7/29/2019 Tetraethyl Orthosilicate - Wikipedia, The Free Encyclopedia

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Tetraethyl orthosilicate

tetraethoxysilane

tetraethyl orthosilicate; ethyl silicate; silicic acid, tetraethyl ester; s ilicon

ethoxide; TEOS

Identifiers

CAS

number

78-10-4

PubChem 6517

ChemSpider6270

Jmol-3D

images

Image 1 (http://chemapps.stolaf.edu/jmol/jmol.php?

model=CCO%5BSi%5D%28OCC%29%28OCC%29OCC)

Properties

Molecular

formula

SiC8H20O4

Molar mass 208.33 g mol1

Appearance colourless liquid

Density 0.933 g/mL at 20C

Melting77 C, 196 K, -107 F

Tetraethyl orthosilicateFrom Wikipedia, the free encyclopedia

Tetraethyl orthosilicate is the chemical

compound with the formula Si(OC2H5)4.

Often abbreviated TEOS, this molecule

consists of four ethyl groups attached toSiO4

4 ion, which is called orthosilicate.

As an ion in solution, orthosilicate does

not exist. Alternatively TEOS can be

considered to be the ethyl ester of

orthosilicic acid, Si(OH)4. It is a

prototypical alkoxide.

TEOS is a tetrahedral molecule. Many

analogues exist, and most are prepared

by alcoholysis of silicon tetrachloride:

SiCl4 + 4 ROH Si(OR)4 + 4

HCl

where R = alkyl such as methyl, ethyl,

propyl, etc.

Applications

TEOS is mainly used as a crosslinking

agent in silicone polymers and as a

precursor to silicon dioxide in the

semiconductorindustry.[1] Other

applications include coatings for carpets

and other objects. TEOSis used in the

production of aerogel. These applications

exploit the reactivity of the Si-OR

bonds.[2]

Other reactions

TEOS has the remarkable property of

easily converting into silicon dioxide. This

reaction occurs upon the addition of

water:

Si(OC2H5)4 + 2 H2O SiO2 + 4

C2H5OH

This hydrolysis reaction is an example of

a sol-gel process. The side product is

ethanol. The reaction proceeds via a

IUPAC name

Other names

SMILES

InChI

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7/29/2019 Tetraethyl Orthosilicate - Wikipedia, The Free Encyclopedia

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point

Boiling

point166-169 C, 439-442 K, 331-336 F

Solubility in

water

decomp

Hazards

Main

hazards

Toxic

Flash point 45 C

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Except where noted otherwise, data are given for materials in their

standard state (at 25 C, 100 kPa)

Infobox references

series of condensation reactions that

convert the TEOS molecule into a

mineral-like solid via the formation of Si-

O-Si linkages. Rates of this conversion

are sensitive to the presence of acids and

bases, both of which serve as catalysts.

The Stber process allows the formation

of monodisperse silica particles.

At elevated temperatures (>600 C),

TEOS converts to silicon dioxide:

Si(OC2H5)4 SiO2 + 2

(C2H5)2O

The volatile coproduct is diethyl ether.

References

1. ^ D. Bulla, Deposition of thick TEOS PECVD silicon oxide layers for integrated optical waveguide applications.

Thin Solid Films. 1998; 334(1-2):60-64. Available at:

http://linkinghub.elsevier.com/retrieve/pii/S0040609098011171.doi:10.1016/S0040-6090(98)01117-1

(http://dx.doi.org/10.1016%2FS0040-6090%2898%2901117-1)

2. ^ Lutz Rsch, Peter John, Rudolf Reitmeier "Silicon Compounds, Organic" Ullmann's Encyclopedia of

Industrial Chemistry, 2002, Wiley-VCH, Weinheim. doi:10.1002/14356007.a24_021

(http://dx.doi.org/10.1002%2F14356007.a24_021) . Article Online Posting Date: June 15, 2000

NIST Standard Reference Database 69, June 2005 Release: NIST Chemistry WebBook(http://webbook.nist.gov/cgi/cbook.cgi?ID=C78104)

Details of TEOS deposition process

(http://timedomaincvd.com/CVD_Fundamentals/films/TEOS_O2_thermal.html)

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Categories: Ethoxides Silicate esters

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