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The top documents tagged [pecvd sio]
PECVD DRIE Anelva Sputter Dry Etch– Tool status Update Feb 2014 DRIE – Load lock O-Ring changed. Ordered for new set. – Wafer transport issue – robot
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A silicon based MEMS resistojet for propelling cubesats
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Nick Pohlman Patrick Schubel Jeremy Opperer Introduction to MEMS ME 381 Robert McCormick School of Engineering and Applied Science December 2002 Nanosatellite
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