the advanced solution for thin film applications - agilent 3k-g system... · the advanced solution...
TRANSCRIPT
Agilent Turbo-V 3K-G System The Advanced Solution for Thin Film Applications
Agilent Turbo-V 3K-G SystemThe Advanced Solution for Thin Film Applications
The Only Truly “Integrated” System in the Market•Fullyintegratedsystemwithonboardpowersupply•Vent/purgevalvescontrolcapability•Integrateddiagnostics•Multipleinterfacecapability•Lowestpowerabsorption
Best Footprint to Performance Ratio•TheTurbo-V3K-Gisanoptimizedsolution
dedicated to the Thin Film Deposition application•ThehighestArgonpumpingspeed(2050l/s)foritssizeallowsuniformdepositionratesathighsubstratethroughput•Highestpumpingspeedinitsclass:2200l/sforNitrogen•Throughput:over1400sccmforNitrogen•RampUptime<6mins•Theall-turbo,morecompactrotordesigndelivershighestperformancewiththesmallestfootprint
Applications•TFDprocesseslike: PVDCoatingsystems,Evaporativesputteringapplications,Glass-coatingsystems,FlatPanelDisplaysubstrateprocessing,ThinFilmPhotovoltaicsmanufacturing,DataStorage,OpticalCoating,LargeAreaCoating•Otherapplicationslike: Vacuumfurnaces,IonImplanters,MBEsystems
Thermal Efficiency•NewdoubleloopSSTcoolingchanneldoublestheheatexchangesurface•Lesspowerconsumption(-25%)resultinginloweroperatingtemperature•Reducedbearingoperatingtemperatureextendsbearinglife
Oil-free, Robust and Reliable•Maintenance-freedesign: -nooilrefill -nopreventivemaintenance•MTTF>200,000hrs•Morecompactelectricalmotordesignreducesrotordiameter(-20%)andimproveselectricalefficiency(+15%)•State-of-the-artrotordesignreducesweightandmechanicalstress(-20%)•Agilent’snewrotor-shaftfitting(Patentpending)
eliminates rotor tensile stress
Best Turbo Solution for Thin Film Deposition
Features and Benefits Compression Ratio vs Foreline Pressure
Pumping Speed vs Inlet Pressure*
Technical SpecificationsPumpingspeedWithISO250F:
N2:2200l/s Ar:2050l/s He:1900l/s
Compressionratio: N2:>1x10 7
Ar:>1x10 8
He:6x103
Throughput(sccm) >1400forNitrogenBasepressure(mbar) <10-8 Inletflange ISO250FForelineflange KF40NWRotationalspeed 31800RPMStart-uptime <6minutesForelinepressure <0.5mbar
Recommendedforepump >60m3/h(dependingon gasflowrequirements)Operatingposition AnyCoolingmethods WaterWeight 52Kg
Stop Speed Reading (SSR)•ContinuedpumpspeedreadingaftertheSTOP
command•Allowsmanagementofpumpslowdown andshutdowntime•Allowscontrolledventingprocedureincombinationwithintegratedpurge/ventdevice(PatentPending)
Integrated Purge and Vent Valve•Bothpurgeandventvalvesareintegratedintothepumpbody
•Valvesaremanagedbytheintegratedelectronics• Protects suspension from contamination•Managesforoptimumpumpslowdown
Remote Control Panel•Enablescontrollofthepumpfromarackmounted
panel•Allowsmanualuserinterface•LCDisplayshowsimmediatepumpstatus
information
Multiple Interface•ProprietaryAgilentProfibuscommunicationcard andspecificGSDfile(optional)
•SerialinterfaceorremoteI/Oprovidecommunicationbetweenthepumpandsystemcontrols
•EnablesthepumptobeoperatedviaaPCusing T-PlusSoftware
Completely Maintenance Free thanks to Agilent's dry system lubricant• No oil•Noriskofsystemcontamination• No preventive maintenance•Designedtoallowmountinginanyposition withoutcompromises
Optimized Temperature Monitoring System •Integrateddoubleloopcoolingchannel•Activecontrolandmanagementofpumpoperatingparametersforthehighestthermalefficiency
•Assurespumpingsystemoperateswithin specificationsformaximumoperatinglife
Integrated, Waterproof Electronics (IP54)•Microprocessorbasedarchitecture•Electronicsarecompletelyprotectedinthepumpbody
•Simplifiespumpinstallationinthesystem•Compactdesignreducesoverallfootprintand
volume
MoniTorr & Remote Assist•IntegratedMoniTorrcard(optional)allows24/7monitoringofallpumpparameters
•AproprietaryAgilentSoftwarePackagecollectsalldata
•AllowsvirtualpresenceofAgilentSupportEngineersattheusersite
Service Capability Worldwide•24hAdvanceExchange,FactoryRepairandUpgradeProgramsallowtheglobalcoverageofpre-andpost-salessupportneeds
20-25 %more gas
throughput
capacity
15 %smaller
size(height)
• Comparisons referred to published competitors' specifications
0
500
1000
1500
2000
2500
1,0E-08 1,0E-07 1,0E-06 1,0E-05 1,0E-04 1,0E-03 1,0E-02 1,0E-01
Pumping speed [L/sec]
ArgonHeliumNitrogen
Pum
ping
spee
d [l/
sec]
Inlet Pressure [mbar]
1,E+00
1,E+01
1,E+02
1,E+03
1,E+04
1,E+05
1,E+06
1,E+07
1,E+08
1,E+09
1,00E-03 1,00E-02 1,00E-01 1,00E+00 1,00E+01
Compression Ratio
ArgonHeliumNitrogen
Foreline Pressure [mbar]
15-20 %
higher
pumping speed
Conp
ress
ion
ratio
(*) Measured with a 60 m3/h forepump
Thisinformationissubjecttochangewithoutnotice©AgilentTechnologies,Inc.2011PublishedJuly15,2011VPD-0511EN
Outline DrawingsPuMPInG SySTEMS (*) Part number AgilentTurbo-V3K-GISO250FSystemwithintegratedpurge/ventdevice 969-8888
AgilentTurbo-V3K-GISO250FSystemwithProfibusandintegratedpurge/ventdevice 969-8889
(*) Pumping Systems include Pump with 230V Integrated Electronics, Inlet Screen installed on the pump, separate center-ring and pre-installed IP54 Mating Connectors.
Both models can be equipped with Agilent’s MoniTorr device on request. Also 120VAC units available on request.
ACCESSORIES Part number MainscableNEMAPlug,3mlong 969-9958 MainscableEuropeanPlug,3mlong 969-9957 T-PlusSoftwareandserialcable 969-9883 Watercoolingkitfor6x8(IDxOD)flexibletube 969-9348 Watercoolingkitfor3/8in.IDflexibletube 969-9338
SPARE PARTS Part number IP54proofmatingconnectors 969-8960 InletscreenISO250 969-9350 O-ringandcenterringISO250 969-9144
Ordering Information
united States and CanadaAgilent Technologies121 Hartwell AvenueLexington, MA 02421USATel.: +1 781 861 7200Toll-Free: +1 800 882 7426Fax: +1 781 860 [email protected]
BeneluxAgilent Technologies Netherlands B.V.Herculesweg 84338 PL MiddelburgThe NetherlandsTel: +31 118 671570Fax: +31 118 671569Toll free: 00 800 234 234 00
BrazilAgilent Technologies BrasilAvenida Marcos Penteado de UlhoaRodrigues, 939 - 6° andarCastelo Branco Office Park,Torre Jacarandá - TamboréBarueri, Sao Paulo CEP: 06460-040Toll free : 0800-728-1405
ChinaAgilent Technologies (China) Co. LtdNo.3, Wang Jing Bei Lu, Chao Yang District, Beijing, 100102ChinaTel.: +86 (10) 6439 7888 Fax: +86 (10) 6439 1318Toll-Free: 800 820 [email protected]
FranceAgilent Technologies France7 avenue des TropiquesZ.A. de Courtaboeuf - B.P. 1291941 Les Ulis cedexFranceTel.: +33 (0) 1 69 86 38 84Fax: +33 (0) 1 69 86 29 88Toll free: 00 800 234 234 [email protected]
Germany & AustriaAgilent TechnologiesAlsfelder Strasse 6Postfach 11 14 3564289 DarmstadtGermanyTel.: +49 (0) 6151 703 353Fax: +49 (0) 6151 703 302Toll free: 00 800 234 234 00
IndiaAgilent Technologies India Pvt. Ltd.G01. Prime corporate Park,230/231, Sahar Road,Opp. Blue Dart Centre,Andheri (East), Mumbai – 400 099.IndiaTel: +91 22 30648287/8200 Fax: +91 22 30648250 Toll Free: 1800 [email protected]
ItalyAgilent Technologies Italia S.p.A. via F.lli Varian 5410040 Leini, (Torino)ItalyTel.: +39 011 997 9111
Fax: +39 011 997 9350Toll-Free: 00 800 234 234 [email protected]@agilent.com
JapanAgilent Technologies Japan, Ltd.8th FloorSumitomo Shibaura Building4-16-36 Shibaura Minato-kuTokyo 108-0023JapanTel.: +81 3 5232 1253Toll-Free: 0120 655 040Fax: +81 3 5232 [email protected]
KoreaAgilent Technologies Korea Ltd.Shinsa 2nd Bldg. 2F966-5 Daechi-dongKangnam-gu, SeoulKorea 135-280Tel.: +82 2 3452 2455Toll-Free: 080 222 2452Fax: +82 2 3452 [email protected]
MexicoAgilent TechnologiesConcepcion Beistegui No 109Col Del ValleC.P. 03100Mexico, D.F.Tel.: +52 5 523 9465Fax: +52 5 523 9472
SingaporeAgilent Technologies Singapore
Pte LtdNo.1 Yishun Avenue 7Singapore 768923Tel: +65 6215 8045Fax : +65 6754 0574Toll-Free: 1 800 2762622 [email protected]
South East AsiaAgilent Technologies Sales Sdn BhdUnit 201, Level 2 uptown 2,2 Jalan SS21/37, Damansara Uptown47400 Petaling Jaya ,Selangor , MalaysiaTel : +603 7712 6106Fax: +603 6733 8121Toll-Free: 1 800 880 805 [email protected]
TaiwanAgilent Technologies Taiwan Limited20 Kao-Shuang Rd., Pin-Chen City, 324Taoyuan Hsien , Taiwan, R.O.C.Tel. +886 34959281Toll Free: 0800 051 342 [email protected]
uK & IrelandAgilent Technologies UK Ltd 6 Mead RoadOxford Industrial ParkYarnton, Oxford OX5 1QUUKTel.: +44 (0) 1865 291570Fax: +44 (0) 1865 291571Toll free: 00 800 234 234 [email protected]
Agilent Technologies
Dimensions:millimeters[inches]
60°
40.00 [1.57]
VENT HOLE ON ENVELOPE
UPPER VIEWBOTTOM VIEW
30°0'
PURGE/VENTVALVES PORT
45°
FORELINE KF 40
WATER COOLING FOR RUBBER TUBE Ø 9.0
Ø 310.00 [Ø 12.20]Ø 11.00 [Ø 0.43] q.ty 12
PURGE/VENTVALVES PORT
EYEBOLT
CENTER-RING (ISO 250F)
Ø334.90 [Ø13.19]
FLANGE ISO 250F
16.0
0 [0
.63]
367.
30 [1
4.46
]
163.
13 [6
.42]
WATER COOLING FOR RUBBER TUBE Ø 9.0
258.
50 [1
0.18
]
VENT
GND HOLE
146.
00 [5
.75]
105.
00 [4
.13]
124.
00 [4
.88]
181.00 [7.13]
Ø329.00 [12.95]
CONTROLLERFRONT PANEL
Agilent Turbo-V 3K-G