sm rtline intelligent vacuum metrology - physics...
TRANSCRIPT
Sm linertSm linert
IntelligentVacuum Transducers for
–101200 to 5 x 10 mbar
Durability That Pays Off
Stay Connected
Time Is Money
Further Smartline Advantages:
Joy in innovation is our main driving force for developing vacuum metrology at its best.The new generation of Smartline sets highest standards with regard to precision, functionality and reliability.
The THYRACONT Pirani with extended measuring range activates ionization sensors below a very low pressure threshold. This protects the sensors and improves gauge life.
The latest transducers offer an RS485 interface and an additional 0-10 V output or EtherCAT.
Smartline‘s intelligent microcontrollers manage sensor control automatically. This guarantees an optimal interplay between the Pirani and ionization sensors without operator intervention.
Optionally with largeLCD display Compact, metal sealedsensorsLow thermal and electricinterference with the vacuumprocessInsensitive to shockventingReplaceable sensor headsCorrect pressure readingsdue to separate gas correction factors for each sensor
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Application Example Solution Applications
Challenge
Brazing, sintering or annealing requires an Two VSH transducers that have the required Analysis instrumentsoxygen free atmosphere which means that wide measuring range and are used to Coating processesprocesses are carried out under vacuum measure the pressure at the furnaces gas inlet Controlling fine to ultrahighpartially using inert gas. and vacuum port with high precision. The vacuum applications
transducers are linked to the system PLC by Sputtering appliancestheir serial RS485 interfaces, so that both Process engineering
The vacuum level must be monitored and kept pressure levels can be directly visualized constantly low during the process to avoid graphically which allows easy monitoring of oxidation of the products. One of our clients the pressure gradient inside the furnace tube. needed to measure the pressure in their high Optionally a VD12 2 channel vacuum display vacuum tube furnace near the gas inlet as well and control unit can be used for pressure as at the vacuum port with high accuracy. reading in the panel.
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- 1 0V S H 1 0 0 0 t o 5 x 1 0 m b a r P i r a n i / H o t C a t h o d e
Application Example
ApplicationsChallenge
Solution
to avoid an overload of the turbo-molecular during the coating process. A VD10 Plastic components are provided with pump, e.g. by connecting it during multichannel vacuum display and control unit metallic coatings, either for aesthetic inapplicable system pressure, the pressure is used as a central control module. reasons or to shield sensitive components in the bypass line as well as the prevacuum from interferences. pressure of the turbo-molecular pump have
to be monitored.
Analysis instrumentsThe metallization is done in a PVD coating Vacuum furnacessystem. It is evacuated with a rotary vane The VSP Pirani Transmitter controls whether Coatingpump via a bypass line to a pressure of the vacuum via the bypass line is sufficient
-2 Prevacuum control10 mbar. Then a turbo-molecular pump is to connect the turbo-molecular pump. Safety switching in vacuum systemsconnected, which further evacuates to Another VSP monitors the necessary -5 10 mbar. The vacuum during the coating prevacuum pressure directly at the turbo-
-4process, that takes place at 2 x 10 mbar, molecular pump. A VSM wide-range must be monitored continuously to ensure transmitter measures the ultimate vacuum consistently high quality coatings. In order inside the system, as well as the pressure
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- 4V S P 1 0 0 0 t o 1 x 1 0 m b a r P i r a n i
- 9V S M 1 0 0 0 t o 5 x 1 0 m b a r P i r a n i / C o l d C a t h o d eApplication Example
Solution
Challenge Applications
-3operation above 10 mbar resulted in rapid For checking the pressure directly at the deterioration of the sensor. measurement location the integraded LCD of During the optical coating of mirrors for laser
the VSM can be used.resonators the typical process pressure lies -3above 2 x 10 mbar. In the VSM transducer a Pirani with extended
range operates the cold cathode only below very low pressures. Further the transition A suitable vacuum transducer must be able Analysis instrumentsbetween the two sensors can be configured to monitor both, process pressure during the Coating plantsto meet applications requirements. The coating as well as the available minimum Process engineeringentire coating process is now monitored by -6pressure of 10 mbar in the vacuum Controlling fine to highthe Pirani. The cold cathode is saved chamber. vacuum applicationsbecause it is active only when the system One of our customers used to work with a Sputtering appliancespumps down to minimum pressure. The Pirani/cold cathode combination gauge, the Vacuum furnacesavailability of the coating plant has improved cold cathode monitoring minimum and significantly.process vacuum. However, the continuous
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Alterations reserved (SLA03)
Application Example
Solution
ApplicationsChallenge
process. At last the processed wafer is as the exact moment when atmospheric Silicon nitride is used in the semiconductor returned to the load-lock. After venting back pressure is reached after venting. The fast industry as an insulating material or for to atmospheric pressure and release of the response time and the precise pressure masking. It is deposited by PECVD (plasma- lock door, the wafer can be removed. For reading of the VSR allow for rapid door enhanced CVD) or LPCVD (low pressure CVD). short lead times, a fast reaction of the release, so very short lock cycles are possible. The feeding of the coating system is done via pressure reading is important. Due to outstanding long-term stability, the a load-lock to continuously keep the vacuum transmitter is essentially maintenance-free.
-2in the process chamber at 10 to 1 mbar.The pressure in the load-lock is monitored by a VSR vacuum transmitter with Piezo / Pirani
Analysis instrumentsThe pressure must be measured accurately combination sensor, which measures 1200 to
Vacuum furnaces-4while evacuating the air lock, in order to take 1 x 10 mbar with high accuracy. Thus, the Coating plants
in the wafer into the process chamber at the lock-pressure for the opening of the process Test of roughing pumps
earliest possible moment to start the coating chamber can be measured accurately, as well Safety switching in vacuum systems
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- 4V S R 1 2 0 0 t o 1 x 1 0 m b a r P i e z o / P i r a n i
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Smartline Vacuum Transducer-4Absolute Pressure 1200 to 1 x 10 mbar
The combination of piezo and Pirani sensor in the digital VSR vacuum transducer offers high precision and excellent resolution in the rough and fine vacuum range.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors.
Smartline represents cutting edge technology providing safe, precise and cost effective process control.
Typical Applications
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Load locks
Analysis technology
Coating plants
Vacuum furnaces
Leakage tests
Operational control of roughing pumps
Process engineering
Mass spectrometers
Safety circuits in vacuum systems
Benefits
Wide measuring range due to Digital RS485 interface and combination sensor piezo / Pirani additional analog output signal
1.5-8.58 V or EtherCATHigh accuracy and optimalresolution over the whole Digital adjustment of zero and measuring range atmospheric pressure via
pushbutton or interfaceTwo independent, potential-free relay switch points Large, integrated LCD display with
background illumination Short response time (VSR53DL, VSR54DL)
Excellent reproducibility and long Display flashes in bright red color in term stability case of error, compared to green
ligthing in the normal modeSmall measuring cell volume (VSR53DL, VSR54DL)
3e. g. 2 cm for VSR53D
Easy connection with PLCsMetal sealed stainless steel sensor, suitable for UHV The digital output signalapplications can be transmitted error-free
over long distances (up to 500 m)Filament is protected against oil and solvent vapors by a metal Baud rate 9.6 kBd to 115 kBdscreen
Rugged, EMI-proof metal housingStable measurements due tooptimized temperature Protection class IP54 compensation (VSR53E, VSR54E)
Easily replaceable sensor heads Suitable for Thyracont with stored calibration data 2 and 4 channel display
and control units VD12 / VD10Measurements independent ofgas type above 20 mbar and Vacuum connection using stainlessadjustable gas type correction steel small flange DN 16 ISO-KF orfactors for Pirani sensor conflat flange DN 16 CF-F
LEDs for device status and switch points
VSR
Technical Data
_______________________________________________________________________________________
Measuring Principle Diaphragm piezo resistive / Pirani_______________________________________________________________________________________
Materials In Contact With Vacuum Stainless steel 1.4307, nickel, gold, silicon oxide, tungsten, glass_______________________________________________________________________________________
-4 -4Measurement Range 1200 - 1 x 10 mbar (900 - 1 x 10 Torr), max. overpressure 4 bar abs. _______________________________________________________________________________________
Accuracy 1200 - 10 mbar: ±0.3% full scale-310 - 2 x 10 mbar: ±10% from reading
_______________________________________________________________________________________
Repeatability 1200-10 mbar: ±0.1 % full scale,-310-2x10 mbar: ±2% from reading
_______________________________________________________________________________________
Reaction Time 1200 - 10 mbar: < 30ms (piezo)-310 - 2 x 10 mbar: < 100 ms (Pirani)
_______________________________________________________________________________________
Voltage Supply 20 - 30 VDC_______________________________________________________________________________________
Electrical Connection VSR53D/DL, VSR54D/DL: SubD 15pol., male, lockable
VSR53E, VSR54E: M12 circular connector, female, lockable,
1x A standard, 5pol., 2x D coded, 4 pol._______________________________________________________________________________________
Power Consumption 2.5 W, additionally 0.8 W for EtherCAT / relays /LCD_______________________________________________________________________________________
Operating Temperature +5...+60°C (rel. humidity max . 80% at 30°C noncondensing)_______________________________________________________________________________________
Storage Temperature -40...+65°C_______________________________________________________________________________________
Max. Bake Out Temperature 125°C at the flange_______________________________________________________________________________________
Output Signal 0-10 VDC, measuring range 1.5 to 8.58 VDC, logarithmic,
1V / decade, load resistor > 10 k W (VSR53D/DL, VSR54D/DL)_______________________________________________________________________________________
Serial Interface RS485: 9.6 kBd to 115 kBd, address switch 1 - 16_______________________________________________________________________________________
Switch Points 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA_______________________________________________________________________________________
Vacuum Connection DN 16 ISO-KF (VSR53), DN 16 CF-F (VSR54)_______________________________________________________________________________________
Protection Class IP54 (VSR53E, VSR54E), IP40 (VSR53D/DL, VSR54D/DL)_______________________________________________________________________________________
Weight 220 g (VSR53D)_______________________________________________________________________________________
Product Codes
VSR53D
VSR53DL
VSR53E
VSR54D
VSR54DL
VSR54E
Accessories:
SLN4
SLKUSB
VGR
W1515002
W1515006
W1515020
Replacement sensor heads
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Combi transducer piezo-Pirani, -41200 - 1 x 10 mbar,
DN16 ISO-KF connection, output RS485 and 0-10V
As VSR53D, with LCD display
As VSR53D,output RS485 and EtherCAT
Combi transducer piezo-Pirani, -41200 - 1 x 10 mbar,
DN16 CF-F connection, output RS485 and 0-10V
As VSR54D, with LCD display
As VSR54D,output RS485 and EtherCAT
Plug-in power supply 24 V
Interface converter RS485-USB
TMVacuGraph software for Windows
Measuring cable for VD12 and VD10, shielded, 2 m
As W1515002, 6 m
As W1515002, 20 m
B_VSR53, B_VSR54
Alterations reserved (VSRA03)
99
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30 69
48
C
VSR53 VSR54
Dimensions in mm
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1,0E-04 1,0E-03 1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02 1,0E+03
Pressure (hPa)
Outp
ut
(V)
V (V) = log (p(hPa)) + 5.5out
p (hPa) = 10 (V (V) - 5.5)out
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Smartline Vacuum Transducer-4Absolute Pressure 1000 to 1 x 10 mbar
The processor controlled VSP with robust helix filament is ideal for precise measurements in the fine vacuum range.
Smartline represents cutting edge technology providing safe, precise and cost effective process control.
Typical Applications
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Benefits
Analysis instruments
Operational control of roughingpumps and vacuum plants
Safety circuits in vacuum systems
Vacuum furnaces
Leakage tests
Freeze drying
Process engineering
Vacuum centrifuges
Durable Pirani helix filament Digital RS485 interface and additional analog output signal
High resolution 1.5-8.5 V or EtherCAT
Good accuracy and excellent Digital adjustment of zero and reproducibility atmospheric pressure via
pushbutton or interfaceTwo independent, potential-free relay switch points Large, integrated LCD display with
background illumination Short response time (VSP63DL, VSP64DL)
Filament is protected against oil Display flashes in bright red color in and solvent vapors by a metal case of error, compared to green screen ligthing in the normal mode
(VSP63DL, VSP64DL)Stable measurements due tooptimized temperature Easy connection with PLCscompensation
The digital output signalSmall volume of the measuring cell can be transmitted error-free
3e. g. 1,8 cm for VSP63D over long distances (up to 500 m)
Metal sealed stainless steel Baud rate 9.6 kBd to 115 kBdsensor, suitable for UHV applications Rugged, EMI-proof metal housing
Easily replaceable sensor heads Protection class IP54 with stored calibration data (VSP63E/VSP64E)
LEDs for device status and Vacuum connection by stainlessswitch points steel small flange DN 16 ISO-KF or
conflat flange DN 16 CF-FSuitable for Thyracont 2 and 4 channel display and control units VD12 / VD10
VSP
Technical Data
_______________________________________________________________________________________
Measuring Principle Pirani_______________________________________________________________________________________
Materials In Contact With Vacuum Stainless steel 1.4307, nickel, tungsten, glass_______________________________________________________________________________________
-4 -4Measurement Range 1000 - 1 x 10 mbar (750 - 1 x 10 Torr), max. overpressure 4 bar abs._______________________________________________________________________________________
Accuracy 1000 - 20 mbar: ca. ±30 % from reading-3 20 - 2 x 10 mbar: < ±10 % from reading
-3< 2 x 10 mbar: < factor 2_______________________________________________________________________________________
Repeatability ±2% from reading_______________________________________________________________________________________
Reaction Time < 100 ms_______________________________________________________________________________________
Voltage Supply 20 - 30 VDC_______________________________________________________________________________________
Electrical Connection VSP63D/DL, VSP64D/DL: SubD 15pol., male, lockable
VSP63E, VSP64E: M12 circular connector, female, lockable,
1x A standard, 5pol., 2x D coded, 4 pol._______________________________________________________________________________________
Power Consumption 2.5W additonally 0.8 W for EtherCAT /relays / LCD_______________________________________________________________________________________
Operating Temperature +5...+60°C (rel. humidity max . 80% at 30°C noncondensing) _______________________________________________________________________________________
Storage Temperature -40...+65°C_______________________________________________________________________________________
Max. Bake Out Temperature 125°C at the flange_______________________________________________________________________________________
Output Signal 0-10VDC, measuring range 1.5 to 8.5 VDC, logarithmic,
1V / decade, load resistor > 10k W (VSP63D/DL, VSP64D/DL)_______________________________________________________________________________________
Serial Interface RS485: 9.6 kBd to 115 kBd, address switch 1 - 16_______________________________________________________________________________________
Switch Points 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA_______________________________________________________________________________________
Vacuum Connection DN 16 ISO-KF (VSP63), DN 16 CF-F (VSP64)_______________________________________________________________________________________
Protection Class IP54 (VSP63E, VSP64E), IP40 (VSP63D/DL, VSP64D/DL)_______________________________________________________________________________________
Weight 190 g_______________________________________________________________________________________
Product Codes
VSP63D
VSP63DL
VSP63E
VSP64D
VSP64DL
VSP64E
Accessories:
SLN4
SLKUSB
VGR
W1515002
W1515006
W1515020
Replacement sensor heads
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Pirani transducer -41000 - 1 x 10 mbar,
DN 16 ISO-KF connectionoutput RS485 and 0-10V
As VS63D, with LCD display
As VS63D, output RS485 and EtherCAT
Pirani transducer -41000 - 1 x 10 mbar,
DN 16 CF-F connection,output RS485 and 0-10V
As VSP64D, with LCD display
As VSP64D, output RS485 and EtherCAT
Plug-in power supply 24 V
Interface converter RS485-USB
TMVacuGraph software for Windows
Measuring cable for VD12 and VD10, shielded 2 m
As W1515002, 6 m
As W1515002, 20 m
B_VSP63, B_VSP64
Alterations reserved (VSPA03)
0
1
2
3
4
5
6
7
8
9
1,0E-04 1,0E-03 1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02 1,0E+03
Pressure (hPa)
Outp
ut
(V)
V (V) = log (p(hPa)) + 5.5out
p (hPa) = 10 (V (V) - 5.5)out
99
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30 69
48
C
VSP63 VSP64
Dimensions in mm
Smartline Vacuum Transducer -9Absolute Pressure 1000 to 5 x 10 mbar
The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors.
Smartline represents cutting edge technology providing safe, precise and cost effective process control.
Typical Applications
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Analysis technology
Coating plants andvapor deposition
Vacuum furnaces
Process engineering
Measuring and controlling infine and ultrahigh vacuum
Sputtering plants
Benefits
Wide range sensor Digital RS485 interface and Pirani / cold cathode additional analog output signal
1.819-8.6 V or EtherCATThe cold cathode sensor is automatically controlled Digital adjustment of zero and by the Pirani atmospheric pressure via
pushbutton or interfacePirani with extended range allowsoperation of cold cathode at lower Large, integrated LCD display withpressure and increases lifetime background illumination
(VSM77DL, VSM79DL)Robust sensor design
Display flashes in bright red color in Small volume of the measuring cell case of error, compared to green
3e. g. 9 cm for VSM77D ligthing in the normal mode(VSM77DL, VSM79DL)
Excellent ignition behavior
Easy connection with PLCsInsensitive against inrush of air
The digital output signalTwo independent, potential-free can be transmitted error-freerelay switch points over long distances (up to 500 m)
LEDs for device status and Baud rate 9.6 kBd to 115 kBdswitch points
Rugged, EMI-proof metal housingEasily replaceable sensor heads with stored calibration data Vacuum connection by stainless
steel small flange DN 25 ISO-KF orCorrect pressure readings by conflat flange DN 40 CF-Fmeans of separate gas typecorrection factors for Pirani and cold cathode
Suitable for Thyracont 2 and 4 channel display andcontrol units VD12 / VD10
VSM
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Technical Data
_______________________________________________________________________________________
Measuring Principle Pirani / inverted magnetron, both depending on gas type_______________________________________________________________________________________
Material In Contact With Vacuum Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic_______________________________________________________________________________________
-9 -9Measurement Range 1000 - 5 x 10 mbar (750 - 5 x 10 Torr), max. overpressure 4 bar abs._______________________________________________________________________________________
Accuracy 1000 - 10 mbar: < 30 % from reading-310 - 2 x 10 mbar: < 10 % from reading
-3 -82 x 10 mbar - 1 x 10 mbar: < 25% from reading_______________________________________________________________________________________
-2Repeatability 10 - 1 x 10 mbar: Approx. ±2% from reading-2 -81 x 10 -1 x 10 mbar: Approx. ±7% from reading
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Response Time 200 ms (1s for activating the cold cathode)_______________________________________________________________________________________
Cathode Voltage Max. 2.5 kV_______________________________________________________________________________________
Voltage Supply 20 - 30 VDC_______________________________________________________________________________________
Electrical Connection VSM77D/DL, VSM79D/DL: SubD, 15pol., male, lockable
VSM77E, VSM79E: M12 circular connector, female, lockable,
1x A standard, 5pol., 2x D coded, 4pol. _______________________________________________________________________________________
Power Consumption Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD_______________________________________________________________________________________
Operating Temperature +5...+60°C_______________________________________________________________________________________
Storage Temperature -40...+65°C_______________________________________________________________________________________
Maximum Bake Out Temperature 160°C at flange (electronic detached)_______________________________________________________________________________________
Output Signal 0 - 10 VDC, measuring range 1.819 - 8.6 VDC, log., 0.6 V/decade
load resistor > 10k W (VSM77D/DL, VSM79D/DL)_______________________________________________________________________________________
Serial Interface RS485: 9.6 kBd to 115 kBd, address switch 1 - 16_______________________________________________________________________________________
Switch Points 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA_______________________________________________________________________________________
Vacuum Connection DN 25 ISO-KF (VSM77), DN 40 CF-F (VSM79)_______________________________________________________________________________________
Protection Class IP54 (VSM77E, VSM79E), IP40 (VSM77D/DL, VSM79D/DL)_______________________________________________________________________________________
Weight Approx. 555 g_______________________________________________________________________________________
Product Codes
VSM77D
VSM77DL
VSM77E
VSM79D
VSM79DL
VSM79E
Accessories:
SLN4
SLKUSB
VGR
W1515002
W1515006
W1515020
Replacement sensor heads
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Combi transducer Pirani/inverted -9magnetron, 1000 - 5 x 10 mbar,
DN 25 ISO-KF connectionoutput 0 - 10 V and RS485
As VSM77D, with LCD display
As VSM77D, output RS485 and EtherCAT
Combi transducer Pirani/inverted -9Magnetron, 1000 - 5 x 10 mbar,
DN 40 CF-F connection output 0 - 10 V and RS485
As VSM79D, with LCD display
As VSM79D, output RS485 and EtherCAT
Plug-in power supply 24 V
Interface converter RS485-USB
TMVacuGraph software for Windows
Measuring cable for VD12 and VD10, shielded 2 m
As W1515002, 6 m
As W1515002, 20 m
B_VSM77, B_VSM79
Vout /V = 0,6 log (p/mbar) + 6,8
p /mbar = 10 ( (Vout /V – 6,8) / 0,6 )
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5
6
7
8
9
10
1E-09 0,0000001 0,00001 0,001 0,1 10
Pressure (hPa)
Outp
ut
(V)
13
9
13
9
40
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48
VSM77 VSM79
Dimensions in mm
Alterations reserved (VSMA02)
Sm linert
Smartline Vacuum Transducer -10Absolute Pressure 1000 to 5 x 10 mbar
The digital combination transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors.
Smartline represents cutting edge technology providing safe, precise and cost effective process control.
Typical Applications
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Analysis technology
Coating plants andvapor deposition
Sputtering plants
Measuring and controlling inthe fine and ultrahigh vacuum range
Vacuum furnaces
Process engineering
Space simulation chambers
Benefits
Wide range sensor Digital RS485 interface and Pirani / Bayard Alpert additional analog output signal
1.219-8.6 V or EtherCATThe hot cathode sensor is automatically controlled Digital adjustment of zero and by the Pirani atmospheric pressure via
pushbutton or interfacePirani with extended range allowsoperation of hot cathode at lower Large, integrated LCD display withpressure and increases lifetime background illumination
(VSH88DL, VSH89DL)Excellent accuracy and repeatability Display flashes in bright red color in
case of error, compared to green Low thermal and electrical ligthing in the normal modeinterference with the vacuum (VSH88DL, VSH89DL)process
Easy connection with PLCsSmall volume of the measuring cell
3e. g. 20 cm for VSH88D The digital output signalcan be transmitted error-free
Bayard-Alpert with blowing over long distances (up to 500 m)resistant, yttrium coated double filament Baud rate 9.6 kBd to 115 kBd
Insensitive against inrush of air Rugged, EMI-proof metal housing
Two independent, potential-free Vacuum connection by stainless relay switch points steel small flange DN 40 ISO-KF or
conflat flange DN 40 CF-FLEDs for device status and switch points
Easily replaceable sensor heads with stored calibration data
Correct pressure readings bymeans of separate gas typecorrection factors for Pirani and hot cathode
Suitable for Thyracont 2 and 4 channel display andcontrol units VD12 / VD10
VSH
Technical Data
_______________________________________________________________________________________
Measuring Principle Pirani / Bayard Alpert, depending on gas type_______________________________________________________________________________________
Materials In Contact With Vacuum Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass_______________________________________________________________________________________
-10 -10Measurement Range 1000 - 5 x10 mbar (750 - 5 x10 Torr), max. overpressure 4 bar abs._______________________________________________________________________________________
Accuracy 1000 - 10 mbar: < 30 % from reading-810 - 1 x 10 mbar: < 10 % from reading
_______________________________________________________________________________________-2 -2 -8Repeatability ±2 % (10 - 1 x 10 mbar), 5% (1 x10 - 1 x 10 mbar)
_______________________________________________________________________________________
Response Time < 200 ms (2 s while switching BA emission current)_______________________________________________________________________________________
Emission Current Automatic switching 10 µA, 100 µA, 1 mA, 2 mA_______________________________________________________________________________________
Degas Ohmic heating of the anode_______________________________________________________________________________________
Voltage Supply 20 - 30 VDC_______________________________________________________________________________________
Electrical Connection VSH88D/DL, VSH89D/DL: SubD, 15pol., male, lockable
VSH88E, VSH89E: M12 circular connector, female, lockable,
1x A standard, 5pol., 2x D coded, 4pol. _______________________________________________________________________________________
Power Consumption Max. 8 W, additional 1 W f. degas and 0.8 W f. EtherCAT/relays/LCD_______________________________________________________________________________________
Operating Temperature +5...+60°C_______________________________________________________________________________________
Storage Temperature -40...+65°C_______________________________________________________________________________________
Maximum Bake Out Temperature 180°C at the flange (electronic detached)_______________________________________________________________________________________
Output Signal 0 - 10 VDC, measuring range 1.219 - 8.6 VDC, log., 0.6 V/decade
load resistor > 10k W (VSH88D/DL, VSH89D/DL)_______________________________________________________________________________________
Serial Interface RS485: 9,6 kBd to 115 kBd, address switch 1 - 16_______________________________________________________________________________________
Switch Points 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA_______________________________________________________________________________________
Vacuum Connection DN 40 ISO-KF (VSH88), DN 40 CF-F (VSH89)_______________________________________________________________________________________
Protection Class IP54 (VSH88E, VSH89E), IP40 (VSH88D/DL, VSH89D/DL)_______________________________________________________________________________________
Weight Approx. 555 g_______________________________________________________________________________________
Product Codes
VSH88D
VSH88DL
VSH88E
VSH89D
VSH89DL
VSH89E
Accessories
SLN4
SLKUSB
VGR
W1515002
W1515006
W1515020
Replacement sensor heads
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Combi transmitter Pirani/Bayert -10Alpert, 1000 - 5 x 10 mbar,
DN 40 ISO-KF connection, output 0 - 10 V log. and RS485
As VSH88D, with LCD display
As VSH88D, output RS485 and EtherCAT
Combi transmitter Pirani/Bayert -10Alpert, 1000 - 5 x 10 mbar,
DN 40 CF-F connection,output 0 - 10 V log. and RS485
As VSH89D, with LCD display
As VSH89D, output RS485 and EtherCAT
Plug-in power supply 24 V
Interface converter RS485-USB
TMVacuGraph software for Windows
Measuring cable for VD12 and VD10, shielded 2 m
As W1515002, 6 m
As W1515002, 20 m
B_VSH88, B_VSH89
Vout /V = 0,6 log (p/mbar) + 6,8
p /mbar = 10 ( (Vout /V – 6,8) / 0,6 )
1,002,003,004,005,006,007,008,009,00
10,00
1,0E-09 1,0E-07 1,0E-05 1,0E-03 1,0E-01 1,0E+01
Pressure (hPa)
Outp
ut
(V)
14
1
141
55
69
48
70
VSH88 VSH89
Dimensions in mm
Alterations reserved (VSHA03)
2 Channel Vacuum Display And Control Unit-10Absolute Pressure 1400 to 5 x 10 mbar
VD12 is an intelligent control unit for applications in apparatus and plant engineering or special equipment construction.
It offers two relay switches, one common or two independent set points.
19inch cassette 14 HP x 3 RE.
Typical Applications
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Industrial plant engineering
Process automation
Apparatus engineering, e. g.process control and documentationfor quality assurance
Mechanical engineering
Packaging technology
Chemical process engineering(vacuum mixers)
Benefits
Simultaneous control of Large graphic LCD display with2 measuring channels background illumination
Can be combined with all Comfortable operation by menu-Smartline and 0-10 V Analogline driven operator guidancetransducers
USB interface for process Pressure display in documentation and setpoint mbar, Torr, hPa programming
VacuGraph software: Documentation and evaluation of vacuum processes, programming
2 potential-free relay switches set points, remote control
Two- or three-step control On demand the controller can be configured ex works according to
Robust 19" metal cassette with the customer‘s requirementsfoil-protected front panel
Adjustable g
Universal switched modepower supply 95 - 265 VAC
EMI compatible
as type correctionfactor
VD12
Technical Data
_______________________________________________________________________________________
Suitable Vacuum Transducers All Smartline transducers,
VSC43MV, VSP63MV, VSP64MV, VCP63MV_______________________________________________________________________________________
Display LCD graphic display, background illumination,
resolution 128x64_______________________________________________________________________________________
Display Refresh Rate 2 Hz (0.5 s)_______________________________________________________________________________________
Sample Rate RS485: 12,5 Hz (80 ms) / channel
0-10V: 50 Hz (20 ms) /channel_______________________________________________________________________________________
Power Supply 95 - 265 VAC, 50/60 Hz_______________________________________________________________________________________
Power Consumption Max. 25 W incl. transducer_______________________________________________________________________________________
Fuse 0.8 A/T_______________________________________________________________________________________
Operating Temperature +5...+50°C_______________________________________________________________________________________
Storage Temperature -20...+60°C_______________________________________________________________________________________
Measuring Inputs 1 x RS485, SubD male, 15pole, for Smartline
2 x Amphenol C91E, 6pole, 0-10 V, female, for Analogline_______________________________________________________________________________________
Control Outputs 2 x relay contact, potential free change over switches,
Phoenix strip terminal 6-pole,
lifetime > 300.000 cycles,
4 A / 250 VAC, 2 A / 45 VDC_______________________________________________________________________________________
Serial Interface Mini-USB, Type B, 5pole, female, Virtual Com Port Protocol_______________________________________________________________________________________
Protection Class IP20_______________________________________________________________________________________
Weight 750 g_______________________________________________________________________________________
Product Codes
VD12S2
Complete Sets
VD1253P
VD1263P
VD1277P
VD1288P
Accessories:
W1515002
W1515006
VGR
WUSB0002
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19inch cassette 14 HP x 3 RU, USB, 95 - 265 VAC
-4(1200 - 1 x 10 mbar)VD12 + VSR53D + cable 2 m
-4(1000 - 1 x 10 mbar)VD12 + VSP63D + cable 2 m
-9(1000 - 5 x 10 mbar)VD12 + VSM77D + cable 2 m
-10(1000 - 5 x 10 mbar)VD12 + VSH88D + cable 2 m
Measuring cable RS485 for Smartline transducers,shielded, 2 m
As W1515002, 6 m
VacuGraph Windows software
Interface cable USB, shielded, 2 m
Alterations reserved (12A01)
178.
0
128.4
106.0
70.8
66.0
Dimensions in mm
Sm linert
4 Channel Vacuum Display And Control Unit-10Absolute Pressure 1000 to 5 x 10 mbar
VD10 is an intelligent control unit for application in apparatus and plant engineering or special equipment construction.
Eight potential free relay switches can be mapped to different measuring channels.
Compact metal 19inch cassette21 HP x 3 RU.
Typical Applications
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Industrial plant engineering
Process automation
Coating plants
Vacuum furnaces
Apparatus engineering, e. g.process control anddocumentation for qualityassurance
Special equipment construction
Benefits
Simultaneous control of up to Large graphic LCD display with4 measuring channels background illumination
Can be combined with Comfortable operation by menu-Smartline transducers driven operator guidance
8 potential-free relay switches USB interface for process documentation
2 programmable function keysVacuGraph software:
Universal switched mode Documentation and evaluation ofpower supply 95 - 265 VAC vacuum processes, remote control
Pressure display in On demand the controller can be mbar, Torr, hPa configured ex works according to
the customer‘s requirementsFail safe operation due to theEMC compatible metal housing
Foil-protected front panel
VD10
Technical Data
_______________________________________________________________________________________
Suitable Vacuum Transducers All Smartline transducers,
VSP63MV, VSP64MV, VCP63MV_______________________________________________________________________________________
Display LCD graphic display, background illuminated,
57 x 35 mm, floating point: 2 - 4 digits,
exponential, 2 digits mantissa, 1 digit exponent_______________________________________________________________________________________
Display Refresh Rate 2 Hz (0.5 s)_______________________________________________________________________________________
Sample Rate 5 Hz (200 ms) per channel (RS485-serial interface, digital)
30 Hz (33 ms) per channel (0 - 10 V input, analog)_______________________________________________________________________________________
Power Supply 95 - 265 VAC, 50/60 Hz_______________________________________________________________________________________
Power Consumption Max. 45 W incl. transducer_______________________________________________________________________________________
Fuse 2.0 A / T_______________________________________________________________________________________
Operating Temperature +5...+40°C_______________________________________________________________________________________
Storage Temperature -20...+60°C_______________________________________________________________________________________
Measuring Inputs 1 x RS485, SubD, 15pole, male, for Smartline
2 x 0 - 10 V Amphenol C91E, 6pole, female, f. VSP63MV, VSP64MV_______________________________________________________________________________________
Control Outputs 8 x relay, normally open contact, SP assignable,
Phoenix strip terminal 16-pole,
lifetime > 1.000.000 cycles,
3 A, 250 VAC, 2 A 40 VD_______________________________________________________________________________________
Serial Interface Mini-USB, type B, 5pole, female, Virtual Com Port protocol_______________________________________________________________________________________
Protection Class IP20_______________________________________________________________________________________
Weight 1100 g_______________________________________________________________________________________
Product Codes
VD10S8
Accessories:
W1515002
W1515006
VGR
WUSB0002
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4 channel display and control unit,19" cassette 21 HP x 3 RU,95 - 265 VAC
Measuring cable RS485 for Smartline transducers,shielded, 2 m
As W1515002, 6 m
VacuGraph Windows software
USB interface cable, shielded, 2 m
Dimensions in mm
172.0
12
8.4 10
6.0
106.5
101.6
Alterations reserved (10A02)
TMVacuGraph 11Windows -Software®
Together with Thyracont vacuum TMgauges, the advanced VacuGraph
software serves as the ultimate tool to visualize, analyze and save measurements on your PC in an efficient and easy way.
TMVacuGraph is self-explanatory and suited for all Thyracont instruments with either USB, RS232, RS485 or Bluetooth interface.
Operating Systems: Windows XP/Vista/7/8/10
Typical Applications
� Visualize, analyze and document vacuum measurement data
� Automatic data logging of vacuum systems and pumps for quality assurance
� Tool for flexible parameter configuration of vacuum sensors (Smartline) for demanding vacuum applications
� Control software for the securing of production processes
� Support for preventive maintain-ance of vacuum plants
� Data management with export function to Windows applications (Excel, Access,..)
� Continuous leakage test by means of rate-of-rise method
Benefits
� Intuitively operated user interface
� Read out Thyracont measurement gauges and data loggers
� Measurement data exportable as CSV files, e. g. for Microsoft Excel
� Online measurement: track data in real time on your PC
� Several measurement curves can be overlapped, compared, dis-placed and zoomed in for detailed analysis
� Simultaneous communication with a random number of active gauges
� Wide choice of pressure units e. g. mbar, hPa, Torr, psi, atm, ...
� PC based regulation of control units by entering setpoints
� Remote control of vacuum controllers (e. g. keyboard lock/unlock of VD12, controller active/inactive)
� Various languages available
� Convenient leakage calculation: Simply select pressure range with the cursor, enter chamber volume and the leakage rate is automatically calculated
� Comfortable setting of all para-meters of Thyracont measurement gauges (e. g. units, output charac-teristics, gas type correction factors, switch and switchover points etc.)
� Curve illustration and graph headings are easily changeable e. g. for quality assurance records
� Curve parameters are adjustable (legend, grid etc.)
� Logarithmic or linear pressure scales
� Time line either absolute including date and time or relatively to the time of measurement
� Mark, comment and print measure-ment curves
� Either numerical or graphical illustration of measurement values
� Export graphs as pixel or vector graphics
� Firmware Update Assistant:Benefit immediately from newly developed features and update gauge firmware simply yourself
� Automatic VacuGraph updates
VGR
Product Codes
• VGRTMVacuGraph Windows software,
download version
Accessories:
• SLKUSBInterface converter RS485-USBfor Smartline active gauges
• SLKBTInterface converter RS485-Bluetooth, for Smartline active gauges
• WUSB0002 Measuring cable, 2m, for gauges with an USB interface (VD8, VD6, VD12 and VD10)
Features
VD8 VD6 VD12 VD10 VSR VSP VSM VSH
Electronic alignment ü
Adjustment output signal
Cathode control mode
Controller status
Degas
Display unit
Filament behaviour
Gas correction factors
Data logger mode
Maximum operation time
Keyboard lock
Relais configuration
Save/load profiles
Value adjustment
Alterations reserved (VGRA05)
Measurement data entry
* Only with digital transducers
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V a c u u m I n s t r u m e n t s
Vacuum Instruments GmbH
Max-Emanuel-Straße 10
94036 Passau, Germany
Tel.: +49 (0)851 95986 0
Fax: +49 (0)851 95986 40
Email: [email protected]
www.thyracont-vacuum.com
Expertise and Responsiveness: +49 (0)851 95986 28
THYRACONT