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The top documents tagged [electrostatic actuators]
Investigation of effects associated with electrical charging of fused silica test mass V. Mitrofanov, L. Prokhorov, K. Tokmakov Moscow State University
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MEMS-BASED INTEGRATED-CIRCUIT MASS-STORAGE SYSTEMS L. R. Carley, G. R. Ganger, D. F. Nagle Carnegie-Mellon University
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