfs{mle s}s{fa․․,,․․․․․․․․73
7,8 [hf smel`bs kvwmle ` ymfznfbfc{wmc flfwe} h`wtfs{fw s}s{fa․․․․․․․․․․․․7;
7,= @ s{`lk`wk flfwe} h`wtfs{mle cmwcvm{ ․․․․․,․․․․․․․․․․․․․․․,,7;
3,0 [}ymc`b snb!efb chfamc`b snbv{mnl kfynsm{mnl (CSK- ywncfss, ․․․․․․․․․․․33
3,7 [hf schfa`{mc ch`lefs nd cnvybmle cnfddmcmfl{ `lk ymfznfbfc{wmc cnls{ l{,,․,,․․․,,,3;
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x
3,3 Ywncfss dbnu nd YZ[ chfamc`b kfynsm{mnl,,․․․․․․․․,,․․․․․․․․․․,36
3,; XWK k`{` nd `s kfynsm{fk Y{.[m (079.09la- g} syv{{fwmle,․․․,,․․․․․․․․․,34
3,6 YZ[.Y{ dmba `l`b}sms g} XWK ․․․,․․․․․․․․․․․․․․․․․․․,,․35
3,4 SFA ma`ef nd YZ[ dmba ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,․․․,,,,,,,,,,,,,,,,,,,,,,,,,,,,․․․,,,,,,,,․38
3,5 YF h}s{fwfsms bnnys nd YZ[ dmbas kfynsm{fk nl kmddfwfl{ {hmcolfss nd `khfsmnlb`}fws․․․․․․․․,,․․․․․․․․․․,,․․․․․․․․․․․․․․,3=
3,8 Svgs{w`{f fddfc{ nl ymfznfbfc{wmc ywnyfw{mfs, @khfsmnl b`}fws kfynsm{fk gf{uffl SmN7 `lk gn{{na Y{" `lk {hfmw fddfc{s kfscwmgfk g}: (`!g- [m" Cw" `lk [` h`tf kmddfwfl{ fddfc{s nlYZ[,,․․․․․․․․․․․․․․․․․․․,,․․․․․․․․․,,․,;9
3,= XWK `lk SFA `l`b}sms nd YZ[ dmba nl kmddfwfl{ `khfsmnl b`}fw: (`- XWK `l`b}sms" (g- [m"(c- Cw" `lk (k- [` `khfsmnl b`}fws ․․․․,,․․․․․․,,․․․․․․․․․․,;0
3,09 @lebf tmfu nd YZ[ {hml dmba nl Cw `lk [m `khfsmnl b`}fws: (`- Cw `lk (g- [m ․․․․,;7
3,00 Fbfc{wmc ywnyfw{mfs nd YZ[ dmbas vsmle kmddfwfl{ hf`{ {wf`{afl{ af{hnk: (`- `s {fayfw`{vwfnl hn{yb`{f (g- Yw " (c- kmfbfc{wmc cnls{`l{" `lk (k- YF bnny `s hf`{ snvwcfs․․․․․․․․․․․․․․․․․․․․․․․․․․․․․․․․․,,;;
3,07 XWK `l`b}sms nd YZ[ dmba y}wnbmsfk vsmle (`- dvwl`cf `lk (g- hn{yb`{f ,․․․․․,․;6
3,03 XWK `l`b}sms nd YZ[ dmbas um{h kmddfwfl{ {hmcolfss․․․․․․․․․․․․․,․;4
3,0; YF h}s{fwfsms bnny `lk kmfbfc{wmc cnls{`l{ `s dwfpvflc} dnw {hf YZ[ dmbas um{h kmddfwfl{
{hmcolfss․․․․․․․․․․․․․․․․․․․,,․․․․․․․․․․․,․;5
;,0 Mbbvs{w`{mnl nd cnaanl cnldmevw`{mnls nd yAFAS s{wvc{vwf․․․․․․․․․․,․;=
;,7 Schfa`{mc nd c`l{mbftfw flfwe} h`wtfs{fw um{h ywnnd a`ss `lk {hf ln{`{mnl nd kmaflsmnl․․,,․․․․․․․․․․․․․․․․․․․․․․․․․,․,69
;,3 Wfsnl`l{ dwfpvflc} ts, ufmeh{ nd ywnnd a`ss ml t`wmnvs bfle{hs nd c`l{mbftfws, [hf umk{hsnd {hf gf`a `lk a`ss `wf dmxfk `s 7 aa,,․․․․․․․․․․․․․․․․․․,64
;,; Wfsnl`l{ dwfpvflc} ts, {hmcolfss nd c`l{mbftfw ml t`wmnvs bfle{hs nd c`l{mbftfws uhnsf umk{h
ms dmxfk `{ 7 aa ․․․․․․․․․․․․․․․․․․․․․․․․․․․․․65;,6 S`df{} d c{nw ts, {hmcolfss nd Sm `{ kmddfwfl{ bfle{hs nd c`l{mbftfws, [hf umk{h nd {hf gf`a
u`s dmxfk `{ 7 aa `lk {hf ufmeh{ nd a`ss ms cnls{`l{ ․․․․․․․․․․․․68
;,4 @tfw`ef s{w`ml nl YZ[ ts, {hmcolfss nd Sm `{ kmddfwfl{ bfle{hs nd c`l{mbftfws uhfl {hf umk{hnd gf`a u`s dmxfk `s 7 aa `lk {hf ufmeh{ nd a`ss ms cnls{`l{ ․․․․․․․6=
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xm
;,5 Fpvmt`bfl{ bvayfk sywmle a`ss s}s{fa․․,,․․․․․․․․․․․․․․․․,,․49
;,8 Ywncfss dbnu nd ymfznfbfc{wmc AFAS flfwe} h`wtfs{fw vsmle SNM u`dfw, ,,․․․․․․43
;,= Fkef nd lfe`{mtf yhn{nwfsms{ y`{{fwmle, ․․․․․․․․․․․․․․․․․․․․45
;,09 K`a`efs nl fkef nd Y{.YZ[ dmba `d{fw wfantmle @b af{`b a`so, ,,․,․․․․․․․,48
;,00 [hf mbbvs{w`{mnl nd KWMF․․․․․․․․․․․․․․,,․․,․․․․․․․․,50
;,07 C}cbmc f{chmle `lk y`ssmt`{mnl nd @SF ywncfss,,․․․․,,․,,․․,,․․․․․․․,53
;,03 SFA ma`ef nd smkf u`bb `lebf ml smbmcnl f{chmle,,․․․,,․․,,․․,,․,,․․․․․,5;
;,0; Kmddfwfl{ f{chmle w`{f {h`l umlknu smzf, [hf smkf nd a`ss u`s ln{ wfbf`sfk" uhmbf {hf n{hfw `wf` s{`w{fk {n f{ch nv{․․․․․․․․․,,․․․,,․․․․․․․․․․․․․,54
;,06 Cw`cos ufwf cwf`{fk nl YZ[ kvf {n s{wnle mnl gnag`wkafl{․․․․․․,,․․․․,55;,04 SFA ma`ef nd f{chfk YZ[ dmba svwd`cf ml cwnss sfc{mnl tmfu,,․․․․․․․․․․5=
;,05 0s{ eflfw`{mnl yhn{nbm{hew`yhmc a`so dnw ywn{n{}yf d`gwmc`{mnl ,,․․․․․․,,․․,․87
;,08 7lk eflfw`{mnl yhn{nbm{hew`yhmc a`so dnw ywn{n{}yf d`gwmc`{mnl,,․․․․,․․․․,,,․8;
;,0= 3wk eflfw`{mnl yhn{nbm{hew`yhmc a`so dnw ywn{n{}yf d`gwmc`{mnl ․․․,,․․․․․,,․84
;,79 Ywn{n{}yf c`l{mbftfw `ww } ․․․․․․․․,,․․․․․․․,․․․․․,․․,․85
;,70 Yhn{nbm{hew`yhmc a`so dnw c`l{mbftfw `ww`} ywn{n{}yf ․․․․․․․․․․,․․․,,88;,77 ;{h eflfw`{mnl yhn{nbm{hew`yhmc a`so dnw ywn{n{}yf d`gwmc`{mnl ․․․․․․,․․,,,․8=
;,73 6{h eflfw`{mnl yhn{nbm{hew`yhmc a`so dnw ywn{n{}yf d`gwmc`{mnl․․․․․,,․․․․,,,=0
6,0 Schfa`{mc nd fxyfwmafl{`b sf{vy dnw flfwe} h`wtfs{fw․․,․․․․,․․,․․․․․=7
6,7 C`l{mbftfws h`tf kmddfwfl{ `tfw`ef {hmcolfssfs nl Sm vlkfw b`}fw { (`- 099 βa" (g- 79 βa"`lk (c- 09 βa (c`l{mbftfw u`s gfl{ kvf {n ml{fwl`b s{wfss-․․․․․․․․,․․․․․=;
6,3 Efnaf{wmc ew`yh nd c`l{mbftfw”s {hmcolfss: (`- S`aybfk c`l{mbftfws `lk {hfmw bnc`{mnl" (g-
[hmcolfss `{ {hf jnml{ nl ywnnd a`ss" (c- [hmcolfss `{ {hf amkkbf nd c`l{mbftfw" `lk (k-[hmcolfss `{ {hf jnml{ nl `lchnw․․․․․․․․․․․․․․․,․․․․․․․=4
6,; [hf wfsnl`l{ dwfpvflc} nd c`l{mbftfw d`gwmc`{fk nl Sm u`dfw․․․․․․․․,․․,․=5
6,6 Wfsnl`l{ dwfpvflc} ms tfw} sflsm{mtf {n {hf {hmcolfss nd {hf gf`a․․,,․․․,․․․,=8
6,4 (`- Nv{yv{ yf`o tnb{`ef (g- Ynufw dwna smlebf c`l{mbftfw nl Sm,,․․,,․․․․․․․==
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xmm
6,5 Cnlc`tf f{chmle ywndmbf `d{fw smbmcnl f{chmle․․․․․․․․․․․,,,․․․․․,090
6,8 Cnay`wmsnl gf{uffl wfsnl`l{ dwfpvflcmfs nd fs{ma`{fk `lk af`svwfk t`bvfs․․,․․097
6,= Nv{yv{ yf`o tnb{`ef `lk ynufw nd kftmcf d`gwmc`{fk nl SNM u`dfw,,․․․․․․․․,,093
6,09 Wfsnl`lcf dwfpvflcmfs nd c`l{mbftfw `ww`} d`gwmc`{fk nl (`- Sm u`dfw" `lk (g- SNM u`dfw"`lk nv{yv{ tnb{`ef dwna kftmcf ml suffy ankf dnw (c- Sm u`dfw" `lk (k- SNM u`dfw, [hf`ccfbfw`{mnl ms 0 e․․․․․․․․․․․․․․․․․․․․,․․․․․․,․096
6,00 Ywn{n{}yfs nd yAFAS c`l{mbftfw `ww`}s, ․․․․․․․․․,․․․․․․․․,․095
6,07 [hf wfsnl`l{ dwfpvflc} nd ` c`l{mbftfw `ww`} d`gwmc`{fk nl `l SNM u`dfw,․․․,․,․,095
6,03 (`- [hf nv{yv{ tnb{`ef ts, dwfpvflc}" `lk (g- {hf yh`sf shmd{ nd C0" C7" `lk C3 dwna {hf yh`sf nd {hfmw y`w`bbfb cnllfc{mnl (C0/C7/C3- ․․․․․․․․․․․,․․․,,․09=
6,0; [hf smel`bs dwna dnvw c`l{mbftfws `lk {hfmw wfsnl`l{ dwfpvflc} `{ 77=,0 Hz? (`- Yf`o!{n!yf`o tnb{`ef" `lk (g- nv{yv{ ynufw um{h wfsms{mtf bn`k․․․․․․․,․․․․,,,․009
6,06 [hf eflfw`{fk cvwwfl{ `{ {hf ny{ma`b wfsms{`lcf bn`k `s lvagfw nd c`l{mbftfws ml y`w`bbfbcnllfc{mnl․․․․․․․․․․․,,․․․․․․․․․․,,․․․․․․․․003
6,04 @C nv{yv{ nd dnvw c`l{mbftfws `lk {hfmw y`w`bbfb cnllfc{mnl,,,․․․․,․ ․․․․․,00;
6,05 Nv{yv{ yf`o tnb{`ef `lk ynufw `s wfsms{`lcf bn`k dwna sfwm`b cnllfc{fk `ww`}․․․,,006
6,08 [hf eflfw`{fk cvwwfl{ `{ {hf ny{ma`b wfsms{`lcf bn`k `s lvagfw nd c`l{mbftfws ml sfwm`bcnllfc{mnl,,․․․․․․․․․․․․․․․․,․․․,․․․․․․,,․․․,,004
6,0= [hf s{wvc{vwf dnw vlmdnwa s{wfss kms{wmgv{mnl․․․․․․,․․․․․․․․․․․008
6,79 [hf cnldmevw`{mnl nd fbfc{wnkf dnw efnaf{wmc s{wfss cnlcfl{w`{mnl: (`- wfc{`levb`w" (g-{w`yfznmk`b, ,,․․․․․․․․․․․․,,,,․․․․․,,․․․․․․․․․․,,,00=
6,70 [hf cnldmevw`{mnl nd fbfc{wnkf `lk afsh fbfafl{s nl (`- wfc{`levb`w `lk (g-{w`yfznmk`b․․․․,․․․․․․․․․․․․․․․․․․․․,․․․․,,,․079
6,77 [hf nv{yv{ ynufws nd kmddfwfl{ fbfc{wnkfs dnw (`- {hf wfc{`levb`w `lk (g- {hf {w`yfznmk`bc`l{mbftfw `cwnss {hf wfsms{mtf bn`k, [hfmw a`xmava ynufw u`s cnay`wfk um{h {hf DFA
a n k f b m l e s { w ` m l s d n w ( c - { h f w f c { ` l e v b ` w ` l k ( k - { h f { w ` y f z n m k ` bc`l{mbftfw,,․․․․․․․․․․․․․․․․,․․․․․․․․․․․․․․077
6,73 [hf s{w`ml ywndmbfs dwna `lchnw {n a`ss dnw {hf wfc{`levb`w `lk {hf {w`yfznmk`b!sh`yfkc`l{mbftfws, ․․․․․․․․․․․․․․․․․․․,․․,,․․․․․․․․073
6,7; [hf eflfw`{fk {n{`b ynufws dwna wfc{`levb`w `lk {w`yfznmk`b, ,,․,,,,,,,,,,․․․․․․07;
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xmmm
6,76 [hf nv{yv{ a`xmava ynufw ts, c`l{mbftfw sh`yf,,․․․․․․,,․․․․․․․․,076
6,74 Schfa`{mc mbbvs{w`{mnl nd 30 ankf (`- `lk 33 ankf (g- c`l{mbftfwfk ymfznfbfc{wmc flfwe}h`wtfs{fws,,․․․․․․․․,․․․․․․․․․․․․․․․․․․․,․․,074
6,75 Schfa`{mc nd MKF․․․․․․․․․․․,,,․․․․․․,,․․․․․․․․․,075
6,78 Ynbmle kmwfc{mnls nl MKF {h`{ shnu kf`k znlf `s ewf} cnbnw ․․․․,,,․․․․․․078
6,7= Ynb`wmz`{mnl h}s{fwfsms bnny dnw {hf YZ[ dmba nl YFH․․․,․․․,․,,,․,,․,,․․,039
6,39 Nv{yv{ ynufw `s {hf ynbmle cnlkm{mnls․․․․․․․․,,․․․․․․․․․․․030
6,30 (`- Y!F bnny `d{fw KC gm`sfk ynbmle `{ hmeh {fayfw`{vwf (g- {hf shmd{ nd cnfwcmtf dmfbk `skmwfc{mnl nd ynbmle․․․․․․․․․․․․․․․․․․․․․․․․․․․,037
6,37 [hf yfwdnwa`lcf nd YFH `s ynbmle cnlkm{mnls: (`- nv{yv{ tnb{`ef `lk (g- nv{yv{
ynufw․․․․․․․․․․․․․․․․․․․․․․,,․․․․․․․․․,,,0376,33 [hf ch`w`c{fwmz`{mnl nd {hf YZ[ dmba ml k33 ankf YFH: (`- h}s{fwfsms bnny $ (g- XWK
`l`b}sms․․․․․․․․․․․․․․․․․,․․․․․․․․․․․․․․,033
6,3; (`-nv{yv{ tnb{`ef `s kmddfwfl{ ynbmle cnlkm{mnls $ (g- nv{yv{ tnb{`ef `{ nyfl!cmwcvm{ `s ynbmle dmfbk․․․․․,,․․․․․․․․․․․․․․․․,․․․․․․․․,03;
6,36 [hf cnay`wmsnl gf{uffl 30 `lk 33 ankf cnltfwsmnl g`sfk nl c`l{mbftfw kmsyb`cfafl{: (`-nv{yv{ dwna 30 ankf" (g- nv{yv{ dwna 33 ankf․․․․․․․․,․․․․․․․,036
6,34 SFA ma`ef nd dw`c{vwfk svwd`cf nd c`l{mbftfw,,․,․․․․․․․․,․․․․,․․․03=
6,35 [hf ymfznfbfc{wmc ywnyfw{mfs nd YZ[ `d{fw yb`sa` f{chmle․․․․․․․․․․․,․0;0
6,38 Nv{yv{ tnb{`ef `lk wfsnl`l{ dwfpvflc} `s lvagfw nd c}cbmc bn`k․․․․․,․․․,․0;7
6,3= Nv{yv{ tnb{`efs ts, dwfpvflc} um{h kmddfwfl{ {fayfw`{vwf,,․․․․․․․․․․․,,,0;;
6,;9 Wfsnl`l{ dwfpvflc} shmd{ um{h {fayfw`{vwf․․․․․․․․․․․,,․․․․․․0;6
6,;0 [hf nv{yv{ tnb{`ef ts, {fayfw`{vwf um{h nyfl cmwcvm{,,․,․․․․․․․,,․․․․,,0;4
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xmt
Bms{ nd [`gbfs
0,0 T`wmnvs yn{fl{m`b ynufw snvwcfs dwna `agmfl{ `lk cnay`wmsnl nd afsn smzf flfwe}h`wtfs{mle kftmcfs, [hf ynufw kflsm{} h`s vlm{ ml βU.ca3 nw ca7․․,,․․․․․․․,6
0,7 [hf yn{fl{m`b tmgw`{mnl snvwcfs `lk {hfmw ch`w`c{fwms{mcs․․․․․․․․․․․․․․,4
0,3 Cnay`wmsnl nd {hwff {}yfs nd {w`lskvcfws․․․․․․․․․․․․․․․,,․․․․,5
7,0 Wfb`{mnlshmy gf{uffl {flsnw ln{`{mnl `lk a`{wmx ln{`{mnl․․․․․․․․․․,,․․,03
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SD4 `lk N7 e`ssfs ufwf vsfk ml {hf f{chmle ywncfss, [hf ebnu kmsch`wef ml yb`sa`
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{hms yhflnaflnl ms ln{ ufbb vlkfws{nnk }f{, M{ ms sveefs{fk {h`{ {hf yb`sa` kflsm{} ml {hf kffy
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[hf fxcfss f{chmle {maf {n wfbf`sf {hf c`l{mbftfw vlkfw {hf b`e fddfc{ wfsvb{fk ml {hmllfw
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Dmevwf ;,0; Kmddfwfl{ f{chmle w`{f `s umlknu smzf, [hf smkf nd a`ss u`s ln{ wfbf`sfk" uhmbf n{hfw `wf` s{`w{ {n f{ch nv{
;,7,3 Svwd`cf amcwna`chmlmle (@kt`lcfk Nxmkf F{chfw-
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mltfs{me`{fk vsmle SD4 e`s g} cnlsmkfwmle {hf f{chmle w`{f" f{chmle ywndmbf" `lk sfbfc{mtm{}
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_ Q, @d{fw f{chmle {hf YZ[ vsmle ` hmeh yb`{fl ynufw nd 399U" cw`cos ufwf dnvlk nl {hf YZ[
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b`}fw u`s sfwmnvsb} gfl{ vy kvf {n ml{fwl`b s{wfss `s ywfkmc{fk, [hf gflkmle cvwt`{vwf u`s
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80
svgs{w`{f, [hf kftmcfs ufwf `bsn f`smb} gwnofl knul kvwmle c`wwm`ef,
3, Gfsmkfs cnayfls`{mle dnw {hf ml{fwl`b s{wfss g} `yyb}mle {hml nxmkf dmbas `lk.nw
cnl{wnbbmle {hfmw s{wfss g} ` ewnu{h af{hnk" {hf wfa`mlmle Sm vlkfw b`}fw u`s chnsfl kvf
{n f`s} d`gwmc`{mnl `lk gfc`vsf m{ svyybmfss hmeh afch`lmc`b s{wfle{h, [hf gflkmle
cnldmevw`{mnls nd {hf c`l{mbftfw s{wvc{vwf `s Sm {hmcolfss umbb gf ml{wnkvcfk ml Ch`y{fw 6,
[hf {hmcolfss nd {hf Sm b`}fw cnvbk gf cnl{wnbbfk g} `kjvs{mle {hf f{chmle y`w`af{fws nd `
KWMF Sm f{chmle s}s{fa,
;, [hf cnltfl{mnl`b b`e fddfc{ u`s dnvlk kvwmle wfbf`smle c`l{mbftfw g} Sm f{chmle, [hf
kmddfwfl{ umlknu smzf mlkvcfk {hf lnl!vlmdnwa f{chmle w`{f, Smlcf {hf b`e fddfc{ wfpvmwfk`kkm{mnl`b f{chmle {maf {n cnaybf{f wfbf`smle nd {hf c`l{mbftfws" m{ u`s h`wk {n cnl{wnb {hf
`ccvw`{f Sm {hmcolfss nlb} g} f{chmle {maf,
@d{fw fx`amlmle {hf df`smgmbm{} nd {hf d`gwmc`{mnl ywncfss vsmle {hf dmws{ a`so" {hf sfcnlk
a`so u`s kfsmelfk cnlsmkfwmle {hf Sm afagw`lf,
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87
Dmevwf ;,05 0s{ eflfw`{mnl yhn{nbm{hew`yhmc a`so dnw ywn{n{}yf d`gwmc`{mnl
[hf sfcnlk a`so ms shnul ml Dmevwf ;,08" `lk m{ u`s kfsmelfk cnlsmkfwmle {hf dnbbnumle
mssvfs `lk wfsvb{fk ml:
0, [hf Sm vlkfw b`}fw uhnsf en`b {hmcolfss u`s 79 βa,
7, [hf e`y gf{uffl {hf c`l{mbftfw `lk {hf nv{smkf umlknu u`s vlmdmfk {n ywftfl{ {hf b`e
fddfc{ nd {hf KWMF s}s{fa" `lk {hf c`l{mbftfw cnvbk gf wfbf`sfk um{hnv{ b`e `wnvlk {hf
smkf `lk hf`k nd ywnnd a`ss, [hf {hmcolfss nd {hf Sm vlkfw b`}fw svyynw{s {hf YZ[ `c{mtf
b`}fw `lk c`l gf cnl{wnbbfk um{hnv{ {hf b`e,
3, [hf fbfc{wnkf smzf u`s flb`wefk {n fl`gbf h`lk!umwmle" `lk {hf gn{{na fbfc{wnkf u`s
`kkfk dnw cbf`w cnl{`c{,
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83
;, [hf {ny fbfc{wnkf smzf u`s wfkvcfk cnay`wmle YZ[ b`}fw {n ywftfl{ ynssmgbf fbfc{wmc
shnw{`ef gf{uffl {hf {ny `lk gn{{na Y{ fbfc{wnkf `d{fw d`gwmc`{mle, [hf fbfc{wmc shnw{`ef
cnvbk gf ywftfl{fk g} wfkvcmle {hf smzf nd {hf {ny fbfc{wnkf g} 06 ¶a,
6, [hf ywn{n{}yf nd {hf c`l{mbftfw `ww`} u`s {fs{fk, [hf lnl!vlmdnwam{} nd {hf kftmcf
kmaflsmnls ml u`dfw sc`bf ameh{ fxms{ dwna {hf cfl{fw {n fkef nw wmeh{ {n bfd{ kvf {n {hf
syfcm`b kflsm{} nd yb`sa` `lk {vwgvbflcf nd wf`c{mtf e`sfs, [hf kmscwfy`lc} nd wfsnl`l{
dwfpvflc} nd f`ch c`l{mbftfw kvf {n lnl!vlmdnwa f{chmle w`{f umbb gf ml{wnkvcfk ml
Ch`y{fw 6,
4, [hf lnl!vlmdnwa f{chmle ywndmbfs nl {hf smkf u`bb nd {hf ywnnd a`ss `lk {hf svwd`cf nd Smvlkfw b`}fw ufwf dnvlk g} SFA `l`b}sms, Svch ` lnl!vlmdnwa f{chmle ywndmbfs mlkvcfk
{hf shmd{ nd wfsnl`l{ dwfpvflc} dwna c`bcvb`{fk t`bvfs, [hf ywncfss u`s ny{mamzfk {n
maywntf f{chmle ywndmbfs" gv{ {hf WMF ywncfss h`s ` bmam{`{mnl {n a`ml{`ml {hf svddmcmfl{
f{chmle w`{f, [hf f{chmle {ny b`}fw u`s wfpvmwfk dnw {hf vlmdnwa ywndmbf {n ng{`ml ` en`b
wfsnl`l{ dwfpvflc},
5, [hf c`l{mbftfws h`tf wfsnl`l{ dwfpvflcmfs vlkfw 099 Hz, [hf kmaflsmnls nd {hf
c`l{mbftfw ufwf t`wmfk {n fx`amlf {hf umk{h" bfle{h" `lk ufmeh{ nd {hf ywnnd a`ss, [hf
kf{`mbfk kmaflsmnls `wf kfln{fk ml [`gbf ;,= `lk [`gbf ;,09, [hf ln{`{mnls ml {hf [`gbfs
`wf g`sfk nl Dmevwf ;,7,
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8;
Dmevwf ;,08 7lk eflfw`{mnl yhn{nbm{hew`yhmc a`so dnw ywn{n{}yf d`gwmc`{mnl
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86
[`gbf ;,= Kmaflsmnl `lk wfsnl`l{ dwfpvflc} nd smlebf c`l{mbftfw ml 7lk a`so
Uy By B Ua Ha Ba Dw #
699
7099 ;099
7999 699 7999
== 0
7499 ;499 83 7
3099 6099 50 3
3;99 ;=990699 699 0699
090 ;
;099 6499 87 6
7699 ;6990699 699 7999
== 4
3099 6099 87 5
0999
3799 67997999 699 7999
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3899 6899 83 =7999 ;699
7699 699 7699=5 09
7699 6999 83 00
0499 ;4997999 699 3999
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7099 6099 87 03
7999 69990699 699 3999
=5 0;
7499 6499 87 06
7499 6499 0999 699 3999 099 043399 4399 83 05
[`gbf ;,09 Kmaflsmnl `lk wfsnl`l{ dwfpvflc} nd c`l{mbftfw `ww`} ml 7lk a`so
Uy By B Ua Ha Ba Dw #
699 7099 ;099 7999 699 7999 == 0
0999 7699 6999 7699 699 7699 83 00
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84
[hf {hmwk a`so ms shnul ml Dmevwf ;,0=" `lk m{ u`s kfsmelfk `lk wfsvb{fk `s dnbbnus:
0, [hf a`so u`s kfsmelfk {n {fs{ t`wmnvs sh`yfs nd c`l{mbftfw s{wvc{vwfs svch `s cmwcvb`wb}
dmbbf{fk ln{ch `lk{w`yfznmk,
7, @ SNM u`dfw um{h 79 ¶a Sm kftmcf b`}fw u`s vsfk dnw ` vlmdnwa Sm vlkfw b`}fw" `lk {n
tfwmd} {hf ankfbmle nd {hf wfsnl`l{ dwfpvflc},
3, [hf kfsmel w`kmc`bb} bnc`{fk {hf kftmcfs dwna {hf cfl{fw nd {hf u`dfw {n mltfs{me`{f {hf
vlmdnwa f{chmle w`{f ml {hf u`dfw sc`bf, [hf hmehb} kflsf bnc`{mnl nd {hf c`l{mfbtfw u`s
fl`gbfk uhfl vsmle {hf kmcmle bmlf nd {hf smbmcnl f{chmle a`so" `lk ` hmeh ywnkvc{ }mfbk
ameh{ gf ynssmgbf, [hf d`mbvwf kvwmle {hf kmcmle kftmcf `bsn ameh{ `bsn gf ywftfl{fk
Dmevwf ;,0= 3wk eflfw`{mnl yhn{nbm{hew`yhmc a`so dnw ywn{n{}yf d`gwmc`{mnl
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85
[hf c`l{mbftfw `ww`} u`s {fs{fk ml y`w`bbfb cnllfc{mnl dnw hmeh cvwwfl{ }mfbk, [hf c`l{mbftfw `ww`}
u`s bnc`{fk ml w`kmc`b dnw vlmdnwa f{chmle, [hfsf ywn{n{}yfs ufwf wfb`{mtfb} b`wef sc`bf {n
ngsfwtf {hf df`smgmbm{} nd {hf c`l{mbftfw `ww`}, [hf d`gwmc`{fk ywn{n{}yfs `wf ymc{vwfk ml Dmevwf
;,79" `lk {hf a`so ms shnul ml Dmevwf ;,70, [hf SmN7 b`}fw c`l gf sffl nl {hf g`cosmkf nd {hf
c`l{mbftfw" `lk {hf wfdbfc{fk cnbnw shnus {hf lnl!vlmdnwa {hmcolfss nd {hf SmN7 `d{fw @SF
f{chmle, [hf kmddfwfl{ gf{uffl {hf a`xmava `lk amlmava {hmcolfss ms tfw} sa`bb" vlkfw 399
la" uhfl mlsyfc{mle {hf cnbnw ch`w{ nd SmN7,
Dmevwf ;,79 ywn{n{}yf c`l{mbftfw `ww`}
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88
Dmevwf ;,70 yhn{nbm{hew`yhmc a`so dnw c`l{mbftfw `ww`} ywn{n{}yf
[hf dnvw{h a`so (Dmevwf ;,70- u`s kfsmelfk {n s{vk} {hf ankfbmle nd wfsnl`l{ dwfpvflc}"
ml{fwkmem{`{fk fbfc{wnkf" `lk sfwm`bb} cnllfc{fk `ww`}" afch`lmc`b s{wfle{h" `lk efnaf{w} s{wfss
nl {hf c`l{mbftfw, [hf kf{`mbfk kmaflsmnls `s ` dvlc{mnl nd kftmcf `wf kfln{fk ml [`gbf ;,00,
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8=
Dmevwf ;,77 ;{h eflfw`{mnl yhn{nbm{hew`yhmc a`so dnw ywn{n{}yf d`gwmc`{mnl
[`gbf ;,00 Kmaflsmnl nd kftmcfs nl ;{h a`so
Cnaafl{sC`b dw (Hz-
S`df{} d`c{nw
By (a- Uy (a- Ua (a- Ba(a-
@ww`} (S $ Y- 076,68 5,=9 ;,99F!93 7,99F!93 7,99F!93 3,99F!93
k33 076,68 5,=9 ;,99F!93 7,99F!93 7,99F!93 3,99F!93
Efnaf{w}s{wfss {fs{
076,68 5,=9 ;,99F!93 7,99F!93 7,99F!93 3,99F!93
Umk{h chfco
076,68 5,=9 ;,99F!93 7,99F!93 7,99F!93 3,99F!93
076,68 5,=9 ;,99F!93 3,99F!93 3,99F!93 3,99F!93
076,68 5,=9 ;,99F!93 ;,99F!93 ;,99F!93 3,99F!93
076,68 5,=9 ;,99F!93 6,99F!93 6,99F!93 3,99F!93
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=9
Dwfpvflc}chfco
04=,=8 =,57 3,99F!93 7,99F!93 7,99F!93 3,99F!93
0;6,90 8,57 3,69F!93 7,99F!93 7,99F!93 3,99F!93
076,68 5,=9 ;,99F!93 7,99F!93 7,99F!93 3,99F!93
009,07 5,77 ;,69F!93 7,99F!93 7,99F!93 3,99F!93
=5,65 4,4; 6,99F!93 7,99F!93 7,99F!93 3,99F!93
85,73 4,0; 6,69F!93 7,99F!93 7,99F!93 3,99F!93
Bfle{h.Umk{h
W`{mn
076,68 5,=9 ;,99F!93 7,99F!93 7,99F!93 3,99F!93
076,;6 4,40 3,67F!93 0,69F!93 7,99F!93 3,99F!93
076,84 6,35 3,09F!93 0,99F!93 7,99F!93 3,99F!93
076,6= 3,;7 7,05F!93 6,99F!9; 7,99F!93 3,99F!93
[hf dmd{h a`so ml Dmevwf ;,73 u`s kfsmelfk `s dnbbnus:
0, [n mltfs{e`{f {hf smzf fddfc{" ynbmle fddfc{" `emle `lk d`{mevf fddfc{" `lk efnaf{w} s{wfss
{fs{ `s c`l{mbftfw sh`yfs,
7, [hf {w`yfznmk ameh{ `b{fw {hf s{wfss kms{wmgv{mnl `lk mlcwf`sf {hf nv{yv{ ynufw, [hf
{w`yfznmk`b c`l{mbftfw ml {hf {hmwk a`so shnufk ln maywntfafl{ nd nv{yv{ ynufw, [hf
s{wfss kms{wmgv{mnl umbb gf fx`amlfk g} {hwff kmddfwfl{ fbfc{wnkfs bnc`{fk nl {hf lf`w
`lchnw" amkkbf nd c`l{mbftfw" `lk lf`w ywnnd a`ss, [hf nv{yv{ smel`bs dwna {hwff
fbfc{wnkfs umbb gf vsfk {n `l`b}zf s{wfss kms{wmgv{mnl, Smel`bs dwna {hf wfc{`levb`w
c`l{mbftfw um{h {hf s`af fbfc{wnkf cnldmevw`{mnl umbb gf cnay`wfk `lk `lb}zfk,
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=0
Dmevwf ;,73 6{h
eflfw`{mnl yhn{nbm{hew`yhmc a`so dnw ywn{n{}yf d`gwmc`{mnl
5/13/2018 THESIS Development of MEMS Piezoelectric Energy Harvesters - slidepdf.com
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=7
CH@Y[FW 6KFTMCF CH@W@C[FWMZ@[MNL @LK @L@B]SMS
6,0 Fxyfwmafl{`b sf{vy dnw ch`w`c{fwmz`{mnl
[hf nv{yv{ smel`bs dwna {hf flfwe} h`wtfs{fw anvl{fk nl `l fbfc{wna`elf{mc sh`ofw
(B`gunwos Ml," F[!037!793- ufwf af`svwfk g} `l nscmbbnscnyf ([fo{wnlmx" [KS390;G-, [hf
smlvsnmk`b tmgw`{mnl nd {hf sh`ofw u`s cnl{wnbbfk g} `l `aybmdmfk snvwcf dwna `l fx{fwl`b
dvlc{mnl eflfw`{nw (@embfl{ 33779@-, [hf eflfw`{fk tmgw`{mnl u`s smavb{`lfnvsb} anlm{nwfk g}
`l `ccfbfwnaf{fw (YCG ymfznfbfc{wnlmcs Mlc," 367C46- uhnsf smel`b u`s anlm{nwfk g} {hf
nscmbbnscnyf, [hf nv{yv{ tnb{`ef dwna {hf kftmcf u`s af`svwfk `cwnss {hf wfsms{nw" uhmch cnvbk
gf wfevb`{fk {n dmlk {hf ny{ma`b wfsms{`lcf bn`k, [hf yf`o!{n!yf`o nv{yv{ ynufw u`s vsfk {n
c`bcvb`{f {hf ynufw" `lk {hf wfcnwkfk nv{yv{ u`tf u`s vsfk dnw {hf @C!KC wfc{mdmfw, [hf
schfa`{mc fxyfwmafl{`b sf{vy ms shnul ml Dmevwf 6,0,
Dmevwf 6,0 Schfa`{mc nd fxyfwmafl{`b sf{vy dnw flfwe} h`wtfs{fw
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=3
6,7 Yfwdnwa`lcf nd smlebf c`l{mbftfw
[hf ch`w`c{fwmz`{mnls nd {hf flfwe} h`wtfs{fw `wf c`{fenwmzfk {n mltfs{me`{f YZ[ dmba
ywnyfw{mfs" wfsnl`l{ dwfpvflc}" `lk nv{yv{ smel`b kvwmle wfsnl`lcf cnlkm{mnls, [hf wfsvb{s nd dmba
ywnyfw{mfs h`tf `bwf`k} gffl kmscvssfk ml Ch`y{fw ;, [hf YZ[ dmbas h`k smamb`w ynb`wmz`{mnl
t`bvfs (Yw `lk Ya`x- gfdnwf `lk `d{fw gffl d`gwmc`{mnl ywncfss, @ amlnw kms{nw{mnl nd gffl
h}s{fwfsms bnny nccvwwfk" `lk m{ sffafk {n gf c`vsfk dwna {hf s{wfss nd {hf wfbf`sfk c`l{mbftfws
`d{fw cnaybf{mle {hf d`gwmc`{mnl `lk.nw kfdfc{s kvf {n {hf kmddvsmnl nd svgs{w`{f a`{fwm`bs, [hf
wfsnl`l{ dwfpvflc} u`s af`svwfk g} `l mayfk`lcf `l`b}zfw `lk {hf a`xmava nv{yv{ tnb{`efu`s {w`cofk tm` `l nscmbbnscnyf, [hf ynufw u`s c`bcvb`{fk dwna {hf nv{yv{ tnb{`ef g} Nha”s
b`u, [n wfc{md} {hf @C eflfw`{fk dwna {hf flfwe} h`wtfs{fw {n KC dnw s{nw`ef" {hf T was t`bvf u`s
vsfk dnw c`bcvb`{mnls, Ml {hms ch`y{fw" {hf wfsnl`l{ dwfpvflc} nd {hf kftmcfs `lk nv{yv{ smel`b umbb
gf `l`b}zfk `lk kmscvssfk,
6,7,0 Kftmcf nl smbmcnl u`dfw
[hf ml{fwl`b s{wfss a`ofs {hf c`l{mbftfw gflk vyu`wk kvf {n {hf lf{ {flsmbf s{wfss gf{uffl
{hf Y{.YZ[.Y{.SmN7 b`}fws, @b{hnveh {hf lf{ s{wfss c`l gf cnl{wnbbfk g} {hf ywnyfw a`{fwm`b
sfbfc{mnl nd ` gvddfw b`}fw (SmN7 nw SmLx- um{h ` kmddfwfl{ kfynsm{mnl af{hnk" ` {hmcofw Sm b`}fw
u`s chnsfl {n ywftfl{ gflkmle `s ufbb `s {n flh`lcf {hf afch`lmc`b s{wfle{h nd {hf kftmcf,Um{hnv{ ` Sm svyynw{ b`}fw" {hf Y{.YZ[.Y{.SmN7 u`s sfwmnvsb} gflk{ `lk d`mbfk" `s shnul ml
Dmevwf 6,7 (c-, [hf ml{fwl`b s{wfss u`s fxyfwmafl{`bb} fx`amlfk `s {hf {hmcolfss nd {hf Sm vlkfw
b`}fw, @{ 099 ¶a nd Sm {hmcolfss" {hf c`l{mbftfw shnufk ln gflkmle kvf {n s{mdd svyynw{ ml Dmevwf
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=;
6,7 (`-, [hf gflkmle nd {hf c`l{mbftfw u`s ln{ dnvlk vy {n 79 ¶a nd Sm {hmcolfss" gv{ m{ s{`w{fk {n
gflk vyu`wk kvf {n {flsmbf wfsmkv`b s{wfss dwna 09 ¶a nd Sm {hmcolfss,
Dmevwf 6,7 C`l{mbftfws h`tf kmddfwfl{ `tfw`ef {hmcolfssfs nl Sm vlkfw b`}fw `s (`- 099 βa" (g- 79
βa" `lk (c- 09 βa (c`l{mbftfw u`s gflk kvf {n ml{fwl`b s{wfss-,
[hf wfsnl`l{ dwfpvflc} ms sflsm{mtf {n kmaflsmnls" fsyfcm`bb} {hf {hmcolfss, [hf dmws{
`{{fay{ u`s cnl{wnbbmle {hf Sm {hmcolfss g} ` KWMF f{chmle ywncfss, [hf cvwwfl{ wfcmyf f{chfs {hf
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=6
smbmcnl um{h `gnv{ 0 ¶a yfw 0 c}cbf (79sfc- nd f{chmle w`{f, @ 79 ¶a Sm vlkfw b`}fw u`s fxyfc{fk
g} {hf KWMF f{chmle ywncfss, [hf ywncfss {maf!g`sfk {hmcolfss cnl{wnb u`s wf`snl`gbb} c`y`gbf
uhfl {hf smbmcnl svyynw{ b`}fw wfa`mlfk `{ `l `tfw`ef nd 75 ¶a nd smbmcnl {hmcolfss kvwmle 669
¶a f{chmle, [hf ywngbfa u`s tfw} ynnw vlmdnwam{} nd {hf c`l{mbftfw" `s shnul ml Dmevwf 6,7,
[hf Sm b`}fw shnufk ` cnltfx ywndmbf um{h ` wfb`{mtf {hmllfw wfemnl nl {hf lf`w `lchnw `lk ywnnd
a`ss, M{ ms ln{ cbf`wb} vlkfws{nnk uh} {hf cnltfx ywndmbf nccvws `{ {hf umkf umlknu smzf nd {hf
y`{{fwl" uhmbf {hf l`wwnu umlknu shnus ` cnlc`tf ywndmbf, M{ sffas {h`{ {hf gm`s ml {hf {wflch ms
bnc`bb} kmddfwfl{ _88Q, M{ u`s `bsn sveefs{fk {h`{ `glnwa`b e`s cnlkm{mnls ml {hf kffy {wflch um{h
` umkf umlknu a`kf lnl!vlmdnwa f{chmle cnldmevw`{mnl efnaf{wmc`bb} _8=Q,
(`-(g-
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_5Q A, Omshm" H, Lfan{n" [, H`a`n" A, ]`a`an{n" S, Svknv" A, A`lk`m" `lk S,]`a`an{n"‒Amcwn {hfwanfbfc{wmc ankvbfs `lk {hfmw `yybmc`{mnl {n uwms{u`{chfs `s `l flfwe} snvwcf‑ Fmeh{ffl{h Ml{fwl`{mnl`b Cnldfwflcf 0==="390!395,
_8Q A, S{w`ssfw" W, @melfw" A Dw`lnsch" `lk E, U`chv{o` " ‒Amlm`{vwmzfk {hfwanfbfc{wmc eflfw`{nws g`sfk nl ynb}!sm `lk ynb}!smef svwd`cf amcwna`chmlmle‑ Sflsnws `lk @c{v`{nws @ 7997"=5!=8636!6;7,
_=Q A, S{nwkfvw `lk M, S{`wo" ‒ Bnu ynufw {hfwanfbfc{wmc eflfw`{nw!sfbd!svddmcmfl{ flfwe} svyyb} dnw amcwn s}s{fas‑ Ywnc, 04{h Ml{, Cnld, nl [hfwanfbfc{wmcs" Kwfskfl" Efwa`l} 0==5"656!
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_00Q J, H, gn{{lfw" J, Lvwlvs" @, E`twmont" E, Ovhlfw" A, J`ebf" C, Ovlzfb" K, Fgfwh`wk" e,Ybfschfw" @, Schvgfw{" `lk O,!H, schbfwf{h " ‒ Lfu {hfwanfbfc{wmc cnaynlfl{s vsmle amcwns}s{fas {fchlnbnemfs‑ Jnvwl`b nd Amcwnfbfc{wnafch`lmc`b S}s{fas 799;"03 ;0;!;79,
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cfbbs" {w`lsms{nws `lk fbfc{wns{`{mc `c{v`{nws‑ MFFF [hf 07{h Ml{fwl`{mnl`b Cnldfwflcf nlSnbmk S{`{f Sflsnws" @c{v`{nws `lk Amcwns}s{fas" Gns{nl" Jvlf 8!07" 7993 7993"0956!095=,
_03Q J, D, W`lk`bb" Nl `agmfl{ flfwe} snvwcfs dnw ynufwmle mlknnw fbfc{wnlmc kftmcfs, 7993"FYDB, y, 60,
_0;Q S Wnvlk} `lk Y OUwmeh{" ‒ @ ymfznfbfc{wmc tmgw`{mnl g`sfk eflfw`{nw dnw umwfbfssfbfc{wnlmcs‑ Sa`w{ A`{fw, S{wvc{, 799;"03 0030–00;7,
_06Q Y, K, Am{chfsnl" [, C, Ewffl" F, A, ]f`{a`l" `lk @, S, Hnbafs " ‒ @wchm{fc{vwfs dnw tmgw`{mnl!kwmtfl amcwnynufw eflfw`{nws‑ Jnvwl`b nd Amcwnfbfc{wnafch`lmc`b S}s{fas 799;"03 ;7=!;;9,
_04Q S Y Gffg}" W L [nw`h" A J [vknw" Y Eb}llf!Jnlfs"[ N”Knllfbb" C W S`h` `lk S Wn}" ‒ @amcwn fbfc{wna`elf{mc eflfw`{nw dnw tmgw`{mnl flfwe} h`wtfs{mle‑ J, Amcwnafch, Amcwnfle, 7995"050765–0746,
_05Q S, Aflmlefw" J,N, Avw!Amw`lk`" W, @amw{h`w`j`h" @, Y, Ch`lkw`o`s`l" `lk J, H, B`le"‒Tmgw`{mnl!{n!fbfc{wmc flfwe} cnltfwsmnl‑ MFFF {w`ls, TBSM S}s{, 7990"=4;!54,
_08Q S, Shf`wunnk `lk W, G, ]`{fs" ‒ Kftfbnyafl{ nd `l fbfc{wna`elf{mc amcwn!eflfw`{nw‑ Fbfc{wnl, Bf{{, 0==5"330883!088;,
_0=Q Gfwl`wk J`ddf" Umbbm`a W, Cnno" `lk H`ls J`ddf" Ymfznfbfc{wmc cfw`amcs, Tnb, 3, (0=50-"Bnlknl `lk Lfu ]nwo: @c`kfamc ywfss,
_79Q L, sf{{fw" Ymfznfbfc{wmc a`{fwm`bs ml kftmcfs, (7997-" B`vs`llf FYDB Sumss Dfkfw`b Mls{m{v{fnd [fchlnbne},
_70Q [naam Wmfoomlfl" ‒ D`gwmc`{mnl `lk ch`w`c{fwmz`{mnl nd dfwwn! `lk ymfznfbfc{wmc avb{mb`}fw kftmcfs dnw hmeh dwfpvflc} `yybmc`{mnls"‑ ml Mldnwa`{mnl `lk L`{vw`b Scmflcfs, 799=" TT[:Tvnwmamfhfl{mf,
_77Q Bvmz Dw`lcmscn A`banlef? Jnsí @l{nlmn A`banlef? U`b{fw O`{svam S`o`an{n" ‒S{vk} nd y}wnfbfc{wmc `c{mtm{} nd yz{.ytkd!hdy cnaynsm{f‑ A`{fwm`bs Wfsf`wch 7993"4
_73Q O, @, OBMCOFW" J, T, GMEEFWS" W, F, LFULH@A" ‒Cnaynsm{fs nd yz{ `lk fynx} dnw h}kwns{`{mc {w`lskvcfw `yybmc`{mnls‑ Jnvwl`b nd {hf @afwmc`l Cfw`amc Sncmf{} 7994"4;6!=,
_7;Q Knlel` Shfl" Snle!]vb Chnf" `lk Knle!Jnn Oma" ‒ @l`b}sms nd ymfznfbfc{wmc a`{fwm`bs dnw flfwe} h`wtfs{mle kftmcfs vlkfw hmeh!e tmgw`{mnls‑ J, J, @, Y, 7995";4(09@-"4566!4549,
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_76Q H}fnvleunn Oma" Mayfk`lcf `k`y{`{mnl af{hnks nd {hf ymfznfbfc{wmc flfwe} h`wtfs{mle " mlA`{fwm`bs flemlffwmle , 7994" Yflls}bt`lm` S{`{f Vlmtfwsm{},
_74Q Y`vb Avw`b{" ‒ YZ[ {hml dmbas dnw amcwnsflsnws `lk `c{v`{nws: Uhfwf kn uf s{`lk>‑ MFFF {w`ls, nl vb{w`, dfwwn, dwfp, cnl{, 7999";5(;-"=93!=06,
_75Q Sh`kw`ch Jnsfyh Wnvlk}" Flfwe} sc`tflemle dnw umwfbfss sflsnw lnkfs um{h ` dncvs nltmgw`{mnl {n fbfc{wmcm{} cnltfwsmnl" ml Afch`lmc`b Flemlffwmle , 7993" Vlmtfwsm{} nd C`bmdnwlm`" Gfwofbf},
_78Q O`zva`s` H`sfe`u` `lk [`{sv}` shmank`" ‒ Ymfznfbfc{wmc {w`lskvcfw `lk fbfc{wnyhnwf{mcmlo kmsyb`} `yy`w`{vs vsmle ymfznfbfc{wmc {w`lskvcfw "‑ V,S, Y`{fl{" Fkm{nw, 7996" SfmonFysnl cnwynw`{mnl: VS@,
_7=Q Xmd`l Uv" K`tmk T`lkfwgmb{" `lk K, W, H`a`ll" ‒S}s{fa`{mc {wf`{afl{ nd kmsyb`cfafl{s" s{w`mls" `lk fbfc{wmc dmfbks ml kflsm{}!dvlc{mnl`b yfw{vwg`{mnl {hfnw}‑ Yh}, wft, G 7996"57936096,
_39Q W, Jnl` `lk E, Shmw`lf" Dfwwnfbfc{wmc cw}s{`bs, (0==3-" Lfu ]nwo: Kntfw,
_30Q K, K`aj`lntmc" ‒ Dfwwnfbfc{wmc" kmfbfc{wmc `lk ymfznfbfc{wmc ywnyfw{mfs nd dfwwnfbfc{wmc {hml dmbas `lk cfw`amcs‑ Wfynw{s nl Ywnewfss ml Yh}smcs 0==8"40 0745,
_37Q B,B, Hflch `lk J, O, Ufs{" Ywmlcmybfs nd fbfc{wnlmc cfw`amcs, (0==9-" Ufs{ Svssfx"Fleb`lk: Jnhl Umbf} $ Snls,
_33Q @,B,Ohnboml" K,T,[`}bnw" `lk L, Sflf" ‒ Ynbmle fddfc{ nl {hf ymfznfbfc{wmc ywnyfw{mfs nd bf`k zmwcnl`{f {m{`l`{f {hml dmbas‑ MFFF 0==8"
_3;Q G, J`ddf" U, W, Cnno Jw," `lk H, j`ddf" Ymfznfbfc{wmc cfw`amcs, (0=50-: @c`kfamc Ywfss" Mlc,
_36Q C,W, Gnufl" ‒Ny{mams`{mnl nd ml{fwkmem{`{fk fbfc{wnkf dnw ymfznfbfc{wmc `c{v`{nws `lk `c{mtf dmgwf cnaynsm{fs‑ J, Fbfc{wncfw`a 7994"04 743!74=,
_34Q W}`l wngfw{ Olmeh{" [hf `l`b}sms `lk {fs{mle nd afas `lk a`cwn sc`bf ymfznfbfc{wmckftmcfs" ml Afch, Fle, 7995" Vlmtfwsm{} nd Ym{{sgvweh, y, =4!000,
_35Q A`wcml A`wzflcom" ]`ssfw @aa`w" So`lk`w G`swnvw" ‒ Ml{few`{fk ynufw h`wtfs{mle s}s{famlcbvkmle ` afas eflfw`{nw `lk ` ynufw a`l`efafl{ cmwcvm{‑ Sflsnws `lk @c{v`{nws @ 7998"0;6!0;4 343!359,
_38Q K`lmfb Ev}na`w" @kwmfl G`kfb" Fbmf Bfdfvtwf" `lk Cb`vkf Wmch`wk" ‒[nu`wk flfwe}h`wtfs{mle vsmle `c{mtf a`{fwm`bs `lk cnltfwsmnl maywntfafl{ g} lnlbmlf`w ywncfssmle‑ MFFF [w`ls`c{mnl nl Vb{w`snlmcs" Dfwwnfbfc{wmcs" `lk Dwfpvflc} Cnl{wnb 7996"67 68;!6=6,
_3=Q N{{a`l" E, O," Hnda`ll" H, D," Gh`{{" @, C, @lk Bfsmfsfv{wf" E, @" ‒ @k`y{mtf ymfznfbfc{wmcflfwe} h`wtfs{mle cmwcvm{ dnw umwfbfss wfan{f ynufw svyyb}‑ MFFF [w`ls`c{mnls nl Ynufw Fbfc{wnlmcs 7997"05 44=!454,
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_;9Q Shv" ], C, `lk Bmfl" M, C," ‒ @l`b}sms nd ynufw nv{yv{ dnw ymfznfbfc{wmc flfwe} h`wtfs{mle s}s{fas‑ Sa`w{ A`{fwm`bs `lk S{wvc{vwfs 7994"060;==!0607,
_;0Q K`lmfb Ev}na`w" @kwmfl G`kfb" Fbmf Bfdfvtwf" `lk Cb`vkf Wmch`wk" ‒[nu`wk flfwe}
h`wtfs{mle vsmle `c{mtf a`{fwm`bs `lk cnltfwsmnl maywntfafl{ g} lnlbmlf`w ywncfssmle‑
MFFF {w`ls`c{mnls nl vb{w`snlmcs" dfwwnfbfc{wmcs" `lk dwfpvflc} cnl{wnb 7996"67(;-"68;!6=6,_;7 M, Kfamw" @,B, Nbsnl" J,B, Somllfw" C,K, Wmch`wks" W,D, Wmch`wks" K,D, G`hw" ‒ Hmeh s{w`ml
gfh`tmnw nd cnaynsm{f {hml dmba ymfznfbfc{wmc afagw`lfs‑ Amcwnfbfc{wnlmc Flemlffwmle 799;"56 07–73,
_;3Q D, Bv" H, Y, Bff" `lk S, Y, Bma" ‒Ankfbmle `lk `l`b}sms nd amcwn ymfznfbfc{wmc ynufw
eflfw`{nws dnw amcwn!fbfc{wnafch`lmc`b!s}s{fas `yybmc`{mnls‑ Sa`w{ A`{fw, S{wvc{, 799;"03 65–43,
_;; A, A`wzflcom" G, Ch`wbn{, S, G`swnvw" A, Cnbml" `lk B, t`bgml" ‒ Kfsmel `lk d`gwmc`{mnl nd ymfznfbfc{wmc amcwn ynufw eflfw`{nws dnw `v{nlnanvs amcwns}s{fas‑ K[MY s}aynsmva nl
kfsmel {fs{mle ml{few`{mnl `lk y`co`emle nd AFAS.ANFAS 7996"77=!397,
_;6Q A, A`wzflcom" ], @aa`w `lk S, G`swnvw" ‒ Ml{few`{fk ynufw h`wtfs{mle s}s{fa mlcbvkmle `
afas eflfw`{nw `lk ` ynufw a`l`efafl{ cmwcvm{‑ Snbmk!S{`{f Sflsnws" @c{v`{nws `lk Amcwns}s{fas Cnldfwflcf" 7995, [W@LSKVCFWS 7995, Ml{fwl`{mnl`b 7995"885!8=9,
_;4Q ],G, Jfnl" W, Snnk" J,!h, Jfnle" S,!E, Oma" ‒Afas ynufw eflfw`{nw um{h {w`lstfwsf ankf{hml dmba yz{‑ Sflsnws `lk @c{v`{nws @ 7996"07 704!77,
_;5Q H, G D`le" J, Z, Bmv" Z, ], Xv" B, Knle" B, U`le" K, Chfl" G, C, C`m" `lk ], Bmv"‒ D`gwmc`{mnl `lk yfwdnwa`lcf nd afas!g`sfk ymfznfbfc{wmc ynufw eflfw`{nw dnw tmgw`{mnl
flfwe} h`wtfs{mle‑ J, Amcwnfbfc{wnlmcs 7994"35 0789!078;,_;8Q G S Bff" S C Bml" U J Uv" X ] U`le" Y Z Ch`le `lk C O Bff" ‒ Ymfznfbfc{wmc AFAS
eflfw`{nws d`gwmc`{fk um{h `l `fwnsnb kfynsm{mnl yz{ {hml dmba‑ J, Amcwnafch, Amcwnfle, 799="0= 94690;,
_;=Q W Fbdwmlo" [ A O`afb" A Enfkgbnfk"S A`{nt`" K Hnhbdfbk" ] t`l @lkfb `lk W t`lSch`mjo" ‒Tmgw`{mnl flfwe} h`wtfs{mle um{h `bvamlva lm{wmkf!g`sfk ymfznfbfc{wmc kftmcfs‑ J,Amcwnafch, Amcwnfle, 799="0= 9=;996,
_69Q Knlel` Shfl" ‒[hf kfsmel" d`gwmc`{mnl `lk ft`bv`{mnl nd ` afas yz{ c`l{mbftfw um{h `lml{few`{fk sm ywnnd a`ss dnw tmgw`{mnl flfwe} h`wtfs{mle‑ J, Amcwnafch, Amcwnfle 7998"08
966905,
_60Q Knlel` shfl" Jvle!H}vl y`wo" J}n{m @jm{s`wm`" snle!]vb Cnf" Hnu`wk C Umobf" `lk Knle!Jnn Oma" ‒Amcwna`chmlfk yz{ c`l{mbftfw g`sfk nl snm s{wvc{vwf dnw bnu dwfpvflc} tmgw`{mnlflfwe} h`wtfs{mle‑ Sflsnws `lk @c{v`{nws @ 799="06;093!098,
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_67Q Oma" H" Gfkfo`w" T" Msb`a" W" Bff" UH" Bfn" K" `lk Ywm}`" S" ‒ B`sfw amcwn!a`chmlfk ymfznfbfc{wmc c`l{mbftfws dnw afch`lmc`b flfwe} h`wtfs{mle‑ MFFF Vb{w`snl, Dwfp, Dfwwnfbfc{, Cl{wb 7998"66 0=99!0=96,
_63Q A`wcn Dfww`wm" Tm{{nwmn Dfww`wm" Amchfbf Evmzzf{{m" K`lmfbf A`wmnbm" @lkwf` [`wnlm"
‒ Ymfznfbfc{wmc avb{mdwfpvflc} flfwe} cnltfw{fw dnw ynufw h`wtfs{mle ml `v{nlnanvsamcwns}s{fas‑ Sflsnws `lk @c{v`{nws @ 7998"0; 737=–336,
_6;Q Jmle!Pv`l Bmv`" Hv`!Gml D`le`" Zhfle!]m Xvg" Xml!Hvm A`ng" Xmv!Chfle Shfl`" KmChfl`" H`le Bm`ng" Gmle!Chv C`m`" ‒ @ afas!g`sfk ymfznfbfc{wmc ynufw eflfw`{nw `ww`} dnw tmgw`{mnl flfwe} h`wtfs{mle‑ Amcwnfbfc{wnlmcs Jnvwl`b 7998"3= 897–894,
_66Q F, Hnle" J,C, Shml" J, Chnm" C,S, Hu`le" `lk H, J, Oma" ‒ Ywfy`w`{mnl `lk ch`w`c{fwmz`{mnlnd yg(zw"{m-n3 {hml dmbas g} af{`bnwe`lmc chfamc`b t`ynw kfynsm{mnl vsmle ` snbmk kfbmtfw} s}s{fa‑ J, A`{fw, wfs, 7999"6(4-"078;!07=9,
_64Q M, O`lln" H, On{fw`" O, U`s`" [, A`{svl`e`" [, o`a`k`" `lk W, [`o`}`a`"
‒Cw}s{`bbnew`yhmc ch`w`c{fwmz`{mnl nd fym{`xm`b yg(zw"{m-n3 dmba um{h kmddfwfl{ zw.{m w`{mn ewnul g} w`kmn!dwfpvflc}!a`elf{wnl syv{{fwmle‑ j, @yyb, Yh}s, 7993"=3(5-";9=0!;9=4,
_65Q S,O, Y`lkf}" @,W, J`afs" Ch`lkw` Yw`o`sh" [,C, Enfb" O, Zmamo" ‒ Fbfc{wmc`b ywnyfw{mfs nd yz{ {hml dmbas ewnul g} snb!efb `lk ybk vsmle ` sffk b`}fw‑ A`{, Scm, Fle, G 799;"007 =4!099,
_68Q Z, D, Zhnv" F, Hnle" W"Unbd" `lk S, [wnbmfw!A`comls{w}" ‒ Kmfbfc{wmc `lk ymfznfbfc{wmc ywnyfw{mfs nd yz{ 67.;8 {hmco dmbas um{h (099- `lk w`lkna cw}s{`bbnew`yhmc nwmfl{`{mnl‑ Ywnc, A`{, wfs, Snc, S}a 7990"466
_6=Q Lmcnb`s Bfkfwa`ll" Y`vb Avw`b{
" J`cfo G`gnwnusom" S`lkwmlf Efl{mb" O`ymb Avo`{m"A`wcn C`l{nlm" @lkwf`s Sfmdfw{" L`t` Sf{{fw" ‒0 9 9q!{fx{vwfk" ymfznfbfc{wmc yg(zwx"{m0∗ x-n3 {hml dmbas dnw afas: Ml{few`{mnl" kfynsm{mnl `lk ywnyfw{mfs‑ Sflsnws `lk @c{v`{nws @ 7993"096 047–059,
_49Q K, @, Gfwbml”cnvw{" C, C, Anbmo" `lk H, J`ddf" ‒ Ymfznfbfc{wmc ywnyfw{mfs nd ynb}cw}s{`bbmlfbf`k {m{`l`{f zmwcnl`{f cnaynsm{mnls ‒ Ywnc, MWF 0=49"07(7-"779!77=,
_40Q X,J, Afle" J,E, Chfle" J,B, Svl" J, [`l" H,J, ]f" J,H, Chv" ‒ Kfyflkflcf nd {fx{vwfkftfbnyafl{ nl {hmcolfss nd smlebf!`llf`bfk!b`}fw ml snb°efb kfwmtfk yz{ {hml ¬bas‑ [hmlSnbmk Dmbas 7999"348 77!76,
_47Q [, [`lm" Z, Xv" K,@, Y`}lf" ‒ Ywfdfwwfk nwmfl{`{mnls dnw snb‛efb kfwmtfk ybz{ {hml b`}fws‑A`{fw Wfs Snc Ywnc 0==3"309 7=6,
_43Q Y, Avw`b{"`- [, A`fkfw" B, S`e`bnumcz" `lk S, Hmgnvx" S, Sc`bfsf" K, L`vantmc" `lk W, E,@ens{mln" L, X`l{hnynvbns `lk H, J, A`{hmfv" B, Y`{{hf}g- `lk F, B, Gvbbnco" ‒[fx{vwfcnl{wnb nd yg{mn3 `lk yg“zw"{m․n3 {hml dmbas um{h {mn7 sffkmle‑ Jnvwl`b nd `yybmfk yh}smcs 0==8"83 3836,
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065
_4;Q E, J, LNWE@ `lk B@VW@ DÈ" ‒Nwmfl{`{mnl sfbfc{mnl ml snb!efb kfwmtfk yz{ {hml dmbas‑A`{, Wfs, Snc, S}ay, Ywnc, 7990"466CC=,0,0,
_46Q E, J, Lnwe`" J, A`fs" F, Cnyy}f" B`vw` Dè" K, Unv{fws" N, T`l kfw Gmfs{" ‒[hf fddfc{ nd yg
s{mnchmnaf{w} nl sum{chmle gfh`tmnw nd y{.bf`k zmwcnl`{f {m{`l`{f.y{ dfwwnfbfc{wmc
c`y`cm{nws‑ J, A`{fw, wfs, 7999"06739=,_44Q `l!]v`l Chfl" M!Ufm Chfl" ‒[fayfw`{vwf–{maf {fx{vwf {w`lsm{mnl nd yg(zw0∗ x{mx-n3 {hml
dmbas: M" wnbf nd yg!wmch ml{fwafkm`{f yh`sfs‑ Jnvwl`b nd {hf @afwmc`l Cfw`amc Sncmf{} 0==;"55 7337,
_45Q C,U, B`u`" O,], [nle`" J,H, Bmg" O, Bmg" ‒ Fddfc{ nd y}wnb}sms {fayfw`{vwf nl {hfch`w`c{fwms{mcs nd yz{ dmbas kfynsm{fk g} {hf snb!efb af{hnk‑ [hml Snbmk Dmbas 0==8"336 779!77;,
_48Q [, Ong`}`shm" A, Mchmom" J, [s`vw" W, A`fk`" ‒ Fddfc{ nd avb{m!cn`{mle ywncfss nl {hfnwmfl{`{mnl `lk amcwns{wvc{vwf nd bf`k zmwcnl`{f {m{`l`{f (yz{- {hml dmbas kfwmtfk g} chfamc`b
snbv{mnl kfynsm{mnl‑ [hml Snbmk Dmbas 7996";8= 5; – 58,
_4=Q Z, J, U@LE" W, A@FK@" O, OMOVCHM" ‒ Kftfbnyafl{ nd yh`sfs `lk {fx{vwf ml snb!efb
kfwmtfk bf`k zmwcnl`{f {m{`l`{f {hml dmbas ywfy`wfk g} {hwff!s{fy hf`{!{wf`{afl{ ywncfss‑ Jnvwl`b nd a`{fwm`bsb scmflcf 7999"36 6=06 – 6=0=,
_59Q S`l!]v`l Chfl" M!Ufm Chfl" ‒[fx{vwf ftnbv{mnl `lk fbfc{wmc`b ywnyfw{mfs nd nwmfl{fk yz{ {hml dmbas‑ A`{fwm`bs Chfams{w} `lk Yh}smcs 0==4";6 06=!047,
_50Q P, Znv" H, F, Wvk` `lk G, E, ]`cngm" ‒ Maywntfk kmfbfc{wmc ywnyfw{mfs nd bf`k zmwcnl`{f{m{`l`{f {hml dmbas kfynsm{fk nl af{`b dnmbs um{h b`lmn3 gvddfw b`}fws‑ @yybmfk Yh}smcs
Bf{{fws 7990"58 0787,_57Q C, Jfddwf} Gwmlofw `lk Efnwef U, Schfwfw" Snb!efb scmflcf: [hf yh}smcs `lk chfams{w} nd
snb!efb ywncfssmle, (0==9-" Y`wo Wmkef: @c`kfamc Ywfss,
_53Q Wngfw{U, Schu`w{z" [hfnknw Schlfbbfw" W`mlfwU`sfw" ‒Chfamc`b snbv{mnl kfynsm{mnl nd fbfc{wnlmc nxmkf dmbas‑ C, W, Chmamf 799;"5 ;33–;40,
_5;Q Sn{{ns" ‒ Fddfc{s nd {hmcolfss nl {hf ymfznfbfc{wmc `lk kmfbfc{wmc ywnyfw{mfs nd bf`k zmwcnl`{f{m{`l`{f {hml dmbas‑ Jnvwl`b nd `yybmfk yh}smcs 7999"853=;0,
_56Q C, H, Bml" Y, @, Dwmkkbf" C, H, A`" @, K`e`" `lk H`}kl Chfl" ‒ Fddfc{s nd {hmcolfss nl {hf
fbfc{wmc`b ywnyfw{mfs nd af{`bnwe`lmc chfamc`b t`ynw kfynsm{fk yg“zw"{m․n3 “76–099 la․{hml dmbas nl b`lmn3 gvddfwfk sm‑ Jnvwl`b nd `yybmfk yh}smcs 7999"=9 069=,
_54Q K, @, G`wwnu" [, F, Yf{wndd" W, Y, [`lknl" A, S`}fw" ‒Ch`w`c{fwmz`{mnl nd {hmco bf`k zmwcnl`{f {m{`l`{f dmbas d`gwmc`{fk vsmle ` lfu snb efb g`sfk ywncfss‑ J, @yyb, Yh}s, 0==5"80 854,
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068
_55Q H, G D`le" J, Z, Bmv" Z, ], Xv" B, Knle" B, U`le" K, Chfl" G, C, C`m" `lk ], Bmv"‒ D`gwmc`{mnl `lk yfwdnwa`lcf nd afas!g`sfk ymfznfbfc{wmc ynufw eflfw`{nw dnw tmgw`{mnlflfwe} h`wtfs{mle‑ Amwn, Jnvwl`b 7994"35 0789!078;,
_58Q U,J, Chnm" ], Jfnl" J,!H, Jfnle" W, Snnk" S,E, Oma" ‒ Flfwe} h`wtfs{mle afas kftmcf g`sfk
nl {hml dmba ymfznfbfc{wmc c`l{mbftfws‑ J, Fbfc{wncfw`a 7994"05 6;3!6;8,_5=Q J`afs A, Efwf $ S{fyhfl Y, [manshflon" Afch`lmcs nd a`{fwm`bs, 7lk, (0=8;-" Gfbanl{"
C`: Gwnnos.Cnbf Flemlffwmle,
_89Q ]m" Jfnle Unn" Shmh" U`l ], Shmh" `lk Ufm!Hfle" ‒ Fddfc{ nd bfle{h" umk{h" `lk ankf nl{hf a`ss kf{fc{mnl sflsm{mtm{} nd ymfznfbfc{wmc vlmanwyh c`l{mbftfws‑ Jnvwl`b nd @yybmfk Yh}smcs 7997"=0(3-"0489!0484,
_80Q S`kfw J F" J`wsnl M" Y`vb A `lk Uhm{f B W" ‒Af{hnk dnw {hf c`bmgw`{mnl nd `{namc dnwcfamcwnscnyf c`l{mbftfws ‒ Wft, Scm, Mls{wva 0==6"44 358=!35=8,
_87Q ],C, Dvle" Dnvlk`{mnl nd snbmk afch`lmcs, (0=46-: Ywfl{mcf!H`bb,
_83Q Lnfb Fkv`wk kv [nm{" Ankfbmle `lk kfsmel nd ` afas ymfznfbfc{wmc tmgw`{mnl flfwe}h`wtfs{fw " ml @fwnl`v{mcs `lk @s{wnl`v{mcs, 7996" AM[: Gns{nl,
_8;Q [,J, E`wmln" A, H`wwmle{nl" ml: @,M, Omlenl" F,W, A}fws"G, [v{{bf" ‒ Dfwwnfbfc{wmc {hml dmbasmm"‑ A`{fw, Wfs, Snc,S}ay, Ywnc, 0==7"7;3 3;0,
_86Q @, @, @}ól" W, Gw`dd" C, C, Bml" H, H, S`uml" `lk A, @, Schamk{" ‒Ch`w`c{fwmz`{mnl nd `{maf avb{mybfxfk mlkvc{mtfb} cnvybfk yb`sa` f{chfw‑ Jnvwl`b nd [hf Fbfc{wnchfamc`b Sncmf{} 0==="0;4 33=,
_84Q Chfl!Ovfm Chvle" ‒Efnaf{wmc`b y`{{fwl fddfc{ nl smbmcnl kffy f{chmle g} `l mlkvc{mtfb}cnvybfk yb`sa` s}s{fa‑ J, Amcwnafch, Amcwnfle, 799;"0; 464,
_85Q J, Ommh`a`¨ om `lk S, Dw`lssmb`" ‒ Y`{{fwl sh`yf fddfc{s `lk `w{md`c{s ml kffy smbmcnl f{chmle‑ J, T`c, Scm, [fchlnb, @ 0==8"05 7789,
_88Q J, Ommh`a¨`om " H, O`{{fbvs " J, O`w{{vlfl " S, Dw`lssmb` ‒ Kfy{h `lk ywndmbf cnl{wnb ml yb`sa`f{chfk afas s{wvc{vwfs‑ Sflsnws `lk @c{v`{nws @ 7999"87 73;–738,
_8=Q J}wom Ommh`aëom" D`gwmc`{mnl nd snm amcwnafch`lmc`b kftmcfs" ml Fbfc{wmc`b `lk Cnaavlmc`{mnls Flemlffwmle , 7996" T[[,
_=9Q H,!C, Bmv" ],!H, Bml" U, Hsv" ‒Smkfu`bb wnvehlfss cnl{wnb ml `kt`lcfk smbmcnl f{ch ywncfss‑ Amcwns}s{fa [fchlnbnemfs 7993"09 7=!3;,
_=0Q G`ofw J" Wnvlk} S" `lk Uwmeh{ Y," ‒ @b{fwl`{mtf efnaf{wmfs dnw mlcwf`smle ynufw kflsm{} mltmgw`{mnl flfwe} sc`tflemle dnw umwfbfss sflsnw lf{unwos"‑ 3wk ml{fwl`{mnl`b flfwe}cnltfwsmnl flemlffwmle cnldfwflcf, 7996: S`l Dw`lcmscn: @M@@,
5/13/2018 THESIS Development of MEMS Piezoelectric Energy Harvesters - slidepdf.com
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_=7Q [, @LKN" X, BM" S, L@O@N" [, O@S@M" H, [@L@O@" A, SHMOMK@ `lk O, S@[N‒ Dw`c{vwf {nvehlfss af`svwfafl{ nd {hml!dmba smbmcnl‑ D`{mevf Dw`c{ Flele A`{fw S{wvc{ 7996"78 485,
_=3Q Xvfjvl Zhfle" ]mchvl Zhnv" Zhm ]`l" ‒ Kfyflkflcf nd cw}s{`bbmlf" dfwwnfbfc{wmc `lk
dw`c{vwf {nvehlfss nl `llf`bmle ml Yg(Zw 9,67[m9,;8 -N3 {hml dmbas kfynsm{fk g} af{`b nwe`lmckfcnaynsm{mnl‑ A`{, Wfs, 7993"4(;-"660!664,
_=;Q Zhfle Xvfjvl" Zhnv ]mchvl" ]`le Zhm}ml" ]`l Zhm" ‒ Ft`bv`{mnl nd dw`c{vwf {nvehlfss nd yz{ dfwwnfbfc{wmc {hml dmbas g} mlkfl{`{mnl dw`c{vwf af{hnk({hml dmbas- ‒ [hf J`y`l Sncmf{} nd Afch`lmc`b Flemlffws 7990"7 ==;,
_=6Q Chff Unl Chvle `lk Ch`le Jvle Oma" ‒ F{chmle fddfc{s nl dfwwnfbfc{wmc c`y`cm{nws um{havb{mb`}fwfk fbfc{wnkfs‑ Jyl, J, @yyb, Yh}s, 0==5"34 75;5,
_=4Q S, @ee`wu`b" S, W, Yfwvssf" C, U, [my{nl" `lk W, W`afsh" H, K, Kwfu `lk [, Tflo`{fs`l"K, G, Wnafwn" T, G, Ynkngfknt" `lk @, Ufgfw" ‒ Fddfc{ nd h}kwnefl nl yg(zw"{m-n3!g`sfk
dfwwnfbfc{wmc c`y`cm{nws‑ @yyb, Yh}s, Bf{{, 0==8"53 0953,
_=5Q ], Shma`an{n" O, Ovshmk`!@gkfbeh`d`w" H, Amom" `lk ], Dvjms`om" ‒ H 7 k`a`ef nd
dfwwnfbfc{wmc yg(Zw"[m-n3 {hml!dmba c`y`cm{nws‛{hf wnbf nd c`{`b}{mc `lk `ksnwy{mtf `c{mtm{}nd {hf {ny fbfc{wnkf‑ @yyb, Yh}s, Bf{{, 0==5"59 39=4,
_=8Q Jvle!H}vl Y`wo" Jvl!Sfno O`le" Hn!S`le @hl" Sfnl!G`f Oma" K`l Bmv" `lk Knle!JnnOma" ‒ @l`b}sms nd S{wfss kms{wmgv{mnl ml ymfznfbfc{wmc AFAS flfwe} h`wtfs{fw vsmle sh`yfk c`l{mbftfw s{wvc{vwf"‑ Dfwwnfbfc{wmcs" 799= MS@D (@ccfy{fk-
_==Q W}`l Wngfw{ Olmeh{" ‒[hf `l`b}sms `lk {fs{mle nd AFAS `lk a`cwn sc`bf ymfznfbfc{wmc
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`lk A, [svo`k`" ‒afch`lmc`b s{wfss fddfc{ nl maywml{ gfh`tmnw nd ml{few`{fk dfwwnfbfc{wmcc`y`cm{nws"‑ @yybmfk Yh}smcs Bf{{fws" 83(;- 578!539
_090Q O, Gwmloa`l" @, [`e`l{sft" Y, Avw`l{" `lk L, Sf{{fw" ‒Sfbd ynb`wmz`{mnl mlYg(Sc0.7[`0.7-N3 wfb`xnw {hml dmbas"‑ Jyy, J, @yy, Yh}, (7994- ;6 (=G- 5788!57=3
_097Q Jnsfyh D, Shfy`wk" Jw" D`l Chv" Ms`ov O`lln" Svs`l [wnbmfw!a`cOmls{w}" ‒ch`w`c{fwmz`{mnl`lk `emle wfsynlsf nd {hf k 30 ymfznfbfc{wcm cnfddmcmfl{ nd bf`k zmwcnl`{f {m{`l`{f {hml dmbas"‑J, @yybmfk Yh}smcs" 0===" 86 (=- 4500!4504
_093Q Jnl!y`vb A`wm`" Jnsfyh D, Shfy`wk Jw," Svs`l [wnmbfw!AcOmls{w}" [, W, U`{omls" `lk @,F,Y`}z`l{" ‒Ch`w`c{fwz`{mnl nd {hf Ymfznfbfc{wmc Ywnyfw{mfs nd Yg9,=8 G`9,97(Ae 0.3 Lg7.3 -N3! Yg[mN3 Fym{`xm`b [hml Dmba"‑ Ml{, J, @yyb, Cfwa, [fchlnb," 7996" 7(0-" 60!68