Hiroak

ABSTRACT A novel developed. Thchips. The vavalve with a tWe also demoof microfluidi KEYWORDShape-memor

INTRODUC

Although and robust mshape recovershape upon exSMPs show ladvantageous

EXPERIME

Figure 1 smemorize theValve actuatio5 V applied theat (>13.5 m

Figure 1. (aconcave shaheating usin

Figure 2. (acan flow thCross-secti

a

SHAki Takehara1

2Resea3Biom

T shape-memor

his valve has alve has a simthin-film heatonstrated a fieic devices by

S ry polymers, v

CTION extensive res

microvalve remry of an SMP.xposure to an large deformas for the simpl

NT shows the prope shape of mion was inspecto a microhea

mJ) was applie

a) Schematic ape as its tempng a microhea

a) Optical michrough the cononal image of

a

b

APE-MEM1,2, Koichiro

1School ofarch Fellow of

materials Unit,

ry polymer (Scompatibility

mple design ater, but can preld-programmanalogy with

valve, poly(ep

earch has beemains a challe. An SMP is aexternal stimu

ability and chale design and r

posed SMP microstructures cted by cross-sater on a chip.ed.

of an SMP. (bmporary shapeater.

crograph of anncave shape of (c). The conc

MORY Po Uto3, Mitsuf Engineering

of the Japan So National Inst

SMP) microvy with electroand is construovide either n

mable valve arra field-progra

psilon-caprola

en conducted oenging issue. a material thatulus such as hanges in the ereliable actuat

microvalve. Poat the submic

sectional imag. As shown in

b) Schematic oand a flat sha

n SMP microvof the PCL laycave shape of

OLYMERuhiro Ebarag, The Universociety for the titute for Mate

valve suitable onics and is coucted with twnormally openray (FPVA) wammable gate

actone)

on microvalvIn this paper

t can temporaheat. Compareelastic modulution of microv

oly(epsilon-cacrometer leveging (Figure 2n Figure 3, ea

of proposed SMape as its perm

valve in the opyer. (c) Optic

f PCL recovere

b

R MICROa3, Takao Aosity of Tokyo, JPromotion of erials Science

for integratioonsidered to b

wo adjacent mn (N/O) or nor

with 8×8=64 varray (FPGA

e technologier, we report aarily memorizeed with well-kus at their respvalves.

aprolactone) (Pel [3] and rev2). Each valveach valve actu

MP microvalvmanent shape

pen state. (b) cal micrographed to a flat sha

c

d

OVALVESoyagi3 and TaJapan f Science, Japae (NIMS), Japa

on into micro-be applicable

microchannels rmally closed alves that ena) in LSI techn

s [1,2], the dea microvalve te shapes but r

known metallicponse tempera

PCL) was useerts to its origoperated at an

uated within 1

ve (N/O valve)e. Valve actuat

Cross-sectionh of a valve inape.

S Takanori Ich

an an

-TAS devicesto low-cost dand a polym(N/C) valve

ables the custonology.

evelopment ofthat is actuatreverts to its pic shape-memoature, which a

ed as the SMPginal shape n

an electrical po150 ms when

). An N/O valtion was contr

nal image of (in the closed s

hiki1

has been disposable

meric sheet functions. om design

f a simple ed by the

permanent ory alloys, are highly

P. PCL can near 50°C. otential of sufficient

lve has a rolled by

(a). Fluid state. (d)

16th International Conference on Miniaturized Systems for Chemistry and Life Sciences

October 28 - November 1, 2012, Okinawa, Japan978-0-9798064-5-2/μTAS 2012/$20©12CBMS-0001 1846

Figure 4 s

shape and a actuate in seqfrequently use

Figure 3. Tmicroheater.microchanne

Figure 4. (atemporary sand a concsequence fr

shows N/O anflat shape as

quence from a ed sequences

Time response Valve openinels was monito

(a) Schematic shape and a fcave shape arom a closed s

a

b

nd N/C valveits permanenclosed state tfor performin

e of an SMP ng was measuored. The valv

of N/O and Nflat shape as ias its permanstate to an ope

s arranged innt shape, and o an open stat

ng the batch pr

microvalve.ured by determve actuated wi

N/C valves arits permanent

nent shape. (ben state and fin

n tandem. An vice versa fo

te and finally rocessing of li

Heating timrmining fluoreithin 150 ms.

rranged in tant shape. An N/b) Tandemlyinally to a clos

N/O valve hafor an N/C vato a closed staiquid samples

e is the duraescence. The s

ndem. An N/ON/C valve has a

arranged N/Osed state.

as a concave alve. Tandemlate. This sequon a chip.

ation of applysquare area b

O valve has a a flat shape aO and N/C v

shape as its tly arranged v

uence is one of

lying a voltagbetween the a

a concave shapas its temporavalves can ac

temporary valves can f the most

ge to a adjacent

pe as its ry shape ctuate in

1847

Finally, wprogrammablmicrochannelarranged at eformation of a

CONCLUSIO

We develowith 8×8=64 design and aadvantageousrealizing full-

ACKNOWL

This resefor-World-Le REFERENC[1] Shoji, S.

4, pp. 15[2] Unger, M

288, pp.[3] Ebara, M

Advance[4] Hu, C., I

(1992). CONTACT Hiroaki Takeh

Figure 5. (aphotograph(8×8=64 vobserved.

we fabricated le integrated l network thateach crossing an arbitrary m

ON oped a novel valves to de

applicability s for use in di-scale micro-T

LEDGEMENTearch was sading Innovat

CES and M. Esash57-171. (1994M.A., et al., M 113-116 (200

M., et al., Shaped Materials, vInterconnect d

hara, tel: +81-3

a) Schematic ah of programmvalves). Select

a

c

an FPVA ascircuit that

t interconnectspoint of the

microfluidic ne

SMP microvemonstrate theof low-cost isposable chip

TAS devices.

TS supported bytive R&D on S

hi, Microflow4). Monolithic mi00). pe-Memory Suvol. 24, pp. 27devices for fie

3-5841-1180; h

architecture ofmed microchated valves we

s shown in Finterconnects

s microfluidice microchanneetwork.

alve that can e suitability ffabrication teps. Also, the

y Grant-in-AScience and T

devices and s

icrofabricated

urface with Dy73-278 (2012)eld programm

h-takehara@bio

of FPGA and Fannel networkere closed, an

Figure 5. This several logc components el network. S

operate as eifor integrationechnology suelectronically

Aid for JSPTechnology (F

systems. Journ

d valves and p

ynamically Tu).

mable gate arra

onano.t.u-toky

FPVA. (b) Opks and schemnd the design

b

s FPVA is agic modules

such as chamSelective valv

ither N/O or Nn into a micruch as plasticy controllable

S Fellows (IRST Program

nal of Microm

pumps by mult

unable Nano‐

ay. Technical d

yo.ac.jp

tical micrograatic of progrned blue and

nalogous to [4]. In contr

mbers, mixers ave actuation e

N/C valves anofluidic netw

c molding anfeature is exp

(22-8063) anm).

mechanics and

tilayer soft lit

‐Geometry A

digests of IED

aph of the FPammed valve

d red fluid lin

an FPGA, wrast, the FPVand sensors. V

enables the on

nd fabricated work. The simnd circuit pripected to be u

nd Funding

Microenginee

thography. Sc

Activated by B

DM 1992 , pp

PVA device. (c)e opening andnes were suc

which is a VA has a Valves are n-demand

an FPVA mple valve inting are useful for

Program

ering, vol.

ience vol.

ody Heat.

p. 591-594

) Optical d closing cessfully

1848