8/13/2019 Syllabus ME3281

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Microsystems design and applications (ME3281)

Pre- / Co- Requisites:None

 Assessment:

Course will be 100% CA, with a project / laborator wor!"

#rie$ escription o$ the moule:&icrosstems technolo' has emonstrate power$ul capabilities an becomeincreasin'l popular in man areas o$ science an en'ineerin'" &icrosstems-baseproucts are alrea in the mar!et, replacin' e(istin' technolo', or creatin' newpossibilities" )his moule will 'i*e a broa introuction to microsstems technolo', anwill co*er the $unamentals o$ micro$abrication, theoretical esi'n issues o$microsstem-base e*ices, an their applications to a *ariet o$ en'ineerin' $iels suchas aerospace, mechanical, electrical, telecommunications an bioen'ineerin'"

+ollowin' topics will be co*ere in the moule:

1. Introduction *er*iew o$ &icrosstems )echnolo'calin' law an per$ormance&ar!ets $or &.& e*icesn$ormation resources

2. Microfabrication fundamentals Photolitho'raph)hin $ilm eposition an etchin'ur$ace-micromachinin'#ul!-micromachinin'

processes#onin'

3. Materials for microsystems*er*iew o$ materials use in microsstems&aterial properties o$ sin'le crstalline silicon&iller inices an wa$er ienti$ication&echanical, thermal, an electrical properties o$ other commonl use materials

4. Beams and diapragms for microsystemsntrouction to static beha*ior o$ elementar beams an membranes

!. Microactuators *er*iew o$ actuation methos.lectrostatic actuationParallel-plate microactuatorComb-ri*e microactuatorPull-in an stable tra*el ran'e+unamentals o$ namics an *ibrationampin' in microactuators)hermal actuation

8/13/2019 Syllabus ME3281

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#asic motion control in microsstems

". Microsensors Pieoresisti*e sensin' an si'nal processin'Capaciti*e sensin' an si'nal processin'+orce $eebac!

&icromachine microaccelerometers&.& 'roscopes&.& pressure sensors

 #. $ptical MEM%

#asic builin'-bloc!s $or optical microsstems&icrohin'es an $ree-space micro optical bench&icromirrors an micromirror arras&.& optical switches, attenuators, an tunable lasers $or $iber optical

communication&.& base projection isplasptical &.& $or aapti*e optics

8. Microfluidics and Bio&MEM% #asic $luiic concepts2aminar $low&icro-*al*es, pumps an mi(ers&icro-channels.lectrowettin'roplet 'enerators+low sensors2ab-on-a-chip

Re$erence an Reain' &aterials:

1" +unamentals o$ &icro$abrication, b &aou, CRC Press, 1334"5" &icromachine )ransucers ourceboo!, b 6o*acs, &c7raw-8ill, 1339"" &icrosstem esi'n, b tephen " enturia, 6luwer Acaemic Publishers, 5001"

&ajor ;ournals:1" ;" &icroelectromechanical stems <.../A&.=5" ensors an Actuators <.lse*ier=" ;" &icromechanics an &icroen'ineerin' <P=

&ajor con$erence proceein's:1" )ransucers >?? <nternational Con$erence on oli-tate ensors an Actuators=,

o-numbere ears since 139

5" &.& >?? <... @or!shop on &icro .lectro &echanical stems=, annual since1393"

" .urosensors >??, annual since 1394, proceein's publishe in special issues o$ensors an Actuators"

" oli-tate ensors an Actuators @or!shop, 8ilton 8ea, C, e*en-numbere earssince 139"

Bhou 7uan'a$$ice: .5-05-1 )el: D115D .mail: mpe'Enus"eu"s'