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The top documents tagged [monte carlo pseuodoparticles]
SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS* Sang-Heon Song a) and Mark J. Kushner b) a) Department of Nuclear Engineering
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SEALING OF POROUS LOW- k DIELECTRIC WITH H 2 /He PLASMA CLEANING
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SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS * Sang-Heon Song a) and Mark J. Kushner b)
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* Work supported by Semiconductor Research Corporation
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SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS *
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