softwaredesignbasic(teachingpendanttransfer)1

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Classificationnumber

504C3027

Pages 33

Version １．１Distribution

number1

Design standard document

（Teaching pendant - Transport）

22nd September 2011

Distributionnumber

１２３４５

Destination

Systemdevicepart 1design

Distributionnumber

６７８９１０

Destination

TAZMO Ltd.

Approvedby

Examinedby

Draft



Classificationnumber

504C0000

Software BusinessProcedures

（System equipment）Revision history

Page

０ Version １．１０

Tazmo Ltd.



HistoryNo

Establishment/lastrevised

Itemnumber

（page）Revision description

Approval

Checked

Proposal

1.111/09/22

All pages New establishment Yamano

beKohat

a Yamaz

oe

Tazmo Ltd.

ClassificationNumber

504C3027 Design Standards

（Teaching Pendant）Revision History

Page

1 Version １．１



Tazmo Ltd.



（Teaching Pendant）Revision History

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2 Version １．１



1. General rules1.1. Purposes

This standard document establishes the design criteria of the teaching pendant

operation method of a TAZMO conveying machine, and aims at unification of the

teaching pendant operation method between equipments.

1.2. Scope of applicationThis document is applied for the conveying machine (mainly robots, aligners, loaders,

unloaders) manufactured by TAZMO. When there is no particular request from the user,

the manual for any neighbor teaching pendant will be prepared following this standard.

However,it is not that limitation when applying this standard document to equipment

composition is difficult.

1.3. Establishment-abolition, maintenance managementProvided in a "quality documentation administrative provision", performs

establishment and revision, and maintenance management.

2. Terminologies Industrial robots

Machines which have the ability to move through automatic control or

manipulation functions, can perform various tasks by programs, and are used in

industry.

Manipulator

Machines constituted from segments connected mutually, which aim at holding ormoving objects (parts, tools, etc.).

Operator

Those who carry out with a robot or a robot-system, are recognized as who can

start, supervise and stop the operation.

Rectangular Robot (Cartesian-Coordinated Robot)

The mechanical structure of an arm is mainly a robot of rectangular-coordinates

form.

Cylindrical Robot (Cylindrical-Coordinated Robot)

The mechanical structure of an arm is mainly a robot of cylinder coordinates form.

SCALAR RobotThe mechanical structure of the arm joints has parallel axes of rotation of the

robot in compliance with a plane perpendicular to the axis.

Link

The machine structure or individual rigid element which is relatively movable to

each other.

Degrees of freedom

The number of independent variables required to describe movement of a rigid

body in space.

Motion space

The region that can be swept by moving parts of the robot (any end effector is not

included) Maximum space

The moving space, plus the working region that can be swept by end effectors.



（Teaching Pendant）

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Restricted space

The region restricted by the limit equipment which does not exceed in a part of

maximum space no matter failure and malfunction what may arise in a robot

system. Operating space

Distance or angle ready for each axis.

Teaching

Point to a position and store information required in order to do work in a robot.

Direct teaching

People need to move a robot's arm, a hand, etc. directly and teach them.

Remote teaching

A kind of direct teaching, use a pendant etc., and move and teach a robot's arm, a

hand, etc.

Operation modeOperating status of the robot controller.

Automatic mode

An operation mode which controls a robot according to a set-up task program.

Manual mode

An operation mode which has priority over other modes, operating a robot by an

operator.

Pendant

The portable unit which is connected to a control device and performs teaching

operation to a robot in a program.

Simple speed

Speed of the point specified when the single axis operated. Track speed

Velocity along the path.

PTP Control

The control for moving the tool center point of a robot axis to another point,

there’s no specification received about the route in that case.

CP Control

Control performed by the instruction given all orbitals or the entire route.

Interpolation

The function which carries out continuous movement without stopping point given

at intervals.

Stop category

Stop function of the mechanical drive. Be classified into following three

categories.

・Stop category-0:

The stop performed by turning off a machine actuator directly, and is not

controlled. Electronic logic and the software must not intervene.

・Stop category-1:

The stop in which the machine actuator is stopped and the power supply is

stopped after that, controlled by orders from a control circuit. The stop of power

supply must not pass electronic logic and the software.

・Stop category-2: The stop by which power supply is carried out at a machine actuator.




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Acceleration-Deceleration Control

There are a velocity-trapezoid system which uses constant acceleration as shown

in Fig. 1.1 (a), and makes acceleration a trapezoid; and an S character

acceleration-and-deceleration system which makes acceleration a curve as shownin Fig. 1.1 (b), and uses S-curve acceleration.

（a） Veloci (a) Velocity trapezoid method （ｂ）S-curve acceleration

method

Figure ２．１ Acceleration method

Initial speed

The speed at the start of acceleration and or at the end of deceleration (START inFigure 1.1)

Maximum speed

When acceleration of the acceleration control is finished, the speed reaches the

constant speed range (MAX in Figure 1.1).

Acceleration

The amount of change of velocity per time during acceleration and deceleration of

acceleration and deceleration control (ACC in Figure 1.1).

S-curve ratio

The ratio of straight line acceleration part (S1) at the time of acceleration of an

acceleration trapezoid system, and the S-curve acceleration part (S0-S1). From

the figure, it becomes（（S0－S1）／S0＊100）（％）.

3. Robot safety requirement items3.1. General industrial robots

When equipped with industrial robots (the definition of an industrial robot is referring

to the following), priority is given to Industrial Safety and Health Act, cope with it to

meet the following safety standards.

Definition: When it corresponds to all the followings, consider it as an industrial

robot.

（1） Having a driving source exceeding 80W. If you have more than one drive

source, it is considered the maximum output of them.（2） Having a manipulator and a memory storage

（3） Performing at least 2 operations of stretching, left-right, up-down.




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ACC

M A X

S T AR T

S P E ED

T IM E

ACCS 0S 1

M A X

S T A R T

S P E ED

T IM E



（4） The motion space of a manipulator exceeds the range of either of four kinds

of the following.

a. 300mm radius x 300mm long for cylindrical-coordinated robot

b. 300mm radius for spherical-coordinated robotc. 300mm x 300mm long for rectangular robot

d. 100mm vertical distance for vertical and horizontal operation.

3.2. Emergency stop-irregular stopWhen the emergency stop operates, the mechanical operation is made into the

mechanism which can stop immediately (stop category 0).

3.3. Teaching（

1）

When a robot is in teaching mode, it is automatically set to safe workingspeed..

（2） Safe working speed of 250 mm/sec (path velocity)or less.

（3） The teaching operation of a robot is performed only while pushing the push-

button switch (Enabling SW).

（4） When the teaching device (pendant) needs to perform teaching operation, a

power supply interception button switch (Stop SW) should be installed to the

pendant.

（5） When you are operating in manual mode, do not perform any operation from

the outside into the structure unless there is the emergency stop switch.

（6） Display the purport of teaching operation with indicating lights etc. during

teaching work.（7） Those who is working with industrial robots should carry out safety rules.

Note: Health Law Article 59 Paragraph 3 (No. 31 Article 36 of the Occupational

Health and Safety regulations, No. 32), Article 18 of the safety and

health regulations established by the special education and training

course is based on Article 19 "special education instructor for industrial

robots", don't perform safety education for those who is non-qualified.




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4. Teaching pendant Name： Small Pendant

Model： HG1T-SB12UH-MK1444

Manufacturer: IDEC Corporation Interface（ You cannot modify the settings below）

Communication form: RS232CCommunication speed: 9600bpsData bit: JIS8Parity: NoneStop bit: １XON/XOFF Control: Disable（no control）Local echo: Disable（no control）CR operation code: Cr（recovery operation only）Buzz Key: No（Beep）

Figure ４．１ Pendant figure




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A u t om a t i c m o d e

M a n u a l m o d eS t o p SW

X →← X ↓ Z Y →← Y

→←

C ANOK

B S

EN T

C L R

+ / -SH I F T 0

98

6

3

5

2

.

1

4

7

S TO POR G↑ ZFUNCE SC

F 1 0F 9F 8F 7F 6

S e l e c t o r SW

8 x 3 2 c o l um n s

9 x 5 c o l um n sM em b r a n e SW

LC D d i s p l a y

E n a b l i n g SWF 5F 4F 3F 2F 1



（1） LCD display

The LCD display has 8 rows of 32 digits.

（2） Stop SW

By pressing the stop switch, the motor drive power supply is cut all off. RESETstop switch (turn slightly to the right) to release it.

（3） Selector SW

Switching between automatic and manual modes. When it is turned down, the

automatic mode is selected, when turned up, the manual mode is selected.

（4） 3-position enabling SW（Enabling SW）

When operating in manual mode, a drive power supply is switched on and it can

operate. If this key is released, a drive power supply is cut off. It is ignored in

automatic mode. Since it is a 3-position switch, when operating it, please press

this key lightly. A switch will be come by off if pushed in strongly.

（5

）Key input unit

（Membrane SW

）

It is used for an input or an operation of equipment from a pendant.

5. Concept of the teaching pendantTeaching pendant are used for robot operations, there are automatic and manual

modes, selected via the selector switch on the teaching pendant. In automatic mode,control operates from the top, you cannot teach pendant operation (monitor functionsonly). In manual mode, operates under the control of the teaching pendant, cannot becontrolled from the top (only read status command).Each command is grouped by using features, and a hierarchy (a tree of functions). Eachoperation also has a password-protection, and that differentiation is made.

5.1. Password on entry The password at the entry of a teaching pendant has just two modes, User mode and

Tazmo mode. However, this is not limited if the user requires more.（１）Password type

The following 2 password modes are prepared. Changing a pre-set password isimpossible.●User Mode：９７８４（the password open to a user）●Tazmo Mode：６８０９、９６００（not open to a user）●Error release Mode：９９９９（not open to a user）

（２）Password level●User mode：for the user、when a user operates it, a pertinent portion is made

with basic functions and private security.●Tazmo Mode ： for Tazmo, which can access the full functionality (runningoperation, speed parameter settings, etc.)●Error release Mode： Error surveillance is stopped and pendant operation isenabled. Suppose that manual operation of an operation category is impossible. A password screen is displayed after power activation, the screen is eitherautomatic mode or manual mode in respect to the selection switch (refer to Fig.5.1 and Fig. 5.2). MODEL：Model name VER ：Software version PON：Program number of software




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8 Version １．１



12345678901234567890123456789012

Figure ５．1 Password screen in automatic mode

12345678901234567890123456789012

Figure

５．２ Password screen in manual mode

（３）How to enter passwordClear Key［ＣＬＲ］・・・・・・・・・Clear the passwordBackspace Key［ＢＳ］・・・・・・Delete a password characterEnter Key［ＥＮＴ］・・・・・・・・Enter passwordNumeric Keys［０］～［９］・・・・・・・・Password input

（４）When a wrong password is enteredIf the password is wrong, characters appear in line 8 as below:「ＰＡＳＳＷＯＲＤＩＳＩＮＣＯＲＲＥＣ」Enter Key［ＥＮＴ］・・・・・・・・Retype the password

[UNIT INFORMATION] |REMOTEMODEL:***** |VER :*.** |PNo. :********* |

|[INPUT PASSWORD] |PASSWORD:******** |

|

[UNIT INFORMATION] | TEACHING

MODEL:***** |VER :*.** |PNo. :********* |

|[INPUT PASSWORD] |PASSWORD:******** |

|




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6. Basic operation of the Teaching PendantIn order to make it equivalent to traditional pendant (PF820), 20 digits are used from

the left; another 12 digits are used from the right, showing operation mode on the 1 st

line, and the operation unit on the 2nd line, and arbitrary use on lower ones. Forreference, the example is shown in Figure 6.2.

12345678901234567890123456789012

Figure ６．1 Basic operation screen

Figure ６．２ Right screen example

Operations of the teaching pendant are divided in to the follow five, which are thestandards of operation of this. The screen display’s main title is on the first line and in []brackets.

[**********] */*|MODE1.************* |UNIT

2.************* |3.************* |4.************* |5.************* |6.************* |7.************* |

[**********] */*|MODE1.************* |UNIT2.************* |MANUAL3.************* |TAZMO4.************* |OVERRIDE5.************* |READY!!6.************* |SPEED *7.************* |ALARM:****




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10 Version １．１

The lower 6lines are not

specified

Align operations

The top 2lines: Statusdisplay

Password level

Sensor override

Power ready

Type of operation

Currently set speed

Alarm is occurring

Main title



6.1. Select the item (for example, when selecting the command) Among the items that are displayed on the screen, you choose what you want to

work.

（１）Screen displayItem selection on the same menu layer is performed by the numeric keys [1] ～[7]. The screen just displays buttons and items which are available. Numberkeys are separated by periods (.). Also, if there are more than seven choices, itdisplays according to the arrangement (see below) of screen page scrolling. A keystroke is performed to select the item、carried out by numeric keys（１～７）.（In item selection, do not use numeric key of 8 or more）

（２）Operation methodsNumeric Keys［１］～［７］・・・・・・・・・ Item selection、move to lowermenu layers.Cursor Keys ← →［］、［］・・・・・・・・Switch between pages

Escape Keys［ＥＳＣ］・・・・・・・・Move to the upper menu layers.

（３）Cursor displayNo cursor is displayed in an item selection menu.

12345678901234567890123456789012

Figure ６．３ Item selection screen

[TITLE] */*|MODE1.********** |UNIT2.********** |3.********** |4.********** |

5.********** |6.********** |7.********** |




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6.2. Input data（such as time teaching）Parameter settings such as teaching or performing direct input of numeric data.（１）Screen display

It is desirable to display the data and the range of data being set at the time of entering data.

（２）Operation methodsClear Key［ＣＬＲ］・・・・・・・・・Clear input lineBackspace Key［ＢＳ］・・・・・・Delete one input characterEscape Key［ＥＳＣ］・・・・・・・Return data from the input mode（input） Move to the upper menu layer （ inputselection）Enter Key［ＥＮＴ］・・・・・・・・Data inputNumeric Key［０］～［９］・・・・・・・・Input selection［１］～［７］ Numeric data entry［０］～［９］

Period Key［・］・・・・・・・・・・Floating-point data entryPositive/Negative Key［＋/－］・・・・・・Toggle the sign of the data

（３）Item selection and cursor displayIf an item is chosen by a number key, a cursor will be displayed on the portionwhich requires an input. In the case of a selection item, selection items aredisplayed one by one. (Example: YES<=>NO)

12345678901234567890123456789012

Figure ６．４ Data entry screen

6.3. The confirmation page （ for example, when running thecommand）

Command execution and data changes require confirmation. The confirmationscreen will be displayed at this time.

（１）Screen displayThe title and operation keys are displayed.

（２）Operation methodsOK Key［ＯＫ］・・・・・・・・RunCancel Key［ＣＡＮ］・・・・・・Cancel（go back to the original）Enter Key［ＥＮＴ］・・・・・・・OK Escape Key［ＥＳＣ］・・・・・・Cancel（go back to the original）

（３）Cursor displayThe confirmation screen doesn’t display the cursor.

[TITLE] */*|MODE1.****** : **.** |UNIT2.****** : **.** |

3.****** : **.** |4.****** : **.** |5.****** : **.** |6.****** : **.** |7.****** :*** |




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12345678901234567890123456789012

Figure ６．５ Operation confirmation

●Operation confirmation screen.［ＯＫ］ is pressed to start the operation.［ＣＡ

Ｎ］to cancel it and return to the previous screen.

When「ＥｎａｂｌｉｎｇｓｗｉｔｃｈＯＮ」is shown at the bottom of the scree,

press the SW to enable the operation.

12345678901234567890123456789012

Figure ６．６ Enter number for confirmation

●Enter the confirmation number.

Display the cursor at the item to enter, then type the number, and press ［ＥＮ

Ｔ］to confirm. Press［ＥＳＣ］to go to the previous screen.

12345678901234567890123456789012

Figure ６．７ Setting change confirmation screen

[ READY? ] |MODE|UNIT

*********** ||

START -> OK |CANCEL -> CAN |

||

[****/****] |MODE|UNIT

**** : *** |**** : *** |

||

DECIDE -> ENT |CANCEL -> ESC |

[********] */*|MODE1.***** : **.** |UNIT2.***** : **.** |

|[SAVE BACKUP MEMORY]|SAVE -> ENT |CANCEL -> ESC |

|




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●Setting checking screen. Under the current screen, five lines is displayed, as

shown in the above figure, and all of a numerical value and an item are saved.

[ＯＫ]to save the backup memory, and to return to the menu.［ＣＡＮ］to go to

the original menu.

12345678901234567890123456789012

Figure ６．８ Running screen

●Screen during operation.

During the operation, press and hold SW to enable, and release to stop

6.4. JOG operation screenIt is operated in JOG or JOG teaching.

（１）Screen displayThe display of an axis and the operation of each axis in JOG operation areperformed. Moreover, input operation is performed in JOG teaching.

（２）Operation methods

数字キー［１］～［７］・・・・・・・・・・Choose the axisCursor Keys ↑ ↓［Ｚ］［Ｚ］・・・・・・・ Axis selectionCursor Keys ← →［］［］・・・・・・・・・Low speed JOG operationCursor Keys ← →［Ｙ］［Ｙ］・・・・・・・High speed JOG operationEnter Keys［ＥＮＴ］・・・・・・・・・・OK

（３）Item selection and cursor displayItem selection is performed by numeric keys ［１］～［７］ , and ↑ ↓［Ｚ］［Ｚ］for scrolling selection. The selected item is highlighted.While holding the enabling SW, press ← → ← →［］［］［Ｙ］［Ｙ］ for JOGoperation to be performed. Either →［］ or →［Ｙ］ is for positive direction、

←［］ or ←［Ｙ］for negative direction.Low-speed JOG runs at speed number 1.

High-speed JOG runs at speed number 2.

12345678901234567890123456789012

Figure ６．９ＪＯＧ operation screen

|MODE|UNIT

************ ||

EXECUTING!! ||||

[****] */*|MODE1.******* |UNIT2.******* |3.******* |4.******* |5.******* |6.******* |7.******* |




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6.5. Error screenWhen an error occurs, the error status is displayed.（１）Screen display

When an error occurs, if it is able to continue, the screen in Figure 6.10 isdisplayed, if not, the screen in Figure 6.11 is displayed.For a continuation possible error, the error can be canceled bygenerating 「 ENT」 key.For a continuation impossible error, press 「 ENT」 toremove the error and perform a CPU reset.

（２）Operation methodsEnter Key［ＥＮＴ］・・・・・・・・・・Clear the error, reset CPU

（３）Item selection and cursor displayCursor display is not performedSince pendant operation cannot be performed in a continuation impossible

error, error release may not be able to be carried out. In order to prevent it, anerror screen is not displayed for 5 seconds after a power supply injection. Thepassword in error release mode is entered between them.

12345678901234567890123456789012

Figure ６．Error 10 occurrence screen (able to continue)

12345678901234567890123456789012

Figure ６．Error 10 occurrence screen (unable to continue)

***： Error Code（３ characters）XXXXXXXXXXXXX： Error Message（maximum 16 character）

[ERROR] |MODE|UNIT

***:XXXXXXXXXXX |||

CONTINUE -> ENT ||

|

[ERROR] |MODE|UNIT

***:XXXXXXXXXXX |||

CPU RESET -> ENT |

POWER OFF ||




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7. About screen（１）Scroll the screen page

Screen at the same hierarchical level can be made in the initial screen. The

following page is created when a display cannot be performed. At this time,(the number of pages / the total number of pages) is specified in the screenupper right. Each page can be switched using the cursor keys [←] [→], you cantoggle crossed. ←（［］：reverse direction, →［］: forward direction）

Figure ７．１ Screen scrolling

（２）Display dataIt is based on not outputting "0" on a beam when displaying digital data（Eg） Regular １２３４（ｍｍ）

False ００００１２３４（ｍｍ）

8. Control of teaching pendant8.1. Initial Control of Teaching PendantWhen teaching pendant is starting, it shows initial control. It returns to a password

entry screen by changing a selection switch, and enables operation by another mode of operation, without intercepting power supply. However, the change by that a robot is ahalt condition at the time of a selection switch change and an operating state isforbidden. When pull it out, teaching pendant is stopped and alarm is generated.

8.2. Configure actionsConfigure actions （Operation mode selection → Unit selection → Category selection→ Operation item → Details of an operation item）（Reference figure ８．１）.

（１）Operation mode selection“Automatic mode”（ＲＥＭＯＴＥ）and “Manual mode”（ＴＥＡＣＨＩＮＧ）can bechosen by selecting a switch of teaching pendant. In the case of “Automatic

mode”, the following categories of actions can only monitor operations（But inTAZMO mode, running is possible）.

（２）Unit selectionEach unit is chosen when two or more units operated with a teaching pendantexist. In the case of a single unit, suppose that an abbreviation is possible. A unit name refers to table 8.1 and determines it individually.

Table ８．1 Unit nameUnit name Unit

ALL UNIT All units （Common items）WAFER TRANSFER Transfer robot

ALIGNER AlignerLOADER ＊ Opener ＊（＊：１～４）

（３）Operation category

[TITLE] 1/2|MODE1.****** : **.** |UNIT2.****** : **.** |3.****** : **.** |4.****** : **.** |5.****** : **.** |

6.****** : **.** |7.****** :*** |

[TITLE] 2/2|MODE1.****** : **.** |UNIT2.****** : **.** |3.****** : **.** |4.****** : **.** |5.****** : **.** |

6.****** : **.** |7.****** :*** |




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According to a teaching pendant, an operation category is classified into thefour following kinds.

Manual（MANUAL）

Work that related to operating. Operation for performing the manual operationof axial movement or auxiliary operation, and setup JOG teaching data.

Parameter（PARAMETER ）Operation which writes data to memory. Operation for setting variousparameters.

Monitor（MONITOR ）Operation of checking a state. Operation for performing the monitor of aninput-and-output signal or a log.

Running（RUNNING）Operation that a pendant performs individual operation. Operation will becomepossible if it inputs with the password in TAZMO mode from automatic mode.Some items is not displayed in user mode.

In running operation, a sensor override is used and it can be made to performa conveyance check without a work.

Figure ８．１ Pendant

operation composition




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[UN I T IN FO RM A T ION ]

[ IN PU T P A S SWORD ]P A S SWO RD : * * * *

V E R : * . * *MOD E L : * * * * *

1 . A L L UN I T[UN I T ] 1 / 1

2 .UN I T 13 .UN I T 2

1 .M AMUA L2 . P AR AM E T E R 3 .MON I TOR

[M OD E ] 1 / 1

[UN I T IN FORM A T ION ]

[ IN PU T P A S SWO RD ]P A S SWO RD : * * * *

V E R : * . * *MOD E L : * * * * *

[UN I T ] 1 / 11 . A L L UN I T2 .UN I T 13 .UN I T 2

1 .MON I TOR [MOD E ] 1 / 1

| T E A CH IN G | R EMO T E

| T E A CH IN G | R EMO T E

| T E A CH IN G | R EMO T E|UN I T |UN I T

[M ANU A L ] 1 / * [ P A R AM E T E R ] 1 / * [MON I TO R ] 1 / *| TE ACH ING|UN I T |UN I T

| * * * * * *| T E ACH IN G|UN I T1 . * * *

2 . * * * * *3 . * * *4 . * * *5 . * * * * * * * *6 . * * * * * * *7 . * * * * * * *

1 . * * *2 . * * * * *3 . * * *4 . * * *5 . * * * * * * * *6 . * * * * * * *7 . * * * * * * *

1 . * * *2 . * * * * *3 . * * *4 . * * *5 . * * * * * * * *6 . * * * * * * *7 . * * * * * * *

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4 .UN I T 35 .UN I T 4

4 .UN I T 35 .UN I T 4

S e l e c t o r SW

T E A CH ING R EM O T EPN O : * * * * * * * * * PNO : * * * * * * * * *

2 .RUNN ING

Operation modeselection

Unit selection

Categoryselection

Categoryselection

Operationitem

Manual mode Automatic

mode

Unitselection



（４）Operation itemsSelect specified operation item. The item with reference to the following table,corresponding to the individual.

Table ８．２ Operation itemsCategory Item M Detail Content

MANUAL ORG InitializationHOME Move to HOME positionMOVE Station number Move to STOP POINTGET Extract operationPUT Storage operationEXTEND Stretch armRETRACT Retract armHOLD Hold operationRELEASE Release operationLIFT UP Arm PUT start height movementLIFT DOWN Arm GET start height movementLIFT MID Arm teaching start height

movementCHANGER Inversion-axis operationXCHANGE Exchange operationMAPPING Station number Mapping operationMAP MOVE Station number Mapping position movementMAP EXTEND Mapping sensor growthMAPRETRACT

Mapping sensor shrinkage

MAP UP Mapping sensor move upMAP DOWN Mapping sensor move down

ALIGNMENT Alignment startCENTERING Center alignment operation

LDP OPEN Open LOAD PORTLDP CLOSE Close LOAD PORT

JOG Specified for each axis JOG OperationTEACHING Specified for each axis JOG Teaching* ORG SEACH ● Each independent axis Starting point detecting operation

PARAMATER

****COMMUNI

BA RATE Communication baud rate

DATA Data bitsPARITY ParitySTOP Stop bitTIME OV Communication time over

RSP NUM Respone timesRSP TIM Respone time interval

HOMEPOSITION

X POSI X-axis (rect coordinate) homeposition

Y POSI Y-axis (rect coordinate) homeposition

R POSI R-axis (cyl coordinate) homeposition

T POSI θ-axis (cyl coordinate) homeposition

Z POSI Lift axis home positionS POSI Slide axis home positionP POSI Inversion axis home position

STATION STATION No. Station numberX POSI X-axis (rectangular) teaching

position Y POSI Y-axis (rectangular) teaching

position




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R POSI R-axial (cylinder) teaching positionT POSI θ-axial (cylinder) teaching positionZ POSI Lift axis teaching positionS POSI Slide axis teaching position

P POSI Inversion axis teaching positionUP LIFT Upper lift movementDOWN LIFT Bottom lift movementLIFT STOP Lift stop teaching positionCOMPLE Teaching end

ORG DATA ● X ORG X-axis original offset● Y ORG Y-axis original offset● R ORG R-axis original offset● T ORG θ-axis original offset● Z ORG Lift axis original offset● S ORG Slide axis original offset● P ORG Inversion axis original offset

MOVE SPEED Each speedspecification

Speed of the specified position

STATIONSPEED

STATION No. Station number

ARM EXTEND Arm speed when there is work ARM RETRACT Arm speed when there is no work LIFT LO Low speed of lift position teachingLIFT HI Top speed of lift position teachingMAPPING Mapping speedTEACHING Teaching speed

SPEEDTABLE

● SPEED No. Speed number (each axis)

● MAX Top speed● START Start speed● ACC Acceleration● S CRV S ratio

MAPPING SIZE Work sizeSLOT The number of slots of a cassetteS PITCT Slot width of a cassetteSTROKE Amount of lift mappingEXTENT Existence detection width

operationRANGE Thickness detection width

operationPOINT Mapping detection depth positionFLYOUT Running-out detection positionSEN OFF Difference bt chuck & sensor

positionTIMING GET WAIT GET waiting time

PUT WAIT PUT waiting timeRETRY GET/PUT times of retryEXEC TIM Execute operating time

OVERRIDE GET/PUT existence check issometimes ignored

CONFIGURATION

● * +LIM **Limit position of the axis in thepositive direction

● * -LIM * Limit position of the axis in the

negative direction● ARM LENGTH Arm length● SV INP Servo motor in-position width● ST INP Step motor position gap width




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DEFAULT ● Data is returned to an initial value ALRAM LOGCLEAR

Clear the alarm log

COMMUN

LOG CLEAR

Clear communication log

MONITOR ERROR LOG Display error logCOMMUNICA TION LOG

Display communication log

INPUT/OUTPUT

I/O display

ENCODER ABS ENCODER Display absolute value of encoderINC ENCODER Display incremental value of

encoder● DEFF COUNT Display deviation value of encoder

CASSETTETEACH

Cassette teaching display

MAPPINGRESULT

Mapping result display

MAPPINGDATA

Mapping data display

RUNNING TRANSFER ● Station specification Transfer operation running ARMRUNNING

● Single arm operation running

TURNRUNNING

● Turn operation running

LIFTRUNNING

● Lift operation running

SLIDERUNNING

● Slide operation running

FLIPRUNNING

● Flip operation running

M（Mode ●）： is displayed in TAZMO mode.

9. NotesIn the creating of the teaching pendant software, pay attention to the following

notes:●In the manual mode of a pendant, there are 2 ranks of speed（１ low speed,２ high speed, speed is used to set at ２５０ mm／ｓ or less.●In the times of a start of operation, such as the time of running or operation,inside of area where operating is being dangerous.




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10. Appendix An error code may include 4 figures. The first is error level, the following figure is

unit number, lower 2 figure be an error code. When a display is a double figure display,

lower 2 figure is displayed.

Error code：＃＄＊＊

＃： Unit number

＄： Error level

＊＊： Error code

Table １０．１ Error code table（2 lower figures）Code Message Content Level

00 RUN Standby state LV001 TEACHING Teaching box operation LV002 READY Moto preparation LV0

03 ACTIVE Running LV004 LV005 LV006 LV007 PAUSE Paused LV008 INTERLOCK Under interlock LV009 INITIAL In preparation LV010 WAIT INITIAL Waiting for untreated initialization LV020 WORK OFF No wafer LV121 WORK ON There is wafer LV122 WORK OFF SLOT No wafer in a specified slot LV123 WORK ON SLOT Specified slot has wafer LV124 SLOT ERROR Error at specified slot LV125 NO STATION No location is specified LV1

26 ARM NO. ERROR Specified arm is abnormal LV127 LV128 LV129 LV12a MAPPING

SENSOR Mapping sensor error LV1

2b MAP PARAMETER Parameter is not set LV12c LV12d LV12e MAP FLYOUT ERR Running out of wafer LV12f MAP DISABLE Stop during mapping LV130 ARM1 OVER Out of range error LV131 ARM2 OVER Out of range error LV132 TURN OVER Out of range error LV133 LIFT OVER Out of range error LV134 SLIDE OVER Out of range error LV135 FLIP OVER Out of range error LV136 RESERVE LV137 RESERVE LV138 ARM1 BATT

WORNBattery of absolute encoder decreased LV1

39 ARM2 BATTWORN

Battery of absolute encoder decreased LV1

3a TURN BATTWORN


3b LIFT BATT WORN Battery of absolute encoder decreased LV13c SLIDE BATT

WORN


3d FLIP BATT WORN Battery of absolute encoder decreased LV13e RESERVE LV13f RESERVE LV1




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40 NOT READY Power supply of driver is not switched on LV141 LV142 LV143 LV1

44 LV145 LV146 LV147 LV148 LV149 LV14a LV14b LV14c LV14d LV14e LV14f LV180 BACKUP MEMORY Backup memory error LV3

a0 BEFORE INITIAL Can not run command before initialize LV2a1 TIME OVER Time is over LV2a2 WORK FLYOUT Wafer jumped out during operating LV2a3 RB POSI ERR Robot operated during the stop LV2a4 WORK(1) LOST Wafer (1) lost during operating LV2a5 WORK(2) LOST Wafer (2) lost during operating LV2a6 BRAKE LOCK Brake ON error LV2a7 CANCEL PAUSE Cancel operation after pause LV2a8 ARM1 POSI ERR Malposition LV2a9 ARM2 POSI ERR Malposition LV2aa TURN POSI ERR Malposition LV2ab LIFT POSI ERR Malposition LV2ac SLIDE POSI ERR Malposition LV2ad FLIP POSI ERR Malposition LV2

ae RESERVE LV2af RESERVE LV2b0 ARM1 +LIMIT ON Abnormal positive limit LV2b1 ARM1 -LIMIT ON Abnormal negative limit LV2b2 ARM2 +LIMIT ON Abnormal positive limit LV2b3 ARM2 -LIMIT ON Abnormal negative limit LV2b4 TURN +LIMIT ON Abnormal positive limit LV2b5 TURN -LIMIT ON Abnormal negative limit LV2b6 LIFT +LIMIT ON Abnormal positive limit LV2b7 LIFT -LIMIT ON Abnormal negative limit LV2b8 SLIDE +LIMIT ON Abnormal positive limit LV2b9 SLIDE -LIMIT ON Abnormal negative limit LV2ba FLIP +LIMIT ON Abnormal positive limit LV2

bb FLIP -LIMIT ON Abnormal negative limit LV2bc RESERVE LV2bd RESERVE LV2be RESERVE LV2bf RESERVE LV2c0 FAN1 ERROR Malfunctioning fan LV3c1 FAN2 ERROR Malfunctioning fan LV3c2 LV3c3 LV3c4 LV3c5 LV3c6 LV3c7 LV3c8 ARM1 ENCODE Error in reading absolute encoder LV3

c9 ARM2 ENCODE Error in reading absolute encoder LV3ca TURN ENCODE Error in reading absolute encoder LV3cb LIFT ENCODE Error in reading absolute encoder LV3cc SLIDE ENCODE Error in reading absolute encoder LV3




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cd FLIP ENCODE Error in reading absolute encoder LV3ce RESERVE LV3cf RESERVE LV3d0 ARM1 DEVI ERR Abnormal position LV3

d1 ARM2 DEVI ERR Abnormal position LV3d2 TURN DEVI ERR Abnormal position LV3d3 LIFT DEVI ERR Abnormal position LV3d4 SLIDE DEVI ERR Abnormal position LV3d5 FLIP DEVI ERR Abnormal position LV3d6 RESERVE LV3d7 RESERVE LV3d8 LV3d9 LV3da LV3db LV3dc LV3dd LV3

de LV3df LV3e0 ARM1 COMMUNI Communication error LV3e1 ARM2 COMMUNI Communication error LV3e2 TURN COMMUNI Communication error LV3e3 LIFT COMMUNI Communication error LV3e4 SLIDE COMMUNI Communication error LV3e5 FLIP COMMUNI Communication error LV3e6 RESERVE LV3e7 RESERVE LV3e8 ARM1 SV ALM Amplifier error LV3e9 ARM1 SV ALM Amplifier error LV3ea TURN SV ALM Amplifier error LV3eb LIFT SV ALM Amplifier error LV3

ec SLIDE SV ALM Amplifier error LV3ed FLIP SV ALM Amplifier error LV3ee RESERVE LV3ef RESERVE LV3f0 LV3f1 LV3f2 LV3f3 LV3f4 LV3f5 LV3f6 LV3f7 LV3f8 LV3

f9 LV3fa LV3fb COLLISION1 Emergency stop (collision detection) LV3fc COLLISION2 Emergency stop (collision detection) LV3fd MAIN POWER

OFFEmergency stop (POWER OFF) LV3

fe EMERGENCY STOP

Emergency stop (stop SW) LV3

ff LV3

【Description】LevelＬＶ０：No error, display statusＬＶ１：Non-continuable error, error is released with following commandＬＶ２：Non-continuable error, error is released with (RST) command

ＬＶ３ : Non-continuable error, error is released by reset ＣＰＵ（ＣＰＩ）or power supply re-injection

Table １０．２ The mode of expression in a teaching pendant




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Standard Japanese translation Default Other candidates

Axial relationＡＸＩＳ Axis ｓｈａｆｔＸ－ＡＸＩＳ X-axis Ｘ－ＡＸ

Ｙ－ＡＸＩＳ Y-axis Ｙ－ＡＸＺ－ＡＸＩＳ Z-axis Ｚ－ＡＸＴ－ＡＸＩＳ θ-axis Ｔ－ＡＸ

Speed setup

ＲＡＮＧＥ Magnification

ＳＴＡＲＴ Initial velocity ＳＶＡＣＣＥＬ Accelerating ＡＣＭＡＸ Maximum speed ＭＡＸＳ－ＣＵＲＶＥ S-curve acc/deceleration ＳＣＳＰＥＥＤ Speed ＳＰＤ

Unit name

ＲＯＢＯＴ RobotＩＮＤＵＳＴＲＩＡＬＲＯＢＯＴ Industrial Robot

ＰＯＬＡＲＲＯＢＯＴ Polar Robot

ＲＥＣＴＡＮＧＵＬＡＲＲＯＢＯＴ Rectangular Robot

ＳＣＡＲＡＲＯＢＯＴ SCARA Robot

ＡＬＩＧＮＥＲ Aligner ＡＬＩＧＮＡＬＮ

ＨＡＮＤＬＥＲ Handler

ＳＥＮＳＩＮＧ Searcher

ＴＲＡＮＳＦＥＲ Vonveyance ＴRF

ＴＵＲＮ Rotation mechanism

ＢＵＦＦＥＲ Buffer ＢＵＦＦＯＵＰ Hoop ＦＵＰ

ＳＭＩＦ SUMIFU ＳＭＦＳＬＩＤＥ Rail

ＢＯＡＴＳＴＡＴＩＯＮ Boat station ＢＴＳＢＡＫＥ（ＰＬＡＴＥ） Bake ＢＫＰＢＰＣＯＯＬ（ＰＬＡＴＥ） Cool ＣＬＰＣＰＣＯＡＴ Coat ＣＯＴＤＥＶＥＬＯＰＥＲ Developer ＤＥＶＤＥＨＹＲＡＴＩＯＮＢＡＫＥ Dehyration bake ＤＨＢＤＩＳＴＲＩＢＵＴＩＯＮＣＡＢＩＮＥＴ Switchboard ＤＳＣＦＵＲＮＡＮＣＥ Bake furnance ＦＵＮＩＮＤＥＸＥＲＳＹＳＴＥＭ Indexer ＩＤＸＰＯＷＥＲＢＯＸ Power supply BOX ＰＷＲＲＯＡＴＲＹＣＵＰ Rotation cup ＲＴＣＲＣ

ＳＣＲＵＢＢＥＲ Scrubber ＳＣＲＶＡＣＵＵＭＤＲＹ Vacuum dry ＶＣＤＩＮＳＰＥＣＴＩＯＮＥＱＵＩＰＭＥＮＴ Inspection equipment

ＥＬＥＶＡＴＯＲ Elevator

Operation

ＥＸＴＥＮＤ Extend

ＲＥＴＲＡＣＴ Retract

ＦＯＲＷＡＲＤ Forward ＦＷＲＥＶＥＲＳＥ Reverse ＲＶＨＯＬＤ Hold

ＬＯＳＴ（ＬＯＳＳ） Loss

ＭＯＶＥ Move ＭＶ

ＲＯＴＡＴＥ RotateＰＩＣＫＵＰ Pickup ＧＥＴＰＵＴＤＯＷＮ Put down ＰＵＴＬＩＦＴ Rise and fall (except pickup




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stroke)

ＵＰ Up

ＤＯＷＮ Down ＤＷＮＳＴＩＣＫ Stick into

ＤＥＴＥＣＴ Detect

ＣＯＭＰＬＥＴＥ Complete ＣＭＰＬＴＲＥＭＯＶＥ Remove

ＲＥＰＬＡＣＥ Replace

ＣＬＯＳＳＳＬＯＴＴＥＤ Stuck at an angle

ＰＩＬＥＵＰ Pile up

ＥＸＣＨＡＮＧＥ Exchange (W arm) ＳＷＡＰＨＡＮＤＯＦＦ Delivery ＰＡＳＳＯＶＥＲＲＩＤＥ Override

ＨＡＬＴ Stop

ＬＥＦＴ（ＬＥＡＶＥ） Release

ＭＥＭＯＲＩＺＥ Memorize

ＭＥＡＳＵＲＥ Measure

Part

ＬＩＮＥＳＥＮＳＯＲ Line sensor

ＬＡＳＥＲ Laser

ＣＨＡＮＧＥＲ Changer

ＳＴＡＴＩＯＮ Station

ＣＡＳＳＥＴＴＥ Cassette ＣＳＴ，ＣＳＳＥＮＳＯＲ Sensor ＳＥＮＳＣＨＥＣＫ Chuck

ＥＭＥＲＧＥＮＣＹ Emergency ＥＭＧＮ，ＥＭＳ

ＡＲＭ Arm（ＭＴ:first, second joint）

ＷＲＩＳＴ Wrist（2nd

axis +C106）ＨＡＮＤ Rotation of third joint （Ｍ

Ｔ）ＴＵＲＮ Rotation of the chuck （Ｍ

Ｔ）ＥＮＴＥＮＴ key ＥＮＴＥＲＢＳ Backspace

ＥＳＣ Escape

ＣＬＥＡＲ Clear ＣＬＲＣＡＮＣＥＬＬＡＴＩＯＮ Cancellation ＣＡＮＳＬＯＴ Number of stages

ＣＨＡＭＢＥＲＶＥＳＳＥＬ Chamber ACCUMORATOR

ＶＡＬＶＥ Valve

ＷＡＦＥＲWafer

ＷＦＲＥＣＬＡＩＭＷＡＦＥＲ Reclaim wafer

ＳＵＢＳＴＲＡＴＥ Substrate

ＡＩＲＰＲＥＳＳ Air pressure ＡＩＲＰ－ＲＲＥＳ

ＶＡＣＵＵＭＰＲＥＳＳ Vacuum pressure ＶＡＣ－ＰＲＥＳ

ＶＡＣＵＵＭ Vaccum ＶＡＣＰＲＥＳＳ Pressure ＰＲＥＳＡＩＲＦＩＬＴＥＲＰＥＮＤＡＮＴ Pendant

ＯＶＥＲＲＵＮ Overrun

ＭＡＳＫ Mask

ＲＥＳＩＳＴ Resist

ＲＥＴＩＣＬＥ ReticleＰＥＬＬＩＣＬＥ Pericle

ＭＡＧＮＥＴＩＣＳＨＩＥＬＤ Magnetic shield

ＩＮＦＡＲＥＤＬＡＳＥＲ Infrared laser




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ＣＯＮＶＥＲＳＩＯＮＫＩＴＳ Conversion kit

ＮＯＺＺＬＥ Nozzle

ＳＥＬＦＤＩＡＧＮＯＳＴＩＣＦＵＮＣＴＩＯＮ

Self-diagnostic function

ＩＯＮＩＺＥＲ IonizerＥＮＣＯＤＥＲ Encoder

ＧＲＥＡＳＥ Grease

ＣＯＮＮＥＣＴＯＲ Connector

ＣＹＬＩＮＤＥＲ Cylinder

ＦＩＢＥＲ Fiber

ＭＥＬＯＤＹ Melody

ＲＥＧＵＬＡＴＯＲ Regulator

Event

ＴＯＰ Top

ＢＯＴＴＯＭ Bottom

ＦＲＯＮＴ Front

ＲＥＡＲ RearＨＥＩＧＨＴ Height

ＤＩＲＥＣＴＩＯＮ Direction ＤＩＲ

ＦＩＲＳＴ First

ＡＤＪＵＳＴ Adjust

ＣＵＲＲＥＮＴ Current ＣＵＲＳＡＦＴＹ Safety

ＩＮＴＥＲＯＣＫ Interlock

ＳＴＲＯＫＥ Stroke

ＨＯＭＥ Home position

ＩＮＬＩＮＥ In-line

ＤＥＦＡＵＬＴ Initial value ＤＥＦＨＩＧＨＴ High speed ＨＩ

ＬＯＷ Low speed ＬＯＣＯＮＴＲＯＬ Control ＣＲＴＩＮＳＴＡＬＬＡＴＩＯＮ Installation

ＣＯＭＭＩＳＳＩＯＮＩＮＧ Starting

ＰＡＴＨ Path

ＴＲＡＪＥＣＴＯＲＹ Trajectory

ＬＯＡＤ Load

ＲＥＰＥＡＴＡＢＩＬＩＴＹ Repeat accuracy

ＰＯＳＩＴＩＯＮＩＮＧＡＣＣＵＲＡＣＹ Position accuracy

ＳＴＯＰＰＩＮＧＡＣＣＵＲＡＣＹ Stopping accuracy

ＴＲＡＮＳＰＯＲＴＡＴＩＯＮＬＥＡＤＴＩＭＥ

Transport lead time

ＭＩＭＩＭＵＭＰＯＳＩＴＯＮＩＮＧＴ

ＩＭＥ

Minimum positioning time

ＦＡＩＬＳＡＦＥ Fail-safe

ＨＡＺＡＥＤ Danger

ＳＡＦＥＷＯＲＫＩＮＧＰＲＯＣＥＤＵＲＥ

Safe working procedure

ＦＡＵＬＴ Failure

ＥＸＰＯＳＵＲＥ Exposure

ＦＲＩＮＧＥ Fringe

ＢＯＷＩＮＧ Bowing

ＡＶＡＩＬＡＢＩＬＩＴＹ Operating rate

ＴＲＯＵＧＨＰＵＴ Throughput

ＢＡＣＫＳＩＤＥ Back side

ＣＹＣＬＥＴＩＭＥ Cycle time

ＣＲＡＣＫ Crack

ＭＥＴＡＬＣOＮＴＡＭＩＮＡＴＩＯＮ Metal comtamination

ＡＩＲＦＬＯＷ Airflow




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State

ＳＴＡＮＤ－ＢＹ Standby

ＲＥＳＵＭＥ Resume

ＲＥＡＤＹ Complete preparation

ＲＵＮ Operating state

ＷＡＩＴ Waiting state

ＮＯＴ－ＲＥＡＤＹ Preparation not complete

ＳＴＡＴＵＳ Status

ＣＯＮＤＩＴＩＯＮ State

Command name

ＯＲＧ Initialization ＩＮＩＴＩＡＬ，ＯＲＩＧＮ

ＲＥＳＥＴＣＰＵ reset

ＣＯＭＭＡＮＤ Command ＣＭＤ

Menu classification

ＭＡＩＮＭＥＮＵ

ＵＮＩＴＭＯＶＥＭＥＮＴ Single unit movementＴＥＡＣＨＩＮＧＳＥＴ Teaching setup ＴＥＡＣＨＲＵＮＮＩＮＧＭＯＤＥ Running ＲＵＮＭＯＤ

ＥＳＰＥＥＤＳＥＴ Speed setup ＳＰＤＳＥＴＥＮＶＩＲＭＥＮＴＳＥＴ Environment setup ＥＮＶＳＹＳＴＥＭＭＯＮＩＴＯＲＤＩＳＰ Monitor display

ＥＸＴＥＮＴＩＯＮ Extension

ＭＡＩＮＴＮＡＮＣＥ Maintenance

ＯＰＥＲＡＴＯＲ Operator ＯＰＥＣＡＬＩＢＲＡＴＩＯＮ Calibration ＣＡＬＢＲＥＧＩＳＴ Registration

ＭＯＤIＦＹ Modification ＭＯＤＦＹ

ＤＥＬＥＴＥ Delete ＤＥＬＣＯＮＦＩＲＭ Confirm

ＲＥＴＵＲＮ Return (screen)

ＥＸＥＣＵＴＥ Executing operation

ＳＥＴ Setup

ＨＩＴＡＮＹＫＥＹ Press any key

Standard

ＳＥＭＩ Semi

ＪＥＩＤＡ Jaidah

ＦＬＡＴ Flat

ＮＯＴＣＨ Notch

ＦＬＡＴ／ＮＯＴＣＨ Flat or notch Ｆ／Ｎ

ＯＲＩＥＮＴＡＴＩＯＮＦＬＡＴ

Orientation flat

Others

ＯＰＥＲＡＴＩＮＧＭＯＤＥ Operating mode

ＡＵＴＯＭＡＴＩＣＭＯＤＥ Automatic mode

ＭＡＮＵＡＬＭＯＤＥ Manual mode

ＥＮＡＢＬＥ Enable

ＤＩＳＡＢＬＥ Disable

ＲＥＰＯＲＴ Report ＲＰＴＭＥＡＳＳＡＧＥ Message ＭＥＳＳＥＬＥＣＴ Select

ＣＯＮＴＥＮＳ Content

ＤＵＭＭＹ Dummy ＤＭＹＪＯＧ JOG

ＯＦＦＳＥＴ Offset value

ＲＥＬＥＡＳＥ Release LIBERTE




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ＲＥＶＩＳＩＯＮ Calibration (correctorientation flat value)

ＡＮＧＬＥ Angle

ＳＩＺＥ Size

ＰＩＴＣＨ PitchＦＩＮＥ Detailed

ＰＯＳＩＴＩＯＮ Position ＰＯＳＣＯＵＮＴ Times（of running）ＣＮＴＮＵＭＢＥＲＲＥＣＩＰＥ Recipe

ＴＡＲＧＥＴ Target

ＲＥＳＵＬＴ Result ＲＥＴＰＲＯＣＥＳＳ Process

ＳＥＱＵＥＮＣＥ Sequence ＳＥＱＤＥＦＩＮＥ Definition

ＥＱＵＩＰＭＥＮＴ Equipment ＥＱＵＩＰＭＡＮＵＡＬ Manual

ＣＥＮＴＥＲ Center ＣＥＮＴ

ＩＮＣＨ InchＰＡＲＡＭＥＴＥＲ Parameter ＰＡＲＡＩＮＳＩＤＥ Inside

ＯＵＴＳＩＤＥ Outside

ＲＥＡＤ Reading

ＷＲＩＴＥ Writing

ＬＡＰ－ＴＩＭＥＲ Lap timer

ＲＥＶＥＲＳＥ Reverse

ＳＴＡＮＤＡＲＤ Standard

ＩＮＣＯＲＲＥＣＴ Incorrect

ＦＬＯＡＴＩＮＧＰＯＩＮＴ Floating point

ＭＯＴＩＯＮＳＰＡＣＥ Motion space

ＲＥＳＴＲＩＣＴＥＤＳＰＡＣＥ Restricted space

ＷＯＲＫＩＮＧＳＰＡＣＥ Workspace

ＯＰＥＲＡＴＩＮＧＲＡＮＧＥ Operating range

ＰＯＬＡＲＣＯＯＲＤＩＮＡＴＥＳ Polar coordinate system

ＣＡＲＴＥＳＩＡＮＣＯＯＲＤＩＮＡＴＥＳ

Rectangular coordinatesystem

ＵＰＳＴＲＥＡＭ Primary side, upper stream

ＤＯＷＮＳＴＲＥＡＭ Secondary side, lowerstream

ＰＲＥＴＲＥＡＴＭＥＮＴ Pretreatment

ＰＯＳＴ－ＴＥＡＴＭＥＮＴ Post-processing

ＣＬＥＡＮＬＩＮＥＳＳ Cleanliness

ＲＥＳＩＳＴＩＶＩＴＹ Resistivity

ＤＡＴＡＬＯＧＧＩＮＧ Data log

ＰＵＬＳＥ Pulse

ＤＥＶＩＣＥ Device

Table １０．３ SEMI INTERNATIONAL STANDARDS 1995 B215ＶＡＲＩＡＢＬＥ VariableＴＲＡＣＥ Trace

ＭＡＴＥＲＩＡＬ Material

ＡＬＡＲＭ Alarm

ＥＮＡＢＬＥ Enable

ＤＩＳＡＢＬＥ Disable

ＥＶＥＮＴ Event (phenomenon)

ＡＢＯＲＴ Abortion

ＢＯＯＴBootＴＥＲＭＩＮＡＬ Terminal

ＴＩＭＥＯＵＴ Timeout

ＨＯＳＴ Host




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ＩＴＥＭ Item

ＦＩＸＥＤ Fixation

ＥＳＴＡＢＬＩＳＨ Establishment

ＳＥＲＶＩＣＥ Service

ＧＲＡＮＴ Permission

ＥＱＵＥＳＴ Substitution

ＡＮＮＯＴＡＴＥ Notes

ＩＮＤＩＶＩＤＵＡＬ Individual

ＶＥＲＩＦＩＣＡＴＩＯＮ Validity

ＩＬＬＥＧＡＬ Illegal

Ｐａ Pascal

Ｂｄ Baud rate

ｈｐ Horsepower (HP)

ｉｎ Inch

ｕｍ Micron

ｒａｄ Radian

ｓｅｃ Second

ｗｆｒＩＮＩＴＡＴＥ Starting

ＣＯＮＣＬＵＤＥ Conclusion

ＩＤＯＬ Standby state

ＰＲＯＣＥＳＳＩＮＧＡＣＴＩＶＥ Operating state

ＰＲＯＣＥＳＳＳＥＴＵＰ Prepairation step

ＲＥＡＤＹ Waiting operation start

ＥＸＥＣＵＴＩＮＧ Under excution

ＰＡＵＳＥ Under a pause

ＩＮＴＥＲＦＡＲＩＮＧ Interference

ＥＮＶＥＬＯＰＥ Course

ＨＡＮＤＯＦＦ Delivery

ＲＥＳＴＯＲＥ ReturnＮＯＲＭＡＬ Normal

ＦＡＵＬＴ Abnormal




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