the challenges posed by the use of substances and mixtures ...positioning in foundry market...

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L’Aquila 31 Maggio 2017 Aula Magna DSU Ui ità d li St di d ll’A il Università degli Studi dell’Aquila The challenges posed by the use of substances and mixtures in the semiconductor industry Fabrizio Marchili EHSS Director This research was financially supported by the European Union within the “LIFE BITMAPS” Project LIFE15 ENV/IT/000332. Confidential - LFoundry S.r.l. All rights reserved. 1

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Page 1: The challenges posed by the use of substances and mixtures ...Positioning in Foundry Market ~Combining 200mm mainstream technologies for analog mixed signal: •with specialty foundry

L’Aquila 31 Maggio 2017Aula Magna DSU

U i ità d li St di d ll’A ilUniversità degli Studi dell’Aquila

The challenges posed by the use of substances and mixtures in the semiconductor industry

Fabrizio MarchiliEHSS Director

This research was financially supported by the European Union within the “LIFE BITMAPS” Project LIFE15 ENV/IT/000332. 

Confidential - LFoundry S.r.l. All rights reserved.1

Page 2: The challenges posed by the use of substances and mixtures ...Positioning in Foundry Market ~Combining 200mm mainstream technologies for analog mixed signal: •with specialty foundry

LFoundry a SMIC company is a leading specialized foundryLFoundry, a SMIC company, is a leading specialized foundry.

From the heart of ancient Europe, with the Headquarter in Avezzano (Italy), LFoundry isfocused on providing access to most advanced analogue manufacturing service with afocused on providing access to most advanced analogue manufacturing service with acapacity of >40,000 wafers/month, innovative technology extensions, including volume90nm and copper manufacturing, a strong emphasis on flexibility and customerpartnershippartnership.

LFoundry is supporting own technology IP for 150nm and 110nm with a large portfolio ofprocess proven libraries IP design tools and reference flows LFoundry’s key focus isprocess-proven libraries, IP, design tools and reference flows. LFoundry’s key focus isprimarily in automotive and industrial related applications including CIS, security, smartpower, embedded memory, and others.

As a SMIC Company, LFoundry can leverage skills and capabilities of one of the leadingsemiconductor foundries in the world and the largest and most advanced foundry in

i l d Chimainland China.

Confidential - LFoundry S.r.l. All rights reserved.2

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About SMIC

Semiconductor Manufacturing International Corporation ("SMIC") (NYSE: SMI; SEHK:Semiconductor Manufacturing International Corporation ("SMIC") (NYSE: SMI; SEHK:981) is one of the leading semiconductor foundries in the world and the largest andmost advanced foundry in mainland China. SMIC provides integrated circuit (IC)f d d t h l i t 0 35 i t 28 tfoundry and technology services at 0.35-micron to 28-nanometer.

Headquartered in Shanghai, China, SMIC has a 300mm wafer fabrication facility (fab)d 200 f b i Sh h i 300 f b d j it dand a 200mm mega-fab in Shanghai; a 300mm mega-fab and a majority owned

300mm fab for advance nodes in Beijing; and 200mm fabs in Tianjin and Shenzhen.SMIC also has marketing and customer service offices in the U.S., Europe, Japan,

d T i d t ti ffi i H Kand Taiwan, and a representative office in Hong Kong.

Confidential - LFoundry S.r.l. All rights reserved.3

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LFoundry Company Base Data

FOUNDATION REVENUE CAPACITY TECHNOLOGY TEAM

October, 2008.MBO from Renesas. 225 million $ Wafer per month:

40.000

R&D Engineering:90

HQ & Manufacturing in Italy, former Micron Fab.

Process & Equipment Engineering:110

Design:

Confidential - LFoundry S.r.l. All rights reserved.4

Design:14

Page 5: The challenges posed by the use of substances and mixtures ...Positioning in Foundry Market ~Combining 200mm mainstream technologies for analog mixed signal: •with specialty foundry

Positioning in Foundry Market

Combining 200mm mainstream technologies for analog mixed signal:• with specialty foundry offerings

• on moving forward technology nodes and wafer size requirements

SPECIALITY FOUNDRIES

FEA

TUR

E

ANALOG

1.0µm ... 0.25µm 150 / 200mm

HN

OLO

GY

ANALOGMIXED SIGNAL& SPECIALITY

FOUNDRY 180 90

TEC

H 180 … 90200mm DIGITAL FOUNDRY

≤ 45nm / 300mm

WAFER SIZE

Confidential - LFoundry S.r.l. All rights reserved.5

WAFER SIZE

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Service Model

QUALITY JOINT TECHNOLOGYCUSTOMER QUALITYINNOVATIVE

TECHNOLOGY COMMITMENT

JOINT TECHNOLOGYDEVELOPMENT

Technology development

CUSTOMERTECHNOLOGY

Adopting customer technology

FLEXIBILITYand production partnershipand customizing foundry technology

Excellent network to leading institutesNew integration e.g. for MEMS into CMOSTechnology IP generation

Special imaging technology know how and capabilitiesEngineering know how & IP for non-CMOS

Setup of full solutionstechnologies such as Optical Sensors, Power MOS, …

OPENFOUNDRY

Design environments and wafer fabrication basedDesign environments and wafer fabrication basedon advanced analogue/mixed signals technology

Flexible PDK platform (i-PDK) with accurate modelsContinuous mainstream technology enrichment with modules like Image Sensors/Pixel, Optical Sensors, High Voltage RF devices High density / low cost embedded memory

Confidential - LFoundry S.r.l. All rights reserved.6

High Voltage, RF devices, High density / low cost embedded memory, ... Specific qualifications like automotive and security

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LFoundry Global Footprint

HEADQUARTER AND FABGERMAN OFFICE

Landshut, Germany:ManagementSales & Marketing Head Office

HEADQUARTER AND FAB

Avezzano, Italy:ManagementHeadquarter Functions

Design

SALES REPS EUROPE

Manufacturing, Technology

Paris, France

JAPAN OFFICE

SALES REPS AND BUSINESS DEVELOPMENT OFFICE USA

Irvine, CAAustin TX

Yokohama, Japan

Austin, TX

SALES REPS ASIASouth Korea

Confidential - LFoundry S.r.l. All rights reserved.7

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Avezzano Fab At A Glance

Confidential - LFoundry S.r.l. All rights reserved.8

8

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Avezzano’s site: a history of resilience

Added Value 2013

Cu FEOL, BSi,90nm  techn,Technology development

(Lab in the Fab)Lean Organization

2016

Imager full conversionMake to Order  bzn  model 

ISO‐TS  QS

Added Value 2013

Capex , Productivity(WO/SQF, Yield, CT)

benchmark

CMOS ImagerTransfer

Jan 04Agreement New Ind Rel

2010‐116” – 8”

Conversion

2009New  labororganization 12 hrs ‐ shift

2006

2009

1998

20042009 Downturn 

Country  Competitiveness

Unions ConflitsPoor Productivity

200mm DRAM Cost  Competitiveness

150mm tecnology150mm tecnology

2013 stay Micron

2016 stay alone

Confidential - LFoundry S.r.l. All rights reserved.9

1998 150mm tecnology 150mm tecnology 

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Management

Dr. TZU-YIN CHIUCHAIRMANAppointed to CEO and Executive Director of SMIC in 2011.More than 30 years of semiconductor experiencePrior to joining SMIC, Dr. Chiu was President and CEO of Hua Hong NEC

SERGIO GALBIATI GÜNTHER ERNSTLFoundrySERGIO GALBIATIVICE-CHAIRMAN

More than 30 years of semiconductor experienceFormerly working for SGS-Thompson, Texas Instruments and Micron in various

t iti

GÜNTHER ERNSTCEO

More than 20 years of semiconductor experienceFormerly held various engineering and management positions at Renesas

LFoundry Board of Directorsmanagement positions Directors

JASON LIDIRECTOR

Appointed to Executive Vice President Legal/PA/GA of SMIC in No 2014

GARETH KUNGDIRECTOR

Joined SMIC in July 2012. He works as Executive Vice President, Investment and Strategic Business Development Legal/PA/GA of SMIC in Nov., 2014.

More than 30 years of semiconductor experiencePrior to joining SMIC, he was the Deputy-Director Secretary of the President’s office of the China Electronic Information Industry Group

President, Investment and Strategic Business Development and Finance and Company Secretary.Between 2003 and 2009, Mr. Kung worked at SMIC as the Group Treasurer and Group Controller and from July 2012 to February 2014 as the Company’s Chief Financial Officer. More than 25 years of work experiencePrior to joining SMIC Gareth Kung worked as chief

Confidential - LFoundry S.r.l. All rights reserved.10

Industry Group,Prior to joining SMIC, Gareth Kung worked as chief financial officer in publicly listed companies, private equity investment manager, banker and auditor.

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AboutAbout SemiconductorsSemiconductors

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SEMICONDUCTOR FOUNDRY

We are experiencing an incredible progress in all kind of detector/sensor technologies Image sensor are spreaddetector/sensor technologies. Image sensor are spread everywhere contributing to people FUN (selfies)

Confidential - LFoundry S.r.l. All rights reserved.1212

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SEMICONDUCTOR FOUNDRYWe are experiencing an incredible progress in all kind of detector/sensor technologies. Image sensor are spreaddetector/sensor technologies. Image sensor are spread everywhere contributing to people FUN (selfies), WELLBEING(AAL- Active and Assisted Living )( g )

Confidential - LFoundry S.r.l. All rights reserved.1313 PIR – Passive Infra‐Red

Page 14: The challenges posed by the use of substances and mixtures ...Positioning in Foundry Market ~Combining 200mm mainstream technologies for analog mixed signal: •with specialty foundry

SEMICONDUCTOR FOUNDRYWe are experiencing an incredible progress in all kind of detector/sensor technologies. Image sensor are spread everywhere contributing to people FUN (selfies), WELLBEING(AAL), SAFETY (ADAS – Advanced Driver Assistance Systems)

Confidential - LFoundry S.r.l. All rights reserved.14

Page 15: The challenges posed by the use of substances and mixtures ...Positioning in Foundry Market ~Combining 200mm mainstream technologies for analog mixed signal: •with specialty foundry

SEMICONDUCTOR FOUNDRY

We are experiencing an incredible progress in all kind of detector/sensor technologies. Image sensor are spread everywhere contributing to people FUN (selfies), WELLBEING( ) S ( S) ( )(AAL), SAFETY (ADAS), HEALTH (Medical Imaging)

Confidential - LFoundry S.r.l. All rights reserved.1515

Page 16: The challenges posed by the use of substances and mixtures ...Positioning in Foundry Market ~Combining 200mm mainstream technologies for analog mixed signal: •with specialty foundry

SEMICONDUCTOR FOUNDRYWe are experiencing an incredible progress in all kind of detector/sensor technologies Image sensor are spreaddetector/sensor technologies. Image sensor are spread everywhere contributing to people FUN (selfies), WELLBEING(AAL), SAFETY (ADAS), HEALTH (Medical Imaging),(AAL), SAFETY (ADAS), HEALTH (Medical Imaging), PRODUCTIVITY (Machine Vision)

Confidential - LFoundry S.r.l. All rights reserved.1616

Page 17: The challenges posed by the use of substances and mixtures ...Positioning in Foundry Market ~Combining 200mm mainstream technologies for analog mixed signal: •with specialty foundry

SEMICONDUCTOR FOUNDRY

We are experiencing an incredible progress in all kind of detector/sensor technologies Image sensor are spreaddetector/sensor technologies. Image sensor are spread everywhere contributing to people FUN (selfies), WELLBEING(AAL) SAFETY (ADAS) HEALTH (Medical Imaging)(AAL), SAFETY (ADAS), HEALTH (Medical Imaging), PRODUCTIVITY (Machine Vision), SECURITY (Surveillance SystemsSystems

Confidential - LFoundry S.r.l. All rights reserved.17

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SEMICONDUCTOR FOUNDRYWe are experiencing an incredible progress in all kind of detector/sensor technologies. Image sensor are spread everywhere contributing to people Fun (selfies), Wellbeing (AAL), Safety (ADAS), Health (Medical Imaging), Productivity (Machine Vision), Security (Surveilliance Systems) and KNOWLEDGE (Scientific and Space Imaging)

Confidential - LFoundry S.r.l. All rights reserved.18

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Microelectronics

Microelectronics relates to the study and manufacture of veryy ysmall electronic designs and components. Usually this meansmicrometer-scale or smaller These devices are typically mademicrometer-scale or smaller. These devices are typically madefrom semiconductor materials. Many components of normal electronicdesign are available in a microelectronic equivalent.These

include transistors, capacitors, inductors, resistors, diodes and , p , , ,(naturally) insulators and conductors can all be found in microelectronic devices.

Confidential - LFoundry S.r.l. All rights reserved.19

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Capacitors Available in Electronics

Confidential - LFoundry S.r.l. All rights reserved.2020

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…and in Microelectronics

~ 1mm = 10‐3m

~ 100 nm = 100 x 10‐9 m= 1 x 10‐7 m

104 times smaller

10000 times smaller 

Confidential - LFoundry S.r.l. All rights reserved.2121

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How small is small

100 micron

.11 micron

Human hair sectionHuman hair section

Confidential - LFoundry S.r.l. All rights reserved.22

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From a Different Perspective … 

http://learn.genetics.utah.edu/content/cells/scale/scale.htmlp g

Confidential - LFoundry S.r.l. All rights reserved.2323

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Semiconductor in Europe Se co ducto u ope

Confidential - LFoundry S.r.l. All rights reserved.24

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Supply chain

Confidential - LFoundry S.r.l. All rights reserved.25(sorgente: WSTS 2013) 

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CLEAN CLEAN EnvironmentMax one 0.5μm EnvironmentMax one 0.5μm particle per 33cm3 of airparticle per 33cm3 of air

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LFoundry and Europe innovation needs

On 2009 the European Commission disclosed its strategy about the so-called KeyEnabling Technologies (KETs) for EuropeEnabling Technologies (KETs) for Europe.

– The semiconductor business has been included on the KETs list

B d th d t “Vi i Mi i & St t R D i E Mi d NBased on the document “Vision, Mission & Strategy: RnD in European Micro- and Nano-Electronics”, Europe shows strengths related to:

– RnD capabilities and capacities in industry, institutes and academia;

– global leadership on More than Moore technologies and applications;

– leadership on the above‐mentioned segments;

– high skills of people.

We provide innovative solutions to bring our customer’s ideato life We wish an eco‐system by shaping strong partnerships withto life. We wish an eco‐system by shaping strong partnerships withRTOs, SMEs and Universities as well.We believe that the development of silicon‐based technologicalsolutions through an open manufacturing model can be part ofsolutions through an open manufacturing model can be part ofEurope’s renaissance on this business.

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THANK YOU