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The top documents tagged [deep implantation]
PROTON BEAM APPLICATIONS FOR SILICON BULK MICROMACHINING P. Nenzi 1, F. Ambrosini 1, M. Balucani 3, G. Bazzano 1, A. Klyshko 3, F. Marracino 1, L. Picardi
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Molecular ion sources for semiconductor ion implantation A. Hershcovitch 1, V. I. Gushenets 2, D. N. Seleznev 3, A. S. Bugaev 2, S. Dugin 4, E. M. Oks
221 views