The reliable way to move into the UV.

Coherent Laser Division Solid-State Continuous-Wave

AZUREThe Azure 266 nm CW Deep-UV Laser

Put unsurpassed expertise to work for you. In your demandingmanufacturing environment, unforeseendowntime can deal a crippling blow to yourproductivity—and to your profitability. That’swhy it’s so important to have a deep-UV laser that’s extremely reliable. A laser thatintegrates into your tool—quickly and easily.A laser that can actually improve the perform-ance of your systems—and help you gain acompetitive advantage.

At last, there’s a deep-UV laser that delivers all these OEM benefits—while building on a heritage of experience and innovation unparalleled in the industry.

Introducing the Azure deep-UV laser.

The new Azure

The Innova 300 FreD™

The SabreFreD™

The Azure laser is the nextgeneration of CW deep-UV.

266AZURE:Enabling the next generation of UV tools

The Azure™ deep-UV laser is the next step inthe evolution of the Verdi™ continuous-wave(CW) green laser system. With the Azure’s out-standing reliability and 100% OEM readiness,you have the one thing you want most from an industrial laser—confidence.

This robust laser delivers all the benefits of Coherent’s unrivalled UV and diode-pumpedsolid-state (DPSS) expertise. The Azure is basedon a mature, proven technology—the highlysuccessful Verdi CW green laser. Equally impor-tant, it was developed through detailed researchand manufacturing experience in UV nonlinearoptical materials, coatings, and lasers. Theresult? A dependable, feature-rich, deep-UVlaser that you can integrate into your manufac-turing environment with ease.

The Azure incorporates years of resonantfrequency doubling of single-frequency CWlasers, including Verdi. And it delivers all thequality, efficiency, and longevity you expectfrom Coherent, the leading supplier of deep-UVand solid-state lasers to the OEM market.

Empower your product line.If you’re looking to enable the next generationof inspection along the semiconductor industryroadmap, the Azure deep-UV laser delivers. Itemits a wavelength of 266 nm, which allowsdetection of smaller defects that longer wave-lengths miss. This results in higher wafer yieldand better mask utilization—while saving timein the process.

With its shorter wavelength, the Azure can also improve disc mastering. It allows CDsand DVDs to have higher information storagedensity than those produced with traditional351 nm and 413 nm wavelength lasers.

For next-generation Fiber Bragg Gratingmanufacturing, Azure offers a much higherwall-plug efficiency than an ion laser of comparable wavelength.

L A S E R S O N T H E S E M I C O N D U C T O R I N S P E C T I O N R O A D M A P

150 nm 130 nm 100 nm 70 nm

t e c h n o l o g y n o d e

250 nm 180 nm

Verdi 532 nm

Sapphire 488 nm

I -L ine 365 nm

Azure 266 nm

FreD 257 nm , 244 nm

266AZURE:

Developed for manufacturers—by manufacturers.

Your OEM environment can benefit greatlyfrom the key product features of the Azuredeep-UV laser. It has a sealed laser head, forconvenient hands-free operation. Thanks to itsexclusive Sentinel™ system, which includes anactive beam-pointing control system, you havecomplete UV beam management. Its compactsystem design allows easy integration into anymanufacturing environment. And its ultra low-noise operation improves data acquisition—even at high frequencies.

Reduce expenses any number of ways.The Azure deep-UV laser is one investment thatcan pay big dividends for years to come. Sincethe Azure uses standard single-phase electricalpower, it can lower your utility costs. For thisreason, the Fiber Bragg Grating Industry is tak-ing a close look at the Azure. Its high conversionefficiency—from green to deep-UV—extends

the lifetime of the system. Reliability is a given, since the Azure is based on the provenVerdi design and utilizes Coherent’s exclusivePermAlign™ DPSS technology, which eliminatesthe need for laser cavity adjustments. And if there’s ever a problem, Coherent has the industry’s most extensive worldwide supportnetwork, for superb service every step of the way.

Safe choice. Smart choice.For over 10 years, Coherent has led the way in high-power UV, deep-UV, and DPSS—and inintegrating these technologies into manufac-turing environments of all types and sizes. Findout how you can benefit from this unmatchedexpertise—with the Azure deep-UV laser. Visitthe Coherent Web site at www.CoherentInc.com.Or call 1-800-527-3786.

Then, see how the Azure deep-UV laser helpsyou put the focus on your product—instead ofon your laser.The Azure™ deep-UV laser is the next step in

the evolution of the Verdi™ continuous-wave(CW) green laser system. With the Azure’s out-standing reliability and 100% OEM readiness,you have the one thing you want most from an industrial laser—confidence.

This robust laser delivers all the benefits of Coherent’s unrivalled UV and diode-pumpedsolid-state (DPSS) expertise. The Azure is basedon a mature, proven technology—the highlysuccessful Verdi CW green laser. Equally impor-tant, it was developed through detailed researchand manufacturing experience in UV nonlinearoptical materials, coatings, and lasers. Theresult? A dependable, feature-rich, deep-UVlaser that you can integrate into your manufac-turing environment with ease.

The Azure incorporates years of resonantfrequency doubling of single-frequency CWlasers, including Verdi. And it delivers all thequality, efficiency, and longevity you expectfrom Coherent, the leading supplier of deep-UVand solid-state lasers to the OEM market.

Empower your product line.If you’re looking to enable the next generationof inspection along the semiconductor industryroadmap, the Azure deep-UV laser delivers. Itemits a wavelength of 266 nm, which allowsdetection of smaller defects that longer wave-lengths miss. This results in higher wafer yieldand better mask utilization—while saving timein the process.

With its shorter wavelength, the Azure can also improve disc mastering. It allows CDsand DVDs to have higher information storagedensity than those produced with traditional351 nm and 413 nm wavelength lasers.

For next-generation Fiber Bragg Gratingmanufacturing, Azure offers a much higherwall-plug efficiency than an ion laser of comparable wavelength.

Enabling the next generation of UV tools

s m a l l fo o t p r i n tm i n i m a l wa t e r c o o l i n g

m o d e s t u t i l i t y re q u i re m e n t s

Coherent as your partner.To compete and succeed in today’s fast-paced research and manufacturing environments, you need a laser partner that understands your needs. A partner that can provide a wide range of technologysolutions, and the support that goes with them.

Since 1966, Coherent has been helping customers by providing complete, laser-based solutions to a wide range of commercial and scientific applications.

With a heritage of innovation and an uncompromising position on quality, Coherent is the mostforward-thinking and diversified manufacturer of solid-state, gas, and semiconductor lasers in the industry.

For more information, visit us on the Web at www.CoherentInc.com. Or call 800-527-3786.

Printed in the U.S.A.MC-061-01-10M0601Copyright © 2001 Coherent,Inc.

Coherent’s scientific and industrial lasers are certified to comply with the FederalRegulations ( 21 CFR Subchapter J ) as administered by the Center for Devices and Radiological Health on all systemsordered for shipment after August 2, 1976

5100 Patrick Henry DriveSanta Clara, CA 95054Phone: 1-800-527-3786

1-408-764-4983Fax: 1-800-362-1170

1-408-988-6838Email: tech.sales@coherentinc.comWeb: www.CoherentInc.com

LO C A L O F F I C E S

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L A S E R D I V I S I O NA M e m b e r o f C o h e r e n t P h o t o n i c s G r o u p

VISIBLE AND INVISIBLE LASER RADIATION�AVOID EYE OR SKIN EXPOSURE TO�DIRECT OR SCATTERED RADIATION

CLASS 4 LASER RADIATION PRODUCT�PER EN60825-1 (1994)

WAVELENGTH 266nm�1W MAX. AVERAGE POWER�