Supporting Information

Large-area, Low-cost Infrared Metamaterial Fabrication via Pulsed Laser Deposition with Metallic Mesh as a Shadow

Mask

Zidong Zhang*, Shuhui Chen, Xiujie Ji, Chen Qin, Huimin Wang, Peitao Xie, Runhua Fan*

A single layer SiC pattern has been fabricated to demonstrate that the SiC layer shows good adhesion to Si (100)

substrate. The fabrication process is exactly same as that in the experimental section, except that only the SiC target

is used during the deposition step. After that, the sample is ultrasonically cleaned for 30 minutes in deionized water,

has impurities blown off the surface with argon gas, and is subjected to vacuum drying.

Figure S1 (a) Optical microscope photographs, (b) backscattered electron images, and (c, d) corresponding element distributions of SiC single layer pattern on Si (100) substrate after 30 minutes of ultrasonic cleaning.

As shown in Figure S1, each unit retains its original shape after the ultrasonic cleaning, which indicates strong adherence between the SiC layer and the Si (100) substrate. In the FeNi-SiC-FeNi multilayer sample, both the bottom layer and the top layer are SiC layers. In this case, the SiC layer can not only provide good adherence between the FeNi-SiC-FeNi fishnet structure and the Si (100) substrate, but also can protect the FeNi layers from being oxidized.

Figure S2 gives the details of the metallic mesh. From Figure 4S, it can be easily found that, before and after the deposition, the morphology of the metallic mesh stays the same. In other word, the mesh mask is reusable. And the price of the mesh mask is is quite cheap, about 10 US dollar per square meter, which greatly reduce the cost of the fabrication.

Figure S2 SEM images of metallic mesh, (a) before deposition, (b) after deposition.

Figure S3 Transmission spectra of 21-layer structure by using polarized light (0 degree) near the absorption peak