there are no free lunches. anti-reflective coating a anti-reflective coating is deposited on the top...
Post on 20-Dec-2015
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![Page 1: There are no FREE lunches. Anti-reflective coating A anti-reflective coating is deposited on the top side to help transmit more of the incident sunlight](https://reader035.vdocuments.us/reader035/viewer/2022062407/56649d4b5503460f94a294f6/html5/thumbnails/1.jpg)
There are no FREE lunches
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Anti-reflective coating
A anti-reflective coating is deposited on the top side to help
transmit more of the incident sunlight
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Because the top side conductor has been already
fabricated and only low temperature process can be used, the typical process to
deposit anti-reflective coating is PECVD
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PECVD• Plasma
• Enhanced
• Chemical
• Vapor
• Deposition
PECVD is used extensively in the manufacture of microelectronic devices because it allows for lower temperature processes
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Just like in sputtering, a plasma is formed in an electric
field
The plasma allows for the deposition or growth of films at lower temperature than would
normally be required in just a CVD process
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Trion ORION III PECVD tool
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Typical PECVD Process• The wafer is loaded in into the vacuum
chamber
• The chamber is pumped to vacuum conditions
• The wafer is heated to deposition temperatures (300oC typical)
• Gas are introduced that will acts as precursors to the film growth
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Typical PECVD Process (continued)
• Chamber pressure is regulated to provide an equilibrium pressure ( gas in, pumping out)
• RF power is applied to the chamber creating a plasma
• A film is grown based on the gases introduced
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For our solar cell
• We will be using SiO2 as the antireflective coating
• There are better anti-reflective coatings but not available in the Cameron clean room such as SiN or ITO
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Trion ORION III PECVDChamber lid open
Heated substrate stageCan accommodate up to 8”
wafers
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Trion ORION III water chiller and dry (no oil) chemical vacuum pump
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Trion ORION III process gas cabinet TEOS (tetraethylorthosilicon) SiO2 precursor
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The blue tint to the solar cell is the anti-reflective coating