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The top documents tagged [plasma tools]
ION ENERGY AND ANGULAR DISTRIBUTIONS INTO SMALL FEATURES IN PLASMA ETCHING REACTORS: THE WAFER- FOCUS RING GAP* Natalia Yu. Babaeva and Mark J. Kushner
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EDGE EFFECTS IN REACTIVE ION ETCHING: THE WAFER- FOCUS RING GAP* Natalia Yu. Babaeva and Mark J. Kushner Iowa State University Department of Electrical
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17 th Real-Time Conference | Lisboa, 24-28 May 2010 Plasma Control @ COMPASS a Vertical Solution H. Fernandes, IPFN and IPP.cz CODAC team 1 Instituto de
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YY_MJK_ICOPS2009_01
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ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS
60 views
ION ENERGY AND ANGULAR DISTRIBUTIONS INTO SMALL FEATURES IN PLASMA ETCHING REACTORS:
67 views