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Symposium on Nanoscale Science & Engineering: Convergence of the Top Down and Bottom Up Approaches

Student Activity Center (SAC) - Salons University of North Carolina - Charlotte,

Charlotte, NC

Oct 24-25, 2005

Conference Chair

Prof. Ken Gonsalves [email protected]

tel: 704-687-3501

Conference Co-Chair

Asst. Prof. Tom Schmedake

[email protected] tel: 704-573-2661

Sponsored By:

Symposium on Nanoscale Science & Engineering: Convergence of the Top Down and Bottom Up Approaches, University of North Carolina, Charlotte, NC, Oct 24-25, 2005.

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Program

October 24 National Initiatives in Nanotechnology

Session Chair: Ken Gonsalves

7:30 - 8:30 On-site registration 8:30 – 8:50 Introductory Remarks: UNC-Charlotte Provost Joan Lorden 8:50 - 9:35 James Murday (Naval Research Labs): "The National Nanotechnology Initiative: a new strategic plan and anticipated impact on national defense and homeland security" 9:35 - 10:15 Jeffery Schloss (NIH): "Nanoscience and Nanotechnology Research for Biology and Medicine" 10:15 - 10:45 Douglas Lowndes (Oak Ridge National Laboratories): "ORNL's New Center for Nanophase Materials Sciences (CNMS): A Catalyst for 21st Century Science" 10:45 - 11:00 Break

Novel Materials and Theory

Session Chair: Tom Schmedake

11:00 - 11:45 Fraser Stoddart (UCLA): "An Integrated Systems-Oriented Approach to Molecular Electronics" 11:45 - 12:30 Thomas Mallouk (Penn State): "Nanoscale Building Blocks for Mesoscopic Materials" 12:30 - 1:45 Lunch - Chris Toumey (USC Nanocenter - University of South Carolina) "Reading Feynman into nanotech: does nanotechnology descend from Richard Feynman's 1959 talk?" Session Chairs: Wade Sisk and Mahy El-Kouedi 1:45 - 2:30 Richard Siegel (Rensselaer Polytechnic Institute): "Assembling Materials and Devices from Nanoscale Building Blocks." 2:30 - 3:15 Seth Marder (Georgia Institute of Technology): "Materials for the Microfabrication of Complex 3 Dimensional Structure, Using Two-Photon Activated Processes" 3:15 – 3:30 Break 3:30 - 4:15 Robert Shull (NIST): "Nanomagnetism: A New Materials Frontier."


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4:15 - 4:45 Edwin L. Thomas (MIT): "Templated Self Assembly of Block Copolymers: Top Down Meets Bottom Up"

4:45 – 5:15 Ray Tsu (UNC-Charlotte): "The Fundamentals of Quantum Dots and Devices" 5:30 - 6:30 Poster Session 6:30 - 7:00 Reception 7:00 Banquet - Dr Robert K. McMahan (Senior Advisor to the Governor NC for Science and Technology): "Innovation Capacity: North Carolina’s Science and Technology Based Economy and the Impact of Nanotechnology”

October 25 Nanotechnology in Medicine

Session Chair: Ken Gonsalves and Craig Halberstadt (CMC)

8:30 - 9:10 Jennifer West (Rice University): "Quantum Dots for Cancer Therapy" 9:10 - 9:50 Rudy Juliano (UNC-Chapel Hill): "Macromolecular Therapeutics; A Promising Application for Nano-technology" 9:50 - 10:30 Scott McNeil (NCI): "NCI - National Cancer Institute and Nanomedicine" 10:30 - 11:10 Nigel Walker (National Institute of Environmental Health Sciences, NIEHS): "Evaluating the safety of nanoscale materials: Current challenges and future directions" 11:10 – 11:20 Break Metrology and Instrumentation for Nanoscale Science

Session Chair: Terry Xu

11:20 - 12:00 Bob Hocken (UNC-Charlotte): "Precision Metrology" 12:00 - 12:40 Mark L. Schattenburg (MIT): "Patterning ultra-precision gratings for dimensional metrology."


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Posters Session (October 24, 5:30 - 6:30)

P1: Synthesis of Platinum Nanoparticles M. Marín-Almazo1, Luis Rendón2, and M. José-Yacamán3

1 Instituto Nacional de Investigaciones Nucleares, Km. 36.5 Carretera México-Toluca, C.P. 52045 Salazar, Edo. de México, México. 2 Instituto de Física, Universidad Nacional Autónoma de México, Apdo. Postal 20-364, Del. Álvaro Obregón, 01000 México, D.F., México. 3 Texas Materials Institute and Department of Chemical Engineering University of Texas at Austin, Austin, Texas. 78712-1062, USA

P2: Nanoscale Chemistry for Environmental Remediation in Soil and Groundwater

Bianca W. Hydutsky, Bettina Schrick, Benjamin Beckerman, Elizabeth B. Mack, and Thomas E. Mallouk

Department of Chemistry, The Pennsylvania State University, University Park, PA 16802

Kaiti Liao, Kiran Gill, Christopher Nelson, and Harch Gill

PARS Environmental, Inc., 6 S. Gold Dr., Robbinsville, NJ 08691

P3: Resists for Sub-100 nm Patterning at 193 nm Exposure Kenneth E. Gonsalves, Nathan D. Jarnagin and Minxing Wang

Department of Chemistry University of North Carolina Charlotte, NC 28223

P4: Nanoparticles from Diesel engine carbon soot by electron microscopy

techniques M.G. Cisniega-Rojas¹ , M.Marín – Almazo¹ , Y. Falcon.²

¹Instituto Nacional de Investigaciones Nucleares. Apdo. postal: 18-1027, México D.F.,C.P. 11801. ² Uam-Azc., Ave. San pablo 180, Col. Reynosa Tamaulipas. C.P. 02200 Mexico


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P5: Understanding and Manipulating Surface Chemsitry at the Atomic Scale

Charles Sykes Department of Chemistry Pearson Chemistry Laboratory Tufts University Medford, MA 02155

P6: Nanolithography and Probing of Electronic Properties of Single Walled

Carbon Nanotubes as Field Effect Transistor H.Chaturvedi1, J.C.Poler1,2

1Department of Physics and Optical Science,UNC,Charlotte,Charlotte,NC 2Department of Chemistry,UNC,Charlotte,Charlotte,NC

P7: Light Transmission through a Set of One-dimensional Dielectric Slabs

Wei Guo Department of Physics and Optical Science University of North Carolina - Charlotte Charlotte, NC 28223

P8: Characterization , Imaging, and Degradation Studies of Quantum Dots in Aquatic

Organisms

Sireesha Khambhammettu1, Kenneth E. Gonsalves2, Amy H. Ringwood3 University of North Carolina at Charlotte, NC-28223 1. Department of Mechanical Engineering 2. Department of Chemistry 3. Department of Biology

P9: Functionalized Carbon Nanotubes through Mechanically Bound and Rigid

Organometalic Complexes

Jordan Poler, Tom DuBois and Thomas A. Schmedake Department of Chemisrty University of North Carolina - Charlotte Charlotte, NC 28223


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P10: Nanofabrication Using 193 nm Lithography at the Triangle National Lithography

Center/NNIN

C. M. Osburn, J. O’Sullivan, D.G. Vellenga, and D.G. Yu Triangle National Lithography Center NCSU Nanofabrication Facility Department of Electrical & Computer Engineering North Carolina State University Raleigh, NC 27695-7920

P11: Nano/Micro Fabrication of Novel Polymers for Tissue Engineering Applications

Y. Umar1, C.E. Austin2, M. Thiyagarajan1, P.B. Nunes2, C.R. Halberstadt2, and K.E. Gonsalves1*

1Department of Chemistry, University of North Carolina at Charlotte, Charlotte, NC 2Department of General Surgery Research, Carolinas Medical Center, Charlotte, NC

P12: EUV Resists for sub 90 nm patterning- Moore’s law and the ITRS roadmap!

Muthiah Thiyagarajan and Kenneth E. Gonsalves,a)

Polymer Chemistry Nanotechnology Laboratory, Cameron Applied Research Center and

Department of Chemistry, Center for Optoelectronics and Optical Communications,

University of North Carolina, Charlotte, North Carolina 28223

Kim Dean SEMATECH, 2706 Montopolis Drive Austin, Texas 78741

P13: Application of Amphiphilic Polymers for Gene Delivery

T. Doran1, K. Gonsalves2, C. Yengo3, Q. Lu1 1. MDA/ALS Center, Cannon Research Center, Carolinas Medical Center, Charlotte,

NC 2. Department of Chemistry, UNC Charlotte, Charlotte, NC 3. Department of Biology, UNC Charlotte, Charlotte, NC

P14: Novel Nanopatterned Surfaces to Investigate for Optimal SERS Enhancement Tres Brazell1, E. Charles Sykes2, Mahnaz El-Kouedi1

1Department of Chemistry and 2Center for Optoelectronics and Optical Communications, University of North Carolina at Charlotte, Charlotte, NC, 28223

P15: Construction of chiral modified electrodes for electrochemically-promoted catalytic

asymmetric hydrogenation reactions

Melissa L. Golden, Stephanie A. Hackney, and Bernadette T. Donovan-Merkert Department of Chemistry, UNC Charlotte


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Abstracts


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October 24: National Initiatives in Nanotechnology

9:00 - 9:45 James Murday (Naval Research Labs):

“The National Nanotechnology Initiative: A new Strategic Plan and Anticipated Impact on

National Defense and Homeland Security”

Dr. James S. Murday Head, Chemistry Division, Naval Research Laboratory Executive Secretary, NSTC Nanoscale Science, Engineering and Technology Subcommittee Abstract: The U. S. National Nanotechnology Initiative (NNI) is one of many efforts around the globe seeking to exploit the scientific and technological opportunities associated with the behavior of nanostructures. After assessing the present global status of nanotechnology R&D and U.S. NNI accomplishments, this talk will address the recently revised NNI Strategic Plan (and the NNI Supplement to the President’s 2006 Budget - see http://www.nano.gov). Special attention will be devoted to nanotechnology implications for defense and homeland security, and to the transition of nanoscience discovery into innovative technology enabled by “Nano-Inside.”

Biographical Sketch: Dr. James S. Murday received a B.S. in Physics from Case Western Reserve in 1964, and a Ph.D. in Solid State Physics from Cornell in 1970. He joined the Naval Research Laboratory (NRL) in 1970, led the Surface Chemistry effort from 1975-1987, and has been Superintendent of its Chemistry Division since 1988. From May to August 1997 he served as Acting Director of Research for the Department of Defense, Research and Engineering. From January 2003 to July 2004, he served as Chief Scientist, Office of Naval Research. Dr. Murday's interest in nanotechnology dates back to the 1980's where he instituted programs to develop the proximal probes - scanning tunneling microscopy, atomic force microscopy and other related techniques. In 1997 he chaired the initial DOD Strategic Research Area committee on Nanoscience. He participated in the National Science and Technology Council (NSTC) Interagency Working Group that created the National Nanotechnology Initiative. From January 2001 to April 2003 he served as Director, National Nanotechnology Coordination Office. He is presently Executive Secretary to the NSTC Subcommittee on Nanometer Science Engineering and Technology (NSET).


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9:45 - 10:15 Jeffery Schloss (NIH)

Nanoscience and Nanotechnology Research for Biology and Medicine

Jeffery A. Schloss, National Human Genome Research Institute, National Institutes of Health Bethesda, MD 20892 U.S.A. Abstract: The National Institutes of Health support nanotechnology research because we anticipate opportunities to apply these emerging technologies to gaining a better understanding of biological mechanisms and to developing improved diagnostic and therapeutic approaches.

New research tools are already providing methods to study cells at a higher level of precision, including single molecule tracking in live cells and manipulation in vitro, to reveal basic molecular and cellular mechanisms. The future vision is to be able to manipulate (both move and modify) and measure individual molecules or cohorts of molecules in living cell and tissues with high precision. Such development should focus on a quantitative understanding of the cell and molecular biology that are at the heart of disease etiology, and will reveal novel strategies to prevent or treat disease. Nanotechnology also offers paths to improve conventional medical diagnostic tests and treatments, and to develop capabilities substantially surpassing those that are available today. Programmatically, NIH approaches this support from several viewpoints, offering different opportunities to investigators and stimulating different components of the R&D community.

Biographical Sketch: Dr. Jeffery A. Schloss is Program Director for Technology Development Coordination in the Division of Extramural Research at the National Human Genome Research Institute (NHGRI), a component of the National Institutes of Health (NIH). At NHGRI, he manages a grants program in technology development for DNA sequencing and single nucleotide polymorphism (SNP) scoring, and serves the NHGRI Division of Extramural Research and Office of the Director as a resource on genome technology development issues. He led the team that launched the Centers of Excellence in Genomic Science, and initiated a program to foster effective collaborations to validate new sequencing technologies for use in high-throughput laboratories. He currently manages the institute's $1000 genome sequencing technology development program. He previously served the NHGRI as program director for large-scale genetic mapping, physical mapping, and DNA sequencing projects.

Dr. Schloss represents NHGRI on the NIH Bioengineering Consortium, BECON, established in 1997 to foster support for bioengineering research. Schloss served as the chair of BECON from 2001-2004. Among his numerous BECON activities, he co-organized the BECON 2000 symposium on nanotechnology in biomedicine. He represents the NIH on the National Science and Technology Council's (NSTC) subcommittee on Nanoscale Science, Engineering and Technology (NSET), planning for the National Nanotechnology Initiative. He also co-chairs the working group for the NIH Nanomedicine Roadmap Initiative.

Dr. Schloss has worked with local high school students, teaching about DNA sequencing and the ethical and societal implications of Human Genome Project. Before coming to NIH in 1992, Dr. Schloss served on the biology faculty at the University of Kentucky. He earned the B.S. degree with honors from Case Western Reserve University, the Ph.D. in Cell Biology from Carnegie-Mellon University, and conducted postdoctoral research at Yale University. Dr. Schloss's research in cell and molecular biology included the study of non-muscle cell motility and regulation of mRNA expression.


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10:15 - 10:45 Douglas Lowndes (Oak Ridge National Laboratories)

ORNL’s New Center for Nanophase Materials Sciences: A Catalyst for 21st Century Science

Douglas H. Lowndes, Scientific Director Center for Nanophase Materials Sciences Oak Ridge National Laboratory Oak Ridge, TN 37831-6056 [email protected]

Abstract: On October 1 the Center for Nanophase Materials Sciences (CNMS) at Oak Ridge National Laboratory (ORNL) will become the first of five new Department of Energy (DOE) Nanoscale Science Research Centers (NSRCs) to begin operation. The CNMS will operate as a highly collaborative nanoscience user research facility, providing users with access to state-of-the-art facilities and expertise based on brief externally peer-reviewed research proposals. Use of the CNMS is free of charge for research that is in the public domain and intended for publication in the open literature. Research at the CNMS is organized under seven Scientific Themes selected to address challenges to understanding, opportunities for new technology, and to exploit special ORNL strengths. The latter include extensive nanomaterials synthesis and characterization capabilities; neutron scattering at the Spallation Neutron Source and High Flux Isotope Reactor; computational nanoscience in the CNMS’ Nanomaterials Theory Institute and using the new Leadership Scientific Computing Facility at ORNL; a new CNMS Nanofabrication Research Laboratory with nanoscale patterning capabilities; and a suite of instruments for imaging, manipulation, and properties measurements on nanoscale materials in controlled environments. The new research facilities, staff expertise, and nanoscience research opportunities available to users will be described, together with the planned operation of the user research program.

Research sponsored by the Division of Materials Sciences and Engineering, U.S. DOE, under contract DE-AC05-00OR22725 with UT-Battelle, LLC.

Biographical Sketch: Doug Lowndes is the Scientific Director of ORNL’s new Center for Nanophase Materials Sciences (http://cnms.ornl.gov) which begins operation in October 2005. In 1999-2000 he served as Chairperson of the Nanoscience/Nanotechnology Group for the Department of Energy’s Basic Energy Sciences (BES) program, during which time he edited and contributed to the report Nanoscale Science, Engineering and Technology Research Directions (1999) for BES. At ORNL Doug has served as leader of the Thin Film and Nanostructured Materials Physics group (http://www.tnmp.ornl.gov) in the Condensed Matter Sciences Division. His current research interests include nanomaterials growth and properties measurements, and the creation of multilayered oxides (heterostructures) with enhanced or new combinations of properties. He has authored or co-authored approximately 300 journal articles and book chapters, including a number of invited papers and reviews. From 1986-2000 Doug served as professor of materials science and engineering at the University of Tennessee-Knoxville, where he taught graduate and undergraduate courses in electronic materials and thin-film growth and supervised graduate student research. Doug is a Fellow of the American Physical Society; he was appointed a Corporate Fellow of ORNL in 1994; and in 1995 he was named ORNL’s “Scientist of the Year”. In 2001 he was honored by UT-Battelle with an R&D Leadership Award “for his innovative leadership in the development of nanoscale science research and capabilities at ORNL.”


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October 24: Novel Materials and Theory

11:00 - 11:45 Fraser Stoddart (UCLA)

Nano Meccano : An Integrated Systems-Oriented Approach to Molecular Electronics

J Fraser Stoddart California NanoSystems Institute, University of California Los Angeles ([email protected]) Abstract: The development of molecular electronic devices for memory and logic applications in computing presents one of the most exciting contemporary challenges in nanoscience and nanotechnology. One basis for such a device is a two-terminal molecular switch tunnel junction that can be electrically switched between high- and low-conductance states. Towards this end, the concepts of molecular recognition and self-assembly have been pursued actively for synthesizing two families of redox-controllable mechanically interlocked molecules—bistable catenanes and bistable rotaxanes—as potential candidates for solid-state molecular switch tunnel junctions. In the case of a two-terminal molecular switch tunnel junction, the objective is to design a molecule that, at a specific voltage, switches from a stable structure (isomer) to another, metastable isomer with a different conductivity: the molecule needs to remain in the metastable state until either another voltage pulse is applied or thermal fluctuations cause a return to the ground state. The two states of the molecule correspond to the ON and OFF states of the switch and the finite stability of the metastable state leads to a hysteretic current/voltage response that forms the basis of the switch. However, such switching behavior can also arise from the intrinsic device capacitance, from charge storage in defect sites at the molecule/electrode interface, or from electrochemical modification of the electrode materials. Such artifacts can be ruled out by careful control experiments, but some other, non-molecular mechanism may nevertheless contribute to the switching response. Thus the challenge is not just to rule out artifacts, but also to verify that the effect is molecular in origin by establishing a correlation to solution-phase observations. Molecular switch tunnel junction devices that contain a monolayer of bistable mechanically interlocked molecules—both [2]catenanes and [2]rotaxanes that are bistable—have been sandwiched between silicon (or carbon nanotubes) and metallic electrodes. These devices can be voltage-switched between a stable Off and a metastable On state. We attribute these observations to an eleectrochemically driven translation of a viologen-containing ring from a tetrathiafulvalene recognition site to a dioxynaphthalene one to form the metastable state. The free energy barrier for relaxation back to the ground state provides an opportunity to correlate the devices with molecular properties in solution. To establish this correlation, we have performed variable temperature electrochemical measurements to quantify the metastable-to-ground state relaxation of these molecular switches not only in solution, but also in self-assembled monolayers and in polymer matrices, as well as in the molecular switch tunnel junctions. The free energy barriers to relaxation of the switches in these four different environments are, respectively, 16, 18, 18, and 21 kcal mol–1 at room temperature. Thus, although the corresponding relaxation rates slow down by a factor of 10,000 as the molecules are increasingly confined, the mechanism remains the same. IT IS UNIVERSAL.


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Some Relevant Literature: 1) A [2]Catenane Based Solid-State Electronically Reconfigurable Switch, Science 2000, 289, 1172–1175. 2) Two-Dimensional Molecular Electronics Circuits, ChemPhysChem 2002, 3, 519–525. 3) The Molecule-Electrode Interface in Single-Molecule Transistors, Angew. Chem., Int. Ed. 2003, 42, 5706–5711. 4) Single-Walled Carbon Nanotube Based Molecular Switch Tunnel Junctions, ChemPhysChem 2003, 4, 1335–1339. 5) The Metastability of an Electrochemically Controlled Nanoscale Machine on Gold Surfaces, ChemPhysChem 2004, 5, 111–116. 6) Langmuir and Langmuir-Blodgett Films of Amphiphilic Bistable Rotaxanes, Langmuir 2004, 20, 5809–5828. 7) Mechanical Shuttling of Linear Motor-Molecules in Condensed Phases on Solid Structures, Nano Lett. 2004, 4, 2065–2071. 8) Molecular Mechanical Switch-Based Solid-State Electrochromic Devices, Angew. Chem., Int. Ed. 2004, 43, 6486–6491. 9) The Role of Physical Environment on Molecular Electromechanical Switching, Chem. Eur. J. 2004, 10, 6558–6564. 10) Whence Molecular Electronics? Science 2004, 306, 2055–2056. 11) Superstructures and Properties of Self-Assembled Monolayers of Bistable [2]Rotaxanes on Au(111) Surfaces from Molecular Dynamics Simulations Validated by Experiment, J. Am. Chem. Soc. 2005, 127, 1563-1575. Biographical Sketch: Fraser Stoddart received his BSc (1964) and PhD (1966) degrees from Edinburgh University. In 1967, he went to Queen’s University, Kingston, Ontario as a National Research Council of Canada Postdoctoral Fellow, and then, in 1970, to the University of Sheffield as an Imperial Chemical Industries’ Research Fellow. Later that same year, he joined the faculty at the University of Sheffield as a Lecturer in Chemistry. After spending a sabbatical (1978-81) at the Imperial Chemical Industries’ Corporate Laboratory in Runcorn, he returned to Sheffield where he was promoted to a Readership in Chemistry in 1982. He was awarded a DSc degree by the University of Edinburgh in 1980 for his research on stereochemistry beyond the molecule. In 1990, he moved to the Chair of Organic Chemistry at Birmingham University and was Head of the School of Chemistry there (1993-97) before moving to the University of California, Los Angeles as the Saul Winstein Professor of Chemistry in 1997. In July 2002, he became the Acting Co-Director of the California NanoSystems Institute (CNSI). On May 1, 2003 he became the Director of the CNSI and assumed the Fred Kavli Chair of NanoSystems Science. Professor Stoddart has published over 700 scientific papers and is currently one of the 10 most highly-cited chemists, according to the Institute of Scientific Information. He has pioneered the development of molecular recognition-cum-self-assembly processes and template-directed protocols for the syntheses of mechanically interlocked compounds (catenanes and rotaxanes) that have been employed as molecular switches and as motor-molecules, respectively, in the fabrication of nanoelectronic devices and NanoElectroMechanical Systems (NEMS). His work has been recognized by many awards, including the International Izatt-Christensen Award in Macrocyclic Chemistry (1993), the American Chemical Society’s Cope Scholar Award (1999), and the Nagoya Gold Medal in Organic Chemistry (2004)He is currently on the international advisory boards of numerous journals, including Angewandte Chemie and the Journal of Organic Chemistry. He became an Associate Editor of Organic Letters on July 1, 2003. He was elected to the Fellowship of the Royal Society of London in 1994 and to the Fellowship of the German Academy of Natural Sciences, the Leopoldina, in 1999.


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11:45 - 12:30 Thomas Mallouk (Penn State) Nanoscale Building Blocks for Mesoscopic Materials Tom Mallouk Pennsylvania State University Abstract: The mesoscopic length scale can be defined as the regime in which the characteristic length of a physical or chemical effect is matched by a physical length in the material. Familiar examples are changes in the optical spectra of semiconductor and metal nanocrystals. Our group and many others have been developing nanoscale building blocks (metals and ligands, polyelectrolytes, crystalline metal oxide sheets, colloidal polymer and silica spheres, and template-grown nanowires) for chemical assembly on nanometer to micron length scales. This talk will describe our recent work on the synthesis of mesoscopic materials, and some of the emergent properties (long distance electron transfer, photonic confinement in solar cells, autonomous motion driven by catalytic reactions) that we find on different length scales. Biographical Sketch: Thomas E. Mallouk was born in New York and received an Sc.B. degree from Brown University. He was a graduate student at the University of California, Berkeley, and a postdoctoral fellow at MIT. In 1985, he joined the Chemistry faculty at the University of Texas at Austin. In 1993 he moved to Penn State, where he is now DuPont Professor of Materials Chemistry and Physics. He is best known for his work on inorganic self-assembly, and on the chemistry of porous, lamellar, and nanoscale materials. His research has focused on the application of inorganic materials to different problems in chemistry and physics, including molecular electronics, catalysis and electrocatalysis, photochemical energy conversion, chemical sensing, separations, superconductivity, and environmental chemistry. He is the author of approximately 240 scientific publications, including a few good ones, and has also edited three books on chemical sensing and solid state chemistry. He is an Associate Editor of the Journal of the American Chemical Society and the director of the Penn State Center for Nanoscale Science.


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12:30 - 1:45 Lunch - Chris Toumey (USC Nanocenter - University of South Carolina)

Reading Feynman into nanotech: does nanotechnology descend from Richard Feynman's

1959 talk? Chris Toumey USC NanoCenter, Sumwalt 103 University of South Carolina Columbia SC 29208 [email protected] Abstract: As histories of nanotechnology are created, one question arises repeatedly: how influential was Richard Feynman’s 1959 talk, “There’s Plenty of Room at the Bottom”? It is said that this talk was the origin of nanotech. It preceded events like the invention of the scanning tunneling microscope, but did it inspire scientists to do things they would not have done otherwise? Did Feynman’s paper directly influence important scientific developments in nanotechnology? Or is his paper being retroactively read into the history of nanotechnology? To explore those questions, I trace the history of “Plenty of Room,” including its publication and republication, its record of citations in scientific literature, and the comments of several luminaries of nanotechnology. This biography of a text enables us to articulate Feynman’s paper with the history of nanotechnology in new ways as it explores how Feynman’s paper is read. Biographical Sketch: Chris Toumey earned his Ph.D. in Anthropology at UNC – Chapel Hill. The main theme of his research is to use the methods of cultural anthropology to study scientific controversies, including creationism, fluoridation, cold fusion, and smoking. He is the author of approximately fifty articles and two books: God’s Own Scientists [1994] and Conjuring Science [1996]. He works in the University of South Carolina NanoCenter, where his work on societal interactions with nanotechnology addresses the ways people tell stories about nanotech, and the problem of public involvement in nanotech policy. His publications have appeared in Nanotechnology Law & Business, Engineering & Science, Techné, and other journals. He is also the creator and coordinator of the South Carolina Citizens’ School of Nanotechnology, an outreach program which has attracted national notice for its innovative ways of welcoming the lay public into discussions of nanotechnology.


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1:45 - 2:30 Richard Siegel (Rensselaer Polytechnic Institute) Assembling Materials And Devices From Nanoscale Building Blocks

Richard W. Siegel Rensselaer Nanotechnology Center and Materials Science and Engineering Department Rensselaer Polytechnic Institute, Troy, NY 12180 Abstract: The past decade has seen explosive growth worldwide in the physical, chemical, and biological synthesis and study of a wide range of nanoscale building blocks with unique properties. Great strides are being made worldwide in our ability to assemble these nanoscale building blocks to create advanced materials and devices with novel properties and functionalities. The novel properties of nanostructures are derived from their confined sizes and their very large surface-to-volume ratios. The former gives rise to unique size-dependent properties in the nanoscale (1-100 nm) regime, while the latter gives rise to the ability of nanoscale additions to conventional material matrices to dramatically change the host material’s properties. A perspective of this important research area will be presented based upon specific examples from our work in the Center for Directed Assembly of Nanostructures supported by the Nanoscale Science and Engineering Initiative of the National Science Foundation. Examples will be given of directed assembly of nanoparticles, nanotubes, and hybrid structures containing these and biomolecules, to make new materials and devices that possess enhanced mechanical, electrical, optical, and bioactive properties, and multifunctional combinations thereof. The opportunities and challenges facing the worldwide research community in moving forward in this area will be considered. Biographical Sketch: Dr. Siegel is the Robert W. Hunt Professor of Materials Science and Engineering and Director of the Rensselaer Nanotechnology Center and the NSF Nanoscale Science and Engineering Center for Directed Assembly of Nanostructures. His holds degrees from Williams College (AB 1958) and the University of Illinois in Urbana (MS 1960, PhD 1965) and did post-doctoral research at Cornell University before joining the faculty of the Department of Materials Science, State University of New York at Stony Brook (1966-76). He was a research scientist, group leader, and research program manager in the Materials Science Division at Argonne National Laboratory (1974-95). Dr. Siegel has been a visiting professor in Germany, Israel, India, Switzerland and Japan and also active in many professional organizations. He is a member of the Nanotechnology Technical Advisory Group of the US President’s Council of Advisors on Science and Technology, chaired the World Technology Evaluation Center worldwide study on nanostructure science and technology (1996-98), and was past chairman (1992-96) of the International Committee on Nanostructured Materials. Dr. Siegel has authored over 230 articles and 17 patents in the areas of defects, diffusion, and nanostructured metal, ceramic, composite, and biomaterials. He has presented more than 430 invited lectures and edited ten books. Dr. Siegel is a founder and Director of Nanophase Technologies Corporation, and received a 1991 US Federal Laboratory Consortium Award for Excellence in Technology Transfer. He is an Honorary Member of the Materials Research Societies of India and Japan, a recipient of an Alexander von Humboldt Foundation Senior Research Award (1994) in Germany, and a RIKEN Eminent Scientist Award (2001) in Japan.


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2:30 - 3:15 Seth Marder (Georgia Institute of Technology) Materials for the Microfabrication of Complex 3 Dimensional Structure, Using Two-Photon

Activated Processes

Seth R. Marder School of Chemistry and Biochemistry and Center for Organic Photonics and Electronics Georgia Institute of Technology 770 State Street Atlanta GA 30332 Abstract: Two-photon 3D lithography is a powerful new approach to the fabrication of complex microstructures and potentially nanostructures. This process requires the use of focused laser beams to excite molecules by a two-photon absorption mechanism. Using this method of excitation, absorption occurs only in the focal volume providing a way to activate chemical processes to produce patterns in materials with pinpoint control in three-dimensions. By computer controlled scanning of the laser beam focus within a photochemically active precursor material, virtually any three-dimensional structure can be fabricated with submicron resolution. Recently, we have developed highly efficient new two-photon absorbers, which advance the state-of-the-art one hundred fold, and have used them to demonstrate two-photon 3D lithography of polymers in negative tone resists and more recently in positive tone resist and in metallic systems. This work illustrates the promise for a practical fabrication technology with readily available laser sources. Two-photon 3D lithography may impact future electronic and photonic technology because of: 1) the limitless possibilities for the types of three dimensional structures that can be fabricated, 2) the ability to directly pattern materials ranging from transparent polymers to highly conducting metals, utilizing composites with ligand coated nanoparticle to seed the growth of metal, 3) the possibility to create “micromolds” that can be used for templated growth of a vast range of materials, allowing for the integration of disparate materials into devices and 4) the capability to fabricate structures from the nanoscale (< 200 nm) to the microscale, providing a means of integrating nanostructures with well established microscale technologies.

Biographical Sketch: Seth Marder is a Professor of Chemistry and Materials Science and Engineering, (courtesy) and the Director of the Center for Organic Photonics and Electronics, at the Georgia Institute of Technology. He is also a co-founder of Arizona Microsystems, L.L.C., Focal Point L.L.C. and LumoFlex, L.L.C. and is a member of the scientific advisory board of Lumera Corporation. Dr. Marder obtained a Bachelors of Science in Chemistry from Massachusetts Institute of Technology in 1978 and his Doctorate from the University of Wisconsin-Madison in 1985, where he was a W. R. Grace Fellow. Dr. Marder then was a postdoctoral researcher at the University of Oxford from 1985–1987. After his stay at Oxford, he moved to the Jet Propulsion Laboratory (JPL) California Institute of Technology (Caltech) where he was a National Research Council Resident Research Associate from 1987–1989. His research interests are in the development of materials for nonlinear optics, applications of organic dyes and nanomaterials for photonic, display, and electronic applications. Dr. Marder is a Fellow of the American Association for the Advancement of Science (2003) and the Optical Society of America (2004). He has co-authored over 200 research papers, has organized or served on organizing committees for over thirty-five scientific conferences,


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including chairing the Seventh International Conference on Organic Nonlinear Optics. In addition Dr. Marder has co-edited several proceedings including an ACS symposium series monograph entitled "Materials for Nonlinear Optics: Chemical Perspectives", as well as proceeding for SPIE and MRS. Among his various editorial activities, he has served on the Board of Reviewing Editors for Science Magazine.


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3:30 - 4:15 Robert Shull (NIST)

Nanomagnetism: A New Materials Frontier

Dr. Robert D. Shull Group Leader Magnetic Materials Group National Institute of Standards and Technology Gaithersburg, Maryland Abstract: Nanocrystalline materials can possess bulk properties quite different from those commonly associated with conventional large-grained materials. Nanocomposites, a subset of nanocrystalline materials, in addition have been found to possess magnetic properties which are similar to, but different from, the properties of the individual constituents. This is true whether the constituent phases are molecular materials or polycrystalline solids. New magnetic phenomena, unusual property combinations, and both enhanced and diminished magnetic property values are just some of the changes observed in magnetic nanocomposites from conventional magnetic materials. Here, a description will be presented of some of these new properties and the exciting magnetic applications envisioned for them. Particular attention will be devoted to three world-leading activities in this area at NIST being pursued in the Magnetic Materials Group: the preparation of GMR spin valves having the world’s highest MR values with the smallest switching fields, the prediction and discovery of the "Enhanced Magnetocaloric Effect" in magnetic nanocomposites, and the dynamic observation of magnetic domains [using the magneto-optic imaging film (MOIF) technique] which are found to exist in these materials, including in magnetic exchange-biased films. These activities are assisting the rapid development of ultra-high density magnetic recording media, high temperature magnetic refrigerators, next-generation hard and soft ferromagnets, and controllable magnetic switches. Biographical Sketch: Dr. Robert D. Shull is presently the Group Leader of the Magnetic Materials Group at NIST. He received a B.S. degree in Metallurgy and Materials Science from MIT in 1968, and both M.S. and Ph.D. degrees in Metallurgical Engineering in 1973 and 1976 respectively from the University of Illinois at Urbana-Champaign (UIUC). He was awarded a Postdoctoral Fellowship at CALTECH from 1976-1979, and then joined the National Bureau of Standards (NBS), now known as NIST, in 1979. Since joining NIST, he has pioneered the area of magnetic nanocomposite refrigerants, rapidly solidified the AlMn alloy in which "quasicrystals" were discovered, prepared the first laser-ablated High Tc superconductor, first explained the novel attractable levitation found in some high Tc materials, proved exchange-biased bilayers reverse their magnetic state asymmetrically, and discovered the first spin density wave in a ferromagnet. Dr. Shull has co-authored over 140 publications, edited 5 books, holds 3 patents, and presented over 200 invited talks. Dr. Shull is the Past Chairman of the International Committee on Nanostructured Materials and both initiated and helped write the National Nanotechnology Initiative (NNI) championed by President Clinton in year 2000. He still sits on the Nanoscale Science, Engineering and Technology (NSET) Subcommittee of the White House Office of Science and Technology Policy (OSTP) to help orchestrate that initiative. He is also the son of Dr. Clifford G. Shull, the winner of the 1994 NOBEL PRIZE in PHYSICS.


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4:15 - 4:45 Edwin L. Thomas (MIT) Templated Self Assembly of Block Copolymers: Top Down Meets Bottom Up Edwin L. Thomas Dept of Materials Science and Engineering MIT Abstract: Materials that can self-assemble are becoming the key building blocks of various advanced nanotechnologies based on “bottom up” fabrication methods. Self-organizing materials provide simple and low-cost processes to make large-area periodic nanostructures. Alternatively, the conventional “top-down” lithographic approaches offer superior nanometer-level precision and accuracy. By combining “bottom-up” self-assembly with “top-down” patterned templates, templated self-assembly (TSA) provides rich opportunities for fundamental studies of self-assembly behavior in confined environments, as well as a source of innovation in nanofabrication methods that benefit from the advantages of both “bottom-up” and “top-down” approaches. Self-assembly has been the focus of much research in the last four decades. These efforts have produced a solid foundation of understanding in the physics and chemistry of self-organizing processes in the bulk. Sophisticated lithographic tools enabling complex 3D structures for the microelectronic industry have also been developed during this time. Only recently have researchers sought to bring the two fields together. Templated self-assembly (TSA) is a method of inducing long range order in thin films of materials using artificial topographical and/or chemically-patterned templates. In contrast to conventional epitaxy in which the lattice of a thin film bears a well-defined relationship to the lattice of the underlying substrate, templates for TSA are not required to be crystalline materials. In the concept of templated self-assembly, the topography and/or chemical pattern of the templates instead of the atomic lattice of the substrate are used to guide the reorganization of self-assembled materials. The characteristic feature size of templates in TSA, LS, ranges from the same order-of-magnitude as the characteristic length, L0, of the self-assembled materials to much larger than L0. Block copolymers have been used as a low-cost nanopatterning tool to make nanodot arrays, nanowire arrays, decoupling capacitors, nanocrystal-based flash memory and catalysts for growing carbon nanotubes. Beyond the applications of short-range ordered nanostructures from typical block copolymer films, templated block copolymers provide well-registered nanostructures and can serve as alternative lithographic tools for nanofabrication applications requiring good dimensional control, pattern registration and low line-edge roughness. Programmable self-assembled block copolymer nanostructures can be achieved by both chemical and topographic substrate patterns. The integration of these templated self-assembly processes into devices has begun, for example in the fabrication of patterned magnetic media for high density magnetic recording. We believe that the use of block copolymers will be appropriate in a wide range of applications as a vehicle to introduce functional groups or functional materials with precise spatial control. For example the incorporation of nano-objects into block copolymers can provide a simple route to control the spatial distribution and orientation of nanoparticles and nanowires and provide ways to create complex hierarchical structures and devices. Biographical Sketch: Ned Thomas’ research interests include polymer physics and engineering of the mechanical and optical properties of block copolymers, liquid crystalline polymers, and hybrid organic-inorganic nanocomposites. He has served as Associate Head of the Department of Materials Science and Engineering and as Director of MIT’s Program in Polymer Science and


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Technology. Currently he serves as the Director of the Institute for Soldier Nanotechnologies at MIT. He and others from MIT co-founded OmniGuide Inc., in Cambridge. He holds a bachelor of science degree in Mechanical Engineering from the University of Massachusetts and a PhD in Materials Science and Engineering from Cornell University. Before coming to MIT, he founded and served as co-director of the Institute for Interface Science and was head of the Department of Polymer Science and Engineering at the University of Massachusetts. Dr. Thomas is the recipient of the 1991 High Polymer Physics Prize of the American Physical Society and the 1985 American Chemical Society Creative Polymer Chemist Award He was elected a Fellow of the American Physical Society in 1986 and a Fellow of the American Association for the Advancement of Science in 2003. Dr. Thomas has been a visiting professor and senior scientist at the Institut Charles Sadron at the Centre National de Recherche Scientifique for Macromolecules in Strasbourg, France; visiting professor at the Chemistry Department of the University of Florida, visiting professor in the Department of Physics at Bristol University; a Bye Fellow in the Department of Physics and Materials Science at Robinson College, Cambridge University; a visiting professor in the Department of Chemical Engineering and Materials Science at the University of Minnesota, the Alexander von Humboldt Fellow at the Institute for Macromolecular Chemistry at the University of Freiburg; and assistant professor in the Department of Chemical Engineering and Materials Science at the University of Minnesota. He has written the undergraduate textbook The Structure of Materials, has coauthored over 325 papers and holds eleven patents.


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4:45 - 5:15 Ray Tsu (UNC-Charlotte) Some Fundamental Issues with the Implementation of Quantum dots

Ray Tsu UNC-Charlotte Abstract: Some fundamental issues with the implementation of quantum dots are listed below: 1. Hermitian operators is central to Quantum mechanics designed to treat atoms and

molecules, seemingly stable forever. Losses may be treated with scattering formalism or with non-Hermitian operators. When lossy terms with non-linearity are present, the distribution for electrons becomes basically classical.

2. The issue of stability, redundancy and robustness with QD devices presents us the most serious challenge for the implementation of nano-electronics. The weight of sodium ions is more than 50,000 times heavier than electron, which translate to the ratio of fifteen bowling balls to a ping pong ball. Therefore living system uses ionic carriers. I doubt that Hi-Tech is ready to give up the speed advantage of electrons! The question is whether it is possible to develop an operating system with nano-electronic devices operating with ten to twenty electrons. Several examples of few electron systems will be discussed.

3. The input, active, and output parts of devices in the nanoscale regime are not clearly distinguishable. Electrically, contacts must have a sufficiently large number of electrons for defining voltage; and optically, a sufficient area for interaction with light. Therefore, quantum dots, must be distributed in a plane between planar contacts, working much like quantum well devices.

Biographical Sketch: Dr. R. Tsu started his professional career at the Bell Telephone Laboratories, Murray Hill, NJ, 1961, working on the theory and experiments related to electron-phonon interaction in piezoelectric solids. He became a close collaborator of Leo Esaki (Nobel Laureate in 1973) at IBM T. J. Watson Research Center where he joined in 1966. A man-made semiconductor superlattice and modulation doping were conceived jointly with Esaki, in 1969; and resonant tunneling in 1973, which led to a rapid development of man-made quantum materials and quantum structures eventually evolved into the present day quantum dots and nanoelectronics. He received the Am. Phys. Soc. -International New Materials Prize (1985); Fellow of Am. Phys. Soc. (1980), and Alexander von Humboldt Award (1975). He came to UNCC in 1988 and became a distinguished Professor in 1995.


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October 25: Nanotechnology in Medicine

8:30 - 9:10 Jennifer West (Rice University)

Diagnostic and Therapeutic Applications of Gold Nanoshells Jennifer West Cameron Professor of Bioengineering and Director of the Institute of Biosciences and Bioengineering at Rice University Rice University Abstract: Metal nanoshells are a realtively new class of nanoparticles consisting of a dielectric core nanoparticles (such as silica) surrounded by an ultrathin layer of metal (such as gold). By changing the size and composition of each consitutent of the nanoshell, one can tune the plasmon resonance across much of the visible and infrared regions of the electromagnetic spectrum. For biomedical applications, we are using silica-gold nanoshells designed for resonance in the near infrared, where penetration of light through tissue is maximal. It is also possible to design nanoshells such that the extinction at the resonant wavelength is predominantly absorption, predominantly scattering, or somewhere between these extremes. The gold surface provides good biocompatibility and easy means to conjugate polymers and biomolecules (such as antibodies, aptamers or peptides) to the nanoshell surface. Using nanoshells that strongly absorb near infrared light to generate heat, we have developed a new type of targeted hyperthermic cancer therapy. In mice, 100% tumor regression and long term survival without tumor regrowth has been achieved. Using nanoshells that strongly scatter, we have developed near infrared optical imaging contrast agents that have allowed detection of tumor cells with high sensitivity. Additionally, we have developed an integrated detection and therapy scheme, using nanoshells that both scatter and absorb. Biographical Sketch: Dr. Jennifer West is the Cameron Professor of Bioengineering and Director of the Institute of Biosciences and Bioengineering at Rice University. Part of her research program is focused on the development of novel nanomaterials for biomedical applications, particularly in cancer and cardiovascular disease. Dr. West was the 2004 recipient of the Frank Annunzio Award for Innovation from the Christopher Columbus Foundation, listed in the MIT Technology Review TR100 and was the 2003 Nanotechnology Now "Best Discovery of the Year". Her research program is funded by NIH, NSF, DOD and private foundations, and she is also a founder of Nanospectra Biosciences.


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9:10 - 9:50 Rudy Juliano (UNC-Chapel Hill)

Macromolecular Therapeutics; A Promising Application For Nanotechnology

Rudy Juliano Dept. of Pharmacology UNC-Chapel Hill Abstract: Macromolecular therapeutics involves the use of relatively high molecular weight molecules such as peptides and oligonucleotides as therapeutic agents. There is a very natural linkage between nanotechnology and macromolecular therapeutics since a major issue is the delivery of macromolecules into cells and tissues. Our work has centered on the regulation of cancer-associated genes with antisense or siRNA oligonucleotides. We have employed a variety of delivery strategies including 'cell-penetrating peptides', dendrimers, and polymeric nanoparticles. While excellent pharmacological effects can be attained in cells in culture, in vivo delivery of therapeutic macromolecules remains a challenge.

Biographical Sketch: Dr. Rudy Juliano is a Professor in the Department of Pharmacology at the University of North Carolina at Chapel Hill. His research interests include macromolecular therapeutics and also cell adhesion molecules and signal transduction. Dr. Juliano received his B.S. in 1963 from Cornell University and went on to receive his Ph.D. in Biophysics from the University of Rochester in 1971. He followed that with a post-doctoral appointment at the Roswell Park Memorial Institute. He joined the University of North Carolina’s Department of Pharmacology in 1987 and served as Chair of the department from 1987-2002. In 1993, Dr. Juliano was recipient of a Fogarty Fellow (Wellcome-CRC Institute). Dr. Juliano has served as the editor or associate editor of Cancer Resarch, Advanced Drug Delivery Reviews, and Molecular Pharmacology. He has also served on the editorial board of several other journals including: Cell Adhesion and Communication, Antisense Research and Development, Oligonucleotides, Pharmaceutical Research, Biochimica et Biophysica Acta, and Journal of Cell Biology.


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9:50 - 10:30 Scott McNeil (NCI)

Preclinical Characterization of Nanoparticles

Scott McNeil, Nanotechnology Characterization Laboratory NCI-Frederick(SAIC-Frederick) Frederick, MD, USA. Abstract: The Nanotechnology Characterization Laboratory (NCL) conducts preclinical efficacy and toxicity testing of nanoparticles intended for cancer therapeutics and diagnostics. The NCL is a collaborating partnership between NCI, the U.S. Food and Drug Administration and the National Institute of Standards and Technology. As part of its assay cascade, NCL characterizes nanoparticles' physical attributes, their in vitro biological properties, and their in vivo compatibility using animal models. The Laboratory facilitates the rapid transition of basic nanoscale particles and devices into clinical applications by providing the critical infrastructure and characterization services to nanomaterial providers. It is a national resource available to investigators from academia, industry and government. The presentation will provide an overview of the NCL, discuss parameters that are critical to biocompatibility, and present assays used for preclinical characterization of nanoparticles. Biographical Sketch: Dr. McNeil serves as Director, Nanotechnology Characterization Laboratory for the National Cancer Institute at Frederick where he conducts pre-clinical characterization of nanomaterials intended for cancer therapeutics and diagnostics. Prior to joining NCI-Frederick (i.e. SAIC-Frederick), he served for three years as Senior Scientist in the Nanotech Initiatives Division at SAIC where he transitioned basic nanotechnology research to government and commercial markets. He has advised Industry and State and US Governments on the development of nanotechnology and is a member of several governmental and industrial working groups related to nanotechnology policy, standardization and commercialization. Dr. McNeil's professional career includes tenure as an Army Officer, with tours as Chief of Biochemistry at Tripler Army Medical Center, as an intelligence analyst at the Defense Intelligence Agency and earlier as a Combat Arms officer in the Gulf War. He is an invited speaker to numerous nanotechnology-related conferences and has six patents pending related to nanotechnology and biotechnology. He received his bachelor's degree in chemistry from Portland State University and his doctorate in cell biology from Oregon Health Sciences University.


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10:30 - 11:10 Nigel Walker (National Institute of Environmental Health Sciences, NIEHS) National Toxicology Program activities evaluating the safety of materials produced through

nanotechnology.

Nigel J.Walker Ph.D. National Toxicology Program National Institute of Environmental Health Sciences National Institutes of Health 111 Alexander Drive PO Box 12233, MD EC-34 Research Triangle Park, NC 27709 Tel:919-541-4893 [email protected] Abstract: Currently there is a paucity of data on the potential toxicity of manufactured nanoscale materials. The unique and diverse physico-chemical properties of nanoscale materials suggest that toxicological properties may differ from materials of similar composition but larger size. The National Toxicology Program (NTP) coordinates toxicology research and testing programs within the federal government and conducts research to provide information about potentially toxic chemicals to health, regulatory, and research agencies, scientific and medical communities, and the public. The NTP is currently engaged in a research program to investigate fundamental questions concerning how nanoscale materials are absorbed and distributed in vivo and whether they can adversely impact biological systems. As part of this research program, the following specific studies are currently ongoing and will discussed: evaluation of the role of size and surface characteristics on the biological fate and disposition of nanoscale crystalline fluorescent semiconductors (“quantum dots”) and titanium dioxide following dermal exposure; evaluation of the in vivo toxicity of fullerene-based nanoscale materials by pulmonary and systemic routes of exposure.

Biographical Sketch: Dr. Nigel Walker is a toxicologist in the Environmental Toxicology Program at the National Institute of Environmental Health Sciences (NIEHS), where he has been since 1995. He received his Ph.D. in Biochemistry from the University of Liverpool in England in 1993 followed by postdoctoral training in environmental toxicology at the Johns Hopkins School of Hygiene and Public Health in Baltimore MD. Dr Walker is currently the lead toxicologist for several initiatives of the DHHS National Toxicology Program including the NTPs toxicological evaluation of nanoscale materials. He has over 50 scholarly publications including peer reviewed journal articles, book chapters and government reports. He is an adjunct assistant professor in the Curriculum in Toxicology at the University of North Carolina at Chapel Hill and is currently President of the North Carolina Society of Toxicology.


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October 25: Metrology and Instrumentation for Nanoscale Science 11:20 - 12:00 Bob Hocken (UNC-Charlotte) Engineering Nanotechnology at UNC Charlotte

Bob Hocken UNC-Charlotte Charlotte, NC 28223 Abstract: Nanotechnology can be defined as “the study, development and processing of materials, devices, and systems in which structure on a dimension of less than 100 nm is essential to obtain the required functional performance.” There are currently two very different approaches to nanotechnology, the first and more classical approach is commonly called engineering nanotechnology. This approach involves using classical deterministic mechanical and electrical engineering principles to build structures with tolerances at levels approaching a nanometer. The other approach, sometimes called molecular nanotechnology is concerned with self-assembled machines and the like and is far more speculative. At Charlotte’s Center for Precision Metrology we have been working in engineering nanotechnology for more than a decade. We started with molecular manipulation with scanning probe microscopes in the late 1980s and have continued to develop new measurement systems, nano-machining systems and nano-positioning devices. In this talk I will describe our work in nano-cutting, nano-positioning with the Sub-Atomic Measuring Machine (SAMM), sensing with Near-field Scanning Optical Microscopes (NSOMs), and a new machine we are building for nanoimprinting. I will conclude with some comments on future challenges in nanotechnology and nanometrology.

Biographical Sketch: After completing a post doctoral assignment at the National Bureau of Standards, Dr. Hocken took a position in what was then the Dimensional Technology Section of the Optical Physics Division. This Section was responsible for the dimensional metrology calibrations for the United States as well as research in this same area. In a few years Dr. Hocken became chief of this section which later became the Dimensional Metrology Group. During this period he developed software correction of Coordinate Measuring Machines and the use of computer assisted theodolites (with Bill Haight) for large-scale stereotriangulation. In 1980 he was promoted to chief of the Automated Production Technology Division and played a lead role in the development of the Automatic Manufacturing Research Facility. In the early 80s he, with Kam Lau, developed the laser tracker for large-scale metrology and actively assisted in the creation of the first measuring machine standard ASME B89.1.12. He next became chief of the Precision Engineering Division a position he held from 1985 to 1988. In 1988 he came to UNC Charlotte as the Norvin Kennedy Dickerson Jr. Distinguished Professor of Precision Engineering. At Charlotte he has built a Center for Precision Metrology which is both nationally and internationally recognized as a center of excellence in dimensional measurement and manufacturing. He is now director of this Center, which is supported by the National Science Foundation, the State of North Carolina, and industry. The Center performs research and educates undergraduate and graduate students in metrology and manufacturing. During his career at UNC Charlotte Dr. Hocken has also performed research in areas ranging from large-scale metrology to nanotechnology. He was also very active in developing standards for machine tools and measuring machines (B5 and B89 standards). He is currently working with several other universities on an NSF funded Nanoscale Science and Engineering Center as well as a variety of other research projects. He has over a hundred papers and several patents in the areas of precision engineering and has taught for over 15 years.


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October 25: Metrology and Instrumentation for Nanoscale Science 12:00 - 12:40 Mark Schattenburg (MIT) Patterning ultra-precision gratings for dimensional metrology

Mark L. Schattenburg Space Nanotechnology Laboratory, Massachusetts Institute of Technology,

Cambridge, MA 02139

Abstract: All precision tools require a stable and accurate reference frame in order to control the relative motion of a probe or beam with respect to the work piece. This includes lithography tools, diamond turning machines, electron microscopes, atomic force microscopes, etc. The reference frame requires, in turn, some means of establishing an accurate length scale that can be compared to the motion of the substrate or probe. As the precision of our tools shrink into the nanometer domain, improvement in the accuracy of reference frames becomes imperative. For the highest precision work, the length scale has been traditionally provided by a laser interferometer. However, the environmental susceptibility of interferometers renders them useless for nano-precision work unless extraordinary efforts are made to control the environment (e.g., operating in vacuum). At MIT we are developing technology using phase-locked scanning laser beams using a tool called the Nanoruler in order to pattern large gratings with phase precision of a few nanometers. These ultra-precision gratings will form the basis of new optical encoders with superior accuracy to laser interferometers. In a new NSF-supported MIT-UNCC research program, we will develop new technology to reduce the phase errors of the gratings patterned by the Nanoruler into the deep-picometer range. Biographical Sketch: Dr. Mark L. Schattenburg is Senior Research Scientist in the MIT Kavli Institute of Astrophysics and Space Research. He is Director of the Space Nanotechnology Laboratory and Associate Director of the NanoStructures Laboratory. His principal interests are in the area of micro/nanofabrication technology, optical and x-ray interferometry, advanced lithography including optical, x-ray, electron-beam and nano-imprint, nano-metrology, x-ray optics and instrumentation, x-ray astronomy, high-resolution x-ray spectroscopy and space physics instrumentation utilizing nanotechnology. He has made numerous contributions to advanced lithography. He is co-inventor of the attenuated (or halftone) phase-shift mask (PSM) that is licensed to semiconductor manufacturers around the world and is the only PSM option widely used for production of computer chips. He was a pioneer of x-ray lithography (XRL) and responsible for a number of innovations, including the first use of refractory metal absorbers, the “microgap” x-ray mask and the flip-bonded x-ray mask. He was the first to demonstrate the replication of sub-100 nm lines by XRL with out-of-contact masking. He is also the co-inventor of spatial-phase-locked electron-beam lithography (SPLEBL) which led to the world’s most accurate electron-beam writer. He is a leading expert in interference lithography and pioneered advanced homodyne and heterodyne fringe locking technology, multi-level resist processing and achromatic interference lithography. He is the inventor of scanning-beam interference lithography and developed the “Nanoruler,” the world’s most precise grating patterning tool. Dr. Schattenburg has a B.S. degree in physics from the University of Hawaii in 1978 and a Ph.D. in physics from MIT in 1984. He is a member of the Optical Society of America, the American Vacuum Society, SPIE, the Institute of Electrical and Electronic Engineers and the American Society for Precision Engineering. He was awarded the 2003 BACUS Prize by SPIE for the development of phase shift mask technology and an R&D 100 award in 2004 for the invention of the Nanoruler.


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Poster Abstracts


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P1: Synthesis of Platinum Nanoparticles

M. Marín-Almazo1, Luis Rendón2, and M. José-Yacamán3

1 Instituto Nacional de Investigaciones Nucleares, Km. 36.5 Carretera México-Toluca, C.P. 52045 Salazar, Edo. de México, México.2 Instituto de Física, Universidad Nacional Autónoma de México, Apdo. Postal 20-364, Del. Álvaro Obregón, 01000 México, D.F., México.3 Texas Materials Institute and Department of Chemical Engineering University of Texas at Austin, Austin, Texas. 78712-1062, USA The synthesis of nanoparticles of different materials has great importance because of all the possible applications in nanotechnology, from electronics, magnetism, photonic devices to catalysts. These potentialities are mainly due to the quantum size effect, which is derived from the dramatic reduction of the number of free electrons in particles in the range 1-10 nm. The chemical synthesis methods appear to offer many advantages over other methods in the controlled production of nanoparticles. The use of hydrotriorganoborates as reducing agents leads to colloidal transition metals in organic phases. In the present work we display the growth of platinum nanoparticles stabilized with a 1-dodecanethiol using the reducing agent lithium trirthylborohydride in tetrahydrofuran. It was observed that particle growth likely occurs in the size range from 2 to 4 nm. It was also observed that most of the particles show an fcc structure. The observation of high resolution electron microscopy (HREM) images with an image processor and the corresponding FFT of the images are discussed. These studies show small particles produced by a colloidal method and reveal the structural characteristics of obtained samples. Contact Author: Presenting Author: Margarita Marín-Almazo Organization: ININ Instituto Nacional de Investigaciones Nucleares, Km. 36.5 Carretera México-Toluca, C.P. 52045 Salazar, Edo. de México, México. Phone: 53-29-72-00 Ext. 2893 Fax: 53-29-72-40 E-mail: [email protected]

P2: Nanoscale Chemistry for Environmental Remediation in Soil and Groundwater

Bianca W. Hydutsky, Bettina Schrick, Benjamin Beckerman, Elizabeth B. Mack, and Thomas E. Mallouk

Department of Chemistry, The Pennsylvania State University, University Park, PA 16802 Kaiti Liao, Kiran Gill, Christopher Nelson, and Harch Gill PARS Environmental, Inc., 6 S. Gold Dr., Robbinsville, NJ 08691


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Soil and groundwater contain a legacy of chemical substances - including halogenated organics and toxic metal ions - from industrial and agricultural processes. Several years ago, scientists at the University of Waterloo developed a remediation method based on zero-valent iron, which has since been investigated by numerous researchers. Chemical reduction by iron converts halogen-containing compounds to relatively innocuous hydrocarbons, and reducible metal ions (Cr(VI), Pb(II), Hg(II), As(V), Tc(VII)) to less soluble forms. Still, the inaccessibility of the deep subsurface and the large volume of soil or water affected by a chemical spill make the clean up of contaminants both costly and technically daunting. To address this problem, we have developed chemical "delivery vehicles" that transport metal nanoparticles through soils. This talk describes the design of these supported metal nanoparticles, their interaction with the complex matrix of natural soils, and the mechanism of their reactions with halocarbons and toxic metal ions. P3: Resists for Sub-100 nm Patterning at 193 nm Exposure

Kenneth E. Gonsalves, Nathan D. Jarnagin and Minxing Wang Department of Chemistry University of North Carolina Charlotte, NC 28223 We are developing methacrylate based resists suitable for 193 nm exposure for sub-100 nm patterning. These resists feature a photoacid generator bound to the polymer chain. It has been reported that photoacid generators have limited compatibility with the chemically amplified resist matrix that leads to phase separation, non-uniform acid distribution and migration during the baking process. To alleviate these problems, it is proposed that PAG units be incorporated in the resist chain, rather than blending monomeric PAG with the resist polymer. Also, these methacrylate resists incorporate the lactone group for substrate adhesion, and the bulky ethyl adamantyl protecting group for improved lithographic performance. The polymer bound PAG resists, poly (u-butyrolactone methacrylate-co-2-ethyl-2-adamantyl methacrylate-co-PAG), were synthesized using free radical polymerization. The average molecular weights of the polymers were 1700-2000 and the polydispersities were around 1.7. The glass transition temperatures were 112˚ to 137˚. PAG incorporated resists, as well as PAG blended resists were exposed using the ASML 5500/9xx optical lithography system, with 0.63 NA. Exposed wafers were evaluated using SEM. The blended resists provided 140 nm isolated lines, while the PAG incorporated resists provided 80 nm isolated lines and 110 nm line/space features. Analysis shows polymers with the highest amount of EAMA, and 8% incorporated PAG provided the best features. The associated photospeed for the 110 nm line space features was 4.25 mJ/cm2. Faster photospeed provides system advantages such as less thermal management of the mirrors and mask, and potentially increased component lifetimes. Analogous resists are currently being developed for EUV. Key Word: phenylmethacrylate dimethylsulfoniumtriflate photoacidgenerator (PAG) Support of Intel Corp OR & SEMATECH INT TX is acknowledged. User Facilities at the NSF Nanofabrication Center at NCSU are also acknowledged


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P4: Nanoparticles from Diesel engine carbon soot by electron microscopy techniques M.G. Cisniega-Rojas¹ , M.Marín – Almazo¹ , Y. Falcon.²

¹Instituto Nacional de Investigaciones Nucleares. Apdo. postal: 18-1027, México D.F.,C.P. 11801. ² Uam-Azc., Ave. San pablo 180, Col. Reynosa Tamaulipas. C.P. 02200 Mexico

Carbon soot is a scourge. It looks and smells bad, and it is a health hazard. It is also wasted energy, which is a paradox since soot forms in a diesel engine , where you will expect complete combustion and no waste. The causes of soot production are among the most important unresolved problems of combustion science .

This paper outlines how electron microscopy methods are being used to complement the carbon soot analysis methods. Information is provided to illustrate how morphology and individual particle chemistry data offer the potential to provide greater insight into the concentrations and sources of organic and elemental carbon species.

Carbon soot is an agglomeration of particles impregnated with “tar” formed in the incomplete combustion of diesel engine. Carbonaceous material are present in high concentrations in the streets of Mexico City ( 1.5 – 30 µg/m³ ). Soot particles form aggregates of primary spheres of 15 to 35 nm in a chain structure, the chains can agglomerate and form particles up to a few micrometers. The actual structure may influence processes such as coagulation and condensation which depend on particle dimension . When soot particles are aged , they are internally mixed with other organic compounds by coagulation , condensation and in a cloud processing. This ageing processes are still in research, as is quite difficult to estimate the life time of the soot particles. Other important processes involving carbon particles are also interactions with: hν, O³, SO², NOx . Organic carbon (OC) can be directly emitted during combustion processes such as those ocurring in non catalyts vehicles in diesel engines. It can be formed also by transfer of mass to the aerosol phase of low volatility products that can result from oxidation of organic gases due to Secondary Organic aerosols. Although Primary Organic aerosols usually dominate, Secondary Organic aerosols are an important contribution to the atmospheric organic carbon sink. Also non-antropogenic sources of organic material are relevant. In fact, α – pirene, β- pirene and monoterpenes emitted from the forest, can contribute significantly to aerosol in presence of dense trees coverage. The concentration from OC ranges are 5 µg (C) m³ at the nuclear center to 4 – 35 µg (C) m³. In Mexico City located 35 km from south east from the Nuclear Center. Contact Author: Presenting author: María Guadalupe Cisniega

Organization: Instituto Nacional de Investigaciones Nucleares (ININ). Km. 36.5 Carret. Mexico – Toluca. C.P. 52045 Salazar, edo. De Mexico, Mexico. Ph: 55 53 29 73 67 Fax: 53 29 72 40 E-mail: [email protected]


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P5: Understanding and Manipulating Surface Chemsitry at the Atomic Scale

Charles Sykes Department of Chemistry Pearson Chemistry Laboratory Tufts University Medford, MA 02155 [email protected]

Our work is aimed at understanding how atoms and molecules interact with surfaces, and building novel nanoscale structures by controlling these interactions. We use Low-Temperature Scanning Tunneling Microscopy (LT-STM), a very powerful surface science technique, which enables direct visualization and control over single atoms and molecules on conductive surfaces. We will study how molecules interact with the electron density inside confined systems (Quantum Corrals) and investigate how we can tailor these interactions in order to spontaneously self-assemble molecules into new surface architectures.

Also, STM will be used to investigate the surface chemistry of model chiral systems with the aim of understanding mechanism by relating chemical reactivity to the atomic scale structure of these potentially important industrial catalysts.

P6: Nanolithography and Probing of Electronic Properties of Single Walled

Carbon Nanotubes as Field Effect Transistor

H.Chaturvedi1, J.C.Poler1,2 1Department of Physics and Optical Science,UNC,Charlotte,Charlotte,NC 2Department of Chemistry,UNC,Charlotte,Charlotte,NC

Carbon nanotubes and nanowires are important materials for new nanotechnology devices and sensors. Future opotoelectronic devices can be made from assemblies of nanostructured materials. We have fabricated back-gated single walled carbon nanotube field effect transistors. . Devices were processed with standard optical lithography and high resolution e-beam lithography. These devices can potentially be used for fabricating future Optoelectronic devices.

The Nanotubes were dispersed and ultra-Sonicated to obtain individual SWNT. These SWNT then form the gate channel of the fabricated field effect transistor. Our preliminary electronic results of the device will be presented. Also, our acquired capabilities in Nano-alignment and Nano-manipulation will be presented along with Atomic force Microscopy of Single Walled Carbon Nanotubes. We are using these devices to study charge injection into the nanotubes and the resultant effect on the tube’s transport properties


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P7: Light Transmission through a Set of One-dimensional Dielectric Slabs

Wei Guo

Department of Physics and Optical Science University of North Carolina - Charlotte Charlotte, NC 28223 Light transmission through identical dielectric slabs whose distribution is arbitrary is formulated in the one-dimensional space using the theory of multiple scattering. Two specific cases are considered after the light transmittance is derived. First, the slabs are assumed to be regularly arranged with a common spacing, so that they form a finite photonic crystal. It is revealed that bandgaps are caused by multiple scattering of light within and between the slabs, and that the more slabs in the crystal, the more bandgaps appear. Second, the defects in the crystal are mimicked via randomly shifting some slabs away from their regular locations. It is then found when more defects are presents some bandgaps in the crystal can be removed. The defects also effectively reduce the crystal into a discrete random medium, but, not as in continuous one-dimensional random media, resonance transmission occurs in the present case at fixed frequencies. P8: Characterization , Imaging, and Degradation Studies of Quantum Dots in Aquatic

Organisms

Sireesha Khambhammettu1, Kenneth E. Gonsalves2, Amy H. Ringwood3

University of North Carolina at Charlotte, NC-28223 1. Department of Mechanical Engineering 2. Department of Chemistry 3. Department of Biology

Nanoparticles may be introduced into aquatic environments during production processes and also as a result of release following their use in electronic and biological applications. The purpose of these studies was to characterize and image the behavior of quantum dots (QD) in seawater, and the accumulation of and toxicity to potential biological receptors. For these studies, oyster embryos as well as isolated hepatopancreatic cells were used. Fluorescent Confocal microscopy, electron diffraction and electron microscopy were used to determine the size distribution and composition of quantum dots and also to verify the accumulation and cellular localization inside these cells.

Furthermore, there are natural differences in environmental factors that may affect the degradation rates of QD’s, including salinity and pH conditions, as well as seasonal differences in temperature. To determine the effects of salinity on degradation rates, non functionalized QD’s composed of a Cd/Se core surrounded by layers of Zn (Evident Technologies) were added to 0.22 filtered seawater samples of different salinities (10, 20, and 30 parts per thousand), and the changes in emission spectra over time were determined; likewise, the potential effects of pH were evaluated under a range of environmentally realistic pH conditions (e.g. pH 7, 7.5, and 8); and the impacts of temperature (10, 20, and 30 degrees centigrade) were determined. These kinds of basic studies are essential for addressing the potential impacts of nano engineered particles on aquatic organisms.


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P9: Functionalized Carbon Nanotubes through Mechanically Bound and Rigid

Organometalic Complexes

Jordan Poler, Tom DuBois and Thomas A. Schmedake

Department of Chemisrty University of North Carolina - Charlotte Charlotte, NC 28223 Carbon nanotubes and nanowires are important materials for new nanotechnology devices and sensors. Future opotoelectronic devices can be made from assemblies of nanostructured materials. One difficulty in preparing these assemblies from nanotubes is the lack of site-specific points of contact and the subsequent compliance of the linkage between nanoparticles. Using molecular mechanics and dynamics calculations, we have modeled the assembly process of two-dimensional and three-dimensional structures of carbon nanotubes. The linkers between the nanotubes consist of novel metalodendrimers. These dendrimers have multiple binding sites with chemically specified chirality. Most importantly, they are mechanically rigid. This enables the multidimensional constraints and geometry, required for advanced electronic and optoelectronic devices. These computational results and the implied 3D nanostructures that are derived will be presented. Moreover we have synthesized several novel silicon based analogues of the same molecular motif. By combining these molecular systems with the Ru based supramolecular systems we can tailor their electron transfer capabilities into the carbon nanotubes. This results in the potential for optically altering the carrier density, and therefore the transport properties of the nanotubes.

P10: Nanofabrication Using 193 nm Lithography at the Triangle National Lithography

Center/NNIN

C. M. Osburn, J. O’Sullivan, D.G. Vellenga, and D.G. Yu Triangle National Lithography Center NCSU Nanofabrication Facility Department of Electrical & Computer Engineering North Carolina State University Raleigh, NC 27695-7920 Leading-edge, optical photolithography facilities have been installed in the Triangle National Lithography Center (TNLC), which is part of the National Nanotechnology Infrastructure Network (NNIN). The ASML PAS 5500-950B 193 nm step and scan system can provide about 60 full-wafer exposures per hour on 6” substrates (wafers or glass). The lithography process uses a 300 nm thick layer of acid-hardened resist (e.g. Rohm & Hass V41) on top of an 80 nm bottom anti-reflective coating (BARC) (e.g., Brewer Science AR29A-8). After 18 mJ/cm2 exposure, the chemically amplified resist is post-exposure baked for 90 sec at 120°C. SEM metrology is used to verify pattern sizes and resist sidewall angles. The scanner field size is 26 mm x 32 mm, making it possible to either expose a large area or, using a smaller field (e.g., 1 cm2), to combine several (e.g., 6) pattern layers on one mask plate to dramatically reduce reticle-making costs.


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Even without resist trimming, linewidths down to 80 nm and nano-dot arrays down to 130 nm have been demonstrated, Resist trimming, under development now, is expected to reduce those sizes by as much as a factor of 4. The TNLC, as well as the NCSU Nanofabrication Facility (NNF) are user facilities, where researchers from academia, industry, and government are welcome to come and use the equipment. Exposures and processing can also be done for remote users. Currently the scanner supports a variety of research programs in resist materials, CO2-based processes, nano-particle drug delivery, optical systems, and advanced semiconductor technology. Key Words: Nanolithography, Nanofabrication Support of NSF under the National Nanotechnology Infrastructure Network is gratefully acknowledged P11: Nano/Micro Fabrication of Novel Polymers for Tissue Engineering Applications

Y. Umar1, C.E. Austin2, M. Thiyagarajan1, P.B. Nunes2, C.R. Halberstadt2, and K.E. Gonsalves1*

1Department of Chemistry, University of North Carolina at Charlotte, Charlotte, NC 2Department of General Surgery Research, Carolinas Medical Center, Charlotte, NC

Engineering functional tissues and organs successfully depends on the ability to control cell orientation and distribution. Materials used for such purposes have to be designed to facilitate cell distribution and eventually guide tissue regeneration in 3D.

Non-patterned cells are effectively not tissues. “Tissues require that cells be placed and hold precise places often with precise orientations”. Cell patterning is therefore very important for tissue engineering. The goal of this research is to develop a biocompatible, biostable chemically amplified bioresist, with which patterns can be generated without involving any harsh chemical treatment.

A combinatorial approach of polymer synthesis can be used to increase the number of available polymeric materials for any application and also to study the correlation between polymer structure, material property, and function. In this research, this approach was used in a limited manner, to synthesize and characterize the copolymers, 3-(t-butoxycarbonyl)-N-vinyl-2-pyrrolidone-co-methyl methacrylate, and t-butyl methacrylate-co- N-vinyl-2-pyrrolidone and a terpolymer of t-butyl methacrylate-co- N-vinyl-2-pyrrolidone-co- methyl methacrylate in different compositions. See scheme 1 below. Due to its hydrophilic and good biocompatibility character, N-vinyl-2-pyrrolidone was used in the polymer systems.

Photoresist solutions were prepared by dissolving a polymer and triarylsulfonium hexafluoroantimonate used as a photoacid generator in cyclohexanone. It was then spin-coated at 2000 rpm on a glass microscope slide and baked at 120oC to remove the solvent. Exposures were done through two types of masks (25µm line by 25µm space and 25µm line by 50µm space) on a Contact Mask Printer. The exposed samples were immediately baked at 120oC on a hot plate and developed in a dilute aqueous base solution (2.6 x 10-3M) for 60s to reveal the patterns as shown in Figure 1.


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Rat Fibroblast cells were cultured on patterned surfaces using DMEM containing 10% FBS. Glass slides with patterns were rinsed with sterile Phosphate Buffered Saline (PBS) several times and placed in a 1-well Lab-Tek chamber coverglass, which was precoated with poly (2-hydroxyehtyl methacrylate). Cells were washed with serum-free medium before seeding onto the samples at a density of 1.0 x 105 cells/well. Nonpatterned scaffolds were used as a control. After seeding, fibroblast cells were cultured on the materials at 37oC in 8% CO2 atmosphere for various periods of time. At the end of each incubation period, the samples were rinsed with PBS to remove nonattached cells. It was observed that on the patterned polymer substrate, cells were strongly aligned, elongated, and became bipolar along the engineered grooves (Figure 1 c & d). However, it appears that the 50µm space may prevent crossover of cells between the channels (1d). These results imply one potential application of using this technique in combination with 3-D bioresorbable constructs to produce an oriented tissue-like structure from fibroblasts, which will have desirable mechanical strength and flexibility similar to that of normal tissue. AFM studies indicated that the developed regions consisted of grooves less than 250 nm in depth, providing contact guidance for cell alignment in addition to their hydrophilic character.

Finally 3-D porous scaffolds were attempted using PLA, PCL, and PLGA. Resist solutions of poly (t-BOC-NVP-co-MMA) were used to modify their surfaces. Cell culture studies were performed to illustrate the varying cell adhering properties of several different polymer surfaces.

P 12: EUV Resists for sub 90 nm patterning- Moore’s law and the ITRS roadmap!

Muthiah Thiyagarajan and Kenneth E. Gonsalves,a)

Polymer Chemistry Nanotechnology Laboratory, Cameron Applied Research Center and

Department of Chemistry, Center for Optoelectronics and Optical Communications, University of

North Carolina, Charlotte, North Carolina 28223

Kim Dean SEMATECH, 2706 Montopolis Drive Austin, Texas 78741 a) Electronic mail: [email protected] Extreme Ultraviolet (EUV) lithography at wavelength of 13.4 nm has emerged as a promising candidate to meet the resolution requirements of the microelectronics industry for the production of dense features with critical dimensions for the 45 nm technology node and beyond. In addition to developing the exposure tools themselves, significant challenges remain in developing photoresist materials with all of the required imaging properties. At the 45nm technology node, the sensitivity of a resist must be approximately 10mJ/cm2 or less and patterned features must exhibit a line edge roughness (LER) of less than 5 nm. In general the absorbance of hydrocarbon polymers containing aromatic rings is smaller than those of the hydrocarbon polymers. The presence of aromatic rings is also known to improve the etch resistance of a polymer. It is known that the LER of the resist patterns is adversely influenced by postexposure bake (PEB) and by resist development. LER refers to interface roughness (IR) of the sidewalls projected onto the substrate plane, rather than two-dimensional IR of the sidewall interface. So reducing LER is indispensable for nanolithography. Roughening occurs due to factors related to the nonuniformity


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of polymers structures at the molecular level, such as oligomer components, polymer aggregates and phase separation structures and those related to statistical variations in photochemical events . It has also been found that size of aggregates depends on both molecular weight of a resist polymer and its structure. In our approach, the photoacid generator was incorporated in the main chain of the polymer to enhance lithographic properties such as photospeed and LER. A polymer bound PAG resists, poly (HOST-co-EAMA-co-PAG1) and poly (HOST-co-EAMA-co-PAG2) has been synthesized and evaluated as potential components of EUV resist materials with enhanced lithographic properties such as photospeed and LER. The polymer bound PAG resist exhibited faster photospeed and less LER than the corresponding blend PAG resists, poly (HOST-co-EAMA) blend PAG3(Tf) and poly (HOST-co-EAMA)blend PAG4(Nf). These results imply that this novel resist has advantages over conventional resists and should be further explored for application in EUV lithography. Furthermore, use of different counter anions such as triflate and nonaflate influences the lithographic performance. Sub-100nm features were obtained with enhanced lithographic performance using EUV exposure.

P13: Application of Amphiphilic Polymers for Gene Delivery

T. Doran1, K. Gonsalves2, C. Yengo3, Q. Lu1

4. MDA/ALS Center, Cannon Research Center, Carolinas Medical Center, Charlotte, NC

5. Department of Chemistry, UNC Charlotte, Charlotte, NC 6. Department of Biology, UNC Charlotte, Charlotte, NC

Non ionic copolymers consisting of polypropylene glycol (hydrophobic) and polyethylene glycol (hydrophilic) in a triblock configuration hold a great potential for gene and nucleic acid delivery. They are easily synthesized and manipulated to produce polymers that vary widely in their physical properties. The number of blocks in each of the segments can be varied to produce a wide array of polymers with highly diverse physical properties and potential interactions with target transgenes or oligonucleotides. The efficiency of gene delivery with amphiphilic polymers can be further improved by incorporating functional groups critical for gene delivery into cells which will induce DNA encapsulation and protection. We have recently examined several commercially available triblock polymers for their interaction with nucleic acid and effects on cell survival and gene delivery. Preliminary studies found that polymers improve efficiency of gene delivery in vivo and in vitro differentially. We were also able to demonstrate that polymers bind to nucleic acid differentially. Our results indicate that systematic investigation into the interaction between polymer and nucleic acid in connection with the effect of polymers on gene delivery could reveal the relationship between structure and function and lead to new designs of polymers that should increase delivery efficiency, provide specific targeting of cells, and reduce toxicity.


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P14: Novel Nanopatterned Surfaces to Investigate for Optimal SERS Enhancement

Tres Brazell1, E. Charles Sykes2, Mahnaz El-Kouedi1

1Department of Chemistry and 2Center for Optoelectronics and Optical Communications, University of North Carolina at Charlotte, Charlotte, NC, 28223

We will present the fabrication and characterization of novel nanopatterned surfaces that are employed as SERS substrates. Commercial Reynolds™ aluminum foil is anodized to grow aluminum oxide. The growth of aluminum oxide on the surface creates nano-indentions or pores on the metal surface. The aluminum oxide is removed or etched using Cr(VI)oxide for several hours. After etching, the surface of the anodized aluminum is now covered with indentations ranging in size from 20 to 120 nm, as dependent on controlled growth conditions. By simply varying one parameter, the anodization voltage, one can test a wide range of pore spacings to determine optimal SERS enhancement. Aluminum has its plasmon resonance in the UV region. Silver or gold can be electrodeposited onto the surface to shift the plasmon resonance into the visible region were Raman spectra can be collected. An Atomic Force Microscope is employed to visualize the aluminum nanopatterned surface. The AFM is also used to verify that enough Ag or Au has been deposited to conserve the overall topography of the nanopattern surface. P-NDMA is adsorbed onto the Nanopatterned surface, and its SERS enhancement is investigated using a MicroRaman Spectrometer. Nanopatterned surfaces provide advantages in that they can be fabricated rapidly at low costs and exhibit a high level of homogeneity. This allows us to fabricate a wide range of configurations to test for optimum SERS enhancement.

P15: Construction of chiral modified electrodes for electrochemically-promoted catalytic

asymmetric hydrogenation reactions.

Melissa L. Golden, Stephanie A. Hackney, and Bernadette T. Donovan-Merkert Department of Chemistry, UNC Charlotte We are designing new polymer-modified electrodes for potential use in electrochemically-promoted catalytic asymmetric synthesis. The electrodes are constructed by tethering terthiophene to chiral catalysts and then oxidizing the modified terthiophenes to produce films on electrode surfaces. The synthesis of the terthiophene monomers and their electropolymerization will be presented.

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