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The top documents tagged [silicon bulk micromachining]
mems
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Silicon technology
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PROTON BEAM APPLICATIONS FOR SILICON BULK MICROMACHINING P. Nenzi 1, F. Ambrosini 1, M. Balucani 3, G. Bazzano 1, A. Klyshko 3, F. Marracino 1, L. Picardi
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03ess5850Lec 3-2
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