semiconductors/mems - s3 alliance 2017 · 4 equipment nozzle-less ultrasonic spray head technology...
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www.s3-AlliAnce.com
s3 Alliance provides the network, and product portfolio that brings leading edge solutions to our customers.
our supply and service solutions are tailored to meet our customers ever changing requirements, enabling them to be competitive in what is now a truly global marketplace.
we source and offer quality products at the right price within the following areas: page equipment 3 metrology & Handling 5 Parts & consumables 6 service / cleaning and Facility 7
s3 AlliAnce
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EQUIPMENT
www.meillc.com
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EQUIPMENT
° AMAT / Mirra, Mesa
° Speedfam IPEC / 472, Auriga, 676, 776
° Strasbaugh / 6EC, 6DSSP
Remanufactured Post CMP Scrubbers
° Ontrack / DSS 100, 200
Remanufactured Grinders
° Strasbaugh (7AF), Disco (DFG 841), Okamoto
° CMP and Backgrinding Upgrades
www.axustech.com
Remanufactured CMP/Polishing Equipment
° Semi-automated CMP Systems from 2” to 12”
° Monitoring Systems
° Pad Monitoring Systems
° Post CMP Cleaners; semi-automated (4”-12”) or fully automated 3” to 6”
www.gnptech.com
CMP / Cleaning Systems for R&D
Nozzle-less ultrasonic spray head technology
° Systems feature proprietary nozzle-less ultrasonic spray head technology
° pr s t in nifor fi s down to sub-micron thickness
° Coating applications include display, fuel cell, semicon-ductor, medical device and others
° Variety of precision coating platforms available from bench-top to large format
www.ultraspray.com
Spray Coating Systems
www.meillc.comwww.meillc.com
° Linear Wet Benches & Refurbs
° Advanced Metal Etch
° MLO
° Resist Strip
° Advanced Cleaning
° Chemical Delivery Systems
° PolySilicon Chuck/Dust/Wafer Cleaning
For semiconductor and solar industries. Product lines include fully automatic wet processing systems and controllers and semi-auto linear and rotary wet processing systems.
Tailored Wet Processing Systems
° DIDO 6“ to 12“ fully auto-mated CMP Platform (P300)
° DIWO 4 to 8“ fully automa-ted CMP Platform (6DSSP)
° Different semi automated platforms for:
° Silicon manufacturing, Rec-laim, CMP R&D, III-V, MEMS
Backgrinding
° 4“ to 8“ compatible, semi to fully automated platforms (7AA, 7AF)
° Edge Grinding 4“ to 8“ fully automated (7AB)
www.strasbaugh.com
CMP & Polishing
CO2 Snow Aerosol Cleaning
° Semi-automatic or fully automated 4“ to 12“ Equip-ment for
° MEMS Cleaning
° Backend Package Cleaning
MASK Cleaning
www.ecosnow.com
Dry Cleaning
° Backside Metal PVD Systems
° High Deposition PVD Systems
Through Silicon Via PVD Deposition
° Nano Films for Data Storage
° MEMS PVD Systems
www.tangosystemsinc.com
Metallization
° RIE
° ICP Etch
° PECVD
° Resist Strip
° Descum
Tools for the Compound Semiconductor, MEMS, Opto-Electronic and other markets. From manual to fully automated.
www.triontech.com
Manufacturer of Plasma Etch (RIE/ICP)
www.meillc.com
Remanufactured CMP / Grinding / Scrubbing Systems
www.axustech.com
CMP AMAT / Mirra, Mirra Mesa Speedfam IPEC / 472, 372M Auriga, 676, 776
Strasbaugh / 6EC, 6DSSP
Post CMP Scrubbers Ontrack / DSS 100, 200 Synergy
Grinders Strasbaugh (7AF), Disco (DFG 841), Okamoto
CMP and Backgrinding Upgrades
Foundry Services for CMP, Backgrinding and Cleaning processes
CMP Semi-automated CMP Systems from 2” to 12”
Post CMP Cleaners semi-automated (4”-12”) or fully automated 3” to 6”
CMP & Cleaning Systems for R&D / MWS
www.gnptech.com
RIE, ICP Etch Phantom III Minilock
PECVD Titan Minilock Orion Oracle III
www.triontech.com
Manufacturer of Plasma (RIE/ICP) Systems
CO2 Snow Aerosol Cleaning Semi-automatic or fully automated 4“ to 12“ Equipment for
Applications MEMS Cleaning Backend Package Cleaning Metal lift Off Particle removal
www.ecosnow.com
CO2 Dry Cleaning
Tailored Wet Processing Systems
Resist Strip
Descum / Strip Apollo (single chamber) Gemini (multi chamber)
MASK Cleaning Post Repair Clean Full MASK Clean
Multi Wire Saw (Diamond Wire) for hard materials (Sapphire and SiC)
Linear Wet Benches Semi to Fully Automated
Upgrade Programs for SEMITOOL SST, SAT and SRD
New SRD Systems Tabletop, Single or double Stack Stand Alone
Refurbishment of Legacy Wetbenches, Parts for
Akrion, SCP, Steag, UP
Applications Advanced Metal Etch Metal Lift Off Resist Strip Advanced Cleaning
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EQUIPMENT
Nozzle-less ultrasonic spray head technology Spraysthin,uniformfilmsdowntosub-micron thickness
Variety of precision coating plat-forms available from bench-top to large format
Spray Coating Systems
PVD Systems Backside Metalisation High Deposition Rate Systems
PVD Systems
Principle surface activation
Room Temperature
Vacuum
Void-free high yield rate bonding can be realized
Room Temperature Wafer Bonder
Applications Coating applications include display, semiconductor
Photoresist, Polyimide Conductiv Coating Metal Coating (EMI Shield)
Applications Through Silicon Via Deposition Nano Films for Data Storage MEMS large PCB SAW
Applications Si / Si SiO2 / SiO2: For insulated pack. Si / Quartz, Quartz / Quartz Cu / Cu Wafer Level Pack. for MEMS (Acc.sensor)
Semi ore Fully Automatic Tape Lamination or Detape System
Wafer Mounting UV Irradiation System
Remanufactured TEL Track Systems
MARK Series ACT Series LITHIUS Series
Tape / Detape / Wafer Mounting / Systems
ACT 8 Track
Applications Wafer tape / detape before grinding Dry Film Resist Lamination for MEMSspecificapplications
Engineering Service
Spare Parts
www.ultraspray.com
www.tangosystemsinc.com
www.mhi-global.com
www.teikoku-taping.com
www.aplt.co.kr
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METROLOGY & HANDLING
2D and 3D Vision with Micro and Nano Pixel ImagingSurface Defect Inspection for:Contamination, Foreign Material, Scratch, Etch Residue, Discoloration
LED FAB Process Inspection
www.ati2000.co.kr
Automatic Wafer / Package Inspection / Laser Marking Systems
Capacitive, IR, BP or WL Interferometry
Thickness, TTV, Bow, Warp measurement
Wafer Characterization Layer thickness measurement
www.microsense.net
Wafer Dimensional Metrology
Formerly Sigmatech
Wafer Surface Metrology Roughness measurement MEMS/Membrane thickness
Manual Wafer Handling Products
Manual Wafer Transfer from 2“ to 8“ Auto Wafer Transfer
from 2“ to 8“ ManualFlat/Notchfinder Auto Flat/Finder
www.stc.tw
Scanning Acoustic Microscope
Scanning Acoustic Microscope for Semiconductor and Industrial Materials
www.acoulab.co.kr
From Manual loading to fully automated equipment
Alignement, recognition Mapping, location and characterization of the defects
Automatic Batch Wafer Systems
www.r2d-automation.com
(Italy and UK)
Single Batch Transfer 2/3 Station or
Vertical Transfer Sorters, OCR Sorters OCR Readers
Standard wafer handling solutions for non-standard wafer handling requirements (OEM, end-users)
From 50mm to 450mm Bridge tool capability with no tooling change-over
Jabil-Chad, Inc. 1565 S. Sinclair Street
Anaheim, CA 92806 TEL 714.938.0080
WEB www.chadindustries.net Excellence in Automation Since 1973
Chad Default document_A SEJ
www.chadindustries.net
Automated Wafer HandlingLoader / Unloader
Applications FLIP CHIP, BGA, FBGA, ITO sputtering Targets, Wafer bonding and Sapphire Wafer (LED)
Applications Bumps dimensions Film Thickness Step Height, cavities Ultrathin wafer
Bump inspection Post Wafer thinning and Dicing Crack Inspection
Non-standard wafer handling solutions (thin, warped, glass, thick,filmframe)
Manual Wafer Lifter from 2“ to 8“
2D & 3D X-ray Inspection System
www.seceng.co.kr/eng/
TSV 3D (Size, Void, Alignment) Cu Pillar Bump (Void) Micro Bump WLP Micro Void Analysis (Size %)
3D CT Images
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PARTS & CONSUMABLES
Retaining Ring available in different materials
PEEK, PPS, PBNavailable for AMATMirra,Reflexion Ebara FREX Others www.willbesnt.com
Retaining Ring & Customized Plastic Parts
www.saesoldia.com
CMP Pad Conditioners
(Germany & UK)
Pad conditioner design allows A higher lifetime Excellent reproducibility Lower defectivity, scratch precaution
Advanced Quality Control systems
EPDM Membranes Silicon Membranes Diaphragms & Seals
www.maxuptech.com
CMP Membranes & Rubber Parts
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PARTS & CONSUMABLES
° Hard Materials: SiC, GaN, Diamond, AlN
° Sapphire Slurry
° GaN, SiC and other Foundry Services
www.sinmat.com
CMP Slurries
Pad conditioner design allows:
° A higher lifetime
° Excellent reproducibility
° Lower defectivity, scratch precaution
Advanced Quality Control systems
www.saesoldia.com
CMP Pad Conditioners
Highly Dynamic complex Fluids acting as Physical Detaching instead of Chemical dissolving
° Water based
° Biodegradable
° pH neutral
° Economical
Applications:
° Photo Resist strip
° Lift off
° Parts Cleaning
° Post Wire Saw Clean
° Screen Printing Clean
www.bubbles-beyond.com
Physical Removal Liquids
Available in different materials:
° PEEK, PPS, PBN
with different designs for:
° M Mirr e e ion
° Ebara FREX
° Others
www.willbesnt.com
Retaining Ring
Bare Si Polish Pads
° Cast Foamed Elastomer with controlled Cells
° Napped Poromeric Material for Final Polishing
° Available up to 65 inches
° Segmented Diameters Larger than 66 inches
° Grooving available in a variety of grooving patterns
www.universalphotonics.com
Polishing Pads
° EPDM Membranes
° Silicon Membranes
° Diaphragms & Seals
www.maxuptech.com
CMP Membranes & Rubber Parts
Hard Materials: SiC, GaN, Diamond, AlN
Sapphire Slurry GaN, SiC and other Foundry Services www.sinmat.com
Hard Material Slurries
Wafer Cassette
Grinding Wheel for hard Materials
SiC, GaN, Sapphire
Chuck Tables New and Refurbished
www.npmt.com.tw www.ckplas.com
Wafer Cassette PEEK from 4“ to 8“ Teflon/PFA,PPfrom2“to12“
Shipping Box from 2“ to 8“
Single Wafer Carrier 2“, 3“, 4“, 5“, 6“ made of PP
GRINDING WHEEL, DICING SAW & BLADES
Mask Package
Reticle SMIF POD
www.levitronix.com
Bearingless Pumps
(CH, CZ, D, France, Italy, PL, Russia)
High Purity Pumps Chemical Mixer DI Water Heaters Chemical Heaters www.treborintl.com
Diaphragm Pumps & Heaters
Applications Photo Resist strip Lift off Parts Cleaning Post Wire Saw Clean
www.bubbles-beyond.com
Water Based Removers
Bare Si Polish Pads Cast Foamed Elastomer with controlled Cells
Napped Poromeric Mate-rial for Final Polishing
Available up to 65 inches
www.universalphotonics.com
Polishing Pads
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PARTS & CONSUMABLES
° Hard Materials: SiC, GaN, Diamond, AlN
° Sapphire Slurry
° GaN, SiC and other Foundry Services
www.sinmat.com
CMP Slurries
Pad conditioner design allows:
° A higher lifetime
° Excellent reproducibility
° Lower defectivity, scratch precaution
Advanced Quality Control systems
www.saesoldia.com
CMP Pad Conditioners
Highly Dynamic complex Fluids acting as Physical Detaching instead of Chemical dissolving
° Water based
° Biodegradable
° pH neutral
° Economical
Applications:
° Photo Resist strip
° Lift off
° Parts Cleaning
° Post Wire Saw Clean
° Screen Printing Clean
www.bubbles-beyond.com
Physical Removal Liquids
Available in different materials:
° PEEK, PPS, PBN
with different designs for:
° M Mirr e e ion
° Ebara FREX
° Others
www.willbesnt.com
Retaining Ring
Bare Si Polish Pads
° Cast Foamed Elastomer with controlled Cells
° Napped Poromeric Material for Final Polishing
° Available up to 65 inches
° Segmented Diameters Larger than 66 inches
° Grooving available in a variety of grooving patterns
www.universalphotonics.com
Polishing Pads
° EPDM Membranes
° Silicon Membranes
° Diaphragms & Seals
www.maxuptech.com
CMP Membranes & Rubber Parts
(UK & Ireland)
For following applications: Slurry mixing and dispense Electro Chemical Deposition (Au, Cu, Permalloy, Solder)
Parts for CVD and ETCH Producer, Speed, Endura, Centura
Dicing Saw
Dicing Blades Resin, Electro formed, Metal,vitrifiedBond
Screen Printing Clean
Segmented Diameters Larger than 66 inches
Grooving available in a variety of grooving patterns
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SERVICE / CLEANING AND FACILITIES
Atmospheric and Vacuum Robot Repair / Exchange
Robots and Aligner Aligners, Brooks, PRI, Equipe
Genmark, RorzeHead Platen Motors
KollmorgenCVD Vaporizer / LMFM Unit Repair / Overhaul
Source Material: TEOS, TDMAT, TEP, TMCTS, BCHD
www.greenspec.co.kr
On Site H2 Generator N2 Generator
Manufacturer of Proton Exch-ange Membrane (PEM) H2 GENERATION products using electrolysis
Enhanced gas supply reliability Improved prity repeatability Improved Safety Stable and reduced costs Generallymorespace-efficient
www.protononsite.com
Hydrogen Separators, Analyzers, Generators
Hydrogen Analysis HEMS – Hydrogen Elimination
Mass Spectroscopy ppb qualificationofHydrogen
Hydrogen Generation Fuel Cell-Ready Hydrogen
Hydrogen Separation Reforming fuels Gas or Liquid, Fossil or Bio
www.powerandenergy.com
Vacuum Pump and Power Supply Repair / Exchange
Cryo Pump Repair, Refurbishment or Exchange
Power Generators / Supply Repair and Refurbishment
Refurbished turbo and mechanical pumps
www.ptbsales.com
Materials for Cleaning Critical Surfaces
www.foamtecintlwcc.com
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SERVICE / CLEANING AND FACILITIES
° Cryo Pump Repair, Refurbishment or Exchange
° Power Generators / Supply Repair and Refurbishment
www.ptbsales.com
Cryo Pump Repair and Refurbishment
Hydrogen Separation: Fuel Cell Ready Hydrogen
Hydrogen Analysis: PPT analysis of HydrogenHEMS – Hydrogen Elimination Mass Spectroscopy
Hydrogen Generation High Effi ciency, Compact Steam Reforming
www.powerandenergy.com
Hydrogen Separation, Analysis, Generation
° Aligners, Brooks, PRI, Equipe
° Genmark, Rorze
° Head Platen Motors from Kollmorgen
CVD Vaporizer / LMFM Unit Repair / Overhaul
° Source Material: TEOS, TDMAT, TEP, TMCTS
www.greenspec.co.kr
Atmospheric and Vacuum Robot Repair / Exchange
° ScrubPads
° Foams
° Microfi ber Wipers
° Swabs
° Ergonomic Tools (ScrubPen, tips...)
Complete Kits and procedure for Process Chamber Clean
° CVD, HDP chamber from AMAT, NVLS
° ETCH from LAM, AMAT, TEL
° IMPLANT Source and Chamber from VARIAN, AMAT, Axcellis
° PHOTO tracks
° PARTSwww.foamtecintlwcc.com
Materials for Cleaning Critical Surfaces
Manufacturer of Proton Exchange Membrane (PEM) H2 GENERATION products using electrolysis
° Enhanced gas supply reliability
° Improved prity repeatability
° Improved Safety
° Stable and reduced costs
° Generally more space-effi cient
www.protononsite.com
Proton Exchange Membrane
MaterialsScrubPadsFoamsMicrofiberWipersSwabsErgonomic Tools (ScrubPen, tips...)
Chamber Cleans CVD, HDP chamber from AMAT, NVLS
ETCH from LAM, AMAT, TEL VOC Free PM Wiping Change tent
IMPLANT Source and Chamber from VARIAN, AMAT, Axcellis
PHOTO tracks
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S3 S
EMI.7
LOCATIONS
S3 Alliance operates from 4 locations within Europe
www.s3-alliance.com
UK-IrelandOffice
S3 Alliance LtdSkeoge Industrial Estate Beraghmore Road Derry, BT48 8SEN. Ireland
GermanOffice
S3 Alliance GmbHMahdenstraße 23D-72138 KirchentellinsfurtGermany
ItalianOffice
S3 Alliance SRLVia Rossini 421052 Busto Arsizio (VA)Italy
RussianOfficeA Subsidiary of S3 Alliance GmbH
S3 Alliance Rus LLCUgreshskayastr.2/5,office02,Moscow, 115088Russia
Tel: +44(0) 2871 357 760Fax: +44(0) 2871 357 744E-mail: [email protected]
Tel: +49 7121 16 777-0Fax: +49 7121 16 777-10E-mail: [email protected]
Теl: +74956385493 +7 926 654 6386E-mail: [email protected]
Tel: +39 033 143 0295Fax: +39 033 1430295 E-mail: [email protected]