smart solutions singulus technologies ag• high innovation potential • aesthetic module design,...

SMART SOLUTIONS

SINGULUS TECHNOLOGIES AG

29.11.2011 _ Presentation _ Dr.-Ing. Stefan Rinck

SINGULUS TECHNOLOGIES

29.11.2011

Smart Solutions

Semiconductor Solar Optical Disc

• Mastering

• Molding

• Replication

• Vacuum Coating

• New Applications

Smart Solutions:

Innovative Technology in

Advanced Vacuum Coating

Applications

• Coating

• Wet Processing

• Systems Business

• MRAM

• Thin Film Heads

• Sensor


29.11.2011

Solar Modules

Crystalline Modules (Mono/Multi) Thin Film Modules (Glass/Foil)


29.11.2011

Si Silicon (a-Si: amorphous, µc-Si: microcrystalline)

CdTe Cadmium telluride

CIS / CIGS Cu(In,Ga)(Se,S)2 - Copper-Indium/Gallium-di-Selenide/Sulfide

Photovoltaic Cells

Solar cells

multicrystalline

substrates (c-Si)

Thin film cells substrates: large area

glass, metal or plastic foil

markt share appr. 10 - 15 %

monocrystalline

substrates (c-Si)

Silicon wafer cells substrates: Si-wafers,

market share appr. 85 - 90 %

Silicon

a-Si / µc-Si

CdTe

CIS / CIGS


29.11.2011

SINGULUS Approach

Design of dedicated PV equipment

Improvement of Productivity

High Yield High

Uptime Small

Footprint

Fast Ramp-up

time

Improvement of Cell Efficiency

New Processes

Low number of Handling

Steps

Layer Stacks


29.11.2011

Wafer Cell

Wafer-

Handling

LINEA SILEX SINGULAR

SOLARE System for Inline Production

of Silicon Solar Cells

SINGULUS owns know-how for the essential processes


29.11.2011

Cell properties mc-Si cell *

η [%]

Voc [mV]

Isc [mA/cm2]

FF [%]

17.0 626 34.8 78.1

Multi-crystalline Si-Cell

Cell properties mono Si cell **

η [%]

Voc [mV]

Isc [mA/cm2]

FF [%]

18.6 628 37.7 78.7

Mono-crystalline Si-Cell

* 2011, 156x156 mm2 screen printed cell, industrial production

** 2011, 156x156 mm2 screen printed cell, industrial production

Segment Solar:

Present Conversion Efficiencies


29.11.2011

New development of a cost saving

anisotropic texturing process for

well established platform SILEX

(> 120 installed systems in the field)

Advantages of new texturing agent vs. standard IPA texturing

+ Flammability risks eliminated

+ Improved process stability, simple application

+ Extended bath lifetime (min. 30 runs) > less waste disposal

+ Smaller, more uniform pyramid size compared to other solutions

+ Shorter etching time

+ Improved environmental impact (less evaporation loss, less waste water)

+ Process works on Standard SILEX ALTEX (upgrade package required)

Process applicable for all standard and high efficiency cell concepts based on mono-crystalline wafer

material

Design-To-Cost

Advanced Alkaline Texturing


29.11.2011

LINEA Inline Wet Process Equipment

for c-Si Cell Production

WB ALTEX

WB ISOTEX

WB COMBI

WB PSG+

• excellent uniformity of chemical treatment

• optimal chemical exchange rate on surface

• no roller marks

• no shading

• low breakage rate

• minimized effects of breakage

• separation of wafer transport and drive train

• minimum of Fluid Carry-Over


29.11.2011

SINGULAR - Static Inline Tool for High

Uptime ICP-PECVD AR Coatings

• Multi chamber system PECVD tool

• High availability (uptime >95%)

• Low CoO

• Small foot print

• Efficient usage of raw materials

• Suitable for various materials

(SiNx, SiOx, Al2O3, a-Si)

• Ready for mass production of rear side

passivation layers


29.11.2011

SINGULAR – Rear Passivation

SINGULUS is following two ways to achieve rear side passivation

Feasibility studies have shown that both layer stacks can be applied with the SINGULAR

deposition technology. Both solutions show very good surface recombination velocities.

At least one of the two solutions will be further followed for a transfer into

industrial production using the mass production tool SINGULAR.

Discussions with industrial partners are ongoing.

Si-Wafer

a-SiOxNy

SiNx

Solution 1: a-SiOxNy / SIN

Si-Wafer

Al2O3

SiNx

Solution 2: Al2O3 / SIN


29.11.2011

p - Typ Cz - Si

LBSF

n + n ++

PERC - Passivated emitter and rear cell

“The PERC cell is often suggested as a relatively low

cost way for making silicon cells above 20 %

efficiency.” , Martin A. Green, 2001

Concept – PERC Solar Cell


29.11.2011

Summary Roadmap c-Si

2010 2011 2012 2013 2014 2015

18.6 %

• Front:

DARC SiN/SiOx 17.7 %

•

+ 0.3 %

• Front:

Selective Emitter

> 20 %

•

Front:

Dual SiN:H

Rear & front:

Rear passivated

screen print cell

(PERC)

integrated in

complete system

Heterojunction

structures

η

20 %

19 %

18 %

19 – 20 %

•

Possible start

of industrial

application of

SINGULAR

passivation layers


29.11.2011

• High efficiencies (more than 20% in the lab, more than 13% in production)

• High technological threshold, but well established and reliable technology

• Low manufacturing costs

• Limited number of competitors

• High innovation potential

• Aesthetic module design, branding of proprietary module technology

0%

10%

20%

30%

40%

50%

60%

70%

80%

90%

100%

2005 2010 2015 2020

EMERGING & CPV

CIGS

CdTe

a-Si

c-Si

Source: Historical data (until 2009) based on Navigant Consulting.

Estimations based on EPIA analysis.

Thin Film – Why CIGS?


29.11.2011

SINGULUS covers the main process steps of CIS/CIGS manufacturing

CIS/CIGS Manufacturing Process


29.11.2011

• Product launch in 2010

• 8 Machines already sold with an order intake of €50 mn

• 2nd generation inline diffusion furnace with optimized cycle time

• Development of 3rd generation of inline diffusion furnace started

CISARIS Inline Diffusion Furnace for

CIS/CIGS Solar Cells


29.11.2011

Process Section

Return Transport Section

Handling Station

to load and unload

substrates into the

machine

QS1

Carrier transfer to

return transport section

LC1

loading chamber for

Pump- and purge cycles to remove

atmospheric residues

HC1-HC5

heating chambers for formation of the CIGSSe

absorber material

CC1+CC2

cooling chambers for cooling the

carrier and substrate down to

specified temperature

EC1

exit chamber to

pump- and purge cycles to remove

toxic gases from the process

chamber

RS1-RS4

cooling down the substrates in four (4) N2 or Ar-forced

convection cooling stations, consisting of ventilators

Substrate

Exchange station

to load and unload

substrates

AD1

back pressure station

differential pressure measurement is

performed to check tightness and

proper functionality

LC2

loading chamber for

process gas inlet into pump- and purge cycles to

remove toxic gases from process chamber

CISARIS Inline Diffusion Furnace

for CIGS Solar Cells


29.11.2011

Very good temperature homogeneity and process reproducibility

CISARIS - Temperature Homogeneity


29.11.2011

New Product: Vacuum Sputtering System

• Sputtering machine

• Modular system

• Vertical Glass transport

Vacuum Sputtering System for

Thin Film Solar Modules


29.11.2011

TENUIS GEN 2 for Deposition of Buffer Layer

• Standard proven process: LOW RISK

• High solar cell efficiencies

• More than 150 process modules in production

(world leader)

• Lowest possible chemical consumption

• Completely automated in line system

• Single side deposition incl. protection against

backside contamination


29.11.2011

• New optimized design

• Lowest cost of ownership on the market

• High availability (uptime > 98 %)

• Better accessibility

• Small footprint

• High market demand

Already 9 systems sold

VITRUM GEN 2 – Wet Processing System


29.11.2011

Smart Solutions

Semiconductor Solar Optical Disc

• Mastering

• Molding

• Replication

• Vacuum Coating


Smart Solutions:



Applications

• Coating

• Wet Processing


• MRAM

• Thin Film Heads

• Sensor


29.11.2011

TIMARIS

• 5 systems in the market by 2010

• 2 systems in revenue (2011)

• 1 further system delivered (revenue

2012)

• TIMARIS system to be used for further

development of MRAM wafers and for

• pilot production ramp up

TIMARIS is the only market-ready machine for MRAM production*

Segment Semiconductor: TIMARIS

Nano Deposition System

*according to own assessment


29.11.2011

Innovative Technology in Advanced Vacuum Coating Applications

Segment Semiconductor: Nano Deposition

Technology

Addressed markets:

Semiconductor

• MRAM

• Other semiconductor applications

Thin Film Heads / Read-Write Heads

• Reader elements

• Write elements

• Other applications

Sensors xMR

• MEMs

• Bio Sensors


29.11.2011

Optical Disc

• Mastering

• Molding

• Replication

• Vacuum Coating


Smart Solutions:



Applications

Smart Solutions

Solar

• Coating

• Wet Processing


Semiconductor

• MRAM

• Thin Film Heads

• Sensor


29.11.2011

SINGULUS TECHNOLOGIES AG

Hanauer Landstrasse 103

D-63796 Kahl/Main

Dr.-Ing. Stefan Rinck, President and CEO

Tel: +49-6188-440-109

[email protected] Markus Ehret, CFO

Tel: +49-6188-440-204 [email protected]

Maren Schuster, Head of Investor Relations

Tel: +49-6188-440-612

[email protected] Bernhard Krause, Communications Worldwide

Tel: +49-6181-9828020

[email protected]

Forward-Looking Statements

This presentation contains forward-looking statements based on

current expectations, assumptions and forecasts of the executive

board and on currently available information. Various known and

unknown risks, unpredictable developments, changes in the

economic and political environment and other presently not yet

identifiable effects could result in the fact that the actual future

results, financial situation or the outlook for the company differ from

the estimates given here. We are not obligated to update the

forward-looking statements made in this presentation unless there

is a legal obligation.

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