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The top documents tagged [frequency ccps]
WAVE AND ELECTROSTATIC COUPLING IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMAS UTILIZING A FULL MAXWELL SOLVER* Yang Yang a) and Mark J. Kushner b) a) Department
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ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS
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WAVE AND ELECTROSTATIC COUPLING IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMAS
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