div class=ts-pagebutton class=gotoPage data-page=1Page 1button div class=ts-imageimg data-url=surface-micromachined-resonant-tuning-fork-proof-mass-pivot-test-electrode-figurehtmlpage=1 data-page=1 class=ts-thumb lazyload alt=Page 1: Surface-Micromachined Resonant Accelerometer · tuning fork Proof mass Pivot Test electrode Figure 2: Microphotograph of fabricated accelerometer the DETF structure to the lever arm loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422195ec56f6bc82f0c182427b069html5thumbnails1jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=2Page 2button div class=ts-imageimg data-url=surface-micromachined-resonant-tuning-fork-proof-mass-pivot-test-electrode-figurehtmlpage=2 data-page=2 class=ts-thumb lazyload alt=Page 2: Surface-Micromachined Resonant Accelerometer · tuning fork Proof mass Pivot Test electrode Figure 2: Microphotograph of fabricated accelerometer the DETF structure to the lever arm loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422195ec56f6bc82f0c182427b069html5thumbnails2jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=3Page 3button div class=ts-imageimg data-url=surface-micromachined-resonant-tuning-fork-proof-mass-pivot-test-electrode-figurehtmlpage=3 data-page=3 class=ts-thumb lazyload alt=Page 3: Surface-Micromachined Resonant Accelerometer · tuning fork Proof mass Pivot Test electrode Figure 2: Microphotograph of fabricated accelerometer the DETF structure to the lever arm loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422195ec56f6bc82f0c182427b069html5thumbnails3jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=4Page 4button div class=ts-imageimg data-url=surface-micromachined-resonant-tuning-fork-proof-mass-pivot-test-electrode-figurehtmlpage=4 data-page=4 class=ts-thumb lazyload alt=Page 4: Surface-Micromachined Resonant Accelerometer · tuning fork Proof mass Pivot Test electrode Figure 2: Microphotograph of fabricated accelerometer the DETF structure to the lever arm loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader034vdocumentsusreader034viewer20220422195ec56f6bc82f0c182427b069html5thumbnails4jpg width=140 height=200 divdiv
