stages - jeli.com.tw
TRANSCRIPT
UTILITY MULTI-AXIS TRANSLA-
TOR
(Backlash)
5mm
Probe Station
PRECISION CROSSED-ROLLER BEA-
RING TRANSLATION STAGE
XY XYZ
13mm 25mm 50mm
0.01mm 0.001mm
Angular Deviation 150
microradian
Straighness Deviation 1 m
D-06UTS-3
A B C D
(inch)
(mm)
D-06UTS-3
D-06UTS-3M
1/4-20
M6
8-32
M4
1"
25
2"
50
D-06UTS-3
D-06RTS-0.5
D-06RTS-1 0.01D-06-RTP-1 0.001
Machine position in mm-200
-160
-120
-80
-40
0.0
40
80
120
160
200m/m
12 131086420.0
xx xx
xx
xxxx
xx xx xxxx
xx xx xx xx xx
-41-
STAGES
Jeli Optoelectronics Co., Ltd. www.jeli.com.tw E-mail:[email protected] TEL 03-4777402 FAX:03-4774603