status in the clean room device production
DESCRIPTION
STATUS IN THE CLEAN ROOM Device production. LHCb – S nake design. IN TEST. LHCb – Straight design. BAD DICING. PRESSURE TEST. BAD COATING little holes in Si. NA62 – Frame 2. READY FOR GLUING. READY FOR DICING. ALICE. NA62 – Dual Banana. KOH inside channels. - PowerPoint PPT PresentationTRANSCRIPT
STATUS IN THE CLEAN ROOMDevice production
Litho+Etching #1(marks+crosses)
Litho+Etching #2 (channels)
Bonding Litho+Etching #3 (holes)
Dicing @ CERN
3961 14.05.12 23.05.12
3772 14.05.12 15.05.12
3850 14.05.12 15.05.12 23.05.12 29.05.12 29.05.12 30.05.12
3917 14.05.12 15.05.12 23.05.12 29.05.12 29.05.12 30.05.12
3776 14.05.12 15.05.12 15.05.12 16.05.12 23.05.12 23.05.12
LHCb – Snake design
LHCb – Straight designLitho+Etching #1(marks+crosses)
Litho+Etching #2 (channels)
Bonding Litho+Etching #3 (holes)
Dicing @ CERN
3637 28.03.12 03.04.12 02.05.12 15.05.12 15.05.12 16.05.12
3424 28.03.12 03.04.12 03.05.12 11.05.12
BAD DICING
PRESSURE TEST
IN TEST
BAD COATING little holes in Si
NA62 – Frame 2Litho+Etching #1(marks+crosses)
Litho+Etching #2 (channels)
Bonding Litho+Etching #3 (holes)
Dicing @ CERN
3448 24.04.12 29.05.12 29.05.12 30.05.12 01.06.12 05.06.12
3625 24.04.12 29.05.12 01.06.12 04.06.12
3645 23.05.12
3446 23.05.12
3627 23.05.12
3624 23.05.12
ALICELitho+Etching #1(marks+crosses)
Litho+Etching #2 (channels)
Bonding Litho+Etching #3 (holes+pools)
Dicing @ CERN
3752 29.05.12 01.06.12 04.06.12 05.06.12
3783 29.05.12 04.06.12 04.06.12 05.06.12
? 29.05.12
READY FOR GLUING
READY FOR DICING
NA62 – Dual Banana
Litho+Etching #1(marks+pool)
Litho+Etching #2 (manifolds+channels)
Litho+Etching #3 (channels)
Bonding Litho+Etching #4 (big pool)
Dicing @ CERN
044 02.03.12 15.03.12 16.03.12 11.05.12 14.05.12 16.06.12 16.06.12
045 05.03.12 29.05.12 30.05.12 01.06.12 tomorrow ???
046 05.03.12 29.05.12 30.05.12
SURFACE NOT CLEAN!
BAD BONDING
PRESSURE TEST
KOH inside channels
SEM PICTURES…