t hru the eyes of a bug : mems for beginners
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T hru the Eyes of a Bug : MEMS for Beginners. I am not a bug. I am an ant!. M E M S ?. I guess you might never heard of MEMS. Where? Tell me. MEMS stands for M icro E lectro M echanical S ystems and we have a plenty of them in our daily lives…. - PowerPoint PPT PresentationTRANSCRIPT
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Thru the Eyes of a Bug:MEMS for Beginners
I am not a bug. I am an ant!
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MEMS?
I guess you might never heard of MEMS..
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MEMS stands for Micro Electro Mechanical Systems and we have a plenty of them in our daily lives…
Where? Tell me.
Me? Super Ant
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From www.lanl.gov/quarterly/q_sum03/airbags.shtml
This saved my life!
Airbag
In cars, the airbag sensor is one..
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Inside of the airbag sensor, a key component is an accelerometer, which detects a sudden motion and send an electrical signal to deploy the airbag.
Got it? A mechanical motion and an electrical signal are bridged.
MEMS Micro Electro Mechanical Systems
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Source: Analog Devices Inc.
Let’s talk about “micro”, then.This is a photo of the accelerometer.
Human hair
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The diameter of a human hair is about 50 t0 100 micrometers. 1,000 micrometers become 1 milimeter.
I am bigger than MEMS!
MEMS MEMS
Anything smaller than micro?It’s nano. 1,000 nano = 1 micron
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This is an array of MEMS mirrors.Yes, the ant is much bigger..
Source: Texas Instrument, http://www.dlp.com/
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Let’s take a close look.
These moving mirrors are used for HDTV sets and projectors.
Source: http://www.dlp.com/
Cool~!
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We can also find a MEMS component in an inkjet printer.
http://konicaminolta.com/
http://mimech.com/printers/inkjet-printer-technology.asp
Hole for ink droplet
http://www.interconnect-solutions.com/inkjet-printing.html
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As we can see, most of MEMS components are either used for measuring and detecting real world conditions (sensors) or for generating a motion (actuators).
Sweet~
Sensor
Actuat
or
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In summary, miniaturized sensors, actuators and systems fabricated by the use of lithography and/or other precision techniques are called MEMS.
What is lithography?
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I will explain…
Need to wear my glasses.
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Litho means “stone”Graphy means “writing”Original designs are drawn on a hard surface (like a limestone) and they are transferred to a soft substrate (like a paper).
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The traditional lithography technique uses ink for the pattern transfer.
In MEMS technology, a “mask”, “light” and a “photoresist” are used. A mask is similar to a film in a camera. The original design on a mask is transferred to a photoresist.The photoresist is sensitive to light and changes its chemical structure upon exposure.
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Instead of paper, we use a silicon wafer and coat it with a photoresist, then expose it under the mask. Using lenses we can reduce the size of the image easily. Yes, down to the micron level.
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The exposed photoresist can be dissolved(+)or left behind(-) after a chemical treatment.
This process is called development.
Mask
PositivePhotoresist
NegativePhotoresist
Light
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Source: IEEE SpectrumSee how it works?
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Repeating this photolithography process with deposition and/or etching,we can create complex multilayered structureslike this
Step 1
Step 2
Step 3
Step 4
Eureka!
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Source: NanoFab and BioMEMS Lab @ UCFSilicon Sensing Systems Ltd., Lucas NovaSensor, Sandia National Lab
Welcome to the world of MEMS!
Do you know what this is?
If so, please send an email to
joecho@mail,ucf.edu
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Produced by Prof. H. J. Cho“Ant” character created by A. Wesser
Under the support of National Scicence FoundationNSF CAREER ECS 0348603
Coming up… soon.
Thru the eyes of a Bug-BioMEMS for beginners
If you need a copy of this for educational purpose,please contact [email protected] with your name and school name.