the laser system provider worldwide r&d and low volume …...and partners we have established...
TRANSCRIPT
Take advantage of our experience and forward-thinking.Backed by 40 years of experience in laser material processing ROFINprovides innovative solutions for the photovoltaic industry. Processing ofsolar cells like drilling, cutting, scribing, doping and ablation of dielectriclayers are the key competences as well as thin film applications, edgeisolation and marking of silicon wafers. Working closely with our clientsand partners we have established great expertise for laser applicationin PV manufacturing. ROFIN is the only supplier worldwide offering thecomplete range of lasers and laser systems for processing solar cells.
EasyMark
� Low cost marking/scribing system
� Very easy handling� Ideally suited for scribe
and break applications� Various types of 1064 nm
laser sources available
MPS
� Medium-sized modular laserworkstation
� High precision processing forthin film and c-Si applications
� Granite base available� Various motion systems with
up to +/- 1 μm accuracy
CombiLine Advanced
� RT version with fast turning 800 mm rotary table, throughput up to 700wafers/h
� WT version with flexiblefixture arrangementsand optional x/y table
� 300 mm motorized z-axis� Optional vision system for
wafer recognition
Precision R&D System
� Integration of up to 3 laser sources
� Suitable for thin film andc-Si applications
� Accuracy of NC axes:± 5 µm, repeatability± 1 µm for x/y- axis
� Max. travel 300 x 600 mm
APPLICATION DEVELOPMENT PRECISION R&D SYSTEM
COMBILINE ADVANCED
The laser system provider worldwide R&D and low volume systems
MPS (Modular Processing System)WAFER VACUUM FIXTURE
EASYMARK
WE ARE WHERE YOU ARE!
ROFIN
� Leading manufacturer for lasers and laser solutions for material processing
� Sales and service teams in 40countries around the world
� Widest range of lasersources, laser systems and customized solutions
� Large application lab for a wide spectrum of pv material processing
CASSETTE LOADING SYSTEM
Benefits
� Compliance with highest safety standards and CE signed
� Excellent laser expertise� High-precision laser processes� Low breakage rate and total
cost of ownership
Features
� Throughput range: up to7200 UPH (Units-Per-Hour)
� 'On the fly' processing� Standardized HMI software
and advanced BeckhoffPLC control
� Automatic self-calibrating highspeed scanner systems
� High precision wafer alignmentwith up to 5 CCD cameras
� QC-system with laser power control and multiple wafersensors
� Optional MES host interface according to SEMI PVstandard
� Integrated exhaust and filter system suitable for clean rooms
� Inline, cassette or stack handling for all common standardsand degrees of automation
The DUAL LINE c-Si is a modular machine platform designedfor high throughput solar cell manufacturing with multipleinstallations at leading PV manufactures worldwide. The core ofthe machine is a high precision granite base to support laseroptics and rapid wafer handling units. It is equipped with twoindependently operating lines for cell transport and one laserprocess chamber each. In general the machine can be placedin-line with other processing machines or configured with stackand/or cassette handling systems for batch type operation. Themachine can be configured with a wide range of ROFIN lasersources in 1064, 532 and 355 nm wavelengths. Various pulselength regimes from continuous wave to femtosecond are alsoavailable. In particular this machine is addressing high cellefficiency processes as MWT cell drilling, laser doping andopening of dielectric layers on the cell front or back side.
'On the fly' processing for elimination of handlingand transfer timesThe Dual Line c-SiTM system also features the inclusion of 'onthe fly' processing, a new system that virtually eliminates waferhandling and transfer times between laser processing cycles,improving productivity by providing processing speeds of up to7200 UPH (Units-Per-Hour)
STACK LOADING SYSTEM
DUAL LINE c-Si
One supplier - all technologies
HIGH-TECH LASER FOR PHOTOVOLTAICS
PowerLine Pico/SHG
� High precision processingand high pulse peak power
� Cold laser ablation ofthin layers
� Multiple wavelength options1064 nm, 532 nm, 355 nm
� Ideal for 24/7 productionin industry
POWERLINE PICO
PERC / THINFILM
POWERLINE SL
THINFILM SCRIBING
POWERLINE E SHG / THG
PERC
POWERLINE L 100 SHG
PERC / BIPV
POWERLINE F 20 -100
ISOLATION & MARKING
POWERLINE F 30 LP
LASER FIRED CONTACT & DRILLING
PowerLine SL 3/20
� Exceptional beam quality� Excellent pulse-to-pulse stability� High long term stability with
temperature management system� Integrated shutter and
safety circuits
PowerLine E SHG/THG
� Different power ranges� Several wavelengths� Single and double scanner
configuration� Various scanning head options
PowerLine L 100 SHG
� High average power andhigh pulse energy
� Round, square and rectangularfiber beam delivery possible
� Top hat beam profile� Excellent pulse-to-pulse stability
PowerLine F 20 -100
� Different power ranges for various applications
� Completely air-cooled� Low operating costs� Single and double scanner
PowerLine F 30 LP
� Compact setup� Excellent pulse-to-pulse stability� High pulse energy� Air cooling
Isolation
Cutting �
EWT/MWT �
LFC �
SE DopingMarkingThin Film P1, P2, P3Scribing of flexible substrates
Isolation �
PERCCutting �
EWT/MWT �
LFCSE DopingMarking �
Thin Film P1, P2, P3 �
Scribing of flexible substrates �
Isolation �
PERC �
CuttingEWT/MWTLFCSE DopingMarkingThin Film P1, P2, P3 �
Scribing of flexible substrates �
Isolation
CuttingEWT/MWTLFCSE DopingMarking �
Thin Film P1, P2, P3 �
Scribing of flexible substrates �
Isolation �
PERC �
CuttingEWT/MWT �
LFCSE Doping �
Marking �
Thin Film P1, P2, P3Scribing of flexible substrates
IsolationPERCCuttingEWT/MWTLFCSE Doping �
MarkingThin Film P1, P2, P3Scribing of flexible substrates
WE T H I N K L A S E R
THE FUTURE OF SOLAR CELL MANUFACTURINGLASER SOLUTIONS FOR THE PV INDUSTRY
WE T H I N K L A S E R
WWW.ROFIN.COM
ROFIN-BAASEL LasertechGmbH & Co. KGZeppelinstraße 1082205 GilchingGermanyPhone +49 8105-3965-0Fax: +49 8105-3965-4159E-mail: [email protected]
ROFIN-SINAR Laser GmbHBerzeliusstraße 8722113 HamburgGermanyPhone +49 40 733 63 0Fax: +49 40 733 63 4100E-mail: [email protected]
ROFIN-SINAR Laser GmbHDieselstraße 1585232 Bergkirchen-GündingGermanyPhone +49 8131 704 0Fax: +49 8131 704 4100E-mail: [email protected]
Benelux: Phone +31 78 69310 37E-mail: [email protected]
CA: Phone +1 905 607 0400E-mail: [email protected]
CH: Phone +41 32 322 1010E-mail: [email protected]
CN: Phone +86 21 68552216E-mail: [email protected]
ES/PT: Phone +34 93 4770 644E-mail: [email protected]
F: Phone +33 1 6911 3636E-mail: [email protected]
IN: Phone +91 22 276125 1E-mail: [email protected]
IT: Phone +39 039 27291E-mail: [email protected]
JP: Phone +81 46 229 8655E-mail: [email protected]
KR: Phone +82 2 837 1750E-mail: [email protected]
SG: Phone +65 6482 1091E-mail: [email protected]
TW: Phone +886 2 2790 1300E-mail: [email protected]
UK: Phone +44 1327 701 100E-mail: [email protected]
US: Phone +1 734 455 5400E-mail: [email protected]
Find further representatives andpartners on www.rofin.com/worldwide
© COHEREN
T-ROFIN/SOLAR/03
.17/E/0.2/V2
.0/ROBI/Selected options and detailed technical specifications on request. All data are subject to change without further notice.