Sample Tests Off-Sample Intensity Values: Ave. AC Intensity = 17.163 DUV AC Intensity = 21.703 UV AC Intensity = 61.149 IR AC Intensity = 3.380 Gain = 1.0

Sample #1, Nominal Thickness = 20.0Å Alignment: X=0.5, Y=1.5, Intensity=0.4835 Model Fit Results: MSE = 1.507 Oxide Thickness = 15.34 ± 0.038 Å Angle Offset = 0.039 ± 0.0027 Data Fit Accuracy(RMS Error in N, C, & S): All Chan.(190 - 1700nm) 0.0019 0.0011 0.0014 DUV(190-250nm) 0.0045 0.0024 0.0022 UV(250-380nm) 0.0033 0.0013 0.0014 VIS(380-700nm) 0.0008 0.0008 0.0018 NIR(700nm-1000nm) 0.0005 0.0009 0.0004 Thickness Precision: Average = 15.39 Std. Dev = 0.013 Range = 0.07 Raw Data Precision (Std. Dev in N, C, & S): All Chan.(190 - 1700nm) 0.0003 0.0005 0.0002 DUV(190-250nm) 0.0002 0.0002 0.0001 UV(250-380nm) 0.0003 0.0002 0.0002 VIS(380-700nm) 0.0003 0.0003 0.0002 NIR(700nm-1000nm) 0.0005 0.0008 0.0003

Sample #2, Nominal Thickness = 100.0Å Alignment: X=-1.9, Y=-0.4, Intensity=0.5063 Model Fit Results: MSE = 0.705 Oxide Thickness = 97.79 ± 0.027 Å Angle Offset = 0.014 ± 0.0013 Data Fit Accuracy(RMS Error in N, C, & S): All Chan.(190 - 1700nm) 0.0006 0.0009 0.0006 DUV(190-250nm) 0.0009 0.0019 0.0004 UV(250-380nm) 0.0008 0.0008 0.0005 VIS(380-700nm) 0.0004 0.0004 0.0007 NIR(700nm-1000nm) 0.0006 0.0010 0.0005

Sample #3, Nominal Thickness = 250.0Å Alignment: X=-0.3, Y=1.8, Intensity=0.5950 Model Fit Results: MSE = 0.690 Oxide Thickness = 235.69 ± 0.020 Å Angle Offset = 0.020 ± 0.0011 Data Fit Accuracy(RMS Error in N, C, & S): All Chan.(190 - 1700nm) 0.0007 0.0007 0.0006 DUV(190-250nm) 0.0014 0.0013 0.0006 UV(250-380nm) 0.0008 0.0004 0.0003 VIS(380-700nm) 0.0007 0.0004 0.0007 NIR(700nm-1000nm) 0.0006 0.0009 0.0007 Thickness Precision: Average = 235.70 Std. Dev = 0.012 Range = 0.05 Raw Data Precision (Std. Dev in N, C, & S): All Chan.(190 - 1700nm) 0.0003 0.0005 0.0002 DUV(190-250nm) 0.0002 0.0002 0.0001 UV(250-380nm) 0.0003 0.0003 0.0001 VIS(380-700nm) 0.0003 0.0003 0.0002 NIR(700nm-1000nm) 0.0005 0.0008 0.0003

Sample #4, Nominal Thickness = 600.0Å Alignment: X=2.0, Y=1.0, Intensity=0.8198 Model Fit Results: MSE = 2.003 Oxide Thickness = 589.85 ± 0.042 Å Angle Offset = 0.033 ± 0.0028 Data Fit Accuracy(RMS Error in N, C, & S): All Chan.(190 - 1700nm) 0.0021 0.0016 0.0022 DUV(190-250nm) 0.0040 0.0028 0.0052 UV(250-380nm) 0.0035 0.0019 0.0026 VIS(380-700nm) 0.0014 0.0009 0.0009 NIR(700nm-1000nm) 0.0014 0.0017 0.0021

Sample #5, Nominal Thickness = 1200.0Å Alignment: X=-0.4, Y=-1.4, Intensity=0.5497 Model Fit Results: MSE = 4.836 Oxide Thickness = 1325.45 ± 0.095 Å Angle Offset = 0.108 ± 0.0061 Data Fit Accuracy(RMS Error in N, C, & S): All Chan.(190 - 1700nm) 0.0052 0.0051 0.0042 DUV(190-250nm) 0.0150 0.0065 0.0108 UV(250-380nm) 0.0035 0.0049 0.0033 VIS(380-700nm) 0.0041 0.0061 0.0042 NIR(700nm-1000nm) 0.0023 0.0035 0.0008

Sample #6, Nominal Thickness = 5000.0Å Alignment: X=1.0, Y=-1.3, Intensity=0.3624 Model Fit Results: MSE = 9.513 Oxide Thickness = 5004.08 ± 3.661 Å EMA % (Mat 2) = 0.5 ± 0.12 Interface Thickness = 14.72 ± 0.728 Å Angle Offset = -0.076 ± 0.0187 Data Fit Accuracy(RMS Error in N, C, & S): All Chan.(190 - 1700nm) 0.0066 0.0116 0.0096 DUV(190-250nm) 0.0213 0.0383 0.0322 UV(250-380nm) 0.0040 0.0087 0.0083 VIS(380-700nm) 0.0032 0.0042 0.0030 NIR(700nm-1000nm) 0.0033 0.0051 0.0029

Sample #7, Nominal Thickness = 10000.0Å Alignment: X=4.7, Y=0.9, Intensity=0.2578 Model Fit Results: MSE = 28.597 Oxide Thickness = 10041.48 ± 20.078 Å EMA % (Mat 2) = 0.4 ± 0.33 Interface Thickness = 22.34 ± 2.156 Å Angle Offset = -0.268 ± 0.0569 Data Fit Accuracy(RMS Error in N, C, & S): All Chan.(190 - 1700nm) 0.0202 0.0343 0.0293 DUV(190-250nm) 0.0695 0.1118 0.1003 UV(250-380nm) 0.0118 0.0286 0.0239 VIS(380-700nm) 0.0075 0.0135 0.0087 NIR(700nm-1000nm) 0.0062 0.0139 0.0057

Sample #8, Glass Substrate Alignment: X=-2.3, Y=0.1, Intensity=0.1892 Model Fit Results: MSE = 1.178 Roughness = 20.79 ± 0.157 Å A = 1.503 ± 0.00018200 B = 0.00423 ± 5.6557E-05 C = 4.5504E-05 ± 2.6024E-06 n of Cauchy Substrate @ 632.8 nm = 1.51398 Data Fit Accuracy(RMS Error in N, C, & S): All Chan.(190 - 1700nm) 0.0006 0.0012 0.0016 DUV(190-250nm) 0.0004 0.0011 0.0044 UV(250-380nm) 0.0003 0.0007 0.0010 VIS(380-700nm) 0.0004 0.0008 0.0013 NIR(700nm-1000nm) 0.0008 0.0015 0.0009

Straight Through Intensity Values: Ave. AC Intensity = 35.964 DUV AC Intensity = 23.197 UV AC Intensity = 76.674 IR AC Intensity = 10.371 Gain = 1.0

Sample #9, Straight Through Alignment: X=-0.8, Y=0.2, Intensity=1.5123 Model Fit Results: No Results Available Straight Through Data Accuracy(RMS Error in Psi & Delta): All Chan.(190 - 1700nm) 0.0226 0.0133 DUV(190-250nm) 0.0279 0.0103 UV(250-380nm) 0.0171 0.0111 VIS(380-700nm) 0.0193 0.0175 NIR(700nm-1000nm) 0.0265 0.0088 Straight Through Psi and Delta Spec: 100.0% of wavelengths pass the Psi spec. (45 ± 0.075) 100.0% of wavelengths pass the Delta spec. (0 ± 0.050) Raw Data Precision (Std. Dev in Psi & Delta): All Chan.(190 - 1700nm) 0.0086 0.0076 DUV(190-250nm) 0.0046 0.0070 UV(250-380nm) 0.0075 0.0087 VIS(380-700nm) 0.0064 0.0076 NIR(700nm-1000nm) 0.0121 0.0072

Wavelength Calibration Started: 2012-6-12 [1104] Wavelength Cal, 2012-6-12 [1104], Sample #1, Nom. Thickness = 20Å Alignment: X=10.6, Y=5.2, Intensity=0.5648 Wavelength Cal, 2012-6-12 [1104], Sample #2, Nom. Thickness = 250Å Alignment: X=10.2, Y=0.7, Intensity=0.7448 Wavelength Cal, 2012-6-12 [1105], Sample #3, Nom. Thickness = 10000Å Alignment: X=6.6, Y=-1.8, Intensity=0.3989 Fit Results: MSE = 2.170 Native = 4.575 ± 0.0422 Thermal = 234.608 ± 0.0479 Thick = 10047.303 ± 2.3542 Thick Intr = 27.223 ± 0.5011 EMA % (Mat 2) = 0.2 ± 0.04 AngOff0 = -0.06 ± 0.002 AngOff1 = -0.01 ± 0.002 BndWidth = 4.637 ± 0.0248 w0 = -0.78297 ± 0.041942 w1 = -0.11377 ± 0.001525 w2 = -0.24359 ± 0.004960 w3 = -0.16633 ± 0.004769

System Calibration Started: 2012-6-13 [1303] Alignment: X=1.7, Y=2.2, Intensity=0.5829 Cal. Type: Cal. Mode=3, Sample 1=25nm Oxide on Si, Sample 2=10nm Oxide on Si, Straight-Through Included Fit Results: MSE=1.572, FOM=0.01291, As=-8.184±0.001, R=90.7176, Oxide Thickness=235.688±0.0261, Angle Offset=0.007±0.0015, Oxide Thickness=97.220±0.0331, Angle Offset=-0.004±0.0018

Hardware Tests Stray Light Test Intensity of first 5 channels = 0.0407%

Dark Noise Test: AC noise, Gain #0: 1-Rev=0.0357, 40-Rev=0.0056 (norm=0.0353) AC noise, Gain #1: 1-Rev=0.0300, 40-Rev=0.0049 (norm=0.0307) AC noise, Gain #2: 1-Rev=0.0216, 40-Rev=0.0036 (norm=0.0228) AC noise, Gain #3: 1-Rev=0.0196, 40-Rev=0.0031 (norm=0.0196)

Precision Test Summary Ave. Thick=15.34Å Overall STD=0.129Å Max. STD=0.013Å Ave. STD=0.008Å STD(STD)=0.0012Å #/Set=30, # Sets=4620 Phase Wheel Info (before): 192.793±0.011,0,0,0,0,0,0,0,0,0,0,0,11856,0.00263,0.00079 Phase Wheel Info (after): 192.840±0.014,0,0,0,0,0,0,0,0,0,0,0,11856,0.00262,0.00087