simulations of ar/h2 and h2 microwave plasmaphysics.muni.cz/~dorian/obrusnik.pdf · simulations of...
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Simulations of Ar/H2 and H2 MicrowavePlasma
Adam Obrusník
Faculty of Science, Masaryk University, Brno
November 12, 2012
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Outline
1. Motivation
2. Geometry
3. Challenges
4. The model
5. Results and Outlook
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Motivation
I Growing importance of plasma torches and jets
I Microwave plasma torch (MPT) in doc. Zajícková’s group - fast CNTand iron NP deposition
I Grant cooperation with the Institute of Physics, ASCR (dr.Bonaventura)
I Complex, challenging problem
I Software simulation available - COMSOL, Matlab
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Geometry
The atmospheric-pressure microwave plasma torch - CNT, iron NPsynthesis (here at DPE)
Figure: The geometry - MPT
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Geometry
Linear antenna microwave reactor - low pressure, NCD synthesis (FZUAV CR)
Figure: The geometry - Ak400
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Challenges
I Very complex problemI Turbulent flow (Re ≈ 60 000 near main inlet)
I Highly inhomogeneous, non-isothermal gas mixture
I Relatively small plasma region⇒ very steep velocity/temperaturegradients
I Minimum 11 species and 16 plasma reactions
I All must be solved at least in 2D axial symmetry
I Necessary input data (cross sections, gas properties at very hightemperatures) scarcely available
I Out-of-the-box solutions (COMSOL Plasma Module, Fluent), usuallyinsufficient for such a complex problem (unstable, only for DC,Maxwellian EEDFs, etc...)
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Model - schematic view
I Implemented in Matlab with COMSOL API
I Solved in 2D axial symmetry
A schematic overview of the iterative loop
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Model - Equations
I Reynolds-averaged Navier-Stokes equations with the k − ε model
ρ∂U∂t+ρ (U · ∇) U−∇·〈ρ(uT ⊗ uT)〉 = −∇·P−∇·µ
[∇ ⊗ U + (∇ ⊗ U)T
]+F.
I Heat equation, diffusion equation for the neutral gas
I Continuity equation for electrons, energy equation for electrons
∂n j
∂t+ ∇ · Γ j + (~u · ∇)n j = R j, Γ j = −µiEni − Di∇ni
I 9 continuity equations for ionized and excited species
I EM field equation (time-harmonic approximation), plasma as a lossydielectric
ε = ε0 −ε0ω
2pe
ν2en + ω2
+ iε0ω
2peνen
ω(ν2
en + ω2)
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Model - ReactionsThe following reactions were considered (+ rotational and vibrational H2excitations)
e− + Ar→ 2e− + Ar+
e− + Ar→ e− + Ar∗
e− + Ar+ → Are− + H2 → 2e− + H+2e− + H2 → e− + H + H(n = 2)e− + H2 → e− + H + H(n = 3)e− + H→ e− + H+
e− + H→ e− + H(n = 2)e− + H→ e− + H(n = 3)H2 + H(n = 2)→ H+3 + e−
H2 + H(n = 3)→ H+3 + e−
H2 + H+2 → H+3 + He− + H+ → H(n = 2)e− + H+ → H(n = 3)e− + H+3 → H2 + H(n = 3)2H + H2 → H2 + H23H→ H2 + H
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Results - gas flow
Neutral gas properties - simplified fluid dynamics simulations without theplasma
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Results - gas flow (MPT)
Experimental verification - fluid dynamics
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Results - with plasma (MPT)
Basic plasma characteristics
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Results - with plasma (linear antenna MW reactor)
Electron concentration (above), electron temperature (below)
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Results - with plasma (linear antenna MW reactor)
Power deposition (above), neutral temperature (below)
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Conclusion
1. A very promising algorithm for simulations of complex plasmasdeveloped and implemented using Matlab and COMSOLMultiphysics API
2. Takes into account both the plasma kinetics and neutral gasdynamics
3. Good results for the Linear Antenna MW Plasma source, not sogood for the MW plasma torch
4. Future experimental verification necessary
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Conclusion
Thank you for your attention.