µsurf

technology

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µsurf – areal confocal microscopy

Geometry

FlatnessRoughness

Application area of the µsurf Technology

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Industrial metrology for laboratory and production

The robust µsurf sensor technol-ogy is based on the CMP tech-nology (Confocal-Multi-Pinhole) of NanoFocus.

Within seconds, topography, roughness and layer thickness in the micro and nanometer ranges are acquired.

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Out of focus – reflected light is masked out.

In focus – reflected light is captured by the CCD camera.

Out of focus

in focus

Out of focus

Signal strength I

Objective lens

Objective lens

Focal planes

Focal planes

Sample

Sample

FWHM

FWHM

Confocal Curve: from the focal range comes the precision of the height values.

Hei

ght z

Out of focus – reflected light is masked out.

In focus – reflected light is captured by the CCD camera.

Out of focus

in focus

Out of focus

Signal strength I

Objective lens

Objective lens

Focal planes

Focal planes

Sample

Sample

FWHM

FWHM

Confocal Curve: from the focal range comes the precision of the height values.

Hei

ght z

Out of focus – reflected light is masked out.

In focus – reflected light is captured by the CCD camera.

Out of focus

in focus

Out of focus

Signal strength I

Objective lens

Objective lens

Focal planes

Focal planes

Sample

Sample

FWHM

FWHM

Confocal Curve: from the focal range comes the precision of the height values.

Hei

ght z

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➋

➌

➍

➎

Technology

Microscope image (left): out of focus points displayed as well as in focus points. Confocal image (right): Only in focus points displayed.

1. Principle The confocal microscope from NanoFocus comprises an LED light source (1), a rotating multi-pinhole disc (2), an objective lens with a piezo drive (3) and a CCD camera (5).

The LED source is focused through the mulit-pinhole disc (MPD) and the objective lens on to the sample surface (4), which reflects the light. The reflected light is reduced by the pinhole of the MPD to that part which is in focus, and this falls on the CCD camera.

The sketch shows a point on the surface being imaged through one pinhole of the MPD. The MPD has a large number of such holes arranged in a special pattern. The rotation of the MPD enables seamless scanning of the entire surface of the sample within the image field. ➊ LED source

➋ Multi-pinhole disc➌ Objective lens➍ Sample➎ CCD camera

2. The Confocal CurveAn image from a conventional optical microscope contains sharp and blurred detail. In contrast, in the confocal image, the blurred detail (unfocused) is filtered out by the operation of the MPD.

Only light from the focal plane reaches the CCD camera, with the intensity following the confocal curve. Thus the confocal microsocope is capable of high resolution in the nanometer range. The precision of the height values follows from the focal range of the confocal curve.

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Hei

ght z

Image stack: Up to 1,000 individual confocal images are captured.

Results: The surface topography is reconstructed from the confocal images.

Measurement process: The objective lens is dis-placed in height by a piezo drive.

Automatically producedmeasurement report

Single profile from the measurementColor-scaled height display

3. Confocal Image StackEach confocal image is a horizontal slice through the topography of the sample. Capturing of images at different focal heights produces a stack of such images, achieved by the confocal microscope throught precise vertical displacement of the objective lens by means of a piezo drive. 200 to 400 confocal images are generally captured within a few seconds, after which the software reconstructs an exact three-dimensional height image from the stack of confocal images. Therefore, service heights are measured, not calculated.

4. Quantitative analysis and reportsThe measured values are transferred to the analysis program containing standardize analysis methods, such as ISO 25178 or ISO 4287 roughness (2D and 3D parameters), form, translucent film thickness and microgeometry. Results are automatically transferred to a pre-formatted report.

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99% correlation (KKF)Best system in the comparison study at NIST, 2005

tactile

µsurf

Sig

n. A

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m) 1

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m) 1

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0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3Profile length (µm)

Exact and reliable 3D measurement data

Structured Surface (100×90 µm), REM: Alcan Research Center, Neuhausen.

The µsurf technology offers various advantages for the characterization of technical surfaces in the micro and nanometer ranges.

Both measurements of an electron beam structured roll, one done with the µsurf technology and the other a SEM, have comparable resolution. Contrary to the SEM (x,y), µsurf offers the data in true 3-dimensional coordinates (x,y,z). Only with this quantitative data can an exact analysis of 3D surface parameters be performed, delivering a larger range of information about the surface texture.

Additionally, in an independent third party study performed by the National Institute of Standards and Technology (NIST), comparing intererometry, laser confocal, and NanoFocus’ Multi-Pinhole Confocal, the µsurf technology acheived the highest correlation (99 %) to tactile systems. With such high correlation to traditional methods, historical data on 2D parameters is no longer obsolete. All the while acquiring surface data a lot faster, without damaging the measurement sample.

Comparison of a SEM and a µsurf confocal microscope

µsurfREM

Correlation of tactile systems and the µsurf confocal microscope

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The µsurf systems do not require preparation of the surface of the measurement sample. When the sample is positioned under the objective, the clearly arranged user interface leads the operator through the measurement process in just a few clicks. Afterwards, the settings of the measurement parameters can be used for serial measurements. Already after a few seconds the µsurf technology provides meaningful data for further analysis.

When measurement data is imported into the report templates of the µsoft analysis software, a full meas-urement report is automatically generated. The output analysis parameters can be modified and displayed as

charts, profiles and 3D pictures. With the automation software µsoft automation, measurements can be processed at a high throughput rate with highest efficiency and without user influence.

Contrary to other techniques, the µsurf technology delivers meaningful measurements and analyses in a few seconds. Easy handling and intelligent software guarantee maximum efficiency.

Meaningful measurement results within seconds

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Robust precision metrology for industrial applications

The µsurf technology was developed especially for use in the typically rough production environment. The robust design and features, such as integrated spring feet, guarantee reliable and correct measurement results. Environmental influences, such as vibrations, dust or splash water, do not affect the precision or accuracy.

Historical use of the µsurf technology, deployed in support of high-paced production inspection, has forged its reputation as a tool to produce high precision measurements repeatedly in less-than-ideal conditions.

Of the many that employ the µsurf technology, Thyssen Krupp Steel AG, a customer and research partner of NanoFocus AG, trusts in the µsurf at their Rolling Mills to get repeatable measurements on the fly.

From steel to solar, medicine to machine tools, automotibiles to airplanes, electronics to optics, manu-facturers, printers, forensic specialists, researchers, and physicians worldwide trust in NanoFocus µsurf confocal technology to get them precise, accurate, and reliable data everytime.

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Hightech – Made in Germany

The components used for NanoFocus measurement systems have to go through strict selection and validation processes to guarantee highest quality levels.

NanoFocus designs, develops, and produces complete 3D measurement solutions, hardware and software.

The components that the µsurf systems are built from, at the manufacturing facility in Oberhausen, Germany, are of the highest quality standards. They must be low-maintenance and durable, such as the high performance LED used as the light source. Com-ponents like these guarantee the economic usage of a measurement system that is always ready to use.

Made in Germany

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Measurement and analysis conforming to international standards

Standards are catalysts for innovations. One example are the EN ISO 25178 standards.

Finally, this norm made a broad range of new analyses possible that describe the surface characteristics and their functions much more precisely. That´s why NanoFocus continuously implements new standards in the measurement systems and the software.

For NanoFocus it is not only important to design measurement solutions conforming to international standards. NanoFocus also uses its experts’ know-ledge in the field of optical metrology to actively support the development of new standards. Jet another technical advantage of NanoFocus systems.

µsurf

ISO 25178-6, ISO 5436-1, VDI 2655-1.2a

µsoft control (control and measurement software)

ISO 11562, ISO 4287, ISO 4288, ISO 5436-1, ISO 5436-2

µsoft analysis (analysis software)

EUR 15178 EN, ISO 1101, ISO 11562, ISO 12085, ISO 12181-1, ISO 12181-2, ISO 12780-1, ISO 12780-2, ISO 12781-1, ISO 12781-2, ISO 1302, ISO 13565-1, ISO 25178-2, ISO 25178-6, ISO 4287, ISO 4288, ISO 5436-1, ISO 5436-2, ISO/TS 16610-1, ISO/TS 16610-20, ISO/TS 16610-22, ISO/TS 16610-31, ISO/TS 16610-40, ISO/TS 16610-41, ISO/TS 16610-49

Conformity of the µsurf technology and software to international standards

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Produktkategorien

Standard

Modular

Business Solution

Dienstleistung

Integration

The complete packageNanoFocus´ standard systems, µsurf basic, µsurf explorer and µsurf mobile, prove that the entrance into the micro and nanotechnology realm does not have to be expensive and complicated. Unpack, plug in, measure. It has never been that easy to perform three dimensional analyses into the nanometer ranges.

The µsurf standard systems are used in various indus-tries: to measure the roughness of medical blood pumps, for production control of electronic components for the automotive sector, the supporting production of complex electronic modules, the inspection of thinnest layers, in metal processing or the paper and print industry.

Produktkategorien

Standard

Modular

Business Solution

Dienstleistung

Integration

The fully developed, industry-specific solutionIncreasingly more industries request measurement systems that meet the exacting requirements of their products as well as their development and produc-tion processes. NanoFocus´ business solutions offer just this: industry-specific solutions, developed with key customers in those respective markets. That´s how industry related knowledge and fully developed NanoFocus technology are combined in the business solutions. The result is a system that is able to perform industry-specific and complex measurement tasks close to production without investing in further customized design.

One of these solutions is µsurf cylinder, which is used by premium car manufacturers worldwide for development and production control of energy efficient and wear-reduced engine cylinders. With the business solution µsurf solar, development processes of solar cells are sped up, production processes are verified and the performance and quality of solar cells are improved continuously.

Produktkategorien

Standard

Modular

Business Solution

Dienstleistung

Integration

The individual conceptSome measurement tasks are that complex, that they require a customized measurement system. The broad range of standardized components, as well as the experience and competence of our hardware and software experts, allow NanoFocus to equip the µsurf custom for specific requirements.

The custom systems are especially used for extremely challenging and specialized surfaces as well as in basic research and in medical device manufacturing, where strict norms have to be met.

Produktkategorien

Standard

Modular

Business Solution

Dienstleistung

Integration

Benefit from technical advanceThe sensors and measurement heads of the µsurf systems can be fully integrated in production processes. Many industry partners of NanoFocus use the technol-ogy to equip their products with best components for three dimensional surface analysis. Besides metrology and medical technology, it is especially the forensic sector that is utilizing the µsurf sensors. For example, the world’s leading company for forensic analyzing systems uses NanoFocus measuring heads for the precise analysis of bullets.

Product groups

Process development (R&D) Process control Production control

µsurf basic

µsurf explorer

µsurf custom, µsurf cylinder, µsurf solar

µsurf sensor

Applications of µsurf systems sorted by measurement tasks

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surf explorer

3D measurement system for laboratory and production

µsurf explorer is a flexible and user-friendly 3D measurement system for precise surface analyses that can be used in measurement and testing laboratories, as well as in produc-tion environments. The µsurf explorer, awarded for its compact design, delivers reliable 3D measurement results quick and uncomplicated in a few steps.

Dental implant Step height measurement (50 nm)ground surface

Flexible allround metrology

solution

Compact design

User-friendly concept

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Ready for use everywhere

The compact and portable µsurf mobile was developed for surface measurements on large objects such as printing rolls and body parts. In a few minutes, the five kilogram, hand-carried system is ready to operate, allowing for large-scale measurements on rolls along the radius of curvature.

surf mobile

EDT roll Half tone printing roll Gravure printing roll

Mobile usage with battery

Only 5.5 kg

Motorized xyz axis

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3D microscopy for industrial research

surf basic

µsurf basic is a 3D microscope optimized for the requirements of industrial and industry-oriented research. The system compels through its high measurement speed and its flexibility, especially when there are a lot of different measurement tasks to accomplish with various requirements.

NEW

Screw thread Rubbing wear Resistor

Turreted optics

75 mm height range

Topographical 3D view in

real color

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surf custom

Measurement system made-to-order

µsurf custom is specifically designed to the requirements of an individual measurement task. A large assortment of hardware and software components enables universal laboratory measure-ment systems, as well as fully automated systems for quality control. Even with smallest height structures, measurement results with nanometer accuracy are guaranteed – within seconds.

Sensor membrane Micro lensesImplant

Modular concept

Fully automatable

For intricate surfaces

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surf cylinder

Specialized solution for motor cylinders

µsurf cylinder is conceived to measure cylinder running surfaces in automotive industry. The angulated optics dive into the cylinder bore, as controlled by a joystick. Every position in the bore is accessable without destroying the engine. For repeating measurements and serial inspections, automated measurement protocols are stored in a database. With the Linewalking system as an additional automation solution, measurement processes can be performed even more effectively and efficiently, with the track system attached to the engine block.

Angulated optics

For cylinder bores from

70 mm to 165 mm dia.

Variable measurement

positioning (radial, axial)

Honed structure AluSil surface Coated piston

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surf solar

Allround solution for solar cells

µsurf solar is a high precision optical measurement solution for the broad range of solar applications in laboratory and production. With portal configuration available up to the meter range, whole thin film solar modules can be measured. A vacuum chuck for safe fixture and the integration of specialized algorithms for better analysis of anti-reflecting surfaces guarantee optimal measurement results. With the integrated automation function, measurement and analysis cycles can be programmed quickly and easily.

Pyramid structure Finger measurement Laser Scribes

Up to 12 area measurements

in 1 minute

Simple and intuitive

automation

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surf sensor

OEM solution to integrate easily

The confocal µsurf area sensor is the heart of the µsurf 3D technology. It can be integrated separately in production machines and analysis systems. Soft interfaces, in the form of software development kits, enable the complete integration in a superior software solution.

Lasered structrure Milled structure

Simple integration

Individual designs possible

Ready to use immediately

Structure of a painting

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Software

With the easy-to-use software, µsoft control, measure-ment data can be analyzed and visualized quickly. The user interface is separated in three areas, providing a useful overview. The measurement assistant that controls the system is already integrated in µsoft control. From measuring to analyzing, only one program is needed.

soft control

µsoft analysis is a comprehensive software package for 2D and 3D surface analysis. The software always contains the latest standards and filter functions. The versions Standard, XT and Premium are available based on analysis demands.

soft analysis

With the µsoft automation, individual measurements and analyses can be automated in an easy way. All chosen parameters are saved in a measurement template, so the user can start a measurement cycle with one click. The measurement data is transferred to a database that forms the interface between the inspection system and a customized µsoft automation analytics module.

soft automation

In some cases, the measurement field of an objec-tive does not suffice for the evaluation of spacious characteristics such as form, roughness or waviness. To extend the total measurement area, neighboring measurement fields can be assembled to one suture-less measurement.

Stitch-Tool

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NanoFocus AGLindnerstrasse 98 | 46149 Oberhausen | Phone +49 208-62 000-0 | Fax +49 208-62 000-99 | info@nanofocus.de | www.nanofocus.de

NanoFocus, Inc. Dr. Christian M. Wichern | Innsbrook Corporate Center 4470 Cox Road, Suite 250 | Glen Allen, Virginia 23060Phone ++1 804-228-4195 | Fax ++1 804-527-1816 | solutions@nanofocus-us.com

NanoFocus Pte. Ltd. Mr. Alan Ong | 5012, Ang Mo Kio Avenue 5, #05-06F, Techplace 2 | Singapore 569876Phone ++65 96849735 | alan.ong@nanofocus-ag.com

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Are you interested in other NanoFocus-Technology?Please call us +49 208 62 000-0 or write an email to sales@nanofocus.de.