the state of the art - xps dr chris blomfield dr adam roberts, dr simon hutton kratos analytical ltd...

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The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd www.kratos.com A Shimadzu Group A Shimadzu Group Company Company

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Page 1: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

The STATE of the art - XPS

Dr Chris Blomfield

Dr Adam Roberts, Dr Simon HuttonKratos Analytical Ltd

www.kratos.com

A Shimadzu Group CompanyA Shimadzu Group Company

Page 2: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Distribution of XPS instruments

UK

France

Germany

UK accounts for <15% of "state of the art" XPS

Based upon last ~ 50 instrument sales

A Shimadzu Group CompanyA Shimadzu Group Company

56% Industrial44% Academic

Page 3: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

What are we missing out on?

• Sate of the art instruments offer:– Improved sensitivity

• improved detection limits

• reduced acquisition time

– Smaller spot sizes• ~ 5m spot size available

– XPS imaging • 3 m spatial resolution

A Shimadzu Group CompanyA Shimadzu Group Company

Page 4: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

3 decades of improvementA Shimadzu Group CompanyA Shimadzu Group Company

Ag 3d5/2

FWHMMono 0.6eVMg 1.0eV

Page 5: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Applications to -CP

• Patterning of polymer substrate (polyethylene PE) with poly(acrylic) acid PAA.– PAA impermeable, wet and dry etch resist

– PAA films easily functionalised

– capped with PEG can be used for bio-applications cell growth

• Oxidised PE film is prepared

• PDMS stamp (optical mask) prepared with n-alkylamine

• PE “stamped” with amine to passivate PE

• Unpassivated regions react with PTBA

• Hydrolysis of this layer leads to PAA

A Shimadzu Group CompanyA Shimadzu Group Company

Page 6: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

-CP process

PE-COOCOR

PE-COOCOR

PE-COOCOR

i) PTBA ii) MeSO3H

alkyl amine

hyperbranchedPAA film

PDMS stamp

Oxidised PE substrate

A Shimadzu Group CompanyA Shimadzu Group Company

alkyl amine

Passivated layer Unpassivated region

Page 7: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

PAA on Au films

Au 4f photoelectron imageattenuation of Au substrategives contrast mechanism

Au substrate

PAA layer

alkyl amine

A Shimadzu Group CompanyA Shimadzu Group Company

Page 8: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

C 1s - 27 m analysis area

PAA

C 1s from PAA layer

A Shimadzu Group CompanyA Shimadzu Group Company

Page 9: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Au 4f & C 1s imageA Shimadzu Group CompanyA Shimadzu Group Company

Page 10: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

A Shimadzu Group CompanyA Shimadzu Group Company

< 3m spatial resolution

Page 11: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Fluorinated PAA on PE

PE-COOCOR

A Shimadzu Group CompanyA Shimadzu Group Company

Experiment repeated usingPE substrate with PAA layer being fluorinated

Page 12: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

C 1s spectraA Shimadzu Group CompanyA Shimadzu Group Company

Page 13: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Adhesive coverage on paper

• Inhomogeneous paper sample with uneven coverage of adhesive - lead to adhesive failure

• Optically - sample was homogenous - white

• XPS O1s image clearly identifies adhesive distribution

A Shimadzu Group CompanyA Shimadzu Group Company

Page 14: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

A Shimadzu Group CompanyA Shimadzu Group Company O1s images variable FOV

Page 15: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Chemical state images

• C1s image allows investigation of chemistry– small spot analysis shows variation in C-H and

C-O

• Energy resolution of SMA allows chemical imaging of different C 1s species

A Shimadzu Group CompanyA Shimadzu Group Company

Page 16: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

C1s chemical state imageA Shimadzu Group CompanyA Shimadzu Group Company

Page 17: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Indium in commercial Al-Zn-In sacrificial anode

• Improved detection limits<0.05% allow analysis of low concentrations of elements

– Al-Zn-In anodes are used to protect marine steel structures from corrosion.

– study with XPS of the active In element – reveals surface segregation to a maximum of

4% over 1 year exposureA Shimadzu Group CompanyA Shimadzu Group Company

Page 18: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

In 3d quantification

Overlap with Ca 2s

In 3d3/2 used for quantification

A Shimadzu Group CompanyA Shimadzu Group Company

Page 19: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Corrosion tests

• Cut anode surface used to represent bulk– XPS In 0.02wt%

– GDOES In 0.0185wt%

• As cast anode surface ~1wt% In

• Corrosion tests show an increase to 4wt% over 1 years simulated corrosion

A Shimadzu Group CompanyA Shimadzu Group Company

Page 20: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

In & Fe conc versus dissolution time

A Shimadzu Group CompanyA Shimadzu Group Company

Page 21: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Summary

• In is surface segregated to Anode surface compared to the bulk - inverse segregation

• In is believed to segregate to the metal:oxide interface a more active surface

• Shows the activity of the anode is a surface phenomena - possible to investigate with improved detection limits

A Shimadzu Group CompanyA Shimadzu Group Company

Page 22: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Optical image contact padA Shimadzu Group CompanyA Shimadzu Group Company

Page 23: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Wide scan - low concentrations

O 1s 7.53%C 1s 37.0%Au 4f 54.42%Co 2p 0.78%Ni 2p 0.27%

A Shimadzu Group CompanyA Shimadzu Group Company

Page 24: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

High resolution Co2p and Ni 2p

Co 2p3/2 Ni 2p3/2

Co oxide

Co metal

A Shimadzu Group CompanyA Shimadzu Group Company

Page 25: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Polymer reflector contamination

ca. 500 m

Cross section through a “dimple”

PP contamination

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Page 26: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Wide scan from 700m areaA Shimadzu Group CompanyA Shimadzu Group Company

Page 27: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

VB from 700m areaA Shimadzu Group CompanyA Shimadzu Group Company

Page 28: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Valence band of PE & PPA Shimadzu Group CompanyA Shimadzu Group Company

Page 29: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

110m spot size C 1sA Shimadzu Group CompanyA Shimadzu Group Company

Page 30: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

110m spot size VBA Shimadzu Group CompanyA Shimadzu Group Company

VB in flat VB in hole

PP character VB

Page 31: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Bond pad contaminationA Shimadzu Group CompanyA Shimadzu Group Company

l

Al 2p photoelectron image

Optical image of Al padsin-situ

Page 32: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Bond pad contamination

• Bad adhesion was observed in Al bond pads

• Optical images was used to identify area of know failure

• XPS images and small spot show F contamination

• Distribution of F indicates residue from plasma etching step in production

A Shimadzu Group CompanyA Shimadzu Group Company

Page 33: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Al 2p and F 1s imagesA Shimadzu Group CompanyA Shimadzu Group Company

F 1s image showsdistribution of F on pads

Page 34: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Small spot spectroscopyA Shimadzu Group CompanyA Shimadzu Group Company

55um spectra showAl/F on pad

Page 35: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Photoelectron imagesA Shimadzu Group CompanyA Shimadzu Group Company

F 1s and al 2p imagesshwo distribution of Facross bond pad

Page 36: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Summary

• Modern XPS instruments are very powerful analytical tools

• As well as improved automation, reliability and accuracy:– imaging, detection limits, resolution, -

probe.....

• How to get more instruments into UK????

A Shimadzu Group CompanyA Shimadzu Group Company

Page 37: The STATE of the art - XPS Dr Chris Blomfield Dr Adam Roberts, Dr Simon Hutton Kratos Analytical Ltd  A Shimadzu Group Company

Acknowledgements

-CPRichard Crooks Texas A & M University

In anodeJohn Norris & Morgan Alexander. CPC, UMIST, UK

Polymer VB Gary Korba 3M Central Research Labs Minneapolis

Paper sampleJames Tse Avery Dennison Pasedena. USA

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