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Page 1: Status of the MEMS Industry 2020 - Yole Développement

From Technologies to Markets

© 2020

Status of the MEMS Industry

2020

Market and Technology

Report

Sample

Page 2: Status of the MEMS Industry 2020 - Yole Développement

2

Glossary and definitions 2

Table of contents 3

Scope of this report 8

Who should be interested in this report 13

Report methodology 14

How to use our data 15

About the authors 16

Companies cited in this report 17

What we got right, What we got wrong 18

Yole Group related reports 20

3-page summary 24

Executive Summary 28

Context 64

• Introduction 65o Electronic megatrends are the pushing forces for more

MEMS & sensor adoption

o Global Technology Roadmap

o MEMS sensor types history & evolution

o Sensors/actuators can emulate & extend our human senses

o MEMS average selling price evolution (2000-2025)

• A perspective on the general impact of covid-19 71o COVID-19 Impact on markets

o COVID-19 Impact overview

o COVID-19 impact

• Short & mid-term

• Mid & long-term

• From globalization to localization?

o Exceptional situation, exceptional measures

Market forecasts 78

• The 3Yole scenarios for covid-19 79

• Impact of covid-19 in our forecasts 80

• Forecasts by end-market 82o Global MEMS forecasts (by volume & value)

o Consumer (by volume & value)

o Automotive (by volume & value)

o Industrial (by volume & value)

o Medical (by volume & value)

o Telecom (by volume & value)

o Defense & Aerospace (by volume & value)

o Expected change in MEMS markets between 2019-2020 due tocovid-19

o MEMS market dynamics by end-market

o Market share ($M) between the main MEMS markets

o The best growth opportunities in each market (by device type)

o Comments for each MEMS market

TABLE OF CONTENTS

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• Forecasts by device 97o MEMS market forecasts by device (by volume & value)

o Inkjet heads (by volume & value)

o Pressure (by volume & value)

o Microphone (by volume & value)

o Accelerometer (by volume & value)

o Gyroscope (by volume & value)

o Magnetometer (by volume & value)

o Inertial combos (by volume & value)

o Optical (by volume & value)

o Infrared (by volume & value)

o Si-microfluidics (by volume & value)

o RF (by volume & value)

o Oscillators (by volume & value)

o Environmental (by volume & value)

o Future (by volume & value)

o MEMS market dynamics by device

o Analysis

• Wafer forecasts 123

o MEMS Wafer starts

o MEMS Wafer starts split by <6’’ and >8’’

o Wafer starts volumes’ detail

o MEMS capping wafers

Players ranking & market share 128

• Player landscape 129o 2019 MEMS players ranking

o Top MEMS players’ technology breakdown

o Business model diversity

o Comments on MEMS players ranking

o TOP-10 MEMS players revenue 10-year history

o The titans’ race continues

o Top MEMS player rankings evolution

o 2019 MEMS foundry rankings

o Comments on foundry ranking

o MEMS foundries device capabilities

o Focus on research institutes offering MEMS foundry services

• Market shares 145o Inkjet heads

o Pressure

o Microphone

o Accelerometer

o Gyroscope

o Magnetometer

o Inertial combos

o Infrared (Thermopile & Microbolometer)

o Optical

o Si-microfluidics

o RF

o Oscillators

TABLE OF CONTENTS

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Market trends 159

• Trends by end-market 160

o Consumer – Market Trends

o Consumer/medical market trends

o Medical market trends

o Automotive market trend

o Autonomous vehicles – the robotic disruption case

o Robotic transportation – key drivers

o Mobility trends

o Industrial – market trends

o Telecom – market trends

o Defense – market trends

• Trends by device type 173

o MEMS sensors gaining attention due to covid-19

o Inkjet heads market trends

o Pressure MEMS market trends

o MEMS microphones market trends

o Inertial MEMS market trends

o Si microfluidics market trends

o Thermal imaging/sensing market trends

o Possible triage procedure for Covid-19 screening atairports

o What if businesses adopt thermal cameras?

o SWOT analysis of fever screening thermal cameras

o Thermopile-based gun thermometer

o CMOS image sensors and thermal imagerscomparison

o CMOS & Thermal Imager sensor evolution

o Optical MEMS market trends

o RF MEMS and oscillators market trends

o RF MEMS & oscillators new products

o RF Market trends - Filter and duplexer supply chain

o Environmental/gas sensor market trends

o Environmental MEMS possible target price (for highvolumes)

o MEMS microspeakers market trends

Technology trends 199

• Manufacturing 200o General MEMS Trends

o Yield improvement roadmap for MEMS wafersinspection

TABLE OF CONTENTS

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o Overview of main manufacturing trends per MEMSdevice

o MEMS form factor – Miniaturization

o Thinning Roadmap for MEMS devices

o From processes to products platforms

o 12’’ for MEMS

• Yes, and it is MEMS for healthcare!

• Implications

• Does it make sense?

o Building MEMS within CMOS

o Key technical steps in the MEMS manufacturingchain

• Example of MEMS accelerometer

• Example of MEMS gyro

• Example of MEMS microphone

• Example of MEMS microbolometer

• Example of MEMS mirror

• Example of RF MEMS

• Example of MEMS oscillator

o Hermetic through Glass vias (TGV)

o Status of 3D printing for MEMS?

o Conclusion

• MEMS devices technology trends 222o Inkjet heads - technology trends

o Pressure MEMS - technology trends

o Microphone technology trends

o Thermal Imaging/Sensing - technology trends• A new miniature SMD thermopile-based

thermometer from Melexis

• Integration in smartphones?

• Who could lead development in high-volume smartphone integration?

o Si-microfluidics - technology trends• The Advent of SI-based platforms

• Point-of-Need instrument type roadmap

o RF/oscillators - technology trends• Filter technology portfolio

• Micro-BAW from Qorvo

• What to look out for in RF MEMS and oscillators

o Micromachined Ultrasonic transducers (MUT)

o Ultrasound imaging technology roadmap

o New/other MEMS developments

o Multispectral sensing: from niche to the masses?

o MEMS Technology roadmap

TABLE OF CONTENTS

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• Software, processing, computing,AI trends 240

o From sensing to predicting, towards more advanced usercases

o Sensors require intelligence

o Intelligent environmental sensor hub

o Cloud and edge computing

o The value chain follows the data flow

o How to acquire value from MEMS?

o Increase the value of sensors by adding intelligence…

o … and collaborate with other key AI developers

o Machine learning core on IMU from ST

o Edge AI startups

o Where is the value in the audio chain?

o Where does in-cabin voice control need Artificialintelligence ?

o Training and inference, where is the computing done?

o Speech recognition

o Google Pixel 3 vs Pixel 4 Hardware

o How to revitalize the MEMS market

o Synthesis

o Acoustic technology proliferation roadmap

o Audio value chain development

o Deep Learning for gas sensing below limit of detection

o Possible thermal imaging AI developments

o Evolution of MEMS sensors?

Conclusions & Perspectives 263

• Conclusions 264

• Short-term Perspectives (2020-2021) 265

• Long-term Perspectives (2022-2025) 266

• The quest for value acquisition in the MEMS market 267

• On the road to augmented intelligence 268

Reverse Costing® Structure, Process and Cost Analyses 269

• Butterfly network’s cMUT

• Infineon’s sealed dual membrane microphone

• MEMS Microphones Comparison 2020

• Usound’s microspeaker

• TDK Chirp’s MEMS-based Ultrasonic ToF sensor

• Smartphone quarterly monitor

Appendix 276

Corporate Presentation 287

TABLE OF CONTENTS

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ADAS: Advanced Driver Assistance System

AF: Auto-Focus

AHRS: Attitude & Heading Reference System

AI: Artificial Intelligence

AR: Augmented Reality

ANC: Active Noise Cancellation

ASIC: Application Specific Integrated Circuit

ASP: Average Selling Price

AUV: Autonomous Underwater Vehicle

BAP: Barometric Air Pressure

BAW: Bulk Acoustic Wave

CAGR: Compound Annual Growth Rate

CIS: CMOS Image Sensor

CMUT: Capacitive Micromachined Ultrasound Transducer

CPU: Central Processing Unit

DLP: Digital Light Processing

DOF: Degree Of Freedom

DPF: Diesel Particulate Filter

DSP: Digital Signal Processing

ECG: ElectroCardioGram

ECM: Electret Condenser Microphone

ESC: Electronic Stability Control

FADEC: Full Authority Digital Engine Control

FBAR: Thin-Film Bulk Acoustic Resonator

GPF: Gasoline particulate filter

GPU: Graphics Processing Unit

HMD: Head-Mounted Display

HUD: Heads-Up Display

HVAC: Heating, Ventilation & Air Conditioning

IC: Integrated Circuit

IDM: Integrated Device Manufacturer

IJ: Ink Jet

IMU: Inertial Measurement Unit

IoT: Internet of Things

IP: Intellectual Property

IR: Infra Red

LWIR: Long Wave Infra Red

M&A: Mergers & Acquisitions

MAP: Manifold Air Pressure

MEMS: Micro Electro Mechanical System(s)

MIMO: Multiple Input Multiple Output

MOEMS: Micro Opto-Electro-Mechanical System(s)

MOS: Metal Oxide Semiconductor

NDIR: Non-Dispersive Infra Red

NPU: Neural Processing Unit

OIS: Optical Image Stabilization

PMUT: Piezo Micromachined Ultrasound Transducer

PVS: Personal Vision Systems

PZT: Lead Zirconate Titanate

RF: Radio Frequency

ROV: Remotely Operated Vehicle

SAW: Surface Acoustic Wave

SNR: Signal to Noise Ratio

SoC: System on Chip

SOI: Silicon On Insulator

TPMS: Tire Pressure Monitoring Systems

UAV: Unmanned Aerial Vehicle

UGV: Unmanned Ground Vehicle

V2X: Vehicle To Everything

VOA: Variable Optical Attenuator

VOC: Volatile Organic Compound

VR: Virtual Reality

WLO: Wafer Level Optics

YoY: Year-on-Year

GLOSSARY AND DEFINITIONS

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SCOPE OF THIS REPORT

Markets MEMS Devices Forecasts Players Trends

Forecasts

Units

$US Dollar

Players and ranking Market Trends

Defense & Aerospace

Industrial

Telecommunications

Medical

Consumer

Automotive

Technology TrendsMarket shares

Inkjet heads

Pressure

Microphones

Accelerometers

Gyroscopes

Magnetometers

Inertial combos

Optical

Microbolometer

Thermopiles

Si-microfluidics

RF

Oscillators

Microtips

Flowmeters

Environmental (humidity, gas

sensors, env. hubs)

Future (microspeaker,

cMUT/pMUT for medical, pMUT

for ultrasonic fingerprint)

Are your needs

outside the scope

of this report?

Contact us for a customized report:

The objectives of this report are to provide:

o A global view about the future of MEMS

o An understanding of the MEMS markets and applications(consumer, automotive, industrial, medical, telecom anddefense & aeronautics)

o MEMS players’ ranking, dynamics and market share

o MEMS market data in $M, units, and wafers for 2019 -2025

o A presentation of MEMS market and technology trends

8’’

Wafers

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APPLICATIONS TRACKED BY YOLE FOR EACH MEMS DEVICE (1/3)Inkjet Heads

Consumer and officeLarge/wide Format Printers

- for graphics and technical

Industrial & printing (digital

presse, label, ceramics,

textile..)

Thermal disposable heads

Thermal permanent head

Piezoelectric permanent head

Thermal permanent printhead

Piezoelectric permanent head

Thermal permanent printhead

Piezoelectric permanent head

Pressure sensors

Pressure sensors for automotivePressure sensors

for industrial

Pressure sensors

for consumer

Pressure sensors for

medical

Pressure sensors

for aeronautics

MAP Power Train

BAP Power Train

Particle filter (DPF, GPF) Power Train

Fuel tank evaporation (EVAP) Power Train

Exhaust gas recirculation (EGR) Power Train

Engine Oil Power Train

Automatic transmission oil Power Train

TPMS Safety

Brake Booster Safety

Side airbags Safety

Pedestrian protection Safety

HVAC

Process control

HVAC

Transportation

Smart phones &

tablets

Drones

Wearable

Smart homes/building

Electronic cigarette

Blood monitoring invasive

Blood monitoring non invasive

Respiratory

Smart inhaler

Others

Air Data

FADEC

Hydraulic & others

Si Microphones

Consumer Medical Automotive Others

Cellphone

Tablets

Laptops

Wearable

Others (Home Automation, PMP,

Laptop, handheld GPS, PC peripherals,

toys…)

Medical

(Hearing Aids)Automotive

Indus, defense,

high end

Accelerometers

Single accelerometers for consumer Accelerometers for automotiveAccelerometers

for MedicalAccelerometers for industrial

Accelerometers for

aeronautics

Accelerometers for

Defense

Cellphone

Tablets

Gaming

Remote controls

Wearable

Others (Home Automation, PMP, Laptop,

handheld GPS, PC peripherals, toys…)

Standalone airbag front sensor

Airbag peripheral sensor

ESC acceleration sensor

Roll over sensing

TPMS

Other: integrated GPS, active suspension,

safety, vibration, EPB

Accelerometer for

pacemaker

Accelerometer for

other healthcare

applications

Seismic - Geophones

Antenna stabilization

Industrial vibration monitoring

Inclinometers

Offshore - Directional drilling + survey

GPS aiding, agriculture / mobile mapping

Other industrial applications

AHRS

Navigation

Other aero (vibration

monitoring...)

Missiles, guided

munitions, bombs

Defense stabilization

systems

Navigation and other

defense applications

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APPLICATIONS TRACKED BY YOLE FOR EACH MEMS DEVICE (2/3)

Gyroscopes

Single Gyroscopes for ConsumerGyroscopes for

AutomotiveGyroscopes for Industrial

Gyroscopes for

medicalGyroscopes for Aeronautics Gyroscopes for Defense

Mobile phone

Mobile phone (OIS)

Tablets

Gaming

Remote controls

Wearable

Others (DSC, pmp, laptop, handheld GPS,

PC peripherals, toys…)

Roll over

ESC gyroscope

GPS navigation

Stabilization systems

GPS aiding - Mobile mapping

ROVs / AUVs navigation for offshore

First responder systems

Drilling

Fall detection

Other commercial applications

Wearables

AHRS for general aviation / backup instrument

Flight control for civil helicopters and aircrafts /

navigation for civil & paramilitary UAVs / Others

Space satellites, spacecraft & skyrockets

Platform stabilization

Missiles guidance, Guided munitions /

bombs

Defense UAV & UGV navigation /

control , Others

Magnetometers

Single Magnetometers

for consumer

Magnetometers

for automotive

Cell phones

Tablets

Other consumer

applications (wearables)

Auto

Inertial combos

Consumer

Accel Gyro

combos

Consumer

Accel Magneto

combos

Consumer 9 DOF

combos

Auto combos

Accel Gyro

Mobile phone

Tablets

Others

Mobile phone

Tablets

Others

Mobile phone

Tablets

Medical

Others (Wearables, Home

Automation, PMP, Laptop…)

ESC combo,

rollover

Robotic cars

Optical MEMS

Optical MEMS

for Telecom

Optical MEMS for

Medical

Optical

MEMS for

Industrial

Optical

MEMS for

Automotive

Optical

MEMS for

Aeronautics

Optical MEMS for

Consumer

Optical MEMS

for Defense

Switches

VOAs

Others (tunable

filters, optical

benches,

transceivers)

Microspectrometers

HMDs

Adaptive

Optics

Digital Cinema

HUDs

LidarsHUDs

Home cinema projector

(including laser TV)

Pico projector (stand

alone and embedded)

Office projector

Autofocus

HMDs

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APPLICATIONS TRACKED BY YOLE FOR EACH MEMS DEVICE (3/3)

Microfluidics

Microdispensers & Drug

DeliverySi biochips

Inhalers

MEMS Micropumps &

Microvalves

Microneedles

POC testing

Next Gen Sequencing

& Sample Preparation

RF MEMS

RF switches for telecomRF switches for

industrialSwitch for Space RF switches for defense RF MEMS for cellphones

RF switches for base stations

RF switches for small cells

RF switches for ATE & RF

Instrumentation

Redundant Matrix

Commutation Matrix

Radars & Communications

RF switches for

communications

RF switches for radars

BAW Filters & Duplexers

RF Switches (antenna)

Antenna tuners

Oscillators and resonators

Consumer Industrial AutomotiveInfrastructure &

telecom

TV, DSLR

Mobile, wearable, IoTIIoT Automotive

Base stations, servers,

routers,…

Micro tips

Micro tips & probes

Micro tips for AFM

Probes for ATE

Flowmeter

Flow meter

flow meter for medical and Diagnostics

flow meter for industrial

Environmental MEMS

Humidity GasCombos (multi-gas, humidity,

temperature, pressure)

Humidity for automotive

Humidity for consumer

Humidity for industrial

Chemical MEMS / Gas

sensorEnvironmental hub

Others

Micro structures, micro valves

Ultra sonic finger print

Micro speaker

Thermal sensing/imaging MEMS

Thermopiles 1-4 pixelsThermopiles arrays - 1x8 to

64x80 pixels

Microbolometers for

AutomotiveMicrobolometers for Industrial Microbolometers for Defense

Microbolometers for

Consumer

Wearable (spot

thermometer)Medical

Industrial T measure, gas & fire

detection, HVAC, smart buildingsNight Vision

Firefighting, maritime, surveillance,

thermography, PVS, Predictive

maintenance, building, process

control

Soldier night vision, weapon sights,

enhanced driver vision, missile seekers

Mobiles, tablets & other

commercial (UAV, EVS, etc)

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CLARIFICATION ON THE FAST MOVING THERMAL IMAGING/SENSING SEGMENT

Variousaspects covered underthe Thermal Imaging/ Sensing umbrella.

In Yole’s previous reports, various names have beenused for thermal radiation detection and imaging: IRdetectors, IR imagers, IR cameras, uncooled IRdetectors/imagers, passive infrared (PIR), far infrared(FIR), Long-Wave IR (LWIR) imagers,microbolometers, thermopiles, etc.

In this report, we are calling Thermal Imaging/SensingMEMS the two main MEMS devices that offer the sameremote T° sensing function:

• thermopiles (or thermal detectors)

• microbolometers (or thermal imagers) which areused in thermal cameras.

The detectors’ main functionality is to detect andsense thermal radiation (temperature reading), whilethe imagers’ main functionality is to take an image ofthermal radiation (each pixel has a single temperaturereading).

Thermal Imaging/Sensing aspects

1D/2D

(3D?)

MEMS device

technology

Application

Microbolometer

Thermopile

Smartphones

1 pixel Array

Thermography

Surveillance

HVAC

…etc…

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METHODOLOGIES AND DEFINITIONS

Market

Volume in Munits

ASP in $

Revenue in $M

Yole’s market forecast model is based on the integration of several sources:

Information

Aggregation

Preexisting

information

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Dr. Dimitrios DAMIANOS, Analyst

Dimitrios Damianos joined Yole as a technology and market analyst, working within the Photonics, Sensing and Display division. Dimitrios collaborates

daily with his team to deliver valuable technology and market reports covering imaging, photonics, and sensors. Upon completing his research activities

on theoretical and experimental quantum optics and laser light generation, Dimitrios attended Grenoble University, France and pursued a Ph.D. in

Optical and Electrical Characterization of Dielectric Materials on silicon as well as SOI, with applications in photovoltaics, image sensors and

microelectronics. Additionally, Dimitrios holds an MSc in Photonics from the University of Patras in Greece and has authored/co-authored several

scientific papers published in international peer-reviewed journals.

Contact: [email protected]

Dr. Eric Mounier, Fellow Analyst

With more than 20 years of experience in MEMS, sensors and photonics applications, markets, and technology analyses, Eric provides deep industry insight into current and future trends in MEMS and photonics. He is a daily contributor to the development of MEMS and photonics activities at Yole, with a large collection of market and technology reports. He also heads multiple custom consulting projects in the fields of business strategy, identification of investments or acquisition targets, due diligences on the buy/sell side, market and technology analysis, cost modelling and technology scouting, among others. Eric has contributed to more than 250 marketing/technological analyses and 80 reports, helping move the MEMS and silicon photonics industry forward. Thanks to his extensive knowledge of the MEMS, sensors, and photonics-related industries, Eric is often invited to speak at industry conferences worldwide. Moreover, he has been interviewed and quoted by leading media throughout the world. Prior to working at Yole, Eric held R&D and marketing positions at CEA Leti in France. Eric has a Semiconductor Engineering degree and a Ph.D. in Optoelectronics from the National Polytechnic Institute of Grenoble.

Contact: [email protected]

Biographies & contacts

ABOUT THE AUTHORS

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AAC, AKM, ALPS ELECTRIC, AMPHENOL, AMS, ANALOG DEVICES, APPLE, ARIOSO, ASIA PACIFIC

MICROSYSTEMS, ASPINITY, AUDIOPIXELS, BOEHRINGER INGELHEIM MICROPARTS, BOSCH, BROADCOM,

BUTTERFLY NETWORK, CANON, CARTESIAM, COLIBRYS, COLLINS AEROSPACE (ex UTC), CIRRUS LOGIC,

CSEM, DENSO, DRS, EPCOS, EPSON, ESIEE, FIRST SENSOR TECHNOLOGY, FLIR SYSTEMS, FORMFACTOR,

FRAUNHOFER IPMS, FUJIFILM DIMATIX, GETTOP, GOERTEK, GOOGLE, HANKING ELECTRONICS,

HEWLETT PACKARD, HONEYWELL, IMEC, IMERAI, IMT, INFINEON TECHNOLOGIES, KNOWLES

ELECTRONICS, LYNRED, MAXIM, MELEXIS, MEMSCAP, MEMSENSING, MEMSIC, MICRALYNE, MURATA, NXP,

OMRON, ON SEMI, PANASONIC, QORVO, QUALCOMM, RAYTHEON, RF360, ROHM, SAMSUNG, SENSATA,

SENSIRION, SI TIME, SILEX MICROSYSTEMS, SILICON SENSING SYSTEMS, SINTEF, SMI, SONY,

STMICROELECTRONICS, SYNTIANT, TAIYO YUDEN, TDK, TE CONNECTIVITY, TELEDYNE DALSA, TEXAS

INSTRUMENTS, TOWER JAZZ, VIS (VANGUARD INTERNATIONAL SEMICONDUCTOR – ex

GLOBALFOUNDRIES), VTT, TSMC, UMC, USOUND, X-FAB, xMEMS

… and many more

COMPANIES CITED IN THIS REPORT

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• The move towards more intelligence (software, processing, algorithms and the advent of AI) on the edge

• 300mm manufacturing for MEMS arrived(even as a niche market: cMUT for ultrasound equipment)

• No one anticipated the Covid-19 outbreak.

We have revamped our MEMS forecasts

taking into account the sanitary

crisis/economical crisis.

• The size of the microbolometer market at

the sensor level was overestimated in 2019

due to a high sensor ASP. We revamped this

ASP.

• Minor revamping of 2019

volumes/ASP/market sizes for a few devices.

Wherever necessary, the revamp info is

given in this report.

WHAT WE GOT RIGHT, WHAT WE GOT WRONG

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This report is an update of Yole’s best-selling “Status of the MEMS Industry” report, which was firstreleased in 2004. This latest edition is an updated version with some minor revamping of 2019volumes/ASP/market sizes, with respect to what was previously forecasted for the same year (Status ofthe MEMS Industry 2019 report).Wherever necessary, the revamp info will be given.

The analysis and market consolidation/forecasts were done during May 2020 using Yole’s database (withthe effect and hypotheses regarding covid-19) dating end of April 2020. The report was finalized end ofJune 2020.

Therefore, the data that you will find in this report is the best available data to date, according to ourextensive monitoring of the various MEMS markets, devices, applications and interviews with the keyplayers/stakeholders. If you want to react to something, please feel free to contact us.

This report combines the best of Yole’s knowledge in the global MEMS industry.Yole regularly participates in industry conferences and tradeshows worldwide and has closerelationships with most market leaders. This report synthetizes the status of the 2020 MEMS industryin a thorough manner, taking into account the trends for each application separately as well as theeffect of covid-19.

DISCLAIMER – NOTE TO READERS

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ELECTRONIC MEGATRENDS ARE PUSHING FOR MORE MEMS & SENSOR ADOPTION

Autonomous & robotic vehicles

MobileHyperscale data centres

Edge computing for smarter sensors

Increased use of voice processing

Medical is meeting consumer for wellness

Less waste, manufacturing optimization

Connected factories

Electrical cars

Connected factories

AR/VR

MEMS examples: Microphones, Micro mirrors,

Micro speakers, Inertials …

MEMS examples: Pressure, Inertials,

Environmental, Microfluidics, Infra red imagers …

MEMS examples: RF MEMS, Inertials, Micro mirrors …

MEMS examples: Inertials, Micro mirrors, Pressure …

MEMS examples: Pressure, Magnetic

sensors, Inertials …

MEMS examples: Inertials, Pressure …

GREEN ENERGYHEALTHY

LIFESTYLE

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DIFFERENT IMPACTS ON DIFFERENT MARKETSHow strong is the negative impact on the market

Hig

h

Time Scale

Mid-term (1 year to 3 years)Short-term (6 months to 1 year)

© Yole Développement, June 2020

Long-term (3 years +)

Med

ium

Lo

w

Civil aviation

*

* This includes both wired and wireless telecom (although dynamics

are different for each, we believe confinement is a factor pushing to

the deployment of new technologies (for 5G, data centers,

transceivers …)

Automotive

Automotive &

Mobility

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20Status of the MEMS Industry 2020 | Sample | www.yole.fr | ©2020

2019-2025 MEMS MARKET FORECASTS BY END-MARKET

Automotive

Industrial

Medical

Telecom

2019$11.5B

2025$17.7B

Consumer

Defense & Aerospace

$2,18B

$0,70B

$11,14BCAGR 8.4%

$2,60BCAGR 3%

$2,14BCAGR

9.2%

2020$10.9B

$0,04B

$0,48B

$6,87B

$1,26B

$1,58BYoY -27,5%

$0,77BYoY 10,6%

$6,69BYoY -2,6%

$0,38BYoY

-20,5%

$1,40BYoY 11,5%

$0,04BYoY 4,7%

$1,04BCAGR 6.8%

$0,59BCAGR 3.7%

$0,21BCAGR

33%

© Yole Développement June 2020

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MEMS MARKET DYNAMICS BY DEVICE

Pressure

Microphones

Accelerometers

Gyroscopes

Inertial combos

Thermopiles

Microbolometers

Optical

Microfluidics

RF

Oscillators

CAGR2019-2025: 7.4%

Revenues 2019: $11.5B

Forecast 2025: $17.7B

Environmental

Future

Inkjet heads

Magnetometers

$1210M

$1214M

$928M

$2210M$1052M

$1649M

$890M

$307M$624M

$265M

$385M

$193M

$134M

$98M

$43M

$1664M5.4%

$1182M4.1%

$5258M15.5%

$1039M-0.2%

$1963M2.9%

$935M0.8%

$325M1%

$731M2.7%

$919M23%

$739M11.4%

$365M11.2%

$455M22.6%

$402M26.5%

$53M3.7%

$1287M1%

Status of the MEMS Industry 2020 | Sample | www.yole.fr | ©2020

© Yole Développement June 2020

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2019 MEMS PLAYERS RANKING

Status of the MEMS Industry 2020 | Sample | www.yole.fr | ©2020

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2019 MEMS FOUNDRY RANKINGS

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TOP-10 MEMS PLAYERS REVENUE SHARE

Broadcom has gained asignificant place during thepast 10 years and has steppedup its pace, along with Qorvo.

Bosch was always ahead fromthe rest of the pack andcontinues to be.

STM, TI and HP dominate asmaller part of the marketthan what they used to 10years ago.

Knowles and NXP remainpretty much stable.

Goertek is continuouslyaccelerating, while TDK ismaneuvering its way forward.

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Devices

Thermopile Microbolometers Microfluidics Pressure Flowmeters

End-

systems

Temperature

point guns

Thermal cameras (fixed,

drones, AR helmets, etc)

DNA sequencing

Point of Care (PoC) testing - PCR

diagnostics

Ventilators

Why

The need for contactless, mass and fast

temperature acquisition (the least contact

between personnel and infected/screened

people)

The need for rapid, mass screening and

testing for covid-19 patients, leading to

quick diagnosis. PoC systems are

portable and can be deployed on site,

without having to get samples back to

the lab

The need for mass deployment of

ventilators, for patients in critical

condition (respiratory failure due

to covid-19)

MEMS SENSORS GAINING ATTENTION DUE TO COVID-19

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Page 26: Status of the MEMS Industry 2020 - Yole Développement

26

CONSUMER/MEDICAL - MARKET TRENDS

From medical devices to consumer healthcare

Consumer devices Medical devices

FitBit Charge 4 Oura ring

The Dash - Bragi

Omron

HeartGuide

Apple watch

series 4

Emotiv EpocX headset

Echo Smartpatch Smart inhalers

Philips Body

scales

Withings BPM

connect

MC10 Biostamp patch

Fitness and wellbeing applications

No approval

From 10k to million shipments

Retail stores

Consumer healthcare

Consumer healthcare

Approval or function approved from health

organization

From thousands to million shipments

Over the counter

Hearing aids

Resmed CPAP home

Medical / Healthcare device

Approval from health organization

From thousands to 100k shipments

Prescription mandatory

Status of the MEMS Industry 2020 | Sample | www.yole.fr | ©2020

Page 27: Status of the MEMS Industry 2020 - Yole Développement

27

MICROPHONE TECHNOLOGY TRENDS

Sealed dual membrane by Infineon Optical MEMS microphone?

Example of a VCSEL-based

optical microphone

(source: Georgia Institute

of Technology)

sensiBel is a Norwegian startup (spin-off from Sintef) that addresses

voice-first user-interface, sound recognition systems, high-fidelity audio

capture, and active noise cancellation (ANC) applications with its 80 dB

SNR and 140 dB AOP optical MEMS microphone in a small package with

low power consumption.

This high-performance microphone enables improved microphone array

performance and delivers studio microphone quality to consumer

electronics. Other applications for the sensiBel microphone include

smart speakers, TVs, conference call solutions, acoustic cameras, ANC

headsets, and many more.

Today’s smartphones are equipped with professional-grade video (4K),

but audio is lagging behind in performance. sensiBel could fill this gap

and bring high-quality audio to the masses.

Sealed dual membrane (SDM) technology is a new innovation built on

the dual back-plate structure, resulting in enhanced SNR and increased

linearity.

Prototypes with a 4.0mm x 3.0mm x 1.2mm package achieved an SNR

of 75 dB, up to 140 dB SPL AOP (sound pressure-level acoustic

overload point).

Product is already available since late 2019.

AirPods Pro use this technology (Goertek mics).

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28

Potential product examples

Imager

(microbolometer)

Detector

(Thermopile)

THERMAL IMAGING/SENSING MEMS - TECHNOLOGY TRENDS

Integration in smartphones?

Excelitas TPiD 1S (SMD) TI TMP006 (WLCSP) Melexis MLX90632

What if Huawei introduces a phone with a temperature measurement option now?

Naturally people are worried about Covid-19 and it wouldn’t be outrageous to use

something which happens to be constantly in their hands – their smartphone – to

frequently measure their body temperature.

In China, 850M people have smartphones: 60% of the Chinese population (Source:

Newzoo). It wouldn’t be unreasonable to expect that 10M people, 1% of the

population would buy a smartphone with a body temperature measurement

functionality. Additionally, these figures only address the Chinese population – it is

likely to be true in other countries as well.

Development choices for mass production and smartphone

integration -10Munits - an order of magnitude

FLIR Lepton Iraytek S0 or Tiny1

Accuracy

better than

0.5°C?

Small form

factor?

Low cost – a

few $?

8’’ or 12’’

CMOS

compatible w/

mass prod.

Rapid

characterization

and testing?

Technology?

Thermopile,

microbolometer,

other?

ASIC, chip

etc. reducing

false negative

reading?

Technology Product

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12’’ FOR MEMS?

Yes, and it is MEMS for healthcare!

As IC substrate size increased, MEMS companies and foundries adopted older equipmenttechnology at low cost. Now the IC industry has stalled at 300 mm and MEMS at 200 mm.

What are the motivation to use such large size wafer for MEMS? Criteria would likely be asfollows:

1. Very large unit volume (e.g. microphones)

2. Large die size (e.g. micro mirrors, MUT, inkjet printheads)

3. Use on top of the IC (e.g. CMOS MEMS process)

MEMS Since 2017

CMUT on 300mm wafers from Butterfly Network:• Large die size: 626mm²

• CMOS MEMS process using TSV interconnet

Finally

Butterfly IQ CMUT chip and wafer;

source: Butterfly Network

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30

MEMS TECHNOLOGY ROADMAP

In the short term, thermal imagers and Si µfluidics, driven bu Covid-19 outbreak, willgain more business momentum.

Graph here shows the market potential for different MEMS devices vs. Timeline. The size of thebubble is relative to the importance the MEMS device currently has

Hig

h p

ote

ntial

5 years2-3 years

Big topic

Medium

topic

Small

topic

Thin film

piezo

SENSING/ACTUATING

MEMS

12’’

Spectro

metry

Thermal

imaging

MEMS-

lidars

NEMS

Si

µfluidics

MEMS

yield

10 years

Environ

mental

MEMS

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31

HOW TO ACQUIREVALUE FROM MEMS?

MCUAPU

$20 - $40

Sensor

Hub

Sensor 1

Sensor 2

Sensor #

…<$1/sensor

$1 - $2

Value

Sensor

System

System Players

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32

THE QUEST FOR VALUE ACQUISITION IN THE MEMS MARKET

New applications

New use-cases

Aggregate

functionalities

Expand the market reach

Achieve higher sales

Alleviate existing use-

cases via algorithms &

software

Add processing

Add computing

(on edge)

More Si sold to a client as

an extra ASIC (embedded

or stand-alone)

Hero’s

path 1Hero’s

path 2

Hero’s

path 3

To acquire extra value:

Do you accept this quest?

Status of the MEMS Industry 2020 | Sample | www.yole.fr | ©2020

Sensor manufacturer value- +

Page 33: Status of the MEMS Industry 2020 - Yole Développement

33

MACHINE LEARNING CORE ON IMU FROM ST

STM has upedthe ante by adding an embeddedMachine Learning core(on an MCU) in theiriNEMO IMU

Custom algorithms run on the IMU to offload the main processor, offering todevelopers:

• Edge computing (higher computation power at sensor level)

• Reduced power consumption at system level

• Increased accuracy & context detection

Consumer

Activity recognition (eg:

gym activity)

AR/VR

Sensor fusion

Industrial

Industrial IoT

Smart antennas

Dynamic

inclinometers

Applications

Implementedin SensorTilebox (ready togo IoT nodefor evaluation/development)

Status of the MEMS Industry 2020 | Sample | www.yole.fr | ©2020

Page 34: Status of the MEMS Industry 2020 - Yole Développement

34

EDGE AI STARTUPS

Imerai Aspinity Syntiant Cartesiam

MEMS used:

MEMS mics MEMS mics (processor only, could be used with any

MEMS mic or inertial)

(NanoEdgeTM software

only, multi-sensor input

up to 10DOF IMUs)

AI for:

Ultrasonic echolocation Ultra-low power, high-performance

always-on sensing for voice, acoustic and

vibration events

Always-on voice, movement

classification, gesture recognition

vibration monitoring

Possible

applications:

• consumer electronics

• Security

• building occupancy

• medical (patient

movement monitoring)

• Keep safety distances

during covid-19

• Consumer (wake-up TV remote

controls, video doorbell,)

• Portable IoT (smart security devices,

predictive maintenance)

• Smartphones

• Earbuds

• Wearables

• Remote Controls

• Drones

• Security Cameras

• Sensors

• Machine health

monitoring

• Predictive

maintenance

Notable info:

Secured investment from

Appollo Informal Investments

in June 2020

Collaboration with Infineon, using their

XSENSIVTM MEMS

• Partnership with Infineon, using

their XSENSIVTM MEMS mics

• Amazon has certified Syntiant chips

for Alexa devices

Collaboration with

STMicroelectronics

RAMP IC

(Source: Aspinity)NDP101 chip (Source: Syntiant)

Source: Imerai

Source: Cartesiam

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ON THE ROAD TO AUGMENTED INTELLIGENCE

Robot

2030

PC Mobile Smart

Imaging

Functionalities:

1995

3D graphics

cards

2006

Deep neural

network with

GPU

2000

Deep

neural

network

2010

Siri

2014

Alexa

2017

First SoC with

NPU

Specialization

EdgeCloudTrends

1990 2020

Mobile

Surveillance IP camera

Audio

Decentralized Centralized

Smart hearable

Smart watches integrating AI

HW for audio

AI

Smartphone

Virtual personal assistant

Smart camera

including audio AI

Next-gen assistant

Smartphone integrating

AI

Smart watch

Companion robot

Olfactometry

Smelling AI

Human

augmentation

2040

Motion sensing

Holographic interaction

Augmented human

Robot home

AR/VR

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36

Contact our

Sales Team

for more

information

Point-of-Need 2020 –Including PCR-Based Testing

Thermal Imagers and Detectors 2020 – COVID-19 Outbreak Impact – Preliminary Report

BioMEMS Market and Technology 2020

Microphones, Microspeakers and Audio Solutions Market and

Technology Trends 2019

High-End Inertial Sensors for Defense, Aerospace and Industrial

Applications 2020

YOLE RELATED REPORTS

Yole Développement

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Page 37: Status of the MEMS Industry 2020 - Yole Développement

37

Contact our

Sales Team

for more

information

Epitaxy Growth Equipment for More Than Moore Devices Technology and

Market Trends 2020

5G’s Impact on RF Front-End Module and Connectivity for Cell

phones 2019

LiDAR for Automotive and Industrial Applications 2019

Artificial Intelligence Computing for Consumer 2019

Status of the Microfluidics Industry 2019

YOLE RELATED REPORTS

Yole Développement

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38

Contact our

Sales Team

for more

information

TDK-Chirp Ultrasonic Time of Flight Sensor

Consumer MEMS Microphones Comparison 2020

Infineon Sealed Dual-Membrane (SDM) MEMS in Goertek

Microphone

Butterfly Network iQ CMUT Sensor

Spectral Engines NironeSensor X

YOLE GROUP OF COMPANIES RELATED REPORTS

System Plus Consulting

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Page 39: Status of the MEMS Industry 2020 - Yole Développement

39

Contact our

Sales Team

for more

information

Honeywell HG4930CA51 6-Axis MEMS Inertial Sensor

USound Achelous UT-P 2016 MEMS Speaker

Qualcomm 3D Sonic SensorFingerprint

Sensirion SCD30: NDIR CO2 and Humidity Sensor

Honeywell HG4930CA51 6-Axis MEMS Inertial Sensor

YOLE GROUP OF COMPANIES RELATED REPORTS

System Plus Consulting

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Page 40: Status of the MEMS Industry 2020 - Yole Développement

40

Yole Group of Companies, including Yole Développement,

System Plus Consulting, Knowmade and PISEO, are pleased

to provide you a glimpse of our accumulated knowledge.

We invite you to share our data with your own network,

within your presentations, press releases, dedicated articles

and more, but you first need approval from Yole Public

Relations department.

If you are interested, feel free to contact us right now!

We will also be more than happy to give you updated data

and appropriate formats.

Your contact: Sandrine Leroy, Dir. Public Relations

Email: [email protected]

HOW TO USE OUR DATA?

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41

CONTACTS

FINANCIAL SERVICES

› Jean-Christophe Eloy - [email protected]

+33 4 72 83 01 80

› Ivan Donaldson - [email protected]

+1 208 850 3914

CUSTOM PROJECT SERVICES

› Jérome Azémar, Yole Développement -

[email protected] - +33 6 27 68 69 33

› Julie Coulon, System Plus Consulting -

[email protected] - +33 2 72 17 89 85

GENERAL

› Camille Veyrier, Marketing & Communication

[email protected] - +33 472 83 01 01

› Sandrine Leroy, Public Relations

[email protected] - +33 4 72 83 01 89

› General inquiries: [email protected] - +33 4 72 83 01 80

Western US & Canada

Steve Laferriere - [email protected]

+ 1 310 600 8267

Eastern US & Canada

Chris Youman - [email protected]

+1 919 607 9839

Europe and RoW

Lizzie Levenez - [email protected]

+49 15 123 544 182

Benelux, UK & Spain

Marine Wybranietz - [email protected]

+49 69 96 21 76 78

India and RoA

Takashi Onozawa - [email protected]

+81 80 4371 4887

Greater China

Mavis Wang - [email protected]

+886 979 336 809 +86 136 6156 6824

Korea

Peter Ok - [email protected]

+82 10 4089 0233

Japan

Miho Ohtake - [email protected]

+81 34 4059 204

Japan and Singapore

Itsuyo Oshiba - [email protected]

+81 80 3577 3042

Japan

Toru Hosaka – [email protected]

+81 90 1775 3866

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